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公开(公告)号：US20100289613A1
公开(公告)日：2010-11-18
申请号：US12467089
申请日：2009-05-15
申请人： Dirk De Bruyker , Michal V. Wolkin
发明人： Dirk De Bruyker , Michal V. Wolkin
CPC分类号： H01G5/0136 , G01K1/14 , G01K7/226 , H01C7/008 , H01C17/06533 , H01G5/18 , Y10T29/49085
摘要： A temperature probe includes a substrate, a cantilever body portion formed on the substrate, having an anchor portion held in contact to the substrate and a free end portion extending out of the surface of the substrate, and a sputter-deposited thermistor sensor portion located at the free end portion of the cantilever body portion.
摘要翻译： 温度探针包括基板，形成在基板上的悬臂主体部分，具有与基板保持接触的锚固部分和从基板的表面延伸出的自由端部分，以及溅射沉积的热敏电阻传感器部分，位于 悬臂主体部分的自由端部分。
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公开(公告)号：US08130072B2
公开(公告)日：2012-03-06
申请号：US12467089
申请日：2009-05-15
申请人： Dirk De Bruyker , Michal V. Wolkin
发明人： Dirk De Bruyker , Michal V. Wolkin
IPC分类号： H01C7/00
CPC分类号： H01G5/0136 , G01K1/14 , G01K7/226 , H01C7/008 , H01C17/06533 , H01G5/18 , Y10T29/49085
摘要： A temperature probe includes a substrate, a cantilever body portion formed on the substrate, having an anchor portion held in contact to the substrate and a free end portion extending out of the surface of the substrate, and a sputter-deposited thermistor sensor portion located at the free end portion of the cantilever body portion.
摘要翻译： 温度探针包括基板，形成在基板上的悬臂主体部分，具有与基板保持接触的锚固部分和从基板的表面延伸出的自由端部分，以及溅射沉积的热敏电阻传感器部分，位于 悬臂主体部分的自由端部分。
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公开(公告)号：US20100290501A1
公开(公告)日：2010-11-18
申请号：US12467072
申请日：2009-05-15
申请人： Dirk De Bruyker , Francisco E. Torres , Michal V. Wolkin , Gregory B. Anderson , Eugene M. Chow
发明人： Dirk De Bruyker , Francisco E. Torres , Michal V. Wolkin , Gregory B. Anderson , Eugene M. Chow
IPC分类号： G01K17/00
CPC分类号： G01K17/006 , B82Y35/00 , G01K2211/00
摘要： A nanocalorimeter includes a merging layer having, a drop placement area for holding drops to be merged and a thermal equilibration area. A measurement layer includes a substrate, and a temperature probe on the substrate, wherein the temperature probe extends out of the surface of the substrate to come into operative contact with the thermal equilibration area when the measurement layer is placed in operative association with the merging layer. The nanocalorimeter is configured to have the merging layer and the measurement layer non-integrated, making the measurement layer reusable.
摘要翻译： 纳米尺度计包括具有用于保持要合并的液滴的液滴放置区域和热平衡区域的合并层。 测量层包括衬底和衬底上的温度探针，其中当测量层与合并层可操作地相关联时，温度探针从衬底的表面延伸出来以与热平衡区域操作接触 。 纳米尺度计被配置为具有合并层和测量层非集成，使得测量层可重复使用。
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公开(公告)号：US07833800B2
公开(公告)日：2010-11-16
申请号：US11167612
申请日：2005-06-27
申请人： Alan Bell , Richard H. Bruce , Eric Peeters , Michal V. Wolkin , Dirk De Bruyker
发明人： Alan Bell , Richard H. Bruce , Eric Peeters , Michal V. Wolkin , Dirk De Bruyker
IPC分类号： G01N33/00
CPC分类号： G01K7/30 , G01K17/00 , G01N25/482
摘要： Thermal sensing devices can include two subsets of thermal sensors connected in a bridge by circuitry on the same support layer or surface with the sensors. Each thermal sensor can be formed in a patterned layer of semiconductor material, and the bridge circuitry can include leads formed in a patterned layer of conductive material, over or under the semiconductor layer. In one implementation, the bridge circuitry includes conductive portions that extend across and electrically contact the lower surface of each sensor's semiconductor slab. The bridge circuitry can also include pads that can be electrically contacted, such as by pogo pins. The device's reaction surface can be spaced apart from or over the thermal sensors. The device's components can be shaped and positioned so that the bridge's offset voltage is below the sensitivity level required for an application, such as by left-right symmetry about an axis.
摘要翻译： 热感测装置可以包括通过与传感器相同的支撑层或表面上的电路在桥中连接的两个热传感器子集。 每个热传感器可以形成在半导体材料的图案化层中，并且桥接电路可以包括形成在导电材料的图案化层中的引线，在半导体层之上或之下。 在一个实施方式中，桥接电路包括导电部分，其延伸并且电接触每个传感器的半导体板的下表面。 桥接电路还可以包括可以电接触的焊盘，例如通过弹簧销。 设备的反应表面可以与热传感器间隔开或超过热传感器。 该装置的部件可以被成形和定位，使得桥的偏移电压低于应用所需的灵敏度水平，例如通过关于轴的左右对称。
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公开(公告)号：US08393785B2
公开(公告)日：2013-03-12
申请号：US12467072
申请日：2009-05-15
申请人： Dirk De Bruyker , Francisco E. Torres , Michal V. Wolkin , Gregory B. Anderson , Eugene M. Chow
发明人： Dirk De Bruyker , Francisco E. Torres , Michal V. Wolkin , Gregory B. Anderson , Eugene M. Chow
CPC分类号： G01K17/006 , B82Y35/00 , G01K2211/00
摘要： A nanocalorimeter includes a merging layer having, a drop placement area for holding drops to be merged and a thermal equilibration area. A measurement layer includes a substrate, and a temperature probe on the substrate, wherein the temperature probe extends out of the surface of the substrate to come into operative contact with the thermal equilibration area when the measurement layer is placed in operative association with the merging layer. The nanocalorimeter is configured to have the merging layer and the measurement layer non-integrated, making the measurement layer reusable.
摘要翻译： 纳米尺度计包括具有用于保持要合并的液滴的液滴放置区域和热平衡区域的合并层。 测量层包括衬底和衬底上的温度探针，其中当测量层与合并层可操作地相关联时，温度探针从衬底的表面延伸出来以与热平衡区域操作接触 。 纳米尺度计被配置为具有合并层和测量层非集成，使得测量层可重复使用。
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公开(公告)号：US07473031B2
公开(公告)日：2009-01-06
申请号：US11167748
申请日：2005-06-27
申请人： Michal V. Wolkin , Dirk De Bruyker , Eric Peeters , Alan Bell
发明人： Michal V. Wolkin , Dirk De Bruyker , Eric Peeters , Alan Bell
CPC分类号： G01K7/30 , B82Y15/00 , G01K17/00 , G01N25/482 , G01N25/4846 , G01N25/4866
摘要： Thermal sensors for calorimetry can include vanadium oxide, heavily p-doped amorphous silicon, or other materials with high temperature coefficients of resistivity. Such thermal sensors can have low noise equivalent temperature difference (NETD). For example, a thermal sensor with NETD no greater than 100 μK over a bandwidth range of approximately 3 Hz or more can include a thermistor including vanadium oxide sputtered at room temperature under conditions that yield primarily V2O5; more specifically, the NETD can be no greater than 35 μK, or even 10 μK over a bandwidth range of approximately 3 Hz or more. If a low noise thermal sensor has NETD no greater than 50 μK over such a bandwidth range, a low noise output circuitry connected to its thermistor can provide an electrical output signal that includes information about input thermal signal peaks with amplitude of approximately 100 μK.
摘要翻译： 用于量热法的热传感器可以包括氧化钒，重掺杂非晶硅或具有高温电阻系数的其它材料。 这样的热传感器可以具有低噪声等效温差（NETD）。 例如，在大约3Hz以上的带宽范围内，NETD不大于100μKK的热传感器可以包括在主要产生V 2 O 5的条件下在室温下溅射的包含氧化钒的热敏电阻; 更具体地说，在大约3Hz以上的带宽范围内，NETD可以不大于35μK，甚至10μK。 如果低噪声热传感器在这样的带宽范围内的NETD不超过50μK，则连接到其热敏电阻的低噪声输出电路可以提供电输出信号，其包括关于具有大约100μKK的振幅的输入热信号峰值的信息。
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公开(公告)号：US07473030B2
公开(公告)日：2009-01-06
申请号：US11167746
申请日：2005-06-27
IPC分类号： G01K17/00
CPC分类号： G01K7/30 , G01K17/00 , G01K17/006 , G01N25/482
摘要： In thermal sensing devices, such as for calorimetry, a support layer or central layer can have a thermometer element or other thermal sensor on one side and a thermally conductive structure or component on the other. The thermally conductive structure can conduct temperature or other thermal input signals laterally across the support layer or central layer. The temperature or signals can then be provided to the thermometer element, such as by thermal contact through the support layer. An electrically conducting, thermally isolating anti-coupling layer, such as of gold or chromium, can reduce capacitive coupling between the thermally conductive structure and the thermometer element or other thermal sensor.
摘要翻译： 在诸如用于量热法的热感测装置中，支撑层或中心层可以在一侧具有温度计元件或其它热传感器，而在另一侧可以具有导热结构或部件。 导热结构可以横跨支撑层或中心层横向传导温度或其他热输入信号。 然后可以将温度或信号提供给温度计元件，例如通过通过支撑层的热接触。 导电的，热隔离的抗耦合层（例如金或铬）可以减少导热结构和温度计元件或其它热传感器之间的电容耦合。
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公开(公告)号：US09349558B2
公开(公告)日：2016-05-24
申请号：US13312880
申请日：2011-12-06
CPC分类号： H01H37/02 , H01H57/00 , H01H59/0009
摘要： A heat switch has a first contact, a plug of thermally conductive material, and a mechanical actuator attached to the plug of thermally conductive material, the mechanical actuator arranged to move the plug into contact with the first contact in a first position and to move the plug out of contact with the first contact in a second position responsive to an input signal.
摘要翻译： 热开关具有第一接触件，导热材料插塞和附接到导热材料插塞的机械致动器，所述机械致动器被布置成在第一位置移动插头与第一触头接触并移动 在响应于输入信号的第二位置中与第一接触件断开接触。
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公开(公告)号：US09182454B1
公开(公告)日：2015-11-10
申请号：US13468801
申请日：2012-05-10
申请人： Kirt Reed Williams , Scott Limb , Dirk De Bruyker
发明人： Kirt Reed Williams , Scott Limb , Dirk De Bruyker
CPC分类号： H01J23/09 , G01R33/0213
摘要： Improved electric field (steered-electron electric-field, or SEEF) sensors and methods of manufacturing the same are provided. The SEEF sensors described herein may have increased sensitivity to low-frequency electric fields while being smaller than previously known sensors, and may allow for low-power electric field detection. The invention described herein allows for sensitive, long-term electric field monitoring for applications ranging from personnel detection to underground facility monitoring, as well as extraordinarily small vector sensing (full Poynting vector) for compact direction-finding of emitters of interest. Exemplary electric field sensors may accurately sense, measure, characterize and/or transmit electric field data over a wide frequency range. Importantly, such sensing, measuring, and/or characterizing do not require any physical or resistive contact between the sensor and a source of an electric field.
摘要翻译： 提供改进的电场（转向电子电场或SEEF）传感器及其制造方法。 本文所述的SEEF传感器可能具有对低频电场的增加的灵敏度，同时小于先前已知的传感器，并且可以允许低功率电场检测。 本文所述的发明允许对从人员检测到地下设备监测的应用的敏感的长期电场监测以及用于紧凑的感兴趣的发射器的方向寻找的非常小的矢量感测（全坡普廷矢量）。 示例性电场传感器可以在宽的频率范围内精确地感测，测量，表征和/或传输电场数据。 重要的是，这种感测，测量和/或表征不需要传感器和电场源之间的任何物理或电阻接触。
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10.发明授权Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal 有权用于采用压力金属的液体拾取，运输和分配的毛细管通道探头公开(公告)号：US08241509B2
公开(公告)日：2012-08-14
申请号：US12428397
申请日：2009-04-22
IPC分类号： C40B50/18
CPC分类号： G01N35/1074 , B01J2219/00387 , B01L3/0244 , B01L3/0255 , B01L3/502715 , B01L2300/0819 , B01L2400/025 , B01L2400/0406 , B41J2/14314 , B41J2/16 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1643 , C40B60/14 , G01N35/1009 , G01N2035/00237 , G01N2035/1037 , G03F7/0002 , Y10T436/2575
摘要： Fluidic conduits, which can be used in microarraying systems, dip pen nanolithography systems, fluidic circuits, and microfluidic systems, are disclosed that use channel spring probes that include at least one capillary channel. Formed from spring beams (e.g., stressy metal beams) that curve away from the substrate when released, channels can either be integrated into the spring beams or formed on the spring beams. Capillary forces produced by the narrow channels allow liquid to be gathered, held, and dispensed by the channel spring probes. Because the channel spring beams can be produced using conventional semiconductor processes, significant design flexibility and cost efficiencies can be achieved.
摘要翻译： 公开了可用于微阵列系统，浸笔纳米光刻系统，流体回路和微流体系统的流体导管，其使用包括至少一个毛细通道的通道弹簧探针。 由释放时从基板弯曲的弹簧梁（例如，应力金属梁）形成，通道可以集成到弹簧梁中或形成在弹簧梁上。 由窄通道产生的毛细管力允许液体被通道弹簧探针收集，保持和分配。 由于可以使用传统的半导体工艺制造通道弹簧梁，所以可以实现显着的设计灵活性和成本效率。
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