GAS SENSOR USING METAL OXIDE NANOPARTICLES, AND METHOD FOR MANUFACTURING SAME
    5.
    发明申请
    GAS SENSOR USING METAL OXIDE NANOPARTICLES, AND METHOD FOR MANUFACTURING SAME 有权
    使用金属氧化物纳米颗粒的气体传感器及其制造方法

    公开(公告)号:US20120042713A1

    公开(公告)日:2012-02-23

    申请号:US13266815

    申请日:2010-04-30

    IPC分类号: G01N27/12 B05D1/04 B05D5/12

    摘要: The present invention provides a gas sensor, including: a sensor substrate provided with an electrode; and a thin layer of sensor material formed by spraying a solution in which metal oxide nanoparticles are dispersed onto the sensor substrate. The gas sensor is advantageous in that a sensor material is formed into a porous thin layer containing metal oxide nanoparticles having a large specific surface area, thus realizing high sensitivity on the ppb scale and a high reaction rate. Further, the gas sensor is advantageous in that it can be manufactured at room temperature, and the thickness of a sensor material can be easily adjusted by adjusting the spray time, so that a thin gas sensor or a thick gas sensor can be easily manufactured.

    摘要翻译: 本发明提供一种气体传感器,包括:具有电极的传感器基板; 以及通过将金属氧化物纳米粒子分散在传感器基板上的溶液喷雾形成的薄层传感器材料。 气体传感器的优点在于,传感器材料形成为具有大比表面积的金属氧化物纳米粒子的多孔薄层,因此在ppb量程上实现高灵敏度和高反应速率。 此外,气体传感器的优点在于其可以在室温下制造,并且通过调节喷射时间可以容易地调节传感器材料的厚度,从而可以容易地制造薄气体传感器或厚气体传感器。