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公开(公告)号：US09410797B2
公开(公告)日：2016-08-09
申请号：US14508097
申请日：2014-10-07
CPC分类号： G01B11/14 , G01B9/02049 , G01B9/02083 , G01D5/38
摘要： A position-measuring device for detecting the position of two objects movable relative to each other, includes a measuring standard that is joined to one of the two objects, as well as a scanning system for scanning the measuring standard, the scanning system being joined to the other of the two objects. The scanning system permits a simultaneous determination of position along a first lateral shift direction and along a vertical shift direction of the objects. To that end, on the part of the scanning system, two scanning beam paths are formed, in which a group of phase-shifted signals is able to be generated in each case at the output end from interfering partial beams of rays. In addition, via the scanning system, at least a third scanning beam path is formed, by which it is possible to determine position along a second lateral shift direction of the objects. The beam from a light source is able to be supplied to the scanning system via a first light guide and coupling-in optics in common for all three scanning beam paths. The interfering partial beams of rays produced in the three scanning beam paths are able to be coupled via common coupling-out optics, into a second light guide which supplies these beams of rays to a detector system.
摘要翻译： 用于检测可相对于彼此移动的两个物体的位置的位置测量装置包括连接到两个物体之一的测量标准，以及用于扫描测量标准的扫描系统，扫描系统被连接到 两个对象中的另一个。 扫描系统允许同时确定沿着物体的第一横向移动方向和沿垂直移动方向的位置。 为此，在扫描系统的一部分上，形成了两个扫描光束路径，其中在每个情况下能够在出射端从干扰的局部射线束产生一组相移信号。 此外，通过扫描系统，形成至少第三扫描光束路径，由此可以确定沿物体的第二横向偏移方向的位置。 来自光源的光束能够经由第一光导和耦合入光学元件被提供给扫描系统，用于所有三个扫描光束路径。 在三个扫描光束路径中产生的干涉的部分光束能够通过公共耦合光学器件耦合到第二导光管中，第二光导将这些光束提供给检测器系统。
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公开(公告)号：US09389100B2
公开(公告)日：2016-07-12
申请号：US14075088
申请日：2013-11-08
发明人： Wolfgang Holzapfel , Joerg Drescher , Markus Meissner , Ralph Joerger , Bernhard Musch , Thomas Kaelberer
CPC分类号： G01D5/26 , G01B11/24 , G01D5/3473
摘要： An optical position measuring instrument including a first scale having a first graduation, wherein the first scale is disposed movable in a first measuring direction, and at a first defined position in the first measuring direction, the first scale includes a spatially limited first marking that differs from the first graduation. The optical position measuring instrument further including a second scale having a second graduation, wherein the second scale is disposed movable in a second measuring direction, and at a second defined position, the second scale includes a second reference marking that is usable for generating at least one reference signal at a reference position of the second scale only if the first scale is located in the first defined position.
摘要翻译： 一种光学位置测量仪器，包括具有第一刻度的第一刻度，其中所述第一刻度尺可在第一测量方向上移动，并且在所述第一测量方向上的第一限定位置处，所述第一刻度尺包括不同的空间有限的第一标记 从第一毕业。 所述光学位置测量仪器还包括具有第二刻度的第二刻度，其中所述第二刻度尺可在第二测量方向上移动，并且在第二限定位置，所述第二刻度尺包括可用于至少产生的第二参考标记 仅在第一标尺位于第一限定位置时在第二刻度的参考位置处的一个参考信号。
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公开(公告)号：US09291481B2
公开(公告)日：2016-03-22
申请号：US14135043
申请日：2013-12-19
CPC分类号： G01D5/38 , G01B11/002
摘要： An optical position-measuring device is adapted to detect the position of an object in several spatial degrees of freedom. The object is disposed in a manner allowing it to move at least along a first direction of movement and along a second direction of movement. The position-measuring device includes at least one light source and at least one first and second measuring standard which are located on the object, extend along a first extension direction and a second extension direction and include graduation regions disposed periodically along the first and second extension directions. In addition, a scanning plate is provided, into which at least first and second retroreflector elements are integrated, the first retroreflector element extending parallel to the first extension direction and the second retroreflector element extending parallel to the second extension direction, and via which, sub-beams that fall on them from the first and second measuring standard, are reflected back in the direction of the respective measuring standard. From superposed sub-beams, a detector system is able to generate position signals at least with respect to the movement of the object along the first and second direction of movement.
摘要翻译： 光学位置测量装置适于以几个空间自由度检测物体的位置。 物体以允许其至少沿着第一运动方向并沿着第二运动方向移动的方式设置。 位置测量装置包括位于物体上的至少一个光源和至少一个第一和第二测量标准物，沿着第一延伸方向和第二延伸方向延伸，并且包括沿着第一和第二延伸部周期性地设置的刻度区域 方向。 另外，设置有扫描板，至少第一和第二后向反射器元件被集成到其中，第一后向反射器元件平行于第一延伸方向延伸并且第二后向反射器元件平行于第二延伸方向延伸， 从第一和第二测量标准落在它们上的光束被反射回各自测量标准的方向。 从叠加的子光束中，检测器系统能够至少相对于物体沿着第一和第二移动方向的运动产生位置信号。
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4.发明授权System and method for positioning a processing tool in relation to a workpiece 有权用于将加工工具相对于工件定位的系统和方法公开(公告)号：US09151593B2
公开(公告)日：2015-10-06
申请号：US13770413
申请日：2013-02-19
发明人： Wolfgang Holzapfel , Joerg Drescher , Markus Meissner , Ralph Joerger , Bernhard Musch , Thomas Kaelberer
CPC分类号： G01B11/002 , G01B11/14 , H01L21/67138 , H01L21/67144 , H01L21/6715 , H01L21/68 , H01L21/681 , Y10T29/49778 , Y10T29/54
摘要： In a system and a method for positioning a processing tool in relation to a workpiece, an object alignment mark and the workpiece are situated on a first object. In addition, a workpiece alignment mark is situated on the workpiece. The processing tool via which the object alignment mark is detectable is situated on a second object, which is disposed so as to be displaceable along at least one movement direction in relation to the first object. Furthermore, an alignment sensor is disposed thereon, with whose aid the object alignment mark and the workpiece alignment mark are detectable. In addition, a scannable measuring standard, which extends along the at least one movement direction, is disposed on the second object. At least two scanning units for scanning the measuring standard are situated on the first object in order to thereby determine the relative position between the first and the second object along the movement direction, the two scanning units having a defined offset.
摘要翻译： 在相对于工件定位加工工具的系统和方法中，物体对准标记和工件位于第一物体上。 此外，工件对准标记位于工件上。 可以检测物体对准标记的处理工具位于第二物体上，第二物体被布置成能够相对于第一物体沿着至少一个移动方向移位。 此外，在其上设置对准传感器，借助于该对准传感器可以检测物体对准标记和工件对准标记。 此外，沿着至少一个运动方向延伸的可扫描测量标准被布置在第二物体上。 用于扫描测量标准的至少两个扫描单元位于第一物体上，从而确定沿移动方向的第一和第二物体之间的相对位置，两个扫描单元具有限定的偏移。
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公开(公告)号：US20130335750A1
公开(公告)日：2013-12-19
申请号：US13919780
申请日：2013-06-17
发明人： Ralf Bihr , Joerg Drescher , Wolfgang Holzapfel , Markus Meissner , Bernhard Musch , Bernhard Pletschacher
IPC分类号： G01B11/14
CPC分类号： G01B11/14 , G01D5/38 , G03F7/70775
摘要： A position-measuring device is used to detect the relative position of two machine components that are disposed in a manner allowing movement relative to each other at least along a first and a second main direction of motion in a displacement plane. The device includes at least one measuring standard, which is mounted on a first machine component. At least six scanning units are mounted on a second machine component, and are used for the optical scanning of the measuring standard in at least two measuring directions in the displacement plane. At least two scanning units are assigned to each measuring direction. The scanning units of each respective measuring direction in the displacement plane are disposed non-centrosymmetrically in relation to a center of the second machine component.
摘要翻译： 位置测量装置用于检测两个机器部件的相对位置，所述两个机器部件至少沿位移平面中的第一和第二主要运动方向相对于彼此移动。 该装置包括安装在第一机器部件上的至少一个测量标准。 至少六个扫描单元安装在第二机器部件上，并且用于在位移平面中的至少两个测量方向上的测量标准的光学扫描。 每个测量方向至少分配两个扫描单元。 位移面中的各测量方向的扫描单元相对于第二机器部件的中心非中心对称地设置。
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6.发明申请Position-Measuring Device and System Having a Plurality of Position-Measuring Devices 有权具有多个位置测量装置的位置测量装置和系统公开(公告)号：US20130194584A1
公开(公告)日：2013-08-01
申请号：US13757533
申请日：2013-02-01
发明人： Wolfgang Holzapfel , Joerg Drescher , Markus Meissner , Ralph Joerger , Bernhard Musch , Thomas Kaelberer
IPC分类号： G01B11/14
摘要： In position-measuring devices and a systems having a plurality of position-measuring devices for determining the position of an object in several spatial degrees of freedom, the plurality of optical position-measuring devices scan the object from a single probing direction, and the probing direction coincides with one of the two main axes of motion.
摘要翻译： 在位置测量装置和具有多个位置测量装置的系统中，用于以几个空间自由度确定物体的位置，多个光学位置测量装置从单个探测方向扫描物体，探测 方向与两个主轴运动方向一致。
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公开(公告)号：US12031886B2
公开(公告)日：2024-07-09
申请号：US18076434
申请日：2022-12-07
CPC分类号： G01M5/0058 , F03D17/00 , G01D5/28 , F05B2260/83
摘要： A sensor assembly for measuring a torsion of a rotor blade of a wind turbine generator system includes a first light source configured to generate light and a first transmitter-side polarizer disposed downstream thereof in a direction of light propagation and configured to generate linearly polarized light as a first transmission light. A second light source is configured to generate unpolarized light as a second transmission light. First and second detector elements are arranged and adapted to receive the first and second transmission light. A first receiver-side polarizer is disposed upstream of the first detector element in the direction of light propagation and a second receiver-side polarizer is disposed upstream of the second detector element in the direction of light propagation. An orientation of a polarization plane of the first receiver-side polarizer and an orientation of a polarization plane of the second receiver-side polarizer are different from one another.
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公开(公告)号：US10746532B2
公开(公告)日：2020-08-18
申请号：US16047691
申请日：2018-07-27
IPC分类号： G01B11/14 , G01B11/02 , G01S17/36 , G01B9/02 , G01S17/10 , H01S3/00 , H01S3/067 , H01S3/08 , H01S3/094 , H01S3/0941 , H01S3/10 , H01S3/102 , H01S3/106 , H01S3/16
摘要： An interferometric distance measurement device includes a multiple wavelength light source, supplying a light beam having at least three different wavelengths. An interferometer unit is provided, which splits the light beam into a measuring light beam and a reference light beam. The measuring and reference light beams reflected back by measuring and reference reflectors are superimposed in an interfering manner to form an interference light beam. The interference light beam is split via a detection unit such that, in each instance, a plurality of phase-shifted, partial interference signals result per wavelength. With the aid of a signal processing unit, an absolute position information item regarding the measuring reflector is determined from the partial interference signals of different wavelengths.
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公开(公告)号：US09849555B2
公开(公告)日：2017-12-26
申请号：US15332844
申请日：2016-10-24
发明人： Markus Meissner
CPC分类号： B23Q17/2428 , B23C1/002 , B23C1/14 , B23C2260/76 , B23Q1/5437 , B23Q17/2233 , B23Q17/2404 , B23Q17/248
摘要： A machine tool includes a stationary machine frame, a tool head, which is able to be positioned relative to the machine frame along three mutually orthogonal translation axes, and a motor-driven tool. The machine tool includes a swivel unit, which can be pivoted about a horizontal swivel axis relative to the machine frame and includes a workpiece positioning device, via which a workpiece can be rotated about an axis of rotation oriented perpendicularly to the swivel axis. The swivel unit is assigned a measuring frame, which is able to be rotated with the swivel unit and is arranged to be thermally and/or mechanically decoupled from the swivel unit and includes components of a first and second position measuring system. Additional components of the first position measuring system are disposed on the tool head, and further components of the second position measuring system are situated on the workpiece positioning device. The spatial position of the tool head in relation to the measuring frame is ascertained via the first position measuring system, and the spatial position of the workpiece positioning device in relation to the measuring frame takes place via the second position measuring system.
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公开(公告)号：US09482517B2
公开(公告)日：2016-11-01
申请号：US14508473
申请日：2014-10-07
CPC分类号： G01B11/14 , G01B9/00 , G01D5/34715 , G01J1/0403
摘要： An optical position-measuring device includes a measuring standard as well as a scanning unit movable relative to it along at least one measuring direction, a scanning beam path being formed between the measuring standard and scanning unit and being used to generate displacement-dependent signals. A protective cap is disposed in a manner allowing movement along an axis perpendicular to the measuring-standard plane such that in at least one operating mode, the protective cap for the most part surrounds the scanning beam path between the scanning unit and measuring standard.
摘要翻译： 光学位置测量装置包括测量标准以及沿着至少一个测量方向相对于其移动的扫描单元，扫描光束路径形成在测量标准和扫描单元之间，并被用于产生位移相关信号。 保护帽以允许沿着垂直于测量标准平面的轴线移动的方式设置，使得在至少一个操作模式中，大部分保护盖围绕扫描单元和测量标准之间的扫描光束路径。
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