摘要:
An interferometric measuring machine includes an exchangeable lens module system for an optical probe. The probe includes a lens body containing the optical apparatus of an interferometer and a lens module containing an objective lens along an object arm of the interferometer that can be exchanged with other lens modules for varying the measuring characteristics of the probe. The lens modules are adapted to accommodate objective lenses having different focal lengths while maintaining a desired optical path length of the object arm of the interferometer.
摘要:
A system and method for surface inspection of an object using optical coherence tomography (OCT) with anticipatory depth of field adjustment is provided. The method includes determining a present working distance and one or more forward working distances; determining a present depth of field in which the surface of the object is in focus at the location of the present working distance and at as many of the consecutive forward surface locations as determined possible; changing to the present depth of field; performing an A-scan of the object; moving the object such that the scanner head is directed at each of the consecutive forward surface locations determined to be in the present depth of field; and performing an A-scan at each of the consecutive forward surface locations determined to be in the present depth of field.
摘要:
A white light interferometric metrology device operates in the image plane and objective pupil plane. The interferometric metrology device extracts the electric field with complex parameters and that is a function of azimuth angle, angle of incidence and wavelength from interferometric data obtained from the pupil plane. Characteristics of the sample are determined using the electric field based on an electric field model of the azimuth angle, the angle of incidence and the wavelength that is specific for a zero diffraction order. A center of the pupil in the pupil plane may be determined based on a Fourier transform of the interferometric data at each new measurement and used to convert each pixel from the camera imaging the objective pupil plane into a unique set of angle of incidence and azimuth angle of light incident on the sample.
摘要:
Imaging systems are provided allowing examination of different object regions spaced apart in a depth direction by visual microscopy and by optical coherence tomography. An axial field of view and a lateral resolution is varied depending on which object region is examined by the imaging system. The proposed imaging systems are in particular applicable for thorough examination of the human eye.
摘要:
Monolithic beam-shaping optical systems and methods are disclosed for an optical coherence tomography (OCT) probe that includes a transparent cylindrical housing having asymmetric optical power. The system includes a transparent monolithic body having a folded optical axis and at least one alignment feature that supports the end of an optical fiber adjacent an angled planar end wall. The monolithic body also includes a total-internal reflection surface and a lens surface that define object and image planes. Light from the optical fiber end traverses the optical path, which includes the cylindrical housing residing between the lens surface and the image plane. Either the lens surface by itself or the lens surface and the reflective (eg, TIR) surface in combination are configured to substantially correct for the asymmetric optical power of the cylindrical housing, thereby forming a substantially rotationally symmetric image spot at the image plane.
摘要:
A probe for an optical coherence tomography system according to an embodiment of the current invention includes a sheath having a proximal end and a distal end and defining a lumen therein, an optical fiber disposed at least partially within the lumen of said sheath, and a sapphire lens attached to the distal end of the sheath to form a fluid-tight seal to prevent fluid from entering the lumen of said sheath. The optical fiber has an end arranged in an optical path with the sapphire lens to provide optical coupling between the sapphire lens and the optical fiber.
摘要:
An exemplary arrangement can be provided which can include a lens arrangement which can have at least two reflecting surfaces on opposing sides thereof, each of the reflecting surfaces can have a reflectivity that can be greater than 10%. The lens arrangement can include a gradient index lens, and can have a refractive optical element, a diffractive optical element, a planar convex lens, an aspheric lens, a ball lens or a cylindrical lens.
摘要:
The invention concerns an optical imaging apparatus comprising (o) a light source (1), (p) sample holding means, (q) an interferometer, (r) reference means, (s) an objective (8) which is adapted to have its sample side focal plane crossing a sample held in said sample holding means, (t) optical or electro-optical means (2, 3, 5, 16) adapted to produce a ring shaped or multi-spot light source in the front focal plane (17) or any conjugated plane (17′) of said objective (8), at least one detector. The invention also includes a method for using said apparatus where the sample is illuminated by an interference pattern and the depth information is obtained by using optical Coherence Tomography.
摘要:
A device for interferential distance measurement between two objects that are situated in a movable manner with respect to each other along at least one shifting direction includes at least one light source as well as at least one splitting element, which splits a beam of rays emitted by the light source at a splitting location into at least two partial beams that propagate onward at different angles. The device furthermore includes at least one deflecting element that effects a deflection of the incident partial beams in the direction of a merging location, where the split partial beams are superimposed in an interfering manner and the optical paths of the partial beams of rays between the splitting location and the merging location being arranged such that the traversed optical path lengths of the partial beams between the splitting location and the merging location are identical in the event of a change of distance between the two objects. Furthermore, at least one detector system is provided for detecting distance-dependent signals from the superimposed pair of interfering partial beams.
摘要:
A device for interferential distance measurement between two objects that are situated in a movable manner with respect to each other along at least one shifting direction includes at least one light source as well as at least one splitting element, which splits a beam of rays emitted by the light source at a splitting location into at least two partial beams that propagate onward at different angles. The device furthermore includes at least one deflecting element that effects a deflection of the incident partial beams in the direction of a merging location, where the split partial beams are superimposed in an interfering manner and the optical paths of the partial beams of rays between the splitting location and the merging location being arranged such that the traversed optical path lengths of the partial beams between the splitting location and the merging location are identical in the event of a change of distance between the two objects. Furthermore, at least one detector system is provided for detecting distance-dependent signals from the superimposed pair of interfering partial beams.