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    VACUUM PUMP WITH ABATEMENT FUNCTION
    1.
    发明申请
    VACUUM PUMP WITH ABATEMENT FUNCTION 审中-公开
    具有吸音功能的真空泵

    公开(公告)号：US20150260192A1

    公开(公告)日：2015-09-17

    申请号：US14644135

    申请日：2015-03-10

    申请人： Ebara Corporation

    发明人： Koichi IWASAKI ,  Hiroki FURUTA ,  Keiichi ISHIKAWA ,  Tetsuo KOMAI ,  Shinichi SEKIGUCHI

    IPC分类号： F04D19/04 ,  F04D27/00

    CPC分类号： F04D19/04 ,  B01D53/005 ,  B01D53/323 ,  B01D53/8659 ,  B01D53/8662 ,  B01D53/8671 ,  B01D2257/2025 ,  B01D2257/2027 ,  B01D2257/2045 ,  B01D2257/2047 ,  B01D2257/2064 ,  B01D2257/2066 ,  B01D2257/553 ,  B01D2258/0216 ,  C23C16/4412 ,  F05D2260/607 ,  Y02C20/30 ,  Y02P70/605

    摘要： A vacuum pump with abatement function which can prevent contamination of a process chamber without allowing products generated by exhaust gas treatment to flow back to the process chamber, and can reduce the amount of gas to be treated without allowing a purge gas and a diluent gas to be contained in an exhaust gas, and thus can achieve energy saving by reducing the amount of energy required for the exhaust gas treatment in an abatement part is disclosed. The vacuum pump with abatement function includes a vacuum pump to which at least one abatement part for treating an exhaust gas is attached. The vacuum pump comprises a dry vacuum pump having a pair of multistage pump rotors each of which comprises a plurality of rotors arranged on a rotating shaft, and the at least one abatement part is connected to an interstage of the multistage pump rotors.

    摘要翻译： 具有减轻功能的真空泵，其可以防止处理室的污染，而不允许废气处理产生的产物流回到处理室，并且可以减少待处理的气体的量，而不允许吹扫气体和稀释气体 被包含在废气中，因此可以通过减少减排部分中废气处理所需的能量来实现节能。 具有减排功能的真空泵包括：真空泵，至少一个用于处理废气的消除部分被附接到该真空泵。 真空泵包括具有一对多级泵转子的干式真空泵，每个泵转子包括设置在旋转轴上的多个转子，并且至少一个减排部分连接到多级泵转子的级间。

    FAN SCRUBBER AND VACUUM PUMP APPARATUS
    2.
    发明申请
    FAN SCRUBBER AND VACUUM PUMP APPARATUS 审中-公开
    风扇和真空泵装置

    公开(公告)号：US20170007961A1

    公开(公告)日：2017-01-12

    申请号：US15201923

    申请日：2016-07-05

    申请人： EBARA CORPORATION

    发明人： Hiroki FURUTA ,  Tetsuro SUGIURA ,  Tetsuo KOMAI ,  Atsushi OYAMA ,  Takashi KYOTANI ,  Shinichi SEKIGUCHI ,  Takanori INADA

    IPC分类号： B01D53/78 ,  B01D53/38 ,  B01D47/06 ,  H02K5/10 ,  H02K5/124

    CPC分类号： B01D53/78 ,  B01D47/06 ,  B01D47/08 ,  B01D53/38 ,  B01D2247/104 ,  B01D2258/0216 ,  H02K1/32 ,  H02K5/128 ,  H02K5/1672 ,  H02K7/14

    摘要： The fan scrubber is provided with a casing having a gas draw-in port and a gas ejection port, a fan disposed in the casing, a nozzle from which a liquid is jetted into the casing, and a canned motor connected to the fan. The canned motor has a main shaft connected to the fan, a rotor which rotates integrally with the main shaft, a stator disposed on the periphery of the rotor, a motor casing in which the rotor and the stator are housed, and a can which partitions the interior of the motor casing into a rotor chamber in which the rotor is disposed and a stator chamber in which the stator is disposed.

    摘要翻译： 风扇洗涤器设置有具有气体吸入口和气体喷射口的壳体，设置在壳体中的风扇，喷射液体喷射到壳体中的喷嘴以及连接到风扇的密封电动机。 密封电动机具有与风扇连接的主轴，与主轴一体旋转的转子，设置在转子周边的定子，容纳转子和定子的电动机壳体以及分隔件 电动机壳体的内部转入其中设置有转子的转子室和设置定子的定子室。