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    VACUUM PUMP WITH ABATEMENT FUNCTION
    3.
    发明申请
    VACUUM PUMP WITH ABATEMENT FUNCTION 有权
    具有吸音功能的真空泵

    公开(公告)号：US20140295362A1

    公开(公告)日：2014-10-02

    申请号：US14226737

    申请日：2014-03-26

    申请人： EBARA CORPORATION

    发明人： Kohtaro KAWAMURA ,  Toyoji SHINOHARA ,  Tetsuro SUGIURA ,  Hideo ARAI ,  Toshiharu NAKAZAWA ,  Keiichi ISHIKAWA ,  Seiji KASHIWAGI ,  Yasuhiko SUZUKI ,  Takashi KYOTANI

    IPC分类号： F23J13/00

    CPC分类号： F23J13/00 ,  B01D53/68 ,  B01D53/76 ,  B01D2251/102 ,  B01D2257/204 ,  B01D2257/553 ,  B01D2258/0216 ,  F04B37/14 ,  F04C25/02 ,  F04C2220/30 ,  F23G5/32 ,  F23G7/065 ,  F23J2219/00 ,  F23J2900/01007 ,  F23L17/00

    摘要： A vacuum pump includes a vacuum pump having a discharge port to which an abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The vacuum pump includes a cylindrical member having an exhaust gas introduction port for introducing the exhaust gas to be treated and a gas outlet port for discharging gases which have been treated, a plurality of fuel nozzles provided at a circumferential wall of the cylindrical member for ejecting a fuel, and a plurality of air nozzles provided at the circumferential wall of the cylindrical member for ejecting air so as to form a swirling flow of air along an inner circumferential surface of the circumferential wall. The air nozzles are disposed at a plurality of stages spaced in an axial direction of the cylindrical member.

    摘要翻译： 真空泵包括具有排出口的真空泵，所述排出口附接有用于处理从真空泵排出以使废气无害化的废气的减排部。 该真空泵包括具有用于引入被处理废气的废气引入口和用于排出已经处理的气体的气体出口的圆柱形构件，设置在圆柱形构件的圆周壁上用于喷射的多个燃料喷嘴 燃料，以及多个空气喷嘴，设置在所述筒状部件的周壁上，用于喷射空气，以沿着所述周壁的内周面形成旋转的空气流。 空气喷嘴配置在与筒状部件的轴向隔开的多个台阶上。

    VACUUM PUMP WITH ABATEMENT FUNCTION
    7.
    发明申请
    VACUUM PUMP WITH ABATEMENT FUNCTION 审中-公开
    具有吸音功能的真空泵

    公开(公告)号：US20150260192A1

    公开(公告)日：2015-09-17

    申请号：US14644135

    申请日：2015-03-10

    申请人： Ebara Corporation

    发明人： Koichi IWASAKI ,  Hiroki FURUTA ,  Keiichi ISHIKAWA ,  Tetsuo KOMAI ,  Shinichi SEKIGUCHI

    IPC分类号： F04D19/04 ,  F04D27/00

    CPC分类号： F04D19/04 ,  B01D53/005 ,  B01D53/323 ,  B01D53/8659 ,  B01D53/8662 ,  B01D53/8671 ,  B01D2257/2025 ,  B01D2257/2027 ,  B01D2257/2045 ,  B01D2257/2047 ,  B01D2257/2064 ,  B01D2257/2066 ,  B01D2257/553 ,  B01D2258/0216 ,  C23C16/4412 ,  F05D2260/607 ,  Y02C20/30 ,  Y02P70/605

    摘要： A vacuum pump with abatement function which can prevent contamination of a process chamber without allowing products generated by exhaust gas treatment to flow back to the process chamber, and can reduce the amount of gas to be treated without allowing a purge gas and a diluent gas to be contained in an exhaust gas, and thus can achieve energy saving by reducing the amount of energy required for the exhaust gas treatment in an abatement part is disclosed. The vacuum pump with abatement function includes a vacuum pump to which at least one abatement part for treating an exhaust gas is attached. The vacuum pump comprises a dry vacuum pump having a pair of multistage pump rotors each of which comprises a plurality of rotors arranged on a rotating shaft, and the at least one abatement part is connected to an interstage of the multistage pump rotors.

    摘要翻译： 具有减轻功能的真空泵，其可以防止处理室的污染，而不允许废气处理产生的产物流回到处理室，并且可以减少待处理的气体的量，而不允许吹扫气体和稀释气体 被包含在废气中，因此可以通过减少减排部分中废气处理所需的能量来实现节能。 具有减排功能的真空泵包括：真空泵，至少一个用于处理废气的消除部分被附接到该真空泵。 真空泵包括具有一对多级泵转子的干式真空泵，每个泵转子包括设置在旋转轴上的多个转子，并且至少一个减排部分连接到多级泵转子的级间。

    VACUUM PUMP WITH ABATEMENT FUNCTION
    8.
    发明申请
    VACUUM PUMP WITH ABATEMENT FUNCTION 有权
    具有吸音功能的真空泵

    公开(公告)号：US20140352820A1

    公开(公告)日：2014-12-04

    申请号：US14289575

    申请日：2014-05-28

    申请人： EBARA CORPORATION

    发明人： Toshiharu NAKAZAWA ,  Tetsuro SUGIURA ,  Kohtaro KAWAMURA ,  Toyoji SHINOHARA ,  Takashi KYOTANI ,  Keiichi ISHIKAWA ,  Seiji KASHIWAGI ,  Yasuhiko SUZUKI ,  Hideo ARAI

    IPC分类号： B01D53/74

    CPC分类号： B01D53/74 ,  B01D53/005 ,  B01D2257/204 ,  B01D2257/2066 ,  B01D2257/553 ,  B01D2258/0216 ,  Y10T137/85978

    摘要： A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which one or more abatement parts for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless are attached. The one or more abatement parts are selected, depending on the amount and kind of the exhaust gas discharged from the vacuum pump, from plural kinds of abatement parts which have different treatment types of exhaust gas and/or different treatment amounts of exhaust gas.

    摘要翻译： 具有减排功能的真空泵用于抽空制造装置的室。 具有减排功能的真空泵包括具有排出口的真空泵，所述排出口附接有用于处理从真空泵排出的排气的一个或多个减排部件，使废气无害化。 根据从真空泵排出的废气的数量和种类，选择具有不同处理类型的废气和/或废气处理量不同的多种减排部件来选择一个或多个减排部件。