公开(公告)号：US09463528B2

公开(公告)日：2016-10-11

申请号：US14461171

申请日：2014-08-15

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Robert Reichenbach ,  Chuan Yang ,  Fang Shan

IPC: B32B3/02 ,  B23K26/00 ,  B23K26/08

CPC classification number: B23K26/0624 ,  B23K26/0006 ,  B23K26/082 ,  B23K26/0823 ,  B23K26/083 ,  B23K26/0853 ,  B23K26/0869 ,  B23K26/0876 ,  B23K26/53 ,  B23K26/57 ,  B23K2101/007 ,  B23K2101/34 ,  B23K2101/40 ,  B23K2103/08 ,  B23K2103/10 ,  B23K2103/14 ,  B23K2103/15 ,  B23K2103/56 ,  Y10T428/24802

Abstract: Laser output (114) is employed to mark an article (100) including a layer (104) supported by a substrate (102), wherein the layer (104) has a thickness (t) that is less than or equal to 50 microns. The laser output (114) is focused to a numerical aperture diffraction-limited spot size (32) of less than or equal to 5 microns at a focal point (80) of the beam waist (90) and directed into the layer (104) to form a plurality of structures comprising a plurality of laser-induced cracks within the layer (104) and within a region of the article (100), wherein the laser-induced cracks terminate within the layer (104) without extending to the substrate (102) or an outer surface (108) of the layer (104), and wherein the plurality of structures are configured to scatter light incident upon the article (100).

Abstract translation: 激光输出（114）用于标记包括由衬底（102）支撑的层（104）的制品（100），其中该层（104）的厚度（t）小于或等于50微米。 在束腰（90）的焦点（80）处将激光输出（114）聚焦到小于或等于5微米的数值孔径衍射限制光斑尺寸（32）并被引导到层（104）中， 以形成在层（104）内并且在制品（100）的区域内包括多个激光诱发的裂纹的多个结构，其中激光诱发的裂纹终止于层（104）内而不延伸到基底 102）或所述层（104）的外表面（108），并且其中所述多个结构被配置为散射入射在所述物品（100）上的光。

公开(公告)号：US09610653B2

公开(公告)日：2017-04-04

申请号：US14032829

申请日：2013-09-20

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Haibin Zhang ,  Fang Shan ,  Mathew Rekow ,  Min Zhang ,  Glenn Simenson ,  Qian Xu ,  James Brookhyser ,  Joe Frankel ,  Michael Darwin ,  Jack Rundel ,  Matthew Pysher

IPC: B23K26/00 ,  B23K26/16 ,  B23K26/36 ,  B23K26/364 ,  B23K103/00

CPC classification number: B23K26/364 ,  B23K26/0006 ,  B23K26/57 ,  B23K2103/50

Abstract: The present invention is a method for separating a workpiece from a common substrate. It includes the steps of providing the workpiece, generating, within a beam source, a beam of laser pulses configured to modify a portion of the workpiece, determining a depth for creating a modified region based upon a characteristic of the workpiece and modifying a plurality of regions within the workpiece to form a plurality of modified regions. Modifying the plurality of regions includes directing the beam of laser pulses from an output of the beam source onto the workpiece, causing relative motion between the workpiece and the output of the beam source while directing the beam of laser pulses onto workpiece, and modifying a characteristic of the pulses of the beam upon generating a number of pulses which generally correspond to creating the modified regions to the determined depth.

公开(公告)号：US20140175067A1

公开(公告)日：2014-06-26

申请号：US14135097

申请日：2013-12-19

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Robert Reichenbach ,  Jeffrey Howerton ,  Hisashi Matsumoto ,  Fang Shan ,  Michael Shane Noel

IPC: B23K26/00 ,  B23K26/36 ,  B23K26/06

CPC classification number: B23K26/352 ,  B23K26/0006 ,  B23K26/361 ,  B23K26/364 ,  B23K26/40 ,  B23K2103/04 ,  B23K2103/08 ,  B23K2103/10 ,  B23K2103/14 ,  B41M5/24

Abstract: A method and laser processing system (2) addresses a substrate (102) with three different sets of laser processing parameters to achieve different surface effects in the substrate (102). A first set of laser parameters is employed to form a recess (106) in the substrate. A second set of laser parameters is employed to polish a surface (108) of the recess (106). A third set of laser parameters is employed to modify a polished surface (108) of the recess (106) to have optical characteristics that satisfy conditions for a desirable visual appearance.

Abstract translation: 一种方法和激光处理系统（2）利用三组不同的激光处理参数寻址衬底（102），以在衬底（102）中实现不同的表面效应。 采用第一组激光参数在衬底中形成凹陷（106）。 使用第二组激光参数来抛光凹部（106）的表面（108）。 使用第三组激光参数来修改凹部（106）的抛光表面（108）以具有满足期望视觉外观的条件的光学特性。