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公开(公告)号：US09828277B2
公开(公告)日：2017-11-28
申请号：US13778950
申请日：2013-02-27
Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Inventor： Haibin Zhang , Qian Xu
CPC classification number: C03B33/0222 , B23K26/40 , B23K2103/50 , Y10T428/24479 , Y10T428/24488
Abstract: Methods and apparatus for separating substrates are disclosed, as are articles formed from the separated substrates. A method of separating a substrate having first and second surfaces includes directing a beam of laser light to pass through the first surface and, thereafter, to pass through the second surface. The beam of laser light has a beam waist located at a surface of the substrate or outside the substrate. Relative motion between the beam of laser light and the substrate is caused to scan a spot on a surface of the substrate to be scanned along a guide path. Portions of the substrate illuminated within the spot absorb light within the beam of laser light so that the substrate can be separated along the guide path.
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公开(公告)号：US09610653B2
公开(公告)日：2017-04-04
申请号：US14032829
申请日：2013-09-20
Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Inventor： Haibin Zhang , Fang Shan , Mathew Rekow , Min Zhang , Glenn Simenson , Qian Xu , James Brookhyser , Joe Frankel , Michael Darwin , Jack Rundel , Matthew Pysher
IPC: B23K26/00 , B23K26/16 , B23K26/36 , B23K26/364 , B23K103/00
CPC classification number: B23K26/364 , B23K26/0006 , B23K26/57 , B23K2103/50
Abstract: The present invention is a method for separating a workpiece from a common substrate. It includes the steps of providing the workpiece, generating, within a beam source, a beam of laser pulses configured to modify a portion of the workpiece, determining a depth for creating a modified region based upon a characteristic of the workpiece and modifying a plurality of regions within the workpiece to form a plurality of modified regions. Modifying the plurality of regions includes directing the beam of laser pulses from an output of the beam source onto the workpiece, causing relative motion between the workpiece and the output of the beam source while directing the beam of laser pulses onto workpiece, and modifying a characteristic of the pulses of the beam upon generating a number of pulses which generally correspond to creating the modified regions to the determined depth.
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3.发明申请METHOD AND APPARATUS FOR INTERNALLY MARKING A SUBSTRATE HAVING A ROUGH SURFACE 审中-公开用于内部标记具有粗糙表面的基板的方法和装置公开(公告)号：US20150158116A1
公开(公告)日：2015-06-11
申请号：US14558324
申请日：2014-12-02
Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Inventor： Haibin Zhang , Mathew Rekow , Chuan Yang , Michael J. Darwin
CPC classification number: B23K26/009 , B23K26/0006 , B23K26/083 , B23K26/0876 , B23K26/50 , B23K26/53 , B23K26/55 , B23K37/0235 , B23K2103/50 , H01L23/544 , Y10T428/24364
Abstract: A method for laser processing provides a coating material (130) applied to a rough surface (42) of a substrate (44) to mitigate adverse optical effects that would be caused by roughness of the surface (42). Laser pulses (52) of the laser output of suitable parameters can be directed and focused to internally mark the substrate (44) material without damaging the rough surface (42) after passing through the coating material (130).
Abstract translation: 一种用于激光加工的方法提供了施加到基底（44）的粗糙表面（42）上的涂层材料（130），以减轻由表面（42）的粗糙度引起的不良光学效应。 激光输出的合适参数的激光脉冲（52）可以被引导和聚焦，以在通过涂层材料（130）之后不损坏粗糙表面（42）来内部标记衬底（44）材料。
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公开(公告)号：US08761216B2
公开(公告)日：2014-06-24
申请号：US13739413
申请日：2013-01-11
Applicant: Electro Scientific, Industries, Inc.
Inventor： Haibin Zhang , Glenn Simenson , Robert Hainsey , David Barsic , Jeffrey Howerton , Wayne Crowther , Patrick Leonard
Abstract: The invention is a method and apparatus for creating a color and optical density selectable visible mark on an anodized aluminum specimen. The method includes providing a laser marking system having a laser, laser optics and a controller operatively connected to said laser to control laser pulse parameters and a controller with stored laser pulse parameters, selecting the stored laser pulse parameters associated with the desired color and optical density, directing the laser marking system to produce laser pulses having laser pulse parameters associated with the desired color and optical density including temporal pulse widths greater than about 1 and less than about 1000 picoseconds to impinge upon said anodized aluminum.
Abstract translation: 本发明是一种用于在阳极氧化铝样品上产生颜色和光密度可选择可见标记的方法和装置。 该方法包括提供激光打标系统，其具有激光器，激光光学器件和可操作地连接到所述激光器以控制激光脉冲参数的控制器和具有存储的激光脉冲参数的控制器，选择存储的与所需颜色和光密度相关联的激光脉冲参数 引导激光打标系统产生激光脉冲，该激光脉冲具有与所需颜色和光密度相关联的激光脉冲参数，包括大于约1皮秒并小于约1000皮秒的时间脉冲宽度以撞击所述阳极氧化铝。
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公开(公告)号：US20140084040A1
公开(公告)日：2014-03-27
申请号：US14033305
申请日：2013-09-20
Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Inventor： Haibin Zhang , Glenn Simenson , Qian XU , Hisashi Matsumoto
IPC: B26F3/00
CPC classification number: B26F3/00 , C03B33/02 , C03B33/03 , C03B33/033 , C03B33/09 , Y10T225/14 , Y10T225/30
Abstract: The invention is an apparatus, for performing the method, and the method including the steps of providing a workpiece, contacting a portion of an exterior surface of the workpiece to an acoustic couplant such that an interface between the acoustic couplant and the portion of the exterior surface is at least substantially continuous across the portion of the exterior surface, and propagating a crack through the workpiece. A portion of the acoustic couplant at the interface has acoustic impedance relative to the acoustic energy that is greater than 400 kg·m−2·s−1.
Abstract translation: 本发明是一种用于执行该方法的方法，该方法包括以下步骤：提供工件，使工件的外表面的一部分与声耦合剂接触，使得声耦合剂与外部部分之间的界面 表面至少基本上连续穿过外表面的部分，并且将裂纹传播通过工件。 界面处的声耦合器的一部分相对于大于400kg·m-2·s-1的声能具有声阻抗。
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Patent Agency Ranking
公开(公告)号：US20140083986A1
公开(公告)日：2014-03-27
申请号：US14033368
申请日：2013-09-20
Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Inventor： Haibin Zhang , Glenn Simenson
CPC classification number: B23K26/352 , B23K26/0006 , B23K26/359 , B23K26/389 , B23K26/40 , B23K2103/05 , B23K2103/08 , B23K2103/10 , B23K2103/14 , B23K2103/50 , B23K2103/52 , B23K2103/54 , B23K2103/56
Abstract: The invention is method, and an apparatus for performing the method having the steps of providing a workpiece, generating a plurality of free electrons at a region of the exterior surface, and machining a portion of the workpiece adjoining the first region by directing laser energy onto the workpiece.
Abstract translation: 本发明是一种方法，以及一种用于执行该方法的装置，该方法具有以下步骤：提供工件，在外表面的区域产生多个自由电子，并且通过将激光能量引导到其上来加工与第一区域邻接的部分的部分 工件。
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7.发明申请公开(公告)号：US20140083983A1
公开(公告)日：2014-03-27
申请号：US14032829
申请日：2013-09-20
Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Inventor： Haibin Zhang , Fang SHAN , Mathew Rekow , Min Zhang , Glenn Simenson , Qian XU , James Brookhyser , Joe Frankel , Michael Darwin , Jack Rundel , Matthew Pysher
IPC: B23K26/36
CPC classification number: B23K26/364 , B23K26/0006 , B23K26/57 , B23K2103/50
Abstract: The present invention is a method for separating a workpiece from a common substrate. It includes the steps of providing the workpiece, generating, within a beam source, a beam of laser pulses configured to modify a portion of the workpiece, determining a depth for creating a modified region based upon a characteristic of the workpiece and modifying a plurality of regions within the workpiece to form a plurality of modified regions. Modifying the plurality of regions includes directing the beam of laser pulses from an output of the beam source onto the workpiece, causing relative motion between the workpiece and the output of the beam source while directing the beam of laser pulses onto workpiece, and modifying a characteristic of the pulses of the beam upon generating a number of pulses which generally correspond to creating the modified regions to the determined depth.
Abstract translation: 本发明是用于从共用基板分离工件的方法。 其包括以下步骤：提供工件，在光束源内产生构造成修改工件的一部分的激光脉冲束，基于工件的特性确定用于产生修改区域的深度，并修改多个 区域，以形成多个修改区域。 修改多个区域包括将激光脉冲束从射束源的输出引导到工件上，引起工件和光束源的输出之间的相对运动，同时将激光脉冲束引导到工件上，并修改特性 产生多个脉冲的波束的脉冲，这些脉冲通常对应于将修改的区域创建到确定的深度。
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8.发明授权Method and apparatus for machining strengthened glass and articles produced thereby 有权用于加工加强玻璃的方法和装置及由此制造的制品公开(公告)号：US09227868B2
公开(公告)日：2016-01-05
申请号：US13779183
申请日：2013-02-27
Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Inventor： Hisashi Matsumoto , Haibin Zhang , Glenn Simenson
IPC: C03B21/06 , C03B17/06 , C03B21/02 , C03B33/09 , B32B3/26 , B23K26/40 , B23K26/06 , B23K26/08 , B23K26/38
CPC classification number: C03B33/091 , B23K26/0622 , B23K26/082 , B23K26/0821 , B23K26/083 , B23K26/382 , B23K26/386 , B23K26/389 , B23K26/40 , B23K2103/50 , B32B3/266 , C03B33/0222 , Y10T428/24273
Abstract: Methods and apparatus for machining substrates are disclosed, as are articles formed from the separated substrates. A method of machining a substrate having a first surface and a second surface opposite the first surface can include forming a first recess in the substrate extending from the first surface toward the second surface, forming a second recess in the substrate extending from the second surface toward the first surface, and removing a portion of the substrate extending from the first recess to the second recess to form an opening in the substrate.
Abstract translation: 公开了用于加工衬底的方法和装置，以及由分离的衬底形成的制品。 加工具有与第一表面相对的第一表面和第二表面的基板的方法可以包括在基板上形成从第一表面朝向第二表面延伸的第一凹部，在基板上形成从第二表面延伸的第二凹部朝向 所述第一表面，以及从所述第一凹部移除到所述第二凹部的基板的一部分，以在所述基板中形成开口。
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公开(公告)号：US20140263212A1
公开(公告)日：2014-09-18
申请号：US14205200
申请日：2014-03-11
Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Inventor： Haibin Zhang
CPC classification number: B23K26/0876 , B23K26/066 , B23K26/082 , B23K26/083 , B23K26/352 , B23K26/361 , B23K26/382 , B23K26/384
Abstract: The angle of incidence (ω) and azimuth (φ) of a beam axis (32) can be moved relative to a workpiece (22) to provide desirable taper characteristics to a side wall (124) of a resulting kerf (120) produced by a focused laser beam (30) propagated along the beam axis (32).
Abstract translation: 梁轴（32）的入射角（ω）和方位角（＆Phgr）可以相对于工件（22）移动，以向产生的切口（120）的侧壁（124）提供期望的锥形特性 通过沿着光束轴线（32）传播的聚焦激光束（30）。
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公开(公告)号：US20140084039A1
公开(公告)日：2014-03-27
申请号：US14033336
申请日：2013-09-20
Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Inventor： Haibin Zhang , Michael Shane Noel
IPC: B26F3/02
CPC classification number: B26F3/02 , B23K26/40 , B23K2103/50 , C03B33/091 , C03B33/093 , Y10T225/12 , Y10T225/321
Abstract: The invention is method and an apparatus for performing the method having the steps of providing a workpiece, cleaving the workpiece to form a first unit piece and a second unit piece having a spatial relationship with the first unit piece in which the second unit piece abuts the first unit piece. Without substantially altering the spatial relationship after cleaving the workpiece, forming a first crack within the first unit piece and propagating the first crack from the first unit piece into the second unit piece.
Abstract translation: 本发明是一种用于执行该方法的方法和装置，该方法具有以下步骤：提供工件，将工件劈开以形成第一单元件和与第二单元件邻接的第一单元件具有空间关系的第二单元件 第一单位片。 在切割工件之后基本上不改变空间关系，在第一单元件内形成第一裂纹并将第一裂纹从第一单元件传播到第二单元件中。
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