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公开(公告)号：US12246979B2
公开(公告)日：2025-03-11
申请号：US18205689
申请日：2023-06-05
Applicant: Evoqua Water Technologies LLC
Inventor： Christopher Hall , Bruce Lee Coulter
IPC: C02F9/00 , C02F1/32 , C02F1/00 , C02F1/04 , C02F1/20 , C02F1/42 , C02F1/44 , C02F1/469 , C02F1/70 , C02F1/72 , C02F103/04 , C02F103/34
Abstract: A method and system of providing ultrapure water for semiconductor fabrication operations is provided. The water is treated by utilizing a free radical scavenging system. The free radical scavenging system can utilize actinic radiation with a free radical precursor compound, such as ammonium persulfate. The ultrapure water may be further treated by utilizing ion exchange media and degasification apparatus. A control system can be utilized to regulate a continuously variable intensity of the actinic radiation.
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公开(公告)号：US20230312386A1
公开(公告)日：2023-10-05
申请号：US18205689
申请日：2023-06-05
Applicant: EVOQUA WATER TECHNOLOGIES LLC
Inventor： Christopher Hall , Bruce Lee Coulter
Abstract: A method and system of providing ultrapure water for semiconductor fabrication operations is provided. The water is treated by utilizing a free radical scavenging system. The free radical scavenging system can utilize actinic radiation with a free radical precursor compound, such as ammonium persulfate. The ultrapure water may be further treated by utilizing ion exchange media and degasification apparatus. A control system can be utilized to regulate a continuously variable intensity of the actinic radiation.
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公开(公告)号：US10961143B2
公开(公告)日：2021-03-30
申请号：US15571266
申请日：2016-05-04
Applicant: Evoqua Water Technologies LLC
Inventor： Christopher Hall , Bruce Lee Coulter
IPC: C02F9/00 , C02F1/32 , C02F1/20 , C02F1/42 , C02F1/44 , C02F1/469 , C02F1/70 , C02F1/72 , C02F103/04 , C02F1/04 , C02F1/00 , C02F103/34
Abstract: A method and system of providing ultrapure water for semiconductor fabrication operations is provided. The water is treated by utilizing a free radical scavenging system. The free radical scavenging system can utilize actinic radiation with a free radical precursor compound, such as ammonium persulfate. The ultrapure water may be further treated by utilizing ion exchange media and degasification apparatus. A control system can be utilized to regulate a continuously variable intensity of the actinic radiation.
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公开(公告)号：US20240390858A1
公开(公告)日：2024-11-28
申请号：US18656688
申请日：2024-05-07
Applicant: Evoqua Water Technologies LLC
Inventor： Michael Gullion , Joshua Hawley , Christopher Hall
Abstract: A conditioning system for a filter module is disclosed. The conditioning system may generally include an inlet, a heat exchanger, a magnetically levitated pump, a channel provided to bypass the heat exchanger, a controller, an outlet, and a base. The system may have components lined with corrosion-resistant materials. A method of conditioning a filter module is also disclosed. The method may generally include measuring TOC in a source of ultrapure water, heating the ultrapure water, rinsing a filter module with the heated water, flushing the filter module with ambient temperature water, and repeating the rinsing with heated water and flushing with ambient temperature water. A method of facilitating conditioning of the filter module is also disclosed. The method may generally include providing a portable filter module conditioning system and providing instructions for installation or use.
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公开(公告)号：US11697607B2
公开(公告)日：2023-07-11
申请号：US17199092
申请日：2021-03-11
Applicant: Evoqua Water Technologies LLC
Inventor： Christopher Hall , Bruce Lee Coulter
IPC: C02F9/00 , C02F1/32 , C02F1/20 , C02F1/42 , C02F1/44 , C02F1/469 , C02F1/70 , C02F1/72 , C02F103/04 , C02F1/04 , C02F1/00 , C02F103/34
CPC classification number: C02F9/00 , C02F1/325 , C02F1/004 , C02F1/008 , C02F1/04 , C02F1/20 , C02F1/42 , C02F1/441 , C02F1/444 , C02F1/4693 , C02F1/4695 , C02F1/70 , C02F1/722 , C02F2001/427 , C02F2103/04 , C02F2103/346 , C02F2201/326 , C02F2201/3227 , C02F2209/20 , C02F2301/08 , C02F2303/18 , C02F2305/023
Abstract: A method and system of providing ultrapure water for semiconductor fabrication operations is provided. The water is treated by utilizing a free radical scavenging system. The free radical scavenging system can utilize actinic radiation with a free radical precursor compound, such as ammonium persulfate. The ultrapure water may be further treated by utilizing ion exchange media and degasification apparatus. A control system can be utilized to regulate a continuously variable intensity of the actinic radiation.
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Patent Agency Ranking
公开(公告)号：US20210086138A1
公开(公告)日：2021-03-25
申请号：US16954517
申请日：2018-12-20
Applicant: Evoqua Water Technologies LLC
Inventor： Michael Gullion , Christopher Hall , Joshua Hawley
Abstract: A conditioning system for a filter module is disclosed. The conditioning system may generally include an inlet, a heat exchanger, a magnetically levitated pump, a channel provided to bypass the heat exchanger, a controller, an outlet, and a base. The system may have components lined with corrosion-resistant materials. A method of conditioning a filter module is also disclosed. The method may generally include measuring TOC in a source of ultrapure water, heating the ultrapure water, rinsing a filter module with the heated water, flushing the filter module with ambient temperature water, and repeating the rinsing with heated water and flushing with ambient temperature water. A method of facilitating conditioning of the filter module is also disclosed. The method may generally include providing a portable filter module conditioning system and providing instructions for installation or use.
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公开(公告)号：US20210380451A1
公开(公告)日：2021-12-09
申请号：US17199092
申请日：2021-03-11
Applicant: Evoqua Water Technologies LLC
Inventor： Christopher Hall , Bruce Lee Coulter
Abstract: A method and system of providing ultrapure water for semiconductor fabrication operations is provided. The water is treated by utilizing a free radical scavenging system. The free radical scavenging system can utilize actinic radiation with a free radical precursor compound, such as ammonium persulfate. The ultrapure water may be further treated by utilizing ion exchange media and degasification apparatus. A control system can be utilized to regulate a continuously variable intensity of the actinic radiation.
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公开(公告)号：US20180273412A1
公开(公告)日：2018-09-27
申请号：US15571266
申请日：2016-05-04
Applicant: Evoqua Water Technologies LLC
Inventor： Christopher Hall , Bruce Lee Coulter
IPC: C02F9/00
CPC classification number: C02F9/00 , C02F1/004 , C02F1/008 , C02F1/04 , C02F1/20 , C02F1/325 , C02F1/42 , C02F1/441 , C02F1/444 , C02F1/4693 , C02F1/4695 , C02F1/70 , C02F1/722 , C02F2001/427 , C02F2103/04 , C02F2103/346 , C02F2201/3227 , C02F2201/326 , C02F2209/20 , C02F2301/08 , C02F2303/18 , C02F2305/023
Abstract: A method and system of providing ultrapure water for semiconductor fabrication operations is provided. The water is treated by utilizing a free radical scavenging system. The free radical scavenging system can utilize actinic radiation with a free radical precursor compound, such as ammonium persulfate. The ultrapure water may be further treated by utilizing ion exchange media and degasification apparatus. A control system can be utilized to regulate a continuously variable intensity of the actinic radiation.
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公开(公告)号：US20180134592A1
公开(公告)日：2018-05-17
申请号：US15571860
申请日：2016-05-06
Applicant: EVOQUA WATER TECHNOLOGIES LLC
Inventor： Adam Szczesniak , Jonathan H. Wood , Bruce L. Coulter , Christopher Hall
CPC classification number: C02F1/725 , C02F1/001 , C02F1/004 , C02F1/20 , C02F1/32 , C02F1/722 , C02F2101/34 , C02F2101/36 , C02F2101/38 , C02F2103/06 , C02F2305/10 , Y02A20/156
Abstract: According to various aspects and embodiments, a system and method for treating groundwater contaminated with an organic contaminant is provided. According to some embodiments, the contaminated groundwater is treated by introducing a persulfate to produce a first treated aqueous solution, exposing the first treated aqueous solution to ultraviolet light to produce a second treated aqueous solution and one or more gases, and removing the one or more gases generated from exposing the first treated aqueous solution to the ultraviolet light.
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公开(公告)号：US11975294B2
公开(公告)日：2024-05-07
申请号：US16954517
申请日：2018-12-20
Applicant: Evoqua Water Technologies LLC
Inventor： Michael Gullion , Christopher Hall , Joshua Hawley
CPC classification number: B01D65/02 , B01D61/146 , B01D61/20 , B01D61/22 , C02F1/444 , F28F19/02 , G01N15/06 , B01D2311/246 , B01D2313/221 , B01D2313/48 , B01D2313/903 , B01D2321/08 , B01D2321/40 , C02F2103/04 , C02F2209/105 , C02F2209/20 , C02F2209/40 , C02F2303/08 , C02F2303/16 , G01N2015/0662
Abstract: A conditioning system for a filter module is disclosed. The conditioning system may generally include an inlet, a heat exchanger, a magnetically levitated pump, a channel provided to bypass the heat exchanger, a controller, an outlet, and a base. The system may have components lined with corrosion-resistant materials. A method of conditioning a filter module is also disclosed. The method may generally include measuring TOC in a source of ultrapure water, heating the ultrapure water, rinsing a filter module with the heated water, flushing the filter module with ambient temperature water, and repeating the rinsing with heated water and flushing with ambient temperature water. A method of facilitating conditioning of the filter module is also disclosed. The method may generally include providing a portable filter module conditioning system and providing instructions for installation or use.
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