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公开(公告)号:US20180051878A1
公开(公告)日:2018-02-22
申请号:US15556582
申请日:2015-11-06
申请人: Ebara Corporation
CPC分类号: F23G7/065 , B01D2251/102 , B01D2257/20 , B01D2258/0216 , F01N3/24 , F23C3/00 , F23D14/24 , F23G5/32 , F23G7/06 , F23G2203/30 , F23G2204/103 , F23G2209/142 , F23L1/00 , F23L7/002 , F23L2900/07008 , F23M5/08
摘要: A hybrid stepping motor has a connector housing formed integrally with an insulator having an upper insulator and a lower insulator. The hybrid stepping motor includes a stator core and output terminals concentrically disposed outside the stator core. A wiring pattern serving as the output terminals has connector pins and land portions disposed eccentrically with respect to one another. The land portions are formed on an outer edge side of the wiring pattern. A surface, which is an uppermost surface of the wiring pattern, is located below a lowermost surface, in which jumper wires and lead wires pass, of the lower insulator. The lead wires are pulled out from a lower side, and are pulled out to guiding grooves.
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公开(公告)号:US20140295362A1
公开(公告)日:2014-10-02
申请号:US14226737
申请日:2014-03-26
申请人: EBARA CORPORATION
发明人: Kohtaro KAWAMURA , Toyoji SHINOHARA , Tetsuro SUGIURA , Hideo ARAI , Toshiharu NAKAZAWA , Keiichi ISHIKAWA , Seiji KASHIWAGI , Yasuhiko SUZUKI , Takashi KYOTANI
IPC分类号: F23J13/00
CPC分类号: F23J13/00 , B01D53/68 , B01D53/76 , B01D2251/102 , B01D2257/204 , B01D2257/553 , B01D2258/0216 , F04B37/14 , F04C25/02 , F04C2220/30 , F23G5/32 , F23G7/065 , F23J2219/00 , F23J2900/01007 , F23L17/00
摘要: A vacuum pump includes a vacuum pump having a discharge port to which an abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The vacuum pump includes a cylindrical member having an exhaust gas introduction port for introducing the exhaust gas to be treated and a gas outlet port for discharging gases which have been treated, a plurality of fuel nozzles provided at a circumferential wall of the cylindrical member for ejecting a fuel, and a plurality of air nozzles provided at the circumferential wall of the cylindrical member for ejecting air so as to form a swirling flow of air along an inner circumferential surface of the circumferential wall. The air nozzles are disposed at a plurality of stages spaced in an axial direction of the cylindrical member.
摘要翻译: 真空泵包括具有排出口的真空泵,所述排出口附接有用于处理从真空泵排出以使废气无害化的废气的减排部。 该真空泵包括具有用于引入被处理废气的废气引入口和用于排出已经处理的气体的气体出口的圆柱形构件,设置在圆柱形构件的圆周壁上用于喷射的多个燃料喷嘴 燃料,以及多个空气喷嘴,设置在所述筒状部件的周壁上,用于喷射空气,以沿着所述周壁的内周面形成旋转的空气流。 空气喷嘴配置在与筒状部件的轴向隔开的多个台阶上。
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公开(公告)号:US20140352820A1
公开(公告)日:2014-12-04
申请号:US14289575
申请日:2014-05-28
申请人: EBARA CORPORATION
发明人: Toshiharu NAKAZAWA , Tetsuro SUGIURA , Kohtaro KAWAMURA , Toyoji SHINOHARA , Takashi KYOTANI , Keiichi ISHIKAWA , Seiji KASHIWAGI , Yasuhiko SUZUKI , Hideo ARAI
IPC分类号: B01D53/74
CPC分类号: B01D53/74 , B01D53/005 , B01D2257/204 , B01D2257/2066 , B01D2257/553 , B01D2258/0216 , Y10T137/85978
摘要: A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which one or more abatement parts for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless are attached. The one or more abatement parts are selected, depending on the amount and kind of the exhaust gas discharged from the vacuum pump, from plural kinds of abatement parts which have different treatment types of exhaust gas and/or different treatment amounts of exhaust gas.
摘要翻译: 具有减排功能的真空泵用于抽空制造装置的室。 具有减排功能的真空泵包括具有排出口的真空泵,所述排出口附接有用于处理从真空泵排出的排气的一个或多个减排部件,使废气无害化。 根据从真空泵排出的废气的数量和种类,选择具有不同处理类型的废气和/或废气处理量不同的多种减排部件来选择一个或多个减排部件。
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公开(公告)号:US20150367284A1
公开(公告)日:2015-12-24
申请号:US14740809
申请日:2015-06-16
申请人: EBARA CORPORATION
CPC分类号: B01D53/869 , B01D53/70 , B01D53/72 , B01D53/8631 , B01D53/8653 , B01D53/8656 , B01D53/90 , B01D2251/202 , B01D2251/204 , B01D2251/208 , B01D2255/1021 , B01D2255/1023 , B01D2255/1025 , B01D2255/2073 , B01D2255/20761 , B01D2255/2092 , B01D2255/30 , B01D2257/204 , B01D2257/206 , B01D2257/404 , B01D2257/556 , B01D2258/0216 , F01N3/2006 , F01N3/2066 , F01N2570/14
摘要: An exhaust gas treatment apparatus which can reduce NOx (nitrogen oxide) produced as a by-product at the time of treating an exhaust gas by applying a three-way catalytic process is disclosed. The exhaust gas treatment apparatus has an oxidative decomposition unit configured to oxidatively decompose an exhaust gas and an exhaust gas cleaning unit configured to clean the exhaust gas after oxidative decomposition. The exhaust gas treatment apparatus includes a nitrogen oxide removing unit disposed at a stage subsequent to the oxidative decomposition unit and configured to remove a nitrogen oxide contained in the exhaust gas. The nitrogen oxide removing unit is configured to supply at least one of hydrocarbon and carbon monoxide into the exhaust gas discharged from the oxidative decomposition unit to cause the at least one of hydrocarbon and carbon monoxide to react with oxygen remaining in the exhaust gas.
摘要翻译: 公开了一种废气处理装置,其可以通过应用三元催化方法来减少在排气处理时作为副产物产生的NOx(氮氧化物)。 废气处理装置具有氧化分解装置,其被配置为对排气进行氧化分解,并且废气净化单元被配置为在氧化分解之后清洁废气。 废气处理装置包括氮氧化物去除单元,其设置在氧化分解单元之后的阶段,并且被构造成去除废气中包含的氮氧化物。 氮氧化物去除单元被配置为将从碳氢化合物和一氧化碳中的至少一种供给到从氧化分解单元排出的排气中,以使烃和一氧化碳中的至少一种与残留在废气中的氧反应。
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公开(公告)号:US20150115600A1
公开(公告)日:2015-04-30
申请号:US14520681
申请日:2014-10-22
申请人: EBARA CORPORATION
CPC分类号: F28F21/00 , F16L13/02 , F28D7/16 , F28F9/00 , F28F9/0246 , F28F21/062 , F28F21/067 , F28F2230/00
摘要: A flow passage connecting apparatus for a heat exchanger includes a boss formed of a resin material in a columnar shape and having a plurality of through-holes for each receiving from one side one end of a heat exchanger tube made of a resin material, and a coupler made of a resin material and having a body portion formed in a circular cylindrical shape. The body portion is configured to receive therein a part of the boss on the other side opposite to the one side and to be connected to the boss by at least one of threaded engagement and full-circle welding. The connecting apparatus further includes first and second seal structures sealing between the boss and the body portion. The body portion has a communication hole formed at a position between the first and second seal structures to communicate between an inside and outside of the body portion.
摘要翻译: 用于热交换器的流路连接装置包括由柱状树脂材料形成的凸台,并且具有多个通孔,每个通孔从一侧接收由树脂材料制成的热交换器管的一端, 由树脂材料制成并且具有形成为圆柱形状的主体部分的联接器。 主体部分构造成在其中接收与一侧相对的另一侧的凸台的一部分,并且通过螺纹接合和全圆焊接中的至少一个来连接到凸台。 连接装置还包括在凸台和主体部分之间密封的第一和第二密封结构。 主体部分具有形成在第一和第二密封结构之间的位置处的连通孔,以在主体部分的内部和外部之间连通。
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公开(公告)号:US20180207580A1
公开(公告)日:2018-07-26
申请号:US15926844
申请日:2018-03-20
申请人: EBARA CORPORATION
发明人: Toshiharu NAKAZAWA , Tetsuro SUGIURA , Kohtaro KAWAMURA , Toyoji SHINOHARA , Takashi KYOTANI , Keiichi ISHIKAWA , Seiji KASHIWAGI , Yasuhiko SUZUKI , Hideo ARAI
IPC分类号: B01D53/74
CPC分类号: B01D53/74 , B01D53/005 , B01D2257/204 , B01D2257/2066 , B01D2257/553 , B01D2258/0216 , Y10T137/85978
摘要: A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which one or more abatement parts for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless are attached. The one or more abatement parts are selected, depending on the amount and kind of the exhaust gas discharged from the vacuum pump, from plural kinds of abatement parts which have different treatment types of exhaust gas and/or different treatment amounts of exhaust gas.
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公开(公告)号:US20140348717A1
公开(公告)日:2014-11-27
申请号:US14284305
申请日:2014-05-21
申请人: EBARA CORPORATION
发明人: Kohtaro KAWAMURA , Toyoji SHINOHARA , Tetsuro SUGIURA , Hideo ARAI , Takashi KYOTANI , Toshiharu NAKAZAWA , Keiichi ISHIKAWA , Seiji KASHIWAGI , Yasuhiko SUZUKI
IPC分类号: B01D53/74
CPC分类号: B01D53/70 , B01D53/0438 , B01D53/685 , B01D53/74 , B01D53/8659 , B01D53/8662 , B01D53/92 , B01D2251/30 , B01D2252/103 , B01D2253/102 , B01D2253/108 , B01D2253/1124 , B01D2253/206 , B01D2255/10 , B01D2257/2025 , B01D2257/204 , B01D2257/2042 , B01D2257/2045 , B01D2257/553 , B01D2257/556 , B01D2258/0216 , B01D2259/818 , F04B37/06 , F04B37/14
摘要: A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which at least one abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The abatement part is selected from a plurality of abatement parts having different treatment types of exhaust gas and/or different treatment amounts of exhaust gas and/or different treatment performances of exhaust gas.
摘要翻译: 具有减排功能的真空泵用于抽空制造装置的室。 具有减排功能的真空泵包括具有排出口的真空泵,附接有至少一个用于处理从真空泵排出的废气以使废气无害化的减排部分。 减排部分选自具有不同处理类型的废气和/或排气的不同处理量和/或废气的不同处理性能的多个减排部件。
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公开(公告)号:US20140290919A1
公开(公告)日:2014-10-02
申请号:US14226741
申请日:2014-03-26
申请人: Ebara Corporation
发明人: Kohtaro KAWAMURA , Toyoji SHINOHARA , Tetsuro SUGIURA , Hideo ARAI , Takashi KYOTANI , Toshiharu NAKAZAWA , Keiichi ISHIKAWA , Seiji KASHIWAGI , Yasuhiko SUZUKI
IPC分类号: B01D53/34
CPC分类号: B01D53/343 , C23C16/4412 , F04B37/06 , F04B37/14 , F23G7/065 , Y02C20/30
摘要: A vacuum pump has an abatement part for treating an exhaust gas discharged from a chamber of a manufacturing apparatus to make the exhaust gas harmless. The vacuum pump includes a heat exchanger configured to heat an inert gas by using heat generated when the exhaust gas is treated to be made harmless in the abatement part. The inert gas heated by the heat exchanger is introduced into the vacuum pump.
摘要翻译: 真空泵具有用于处理从制造装置的室排出的废气的减排部,以使废气无害化。 真空泵包括热交换器,该热交换器被配置为通过使用在排气处理时产生的热量在减水部分中变得无害化来加热惰性气体。 由热交换器加热的惰性气体被引入真空泵。
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