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公开(公告)号：US5294292A
公开(公告)日：1994-03-15
申请号：US572638
申请日：1990-08-27
申请人： Eiji Yamashita , Terumi Muguruma
发明人： Eiji Yamashita , Terumi Muguruma
IPC分类号： H01L21/302 , G03F7/42 , H01L21/02 , H01L21/027 , H01L21/3065 , H01L21/311 , H01L21/3213 , H01L21/306
CPC分类号： H01L21/02071 , G03F7/427 , H01L21/31138
摘要： A plasma ashing method to prevent a generation of a resist-residue buildup is disclosed that includes a step for installation of a substrate on which a photoresist material is formed in a chamber, a step for drawing a vacuum in the chamber and keeping the chamber at a predetermined pressure, a step for filling oxygen gas in the camber and keeping the chamber at approximately 1 Torr, and a step for applying a high-frequency electric power of 0.10 [W/cm.sup.2 ] or less to the oxygen gas. A more effective range of the high-frequency electric power per area of the internal wall of the chamber is from 0.008 to 0.10 [W/cm.sup.2 ]. The most effective value of the high-frequency electric power is 0.055 [W/cm.sup.2 ].
摘要翻译： 公开了一种用于防止产生抗蚀剂残留物累积的等离子体灰化方法，其包括用于安装其中在其中形成光致抗蚀剂材料的基板的步骤，用于在室中抽真空并将该室保持在 预定压力，用于在外倾中填充氧气并将室保持在约1乇的步骤，以及向氧气施加0.10（W / cm 2）以下的高频电力的步骤。 室内壁面积的高频电力的有效范围为0.008〜0.10（W / cm2）。 高频电力的最有效值为0.055（W / cm2）。
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公开(公告)号：US06883539B2
公开(公告)日：2005-04-26
申请号：US10669003
申请日：2003-09-24
IPC分类号： H01L21/673 , H01L21/677 , H01L21/68 , B65G1/133
CPC分类号： H01L21/67772 , H01L21/67376 , Y10T137/86083
摘要： A container for storing substrates capable of shortening the cycle time of the production, improving the production efficiency and reducing the production cost is provided. The container for storing substrates is composed of a box for accommodating the substrates, and a closure member for sealingly closing the box by tightly fixing the closure member to the opening of the box. The container for storing substrates is provided with means for temporarily storing a sealing gas and introducing the sealing gas into the box. Also, the container for storing substrates is provided with means for means for temporarily forming a low pressure space for the purpose of evacuating the gas inside of the box by transferring the gas to the low pressure space.
摘要翻译： 提供一种用于存储能够缩短生产周期时间的基板的容器，提高生产效率和降低生产成本。 用于存储基板的容器由用于容纳基板的箱体和用于通过将封闭构件紧密地固定到箱体的开口而密封地封闭箱体的封闭构件组成。 用于存储基板的容器设置有临时存储密封气体并将密封气体引入箱中的装置。 此外，用于存储基板的容器设置有用于临时形成低压空间的装置，用于通过将气体转移到低压空间来抽空箱内的气体。
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公开(公告)号：US06267123B1
公开(公告)日：2001-07-31
申请号：US09265539
申请日：1999-03-09
IPC分类号： B08B302
CPC分类号： H01L21/67028 , B08B3/04 , B08B9/087 , B08B9/093 , H01L21/67051 , H01L21/67772 , Y10S134/902
摘要： A pod for storing and carrying substrates consists of a pod body and a cover. An inlet and an outlet are formed on one of the pod body and cover. The cover is tightly fitted to the pod body to close the inside of the pod body. A washing liquid is introduced into the pod through the inlet and is discharged from the pod through the outlet, thereby easily washing the inside of the pod with the pod itself serving as a washing tank. A washing cover has an inlet, an outlet, and a heater. The washing cover is attached to the pod body when washing the inside of the pod body. Further provided is a cleaning apparatus having pipes and a pump that are connected to the washing cover. The cleaning apparatus may have a table serving as the washing cover. The table is connected to pipes and a pump.
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公开(公告)号：US6123120A
公开(公告)日：2000-09-26
申请号：US203491
申请日：1998-12-02
IPC分类号： B65B31/04 , H01L21/02 , H01L21/673 , B65B1/04
CPC分类号： H01L21/67769 , H01L21/67389
摘要： Storage equipment simply and effectively maintains the cleanness of substrates stored therein. The substrates in the storage equipment are set in a pod. The storage equipment has removable covers, a unit for fitting the covers to pods, respectively, a unit for holding the pods with the covers, a gas supply unit for individually supplying gas into the pods through the covers, and an exhaust unit for individually discharging an atmosphere from the pods through the covers. Each pod is closed with the cover in the storage equipment, and the gas supply unit and exhaust unit periodically replace an atmosphere in each pod with inert gas or evacuate each pod, to control the storage conditions of each pod in the storage equipment.
摘要翻译： 存储设备简单有效地保持其中存储的基板的清洁度。 存储设备中的基板被设置在容器中。 存储设备具有可移除的盖，用于将盖安装到舱的单元，用于将盖保持在盖上的单元，用于通过盖单独地将气体供应到舱中的气体供应单元，以及用于单独排出的排气单元 从荚果通过盖子的气氛。 每个荚用存储设备中的盖子封闭，气体供应单元和排气单元周期性地用惰性气体代替每个舱中的气氛或排空每个舱，以控制存储设备中每个舱的储存条件。
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公开(公告)号：US06926029B2
公开(公告)日：2005-08-09
申请号：US11006595
申请日：2004-12-08
IPC分类号： H01L21/673 , H01L21/677 , H01L21/68 , B65G1/133
CPC分类号： H01L21/67772 , H01L21/67376 , Y10T137/86083
摘要： A container for storing substrates capable of shortening the cycle time of the production, improving the production efficiency and reducing the production cost is provided. The container for storing substrates is composed of a box for accommodating the substrates, and a closure member for sealingly closing the box by tightly fixing the closure member to the opening of the box. The container for storing substrates is provided with means for temporarily storing a sealing gas and introducing the sealing gas into the box. Also, the container for storing substrates is provided with means for means for temporarily forming a low pressure space for the purpose of evacuating the gas inside of the box by transferring the gas to the low pressure space.
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公开(公告)号：US20050098218A1
公开(公告)日：2005-05-12
申请号：US11006595
申请日：2004-12-08
IPC分类号： H01L21/673 , H01L21/677 , H01L21/68 , F04F3/00
CPC分类号： H01L21/67772 , H01L21/67376 , Y10T137/86083
摘要： A container for storing substrates capable of shortening the cycle time of the production, improving the production efficiency and reducing the production cost is provided. The container for storing substrates is composed of a box for accommodating the substrates, and a closure member for sealingly closing the box by tightly fixing the closure member to the opening of the box. The container for storing substrates is provided with means for temporarily storing a sealing gas and introducing the sealing gas into the box. Also, the container for storing substrates is provided with means for means for temporarily forming a low pressure space for the purpose of evacuating the gas inside of the box by transferring the gas to the low pressure space.
摘要翻译： 提供一种用于存储能够缩短生产周期时间的基板的容器，提高生产效率和降低生产成本。 用于存储基板的容器由用于容纳基板的箱体和用于通过将封闭构件紧密地固定到箱体的开口而密封地封闭箱体的封闭构件组成。 用于存储基板的容器设置有临时存储密封气体并将密封气体引入箱中的装置。 此外，用于存储基板的容器设置有用于临时形成低压空间的装置，用于通过将气体转移到低压空间来抽空箱内的气体。
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公开(公告)号：US06422247B1
公开(公告)日：2002-07-23
申请号：US09860470
申请日：2001-05-21
IPC分类号： B08B908
摘要： A pod for storing and carrying substrates consists of a pod body and a cover. An inlet and an outlet are formed on one of the pod body and cover. The cover is tightly fitted to the pod body to close the inside of the pod body. A washing liquid is introduced into the pod through the inlet and is discharged from the pod through the outlet, thereby easily washing the inside of the pod with the pod itself serving as a washing tank. A washing cover has an inlet, an outlet, and a heater. The washing cover is attached to the pod body when washing the inside of the pod body. Further provided is a cleaning apparatus having pipes and a pump that are connected to the washing cover. The cleaning apparatus may have a table serving as the washing cover. The table is connected to pipes and a pump.
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