Apparatus for generating/detecting terahertz wave using graphene and manufacturing method of the same
    3.
    发明授权
    Apparatus for generating/detecting terahertz wave using graphene and manufacturing method of the same 有权
    使用石墨烯生成/检测太赫兹波的装置及其制造方法

    公开(公告)号:US09130082B2

    公开(公告)日:2015-09-08

    申请号:US14063361

    申请日:2013-10-25

    CPC classification number: H01L31/028 H01L31/085

    Abstract: Provided is a terahertz wave generating/detecting apparatus and a method for manufacturing the same. The terahertz wave generating/detecting apparatus includes; a substrate having an active region and a transmitting region; a lower metal layer extending in a first direction on the active region and the transmitting region of the substrate; a graphene layer disposed on the lower metal layer on the active region; and upper metal layers extending in the first direction on the graphene layer of the active region and the substrate in the transmission region, wherein a terahertz wave is generated or amplified by a surface plasmon polariton that is induced on a boundary surface between the graphene layer and the lower metal layer by beated laser light applied to the graphene layer and the metal layer.

    Abstract translation: 提供一种太赫兹波发生/检测装置及其制造方法。 太赫兹波发生/检测装置包括: 具有有源区和发射区的衬底; 在所述有源区域和所述基板的透射区域上沿第一方向延伸的下金属层; 设置在有源区上的下金属层上的石墨烯层; 以及在有源区域的石墨烯层和透射区域中的衬底在第一方向上延伸的上金属层,其中通过在石墨烯层和石墨烯层之间的边界表面上诱导的表面等离子体激元产生或放大太赫兹波 通过施加到石墨烯层和金属层上的激光的下部金属层。

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