公开(公告)号：US09553678B2

公开(公告)日：2017-01-24

申请号：US13907582

申请日：2013-05-31

申请人： Electronics and Telecommunications Research Institute

发明人： Kyung-Hyun Park ,  Han-Cheol Ryu ,  Jeong-Woo Park ,  Sang-Pil Han ,  Nam-Je Kim

IPC分类号： H04B10/90 ,  H04B10/80

CPC分类号： H04B10/801 ,  H04B10/90

摘要： Disclosed herein is an interconnection apparatus and method using terahertz waves. The interconnection apparatus using terahertz waves according to the present invention includes a first terahertz wave generation unit for generating a first transmission terahertz wave, a center frequency of which is a first center frequency, using photomixing. A second terahertz wave generation unit generates a second transmission terahertz wave, a center frequency of which is a second center frequency different from the first center frequency. A first terahertz wave detection unit detects a first reception terahertz wave corresponding to the first transmission terahertz wave. A second terahertz wave detection unit detects a second reception terahertz wave corresponding to the second transmission terahertz wave.

摘要翻译： 这里公开了使用太赫兹波的互连装置和方法。 根据本发明的使用太赫兹波的互连装置包括：第一太赫兹波产生单元，用于使用光混合产生中心频率为第一中心频率的第一透射太赫兹波。 第二太赫波生成单元生成第二传输太赫兹波，其中心频率是与第一中心频率不同的第二中心频率。 第一太赫兹波检测单元检测对应于第一传输太赫兹波的第一接收太赫兹波。 第二太赫兹波检测单元检测对应于第二传输太赫兹波的第二接收太赫兹波。

公开(公告)号：US09136421B2

公开(公告)日：2015-09-15

申请号：US14154717

申请日：2014-01-14

申请人： Electronics and Telecommunications Research Institute

发明人： Kiwon Moon ,  Han-Cheol Ryu ,  Sang-Pil Han ,  Kyung Hyun Park

IPC分类号： H01L31/12 ,  H01L31/0232 ,  H01L31/0304 ,  H01L31/18 ,  H04B10/90 ,  B82Y20/00 ,  H01L25/16 ,  G01N21/3581 ,  G01N21/3586 ,  G02F1/01

CPC分类号： H01L31/12 ,  B82Y20/00 ,  G01N21/3581 ,  G01N21/3586 ,  G02F1/0126 ,  G02F2202/12 ,  G02F2202/32 ,  G02F2203/13 ,  H01L25/167 ,  H01L31/02327 ,  H01L31/03046 ,  H01L31/18 ,  H01L2924/0002 ,  H04B10/90 ,  H01L2924/00

摘要： Provided is a broadband photomixer technology that is a core to generate continuous frequency variable and pulsed terahertz waves. It is possible to enhance light absorptance by applying the transmittance characteristic of a 2D light crystal structure and it is possible to increase the generation efficiency of terahertz waves accordingly. Moreover, it is possible to implement a wide area array type terahertz photomixer by applying an interdigit structure and spatially properly arranging a light crystal structure having various cycles. Accordingly, it is possible to solve difficulty in thermal characteristic and light alignment by mitigating the high light density of a light absorption unit and low photoelectric conversion efficiency is drastically improved. In addition, the radiation pattern of terahertz waves may be electrically controlled through the present invention.

摘要翻译： 提供了一种宽带光混频器技术，其是产生连续频率可变和脉冲太赫兹波的核心。 可以通过应用2D光晶体结构的透射特性来增强光吸收，并且可以相应地提高太赫兹波的产生效率。 此外，可以通过应用叉指结构并在空间上适当地布置具有各种周期的光晶体结构来实现广域阵列型太赫兹光混频器。 因此，可以通过减轻光吸收单元的高光密度来解决热特性和光取向的困难，并且显着提高了低的光电转换效率。 此外，太赫兹波的辐射图可以通过本发明进行电控制。

公开(公告)号：US09130082B2

公开(公告)日：2015-09-08

申请号：US14063361

申请日：2013-10-25

申请人： ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

发明人： Kyung Hyun Park ,  Sang-Pil Han ,  Jeong Woo Park ,  Han-Cheol Ryu ,  Kiwon Moon ,  Namje Kim ,  Hyunsung Ko

IPC分类号： H01Q13/08 ,  H01L31/028 ,  H01L31/08

CPC分类号： H01L31/028 ,  H01L31/085

摘要： Provided is a terahertz wave generating/detecting apparatus and a method for manufacturing the same. The terahertz wave generating/detecting apparatus includes; a substrate having an active region and a transmitting region; a lower metal layer extending in a first direction on the active region and the transmitting region of the substrate; a graphene layer disposed on the lower metal layer on the active region; and upper metal layers extending in the first direction on the graphene layer of the active region and the substrate in the transmission region, wherein a terahertz wave is generated or amplified by a surface plasmon polariton that is induced on a boundary surface between the graphene layer and the lower metal layer by beated laser light applied to the graphene layer and the metal layer.

摘要翻译： 提供一种太赫兹波发生/检测装置及其制造方法。 太赫兹波发生/检测装置包括： 具有有源区和发射区的衬底; 在所述有源区域和所述基板的透射区域上沿第一方向延伸的下金属层; 设置在有源区上的下金属层上的石墨烯层; 以及在有源区域的石墨烯层和透射区域中的衬底在第一方向上延伸的上金属层，其中通过在石墨烯层和石墨烯层之间的边界表面上诱导的表面等离子体激元产生或放大太赫兹波 通过施加到石墨烯层和金属层上的激光的下部金属层。

公开(公告)号：US09618823B2

公开(公告)日：2017-04-11

申请号：US14430182

申请日：2013-09-17

申请人： ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

发明人： Kyung-Hyun Park ,  Nam-Je Kim ,  Hyun-Sung Ko ,  Dong-Hun Lee ,  Sang-Pil Han ,  Han-Cheol Ryu ,  Jeong-Woo Park ,  Ki-Won Moon ,  Dae-Yong Kim

IPC分类号： H01L21/00 ,  G02F1/35 ,  H01L31/0216 ,  H01L31/0304 ,  H01L31/14 ,  H01L31/18

CPC分类号： G02F1/353 ,  G02F2203/13 ,  H01L31/02161 ,  H01L31/03046 ,  H01L31/14 ,  H01L31/1844

摘要： Disclosed herein is a photomixer and method of manufacturing the photomixer which can fundamentally solve the existing restrictive factors of a PCA and a photomixer which are core parts of a conventional broadband terahertz spectroscopy system. The presented photomixer includes an active layer formed on a top surface of a substrate, the active layer being formed on an area on which light is incident, and a thermal conductive layer formed on the top surface of the substrate, the thermal conductive layer being formed on an area other than the area on which light is incident. The active layer is formed to have a mesa cross section, and the thermal conductive layer is regrown on an area other than the area on which light is incident using an MOCVD method, and has a flattened surface.

公开(公告)号：US20150277208A1

公开(公告)日：2015-10-01

申请号：US14430182

申请日：2013-09-17

申请人： ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

发明人： Kyung-Hyun Park ,  Nam-Je Kim ,  Hyun-Sung Ko ,  Dong-Hun Lee ,  Sang-Pil Han ,  Han-Cheol Ryu ,  Jeong-Woo Park ,  Ki-Won Moon ,  Dae-Yong Kim

IPC分类号： G02F1/35 ,  H01L31/0216 ,  H01L31/0304 ,  H01L31/18 ,  H01L31/14

CPC分类号： G02F1/353 ,  G02F2203/13 ,  H01L31/02161 ,  H01L31/03046 ,  H01L31/14 ,  H01L31/1844

摘要： Disclosed herein is a photomixer and method of manufacturing the photomixer which can fundamentally solve the existing restrictive factors of a PCA and a photomixer which are core parts of a conventional broadband terahertz spectroscopy system. The presented photomixer includes an active layer formed on a top surface of a substrate, the active layer being formed on an area on which light is incident, and a thermal conductive layer formed on the top surface of the substrate, the thermal conductive layer being formed on an area other than the area on which light is incident. The active layer is formed to have a mesa cross section, and the thermal conductive layer is regrown on an area other than the area on which light is incident using an MOCVD method, and has a flattened surface.

摘要翻译： 本文公开了一种混合器和制造光混合器的方法，其可以从根本上解决作为常规宽带太赫兹光谱系统的核心部分的PCA和光混合器的现有限制因素。 所提供的光混色器包括形成在基板的顶表面上的有源层，所述有源层形成在光入射的区域上，以及形成在所述基板的顶表面上的导热层，所述导热层被形成 在光线入射区域以外的区域。 有源层形成为具有台面横截面，并且使用MOCVD方法将导热层再生长在除了入射光的区域之外的区域上，并且具有扁平表面。

公开(公告)号：US09035251B2

公开(公告)日：2015-05-19

申请号：US14049059

申请日：2013-10-08

申请人： ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

发明人： Sang-Pil Han ,  Kyung Hyun Park ,  Namje Kim ,  Han-Cheol Ryu ,  Jeong Woo Park ,  Hyunsung Ko ,  Kiwon Moon

IPC分类号： G01J5/20 ,  G01N21/3581

CPC分类号： G01N21/3581

摘要： A terahertz wave generating module includes a bidirectional light source which provides a first dual-mode beam in a first direction and a second dual-mode beam in a second direction; a forward lens unit which focuses the first dual-mode beam; a photomixer unit which converts the first dual-mode beam focused by the forward lens unit into a terahertz wave; a backward lens unit which focuses the second dual-mode beam; and a light output unit which uses the second dual-mode beam focused by the backward lens unit as a light signal, wherein the bidirectional light source, the forward lens unit, the photomixer unit, the backward lens unit, and the light output unit are integrated in a housing.

摘要翻译： 太赫兹波发生模块包括双向光源，其在第一方向上提供第一双模光束，而在第二方向上提供第二双模光束; 聚焦第一双模光束的前透镜单元; 将由前向透镜单元聚焦的第一双模光束转换为太赫兹波的光混合器单元; 聚焦第二双模光束的反向透镜单元; 以及使用由后向透镜单元聚焦的第二双模光束作为光信号的光输出单元，其中双向光源，前透镜单元，光混合器单元，后透镜单元和光输出单元是 融入住房。

公开(公告)号：US20130271335A1

公开(公告)日：2013-10-17

申请号：US13856714

申请日：2013-04-04

申请人： Electronics and Telecommunications Research Institute

发明人： Han-Cheol Ryu ,  Kyoung Hyun Park ,  Jeong Woo Park ,  Nam Je Kim ,  Sang-Pil Han ,  Hyun Sung Ko

IPC分类号： H01Q13/02

CPC分类号： H01Q13/02 ,  H01Q13/0283

摘要： Disclosed is a horn antenna apparatus. The horn antenna apparatus includes a substrate; and a silicone antenna part bonded to the substrate and provided with a horn cavity having a radiating aperture part having one portion opened to the outside in a horizontal direction to a bonding surface. In accordance with the embodiment of the present invention, it is possible to easily implement the horn antenna apparatus capable of saving cost and providing the high gain using the photolithography and chemical etching method and to implement the terahertz transmitting and receiving module capable of saving cost and providing the high efficiency using the same.

摘要翻译： 公开了一种喇叭天线装置。 喇叭天线装置包括：基板; 以及硅胶天线部件，其结合到所述基板上并设置有喇叭腔，所述喇叭腔具有辐射开口部，所述辐射开口部的一部分在与所述接合面的水平方向向外侧开口。 根据本发明的实施例，可以容易地实现能够节省成本并且使用光刻和化学蚀刻方法提供高增益的喇叭天线装置，并且实现能够节省成本的太赫兹发射和接收模块， 提供高效率使用它。

公开(公告)号：US09410851B2

公开(公告)日：2016-08-09

申请号：US14023257

申请日：2013-09-10

申请人： Electronics and Telecommunications Research Institute

发明人： Namje Kim ,  Sang-Pil Han ,  Kyung Hyun Park ,  Han-Cheol Ryu ,  Hyunsung Ko ,  Jeong Woo Park

IPC分类号： G01T1/04 ,  G01J9/04

CPC分类号： G01J9/04

摘要： The inventive concept relates to a beating signal monitoring module and a terahertz wave generation device and an optical signal monitoring device that including the beating signal monitoring module. The beating signal monitoring module includes a nonlinear unit generating an optical signal including a FWM light in response to a beating signal generated from a first light and a second light; a filter unit separating the FWM light from the optical signal and outputting the separated FWM light; and a monitoring unit monitoring the beating signal using the separated FWM light. The beating signal monitoring module and a terahertz wave generation device and an optical signal monitoring device that including the beating signal monitoring module can effectively monitor a beating signal being generated by two lasers using a Four Wave Mixing signal.

摘要翻译： 本发明构思涉及一种包括跳动信号监测模块的跳动信号监测模块和太赫兹波发生装置以及光信号监测装置。 跳动信号监控模块包括：非线性单元，响应于从第一光和第二光产生的拍打信号，产生包括FWM光的光信号; 滤波器单元，将FWM光与光信号分离，并输出分离的FWM光; 以及监视单元，使用分离的FWM光监视拍动信号。 跳动信号监测模块和太赫兹波发生装置以及包括跳动信号监测模块的光信号监测装置可以使用四波混频信号有效地监测由两个激光器产生的跳动信号。

公开(公告)号：US09228826B2

公开(公告)日：2016-01-05

申请号：US13802198

申请日：2013-03-13

申请人： Electronics and Telecommunications Research Institute

发明人： Han-Cheol Ryu ,  Namje Kim ,  Sang-Pil Han ,  Kyung Hyun Park ,  Hyunsung Ko ,  Jeong Woo Park

IPC分类号： G01B11/06

CPC分类号： G01B11/06

摘要： A contactless thickness measuring apparatus is provided which includes an terahertz transmitter configured to receive the first optical path signal from the coupler and to generate a terahertz continuous wave using the first optical signal and an applied bias; an optical delay line configured to delay the second optical path signal output from the coupler; and an terahertz receiver configured to receive the terahertz continuous wave penetrating a sample and to detect an optical current using the terahertz continuous wave and the second optical path signal delayed. A thickness of the sample is a value corresponding to the optical current which phase value becomes a constant regardless of a plurality of measurement frequencies.

摘要翻译： 提供了一种非接触式厚度测量装置，其包括太赫兹发射器，其被配置为从耦合器接收第一光路信号并使用第一光信号和施加的偏压产生太赫兹连续波; 光延迟线，被配置为延迟从耦合器输出的第二光路信号; 以及太赫兹接收器，被配置为接收穿透样本的太赫兹连续波，并且使用太赫兹连续波和第二光路信号延迟来检测光电流。 样品的厚度是与光电流相对应的值，该相位值成为常数，而与多个测量频率无关。

公开(公告)号：US08772725B2

公开(公告)日：2014-07-08

申请号：US13840956

申请日：2013-03-15

申请人： Electronics and Telecommunications Research Institute

发明人： Jeong Woo Park ,  Kyung Hyun Park ,  Han-Cheol Ryu ,  Dong-Hun Lee ,  Sang-Pil Han ,  Hyunsung Ko ,  Namje Kim

IPC分类号： G01J5/02

CPC分类号： H01L31/02 ,  G02F1/3534 ,  G02F2203/13 ,  H01L31/0232 ,  H01L31/02327 ,  H01L31/105 ,  H01S5/005 ,  H01S5/0092 ,  H01S5/4012 ,  H01S5/4087 ,  H03B2200/0084

摘要： An optical device may include first and second lasers generating first and second laser beams; and a photo detector detecting the first and second laser beams. The optical detector comprises a substrate, a first impurity layer on the substrate, an absorption layer on the first impurity layer and a second impurity layer on the absorption layer. The absorption layer generates a terahertz by a beating of the first and second laser beams and has a thickness of less than 0.2 μm.

摘要翻译： 光学装置可以包括产生第一和第二激光束的第一和第二激光器; 以及检测第一和第二激光束的光电检测器。 光学检测器包括衬底，衬底上的第一杂质层，第一杂质层上的吸收层和吸收层上的第二杂质层。 吸收层通过第一和第二激光束的跳动产生太赫兹，并且具有小于0.2μm的厚度。