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公开(公告)号：US06778876B1
公开(公告)日：2004-08-17
申请号：US10286586
申请日：2002-11-01
申请人： Elfido Coss, Jr. , Howard E. Castle
发明人： Elfido Coss, Jr. , Howard E. Castle
IPC分类号： G06F1900
CPC分类号： H01L21/67288 , H01L21/67259 , H01L21/681 , Y10T29/49014
摘要： The present invention is generally directed to various methods of processing substrates based upon the substrate orientation. In one embodiment, the method comprises determining a defective die pattern of a process tool based upon an orientation of a semiconducting substrate in the tool during processing operations, positioning at least one subsequently processed semiconducting substrate in the process tool at an orientation selected to minimize defective die produced by the process tool, the selected orientation being based upon the determined defective die pattern of the process tool, and performing processing operations in the process tool on at least one subsequently processed substrate while at least one substrate is positioned in the process tool at the selected orientation. In another illustrative embodiment, the method comprises providing a plurality of semiconducting substrates to a processing tool, positioning each of the substrates within the tool at a selected orientation such that at least one electrical performance characteristic of at least one device formed on each of the substrates is optimized when a process operation is performed thereon in the process tool, and performing the processing operation on each of the substrates in the tool while each of the substrates is positioned at the selected orientation.
摘要翻译： 本发明一般涉及基于衬底取向处理衬底的各种方法。 在一个实施例中，该方法包括基于处理操作期间工具中的半导体衬底的取向来确定工艺工具的有缺陷的芯片图案，将处理工具中的至少一个随后处理的半导体衬底以选择为使缺陷最小化的方向 由工艺工具生产的模具，所选择的取向基于所确定的处理工具的有缺陷的模具图案，并且在至少一个随后处理的基板上的处理工具中执行处理操作，同时至少一个基板位于处理工具中 所选方向。 在另一示例性实施例中，该方法包括向处理工具提供多个半导体衬底，将工件中的每个衬底以选定的取向定位，使得在每个衬底上形成至少一个器件的至少一个电性能特征 当在处理工具中对其进行处理操作时进行优化，并且在每个基板位于所选取向的同时对工具中的每个基板执行处理操作。
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公开(公告)号：US08359494B2
公开(公告)日：2013-01-22
申请号：US10323272
申请日：2002-12-18
申请人： Elfido Coss, Jr. , Ernest D. Adams, III , Robert J. Chong , Howard E. Castle , Thomas J. Sonderman , Alexander J. Pasadyn
发明人： Elfido Coss, Jr. , Ernest D. Adams, III , Robert J. Chong , Howard E. Castle , Thomas J. Sonderman , Alexander J. Pasadyn
IPC分类号： G06F11/00
CPC分类号： H01L22/20 , H01L2924/0002 , H01L2924/00
摘要： A method and an apparatus are provided for parallel fault detection. The method comprises receiving data associated with processing of a workpiece by a first processing tool, receiving data associated with processing of a workpiece by a second processing tool and comparing at least a portion of the received data to a common fault model to determine if a fault associated with at least one of the processing of the workpiece by the first processing tool and processing of the workpiece by the second processing tool occurred.
摘要翻译： 提供了用于并行故障检测的方法和装置。 该方法包括接收与第一处理工具处理工件有关的数据，通过第二处理工具接收与工件的处理有关的数据，并将至少一部分接收到的数据与常见故障模型进行比较，以确定是否存在故障 与通过第一处理工具处理工件和由第二处理工具处理工件的至少一个相关联。
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公开(公告)号：US07200779B1
公开(公告)日：2007-04-03
申请号：US10133097
申请日：2002-04-26
IPC分类号： G06F11/00
CPC分类号： G06F11/0769 , G06F11/0709 , G06F11/076 , G06F11/0781
摘要： A method and apparatus is provided for fault notification based on a severity level. The method comprises detecting a fault associated with a processing tool that is adapted to process one or more workpieces, determining a fault severity level of the detected fault and selecting at least one user to notify of the fault based on the severity level of the fault.
摘要翻译： 基于严重性级别提供了用于故障通知的方法和装置。 该方法包括检测与处理一个或多个工件的处理工具相关联的故障，确定检测到的故障的故障严重性级别，并且基于故障的严重性级别选择至少一个用户通知故障。
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公开(公告)号：US07051250B1
公开(公告)日：2006-05-23
申请号：US10164091
申请日：2002-06-06
IPC分类号： G06F11/00
CPC分类号： G05B19/4184 , G05B2219/31355 , G05B2219/31365 , G05B2219/32243 , G05B2219/32254 , Y02P90/14 , Y02P90/20
摘要： A method and apparatus is provided for routing workpieces based upon detecting a fault. The method comprises routing a workpiece to a first processing tool identified by a dispatch system, detecting a fault condition associated with the first processing tool and notifying the dispatch system of the detected fault condition. The method further comprises routing a second workpiece to a second processing tool in response to the dispatch system being notified of the fault condition.
摘要翻译： 提供了一种基于检测故障来路由工件的方法和装置。 该方法包括将工件路由到由调度系统识别的第一处理工具，检测与第一处理工具相关联的故障状况并通知调度系统检测到的故障状况。 该方法还包括响应于调度系统被通知故障状况而将第二工件路由到第二处理工具。
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公开(公告)号：US06928333B1
公开(公告)日：2005-08-09
申请号：US09387174
申请日：1999-08-31
摘要： According to an example embodiment, the present invention is directed to a new and efficient method for bringing at least two items together from independent locations via separate paths in a computer controlled manufacturing environment. Using the computer, the probabilities for pickup and delivery of each of the two items are generated and used to determine an efficient manner in which to bring the items together via the separate paths.
摘要翻译： 根据示例性实施例，本发明涉及一种用于在计算机控制的制造环境中通过独立路径将独立位置带入至少两个项目的新的和有效的方法。 使用计算机，产生并且使用两个项目中的每一个的拾取和递送的概率来确定通过分开的路径将项目合在一起的有效方式。
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公开(公告)号：US06905895B1
公开(公告)日：2005-06-14
申请号：US10185495
申请日：2002-06-28
申请人： Elfido Coss, Jr. , Mark K. Sze-To
发明人： Elfido Coss, Jr. , Mark K. Sze-To
CPC分类号： H01L22/20 , H01L2223/54453
摘要： A method and an apparatus for predicting excursions based upon tool state variables. At least one semiconductor wafer is processed in a processing tool. Tool state data relating to the processing tool is acquired. The tool state data comprises at least one tool state variable. A determination is made whether an excursion of the tool health related to the processing tool has occurred based upon the tool state data. The tool state variable is modified to reduce the excursion of the tool health in response to the determination that the excursion of the tool health has occurred.
摘要翻译： 一种基于工具状态变量预测偏移的方法和装置。 在处理工具中处理至少一个半导体晶片。 获取与处理工具相关的工具状态数据。 刀具状态数据包括至少一个刀具状态变量。 根据工具状态数据确定是否发生了与处理工具相关的工具健康的偏移。 修改工具状态变量以减少工具健康的偏差，以响应确定工具健康发生偏移的确定。
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7.发明授权Method for requesting trace data reports from FDC semiconductor fabrication processes 失效从FDC半导体制造工艺请求跟踪数据报告的方法公开(公告)号：US06871112B1
公开(公告)日：2005-03-22
申请号：US09479852
申请日：2000-01-07
CPC分类号： H01L22/20 , H01L2924/0002 , H01L2924/00
摘要： The invention is, in its various aspects, a method and apparatus for dynamically generating trace data reports in a semiconductor fabrication process employing fault detection control. The method comprises specifying data including at least one of a parameter, a trigger, and a frequency, for a trace data report; automatically generating from a fault detection controller a request including the specified data to a report generator; formulating the trace data report responsive to the request; and returning the formulated trace data report from the report generator based on the request. The apparatus is a semiconductor fabrication processing system, comprising: a fabrication tool capable of providing at least one of specified data and a trace data report; a fault detection controller capable of automatically generating a request for the trace data report, the request including the specified data; a report generator capable of requesting at least one of the specified data and the trace data report from the fabrication tool and capable of, if the specified data is requested from the fabrication tool, providing the trace data report; and an operator interface for receiving data specified for the trace data report, the specified data including at least one of a parameter, a trigger, and a frequency for the trace data report, and to which the trace data report may be returned from at least one of the report generator and the fabrication tool.
摘要翻译： 本发明在其各个方面是一种用于在采用故障检测控制的半导体制造过程中动态产生跟踪数据报告的方法和装置。 该方法包括指定用于跟踪数据报告的包括参数，触发和频率中的至少一个的数据; 从故障检测控制器自动生成包括指定数据的请求到报告生成器; 根据请求制定跟踪数据报告; 并根据请求从报告生成器返回已制定的跟踪数据报告。 该装置是半导体制造处理系统，包括：能够提供指定数据和跟踪数据报告中的至少一个的制造工具; 一个故障检测控制器，能够自动产生跟踪数据报告的请求，该请求包括指定的数据; 报告发生器，其能够从所述制造工具请求所述指定数据和跟踪数据报告中的至少一个，并且如果从所述制造工具请求指定的数据，则能够提供所述跟踪数据报告; 以及用于接收为跟踪数据报告指定的数据的操作者界面，所述指定数据包括用于跟踪数据报告的参数，触发和频率中的至少一个，并且跟踪数据报告至少可以从其返回 报告生成器和制作工具之一。
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8.发明授权Method and apparatus for implementing corrected species by monitoring specific state parameters 有权通过监测特定状态参数来实施校正物种的方法和装置公开(公告)号：US06465263B1
公开(公告)日：2002-10-15
申请号：US09477252
申请日：2000-01-04
IPC分类号： G01R3126
CPC分类号： H01L22/20
摘要： The present invention provides for a method and an apparatus for implementing corrected species by monitoring state parameters in a manufacturing process. A process run of semiconductor devices is performed. Production data relating to the process run of semiconductor devices is acquired. The acquired production data is stored into a production database. A recipe management analysis is performed. The apparatus of the present invention comprises: a recipe management system; a first machine interface connected to said recipe management system; a processing tool connected to said first machine interface; and a fault detection system connected to said first machine interface.
摘要翻译： 本发明提供了一种通过在制造过程中监视状态参数来实现校正物种的方法和装置。 执行半导体器件的工艺流程。 获取与半导体器件的工艺流程有关的生产数据。 获取的生产数据被存储到生产数据库中。 进行食谱管理分析。 本发明的装置包括：配方管理系统; 连接到所述配方管理系统的第一机器接口; 连接到所述第一机器接口的处理工具; 以及连接到所述第一机器接口的故障检测系统。
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公开(公告)号：US6035245A
公开(公告)日：2000-03-07
申请号：US46854
申请日：1998-03-24
CPC分类号： G06Q10/08 , Y10S414/14
摘要： A computer controlled manufacturing arrangement and method for selecting between multiple paths for transporting cassettes between processing locations. The manufacturing arrangement includes a plurality of stockers interconnected with tracks on which cassettes are carried on vehicles. A first and second stocker are interconnected by at least a first path and a second path formed by the tracks, and a cassette can be transported from the first to the second stocker via either of the two paths. A plurality of robotic arrangements are configured to transfer cassettes between the stockers and the vehicles. A data processing system is coupled to the robotic arrangements and configured and arranged to maintain an historical record of codes indicative of periods of time expended in transporting cassettes from the first stocker to the second stocker via the first path and second path, respectively. When a cassette is to be transported from the first stocker to the second stocker, the data processing system determines, as a function of the historical record of codes associated with the paths, which of the first or second paths is more likely to result in a lesser period of time in transporting the cassette, and selects one of the first or second paths according to which path is more likely to result in a lesser period of time in transporting the cassette. The robotic arrangement is then instructed to load the cassette on the vehicle of the selected path.
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公开(公告)号：US06868512B1
公开(公告)日：2005-03-15
申请号：US10229226
申请日：2002-08-27
CPC分类号： H01L22/20 , Y10S707/99953
摘要： A method includes receiving incoming fault detection and correction (FDC) data. The incoming FDC data is stored in a real-time database, A first subscriber list designating a first subscriber for at least a portion of the incoming FDC data is provided. The portion of the incoming FDC data designated in the first subscriber list is sent to the first subscriber. A system includes at least one data collection source, a real-time database, and a database management unit. The data collection source is configured to generate incoming fault detection and correction (FDC) data. The database management unit is configured to store the incoming FDC data in the real-time database, provide a first subscriber list designating a first subscriber for at least a portion of the incoming FDC data, and send the portion of the incoming FDC data designated in the first subscriber list to the first subscriber.
摘要翻译： 一种方法包括接收进入的故障检测和校正（FDC）数据。 输入的FDC数据被存储在实时数据库中。提供了为输入FDC数据的至少一部分指定第一订户的第一用户列表。 在第一用户列表中指定的输入FDC数据的部分被发送到第一用户。 系统包括至少一个数据收集源，实时数据库和数据库管理单元。 数据采集源被配置为产生进入的故障检测和校正（FDC）数据。 数据库管理单元被配置为将输入的FDC数据存储在实时数据库中，为进入的FDC数据的至少一部分提供指定第一订户的第一订户列表，并且将指定的输入FDC数据的部分发送到 第一订阅者列表。
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