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    Identifying a cause of a fault based on a process controller output
    3.
    发明授权
    Identifying a cause of a fault based on a process controller output 失效
    根据过程控制器输出识别出故障的原因

    公开(公告)号：US06778873B1

    公开(公告)日：2004-08-17

    申请号：US10210640

    申请日：2002-07-31

    申请人： Jin Wang ,  Elfido Coss, Jr. ,  Brian K. Cusson ,  Alexander J. Pasadyn ,  Michael L. Miller ,  Naomi M. Jenkins ,  Christopher A. Bode

    发明人： Jin Wang ,  Elfido Coss, Jr. ,  Brian K. Cusson ,  Alexander J. Pasadyn ,  Michael L. Miller ,  Naomi M. Jenkins ,  Christopher A. Bode

    IPC分类号： G06F1900

    CPC分类号： G05B19/4184 ,  G05B23/0281 ,  G05B2219/31357 ,  G05B2219/31363 ,  G05B2219/32201 ,  Y02P90/14 ,  Y02P90/22

    摘要： A method and apparatus is provided for identifying a cause of a fault based on controller output. The method comprises processing at least one workpiece under a direction of the controller and detecting a fault associated with the processing of the at least one workpiece. The method further includes determining a plurality of possible causes of the detected fault, identifying a more likely possible cause out of the plurality of possible causes, providing fault information associated with the identified more likely possible cause to the controller. The method further includes providing fault information associated with the identified more likely possible cause to the controller. The method further comprises adjusting the processing of one or more workpieces to be processed next based on the fault information provided to the controller. The method further includes generating prediction data associated with processing of the next workpieces, and comparing the prediction data to processing data associated with the processing of the next workpieces to identify a possible cause of the fault.

    摘要翻译： 提供了一种基于控制器输出来识别故障原因的方法和装置。 该方法包括在控制器的方向上处理至少一个工件，并检测与至少一个工件的处理相关的故障。 该方法还包括确定检测到的故障的多个可能的原因，从多个可能的原因中识别更可能的可能原因，将与所识别的更可能的可能原因相关联的故障信息提供给控制器。 该方法还包括向控制器提供与所识别的更可能的可能原因相关联的故障信息。 该方法还包括基于提供给控制器的故障信息来调整接下来要处理的一个或多个待处理工件的处理。 该方法还包括生成与下一个工件的处理相关联的预测数据，以及将预测数据与与下一个工件的处理相关联的处理数据进行比较，以识别故障的可能原因。

    Methods of processing substrates based upon substrate orientation
    5.
    发明授权
    Methods of processing substrates based upon substrate orientation 失效
    基于基板取向处理基板的方法

    公开(公告)号：US06778876B1

    公开(公告)日：2004-08-17

    申请号：US10286586

    申请日：2002-11-01

    申请人： Elfido Coss, Jr. ,  Howard E. Castle

    发明人： Elfido Coss, Jr. ,  Howard E. Castle

    IPC分类号： G06F1900

    CPC分类号： H01L21/67288 ,  H01L21/67259 ,  H01L21/681 ,  Y10T29/49014

    摘要： The present invention is generally directed to various methods of processing substrates based upon the substrate orientation. In one embodiment, the method comprises determining a defective die pattern of a process tool based upon an orientation of a semiconducting substrate in the tool during processing operations, positioning at least one subsequently processed semiconducting substrate in the process tool at an orientation selected to minimize defective die produced by the process tool, the selected orientation being based upon the determined defective die pattern of the process tool, and performing processing operations in the process tool on at least one subsequently processed substrate while at least one substrate is positioned in the process tool at the selected orientation. In another illustrative embodiment, the method comprises providing a plurality of semiconducting substrates to a processing tool, positioning each of the substrates within the tool at a selected orientation such that at least one electrical performance characteristic of at least one device formed on each of the substrates is optimized when a process operation is performed thereon in the process tool, and performing the processing operation on each of the substrates in the tool while each of the substrates is positioned at the selected orientation.

    摘要翻译： 本发明一般涉及基于衬底取向处理衬底的各种方法。 在一个实施例中，该方法包括基于处理操作期间工具中的半导体衬底的取向来确定工艺工具的有缺陷的芯片图案，将处理工具中的至少一个随后处理的半导体衬底以选择为使缺陷最小化的方向 由工艺工具生产的模具，所选择的取向基于所确定的处理工具的有缺陷的模具图案，并且在至少一个随后处理的基板上的处理工具中执行处理操作，同时至少一个基板位于处理工具中 所选方向。 在另一示例性实施例中，该方法包括向处理工具提供多个半导体衬底，将工件中的每个衬底以选定的取向定位，使得在每个衬底上形成至少一个器件的至少一个电性能特征 当在处理工具中对其进行处理操作时进行优化，并且在每个基板位于所选取​​向的同时对工具中的每个基板执行处理操作。

    Process control based upon a metrology delay
    6.
    发明授权
    Process control based upon a metrology delay 有权
    基于计量延迟的过程控制

    公开(公告)号：US06834213B1

    公开(公告)日：2004-12-21

    申请号：US10336913

    申请日：2003-01-06

    申请人： Thomas J. Sonderman ,  Jin Wang ,  Naomi M. Jenkins ,  Elfido Coss, Jr.

    发明人： Thomas J. Sonderman ,  Jin Wang ,  Naomi M. Jenkins ,  Elfido Coss, Jr.

    IPC分类号： G06F1900

    CPC分类号： G05B5/01 ,  G05B19/4183 ,  G05B2219/32075 ,  G05B2219/37222 ,  G05B2219/45031 ,  Y02P90/10

    摘要： A method and an apparatus for performing process control based upon a metrology delay. A process step is performed upon a first workpiece. Metrology data related to the first workpiece is acquired. A control adjustment based upon the metrology data is determined. A magnitude of the control adjustment is modified based upon a time period. The time period is defined by a first time frame relating to processing the first workpiece and a second time frame relating to acquiring metrology data related to the first workpiece.

    摘要翻译： 一种用于基于测量延迟执行过程控制的方法和装置。 在第一工件上执行工艺步骤。 获取与第一工件有关的计量数据。 确定基于测量数据的控制调整。 基于时间段来修改控制调整的大小。 时间段由与处理第一工件有关的第一时间框架和与获取与第一工件相关的度量数据相关的第二时间框架限定。

    Updating process controller based upon fault detection analysis
    7.
    发明授权
    Updating process controller based upon fault detection analysis 失效
    基于故障检测分析更新过程控制器

    公开(公告)号：US06871114B1

    公开(公告)日：2005-03-22

    申请号：US10231713

    申请日：2002-08-30

    申请人： Eric O. Green ,  Matthew A. Purdy ,  Elfido Coss, Jr. ,  Christopher A. Bode ,  Robert J. Chong ,  Gregory A. Cherry

    发明人： Eric O. Green ,  Matthew A. Purdy ,  Elfido Coss, Jr. ,  Christopher A. Bode ,  Robert J. Chong ,  Gregory A. Cherry

    IPC分类号： G05B19/404 ,  G06F19/00

    CPC分类号： G05B19/404 ,  G05B2219/37252 ,  G05B2219/37345 ,  G05B2219/45031

    摘要： A method and an apparatus for adjusting a process controller based upon a fault detection analysis. A process step upon a workpiece is performed using a processing tool. Manufacturing data relating to processing of the workpiece is acquired. The manufacturing data may include metrology data relating to the processed workpiece and/or tool state data relating to the tool state of a processing tool. A metrology/tool state data integration process is performed based upon the acquired manufacturing data. The metrology/tool state data integration process includes performing an assessment of a tool health related to the processing tool and adjusting an emphasis of the metrology data based upon the assessment of the tool health.

    摘要翻译： 一种基于故障检测分析调整过程控制器的方法和装置。 使用加工工具进行工件的加工步骤。 获取与工件的加工有关的制造数据。 制造数据可以包括与处理工具有关的计量学数据和/或与加工工具的工具状态有关的刀具状态数据。 基于获取的制造数据执行计量/工具状态数据集成处理。 计量/工具状态数据集成过程包括对与处理工具相关的工具健康进行评估，并且基于对工具健康的评估来调整计量数据的重点。

    Fault notification based on a severity level
    8.
    发明授权
    Fault notification based on a severity level 失效
    基于严重性级别的故障通知

    公开(公告)号：US07200779B1

    公开(公告)日：2007-04-03

    申请号：US10133097

    申请日：2002-04-26

    申请人： Elfido Coss, Jr. ,  Susan Hickey ,  Michael R. Conboy

    发明人： Elfido Coss, Jr. ,  Susan Hickey ,  Michael R. Conboy

    IPC分类号： G06F11/00

    CPC分类号： G06F11/0769 ,  G06F11/0709 ,  G06F11/076 ,  G06F11/0781

    摘要： A method and apparatus is provided for fault notification based on a severity level. The method comprises detecting a fault associated with a processing tool that is adapted to process one or more workpieces, determining a fault severity level of the detected fault and selecting at least one user to notify of the fault based on the severity level of the fault.

    摘要翻译： 基于严重性级别提供了用于故障通知的方法和装置。 该方法包括检测与处理一个或多个工件的处理工具相关联的故障，确定检测到的故障的故障严重性级别，并且基于故障的严重性级别选择至少一个用户通知故障。

    Scheduling method for automated work-cell transfer system
    10.
    发明授权
    Scheduling method for automated work-cell transfer system 失效
    自动化工作单元传输系统的调度方法

    公开(公告)号：US06928333B1

    公开(公告)日：2005-08-09

    申请号：US09387174

    申请日：1999-08-31

    申请人： Michael R. Conboy ,  Patrick J. Ryan ,  Elfido Coss, Jr.

    发明人： Michael R. Conboy ,  Patrick J. Ryan ,  Elfido Coss, Jr.

    IPC分类号： G06F19/00 ,  G06Q10/00

    CPC分类号： G06Q10/06 ,  Y02P90/86

    摘要： According to an example embodiment, the present invention is directed to a new and efficient method for bringing at least two items together from independent locations via separate paths in a computer controlled manufacturing environment. Using the computer, the probabilities for pickup and delivery of each of the two items are generated and used to determine an efficient manner in which to bring the items together via the separate paths.

    摘要翻译： 根据示例性实施例，本发明涉及一种用于在计算机控制的制造环境中通过独立路径将独立位置带入至少两个项目的新的和有效的方法。 使用计算机，产生并且使用两个项目中的每一个的拾取和递送的概率来确定通过分开的路径将项目合在一起的有效方式。