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8 条记录 (耗时 0.021 秒)

    Delivery system for PECVD powered electrode
    1.
    发明申请
    Delivery system for PECVD powered electrode 审中-公开
    PECVD供电电极输送系统

    公开(公告)号：US20050022735A1

    公开(公告)日：2005-02-03

    申请号：US10630139

    申请日：2003-07-31

    申请人： Eric Breitung ,  George Dalakos ,  Peter Codella ,  Manisha Tinani-Mendleson

    发明人： Eric Breitung ,  George Dalakos ,  Peter Codella ,  Manisha Tinani-Mendleson

    IPC分类号： C23C16/44 ,  C23C16/455 ,  C23C16/509 ,  H01J37/32 ,  C23C16/00 ,  C23F1/00

    CPC分类号： C23C16/45565 ,  C23C16/4409 ,  C23C16/5096 ,  H01J37/3244

    摘要： Gas delivery devices for PECVD systems and methods for using such systems are described. The delivery device goes directly through the powered electrode and thereby bypasses components of the PECVD systems used to support that electrode. The delivery device contains a coupling device between the powered electrode of the PECVD reactor and the gas inlet line. The gas inlet line is electrically and thermally isolated from the powered electrode and is sealed to maintain the vacuum integrity of the PECVD reactor through the use of a coupling device. Thus, gases from the heated gas lines can be routed directly through the powered electrode and fed into the reactor via the showerhead without having a cold area between the showerhead and gas inlet line.

    摘要翻译： 描述了用于PECVD系统的气体输送装置以及使用这种系统的方法。 输送装置直接通过动力电极，从而绕过用于支撑该电极的PECVD系统的部件。 输送装置在PECVD反应器的动力电极和气体入口管线之间包含耦合装置。 气体入口管线与被动电极电隔离，并且被密封，以通过使用联接装置来保持PECVD反应器的真空完整性。 因此，来自加热的气体管线的气体可以直接通过动力电极被路由并经由喷头进料到反应器中，而在喷头和气体入口管线之间没有冷的区域。

    Antireflective surfaces, methods of manufacture thereof and articles comprising the same
    3.
    发明申请
    Antireflective surfaces, methods of manufacture thereof and articles comprising the same 审中-公开
    抗反射表面，其制造方法和包含其的制品

    公开(公告)号：US20070115554A1

    公开(公告)日：2007-05-24

    申请号：US11285650

    申请日：2005-11-22

    申请人： Eric Breitung ,  Bastiaan Korevaar

    发明人： Eric Breitung ,  Bastiaan Korevaar

    IPC分类号： G02B1/10

    CPC分类号： G02B1/118 ,  G02B1/11

    摘要： Disclosed herein is an antireflective viewing surface comprising a viewing surface; and a textured layer disposed upon the viewing surface; wherein the textured layer comprises randomly distributed protrusions having randomly distributed dimensions that are smaller than the wavelength of light. Disclosed herein too is a method of manufacturing and antireflective viewing surface comprising electroforming a metal upon a first template to form an electroformed metal template; wherein the first template comprises random, columnar structures; disposing a layer of a polymeric resin on a viewing surface; pressing the electroformed metal template against the viewing surface; and solidifying the polymeric resin.

    摘要翻译： 本文公开了包括观察表面的抗反射观察表面; 和设置在观察表面上的纹理层; 其中纹理层包括随机分布的具有小于光波长的尺寸的突起。 本文还公开了一种制造和抗反射观察表面的方法，包括在第一模板上电铸金属以形成电铸金属模板; 其中所述第一模板包括随机的柱状结构; 在观察表面上设置聚合物树脂层; 将电铸金属模板压在观察表面上; 并固化聚合物树脂。

    Compound for optical materials and methods of fabrication
    7.
    发明申请
    Compound for optical materials and methods of fabrication 失效
    用于光学材料的复合材料和制造方法

    公开(公告)号：US20050214479A1

    公开(公告)日：2005-09-29

    申请号：US10812191

    申请日：2004-03-29

    申请人： Christoph Erben ,  Eric Breitung ,  Ryo Tamaki

    发明人： Christoph Erben ,  Eric Breitung ,  Ryo Tamaki

    IPC分类号： C07F7/21 ,  C08F14/18 ,  C09K19/00 ,  C07C17/02 ,  C07C25/13

    CPC分类号： C07F7/21 ,  C08F14/18 ,  Y10T428/10

    摘要： A polycyclic or monocyclic perfluorovinyl compound comprising at least one structural unit selected from the group consisting of formula I and formula II wherein M is independently at each occurrence a metal selected from group 14 of the periodic table of the elements; and R is independently at each occurrence a bond, a hydrogen, an aliphatic group, a cycloaliphatic group, or an aromatic group. The polycyclic or monocyclic compound comprises at least two perfluorovinyl groups. A method for making an optical film of the disclosed compound, an electro-optical device comprising a polymer fabricated from the disclosed compound and a polymer fabricated from the disclosed compound are also provided.

    摘要翻译： 多环或单环全氟乙烯基化合物，其包含至少一种选自式I和式II的结构单元，其中M在每次出现时独立地为选自元素周期表第14族的金属; 并且R在每次出现时独立地为键，氢，脂族基团，脂环族基团或芳族基团。 多环或单环化合物包含至少两个全氟乙烯基。 还提供了制备所公开化合物的光学膜的方法，包括由所公开的化合物制备的聚合物的电光装置和由所公开的化合物制备的聚合物。