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公开(公告)号：US06525326B1
公开(公告)日：2003-02-25
申请号：US09654381
申请日：2000-09-01
IPC分类号： H01J3730
CPC分类号： H01J3/40 , H01J37/026 , H01J37/3002 , H01J37/3171 , H01J2237/004 , H01J2237/022 , H01J2237/31705
摘要： A system for inhibiting the transport of contaminant particles with an ion beam includes an electric field generator for generating an electric field relative to a path of travel for the ion beam. A particle located in the ion beam and in a region of the electric field is charged to a polarity according to the ion beam, so that the electric field may urge the charged particle out of the ion beam.
摘要翻译： 用于抑制用离子束输送污染物颗粒的系统包括用于相对于离子束的行进路径产生电场的电场发生器。 位于离子束中并且在电场的区域中的粒子根据离子束被充电到极性，使得电场可以将带电粒子推出离子束。
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2.发明授权公开(公告)号：US06984831B2
公开(公告)日：2006-01-10
申请号：US10794850
申请日：2004-03-05
IPC分类号： H01J37/08
CPC分类号： H01J37/08 , H01J37/3171 , H01J2237/006 , H01J2237/061 , H01J2237/06308 , H01J2237/082
摘要： A cathode system having a cathode element configured to extend through an aperture in a wall of an arc chamber of an ion implanter system. A gas flow through a spacing between the cathode element and the aperture is restricted by a restriction member. A method of ionizing a source gas and a cathode element incorporating the restriction member are also provided.
摘要翻译： 一种具有阴极元件的阴极系统，其被配置为延伸穿过离子注入系统的电弧室的壁中的孔。 通过限制部件限制通过阴极元件和孔之间的间隔的气流。 还提供了一种电离源气体和结合有限制构件的阴极元件的方法。
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公开(公告)号：US07559557B2
公开(公告)日：2009-07-14
申请号：US11894979
申请日：2007-08-22
CPC分类号： H01J37/16 , H01J37/18 , H01J2237/166 , H01J2237/31701 , Y10S277/913
摘要： A sealing system is disclosed. One such sealing system includes a first vacuum chamber and a second vacuum chamber. The sealing system includes a first sealing unit having a proximal end and a distal end, the proximal end of the first sealing unit disposed on the first vacuum chamber. The sealing system includes a second sealing unit having a distal end and a proximal end, the distal end of the second sealing unit disposed on the distal end of the first sealing unit and the proximal end of the second sealing unit disposed on the second vacuum chamber. One of the sealing units is concave, while the other is convex. The sealing system also includes a first o-ring, a second o-ring, and a third o-ring.
摘要翻译： 公开了一种密封系统。 一个这样的密封系统包括第一真空室和第二真空室。 密封系统包括具有近端和远端的第一密封单元，第一密封单元的近端设置在第一真空室上。 密封系统包括具有远端和近端的第二密封单元，第二密封单元的远端设置在第一密封单元的远端上，第二密封单元的近端设置在第二真空室 。 其中一个密封单元是凹形的，而另一个是凸形的。 密封系统还包括第一O形环，第二O形环和第三O形环。
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公开(公告)号：US20090050825A1
公开(公告)日：2009-02-26
申请号：US11894979
申请日：2007-08-22
CPC分类号： H01J37/16 , H01J37/18 , H01J2237/166 , H01J2237/31701 , Y10S277/913
摘要： A sealing system is disclosed. One such sealing system includes a first vacuum chamber and a second vacuum chamber. The sealing system includes a first sealing unit having a proximal end and a distal end, the proximal end of the first sealing unit disposed on the first vacuum chamber. The sealing system includes a second sealing unit having a distal end and a proximal end, the distal end of the second sealing unit disposed on the distal end of the first sealing unit and the proximal end of the second sealing unit disposed on the second vacuum chamber. One of the sealing units is concave, while the other is convex. The sealing system also includes a first o-ring, a second o-ring, and a third o-ring.
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