公开(公告)号：US06969854B1

公开(公告)日：2005-11-29

申请号：US10614614

申请日：2003-07-07

Applicant: Erik Essers ,  Michael Trunz

Inventor： Erik Essers ,  Michael Trunz

IPC: H01J37/02 ,  G01B27/58 ,  G01M23/00

CPC classification number: H01J37/02 ,  H01J2237/0216

Abstract: An arrangement for holding a particle beam apparatus such as a transmission electron microscope. The arrangement is sufficient for receiving a good resolution in the area of 1 Å or less, said arrangement still being under more or less no influence of the environment, in particular, building vibrations. In one embodiment, the arrangement comprises a base structure comprising a plurality of hollow bodies, at least one of said hollow bodies having a first length extension in a first direction, a second length extension in a second direction and a third length extension in a third direction, said first length extension being larger than said second and third length extensions, and wherein a cross section of said at least one of said hollow bodies perpendicular to said first direction is substantially triangular. Due to the hollow body shape, a very stiff structure is provided with a very good eigenfrequency.

Abstract translation: 用于保持诸如透射电子显微镜的粒子束装置的装置。 该装置足以在1埃或更小的区域内获得良好的分辨率，所述装置或多或少不受环境，特别是建筑物振动的影响。 在一个实施例中，该装置包括基本结构，其包括多个中空体，至少一个所述中空体在第一方向上具有第一长度延伸，在第二方向上具有第二长度延伸，在第三方向上具有第三长度延伸 所述第一长度延伸部大于所述第二和第三长度延伸部，并且其中所述至少一个所述中空体垂直于所述第一方向的横截面基本上为三角形。 由于中空体的形状，非常坚固的结构具有非常好的本征频率。

公开(公告)号：US08431894B2

公开(公告)日：2013-04-30

申请号：US11659145

申请日：2005-07-28

Applicant: Erik Essers ,  Gerd Benner ,  Volker Drexel

Inventor： Erik Essers ,  Gerd Benner ,  Volker Drexel

IPC: G21K7/00

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/2449

Abstract: An electron beam device has an electron gun for generating an electron beam, an objective lens for focusing the electron beam on an object and at least one detector for detecting electrons emitted by the object or electrons backscattered by the object. Detection of electrons emitted by or backscattered by an object may be simplified and improved using quadrupole devices and certain configurations of these devices provided in the electron beam device.

公开(公告)号：US06949744B2

公开(公告)日：2005-09-27

申请号：US10825240

申请日：2004-04-16

Applicant: Michael Steigerwald ,  Erik Essers

Inventor： Michael Steigerwald ,  Erik Essers

IPC: G01Q30/02 ,  H01J37/05 ,  H01J37/12 ,  H01J37/153 ,  H01J37/28 ,  G01N23/00 ,  H01J25/00 ,  H05H7/06

CPC classification number: H01J37/28 ,  H01J37/05 ,  H01J37/12 ,  H01J37/153

Abstract: An electron microscopy system and an electron microscopy method for detection of time dependencies of secondary electrons generated by primary electrons is provided, in which the primary electron pulses are directed onto a sample surface and electrons emanating from the sample surface are detected, time resolved. To this end the system comprises in particular a cavity resonator. A cavity resonator can also be used to reduce aberrations of focusing lenses.

Abstract translation: 提供了用于检测由一次电子产生的二次电子的时间依赖性的电子显微镜系统和电子显微镜方法，其中初级电子脉冲被引导到样品表面上，并且检测从样品表面发射的电子，被时间分辨。 为此，该系统特别地包括空腔谐振器。 腔谐振器也可用于减少聚焦透镜的像差。

公开(公告)号：US06707041B2

公开(公告)日：2004-03-16

申请号：US10161131

申请日：2002-05-29

Applicant: Erik Essers

Inventor： Erik Essers

IPC: H01J37244

CPC classification number: H01J37/28 ,  H01J37/244 ,  H01J2237/2608

Abstract: A detector for scanning electron microscopes with high pressure in the sample chamber has a first electrode for accelerating electrons emergent from a sample received on the sample holder, and at least one second electrode, the end of which directed toward the sample holder is at a smaller distance from the sample holder than the first electrode, and is at a potential between the potential of the first electrode and the potential of the beam guiding tube. The volume of the secondary electron cascade is increased by the second electrode. In an alternative embodiment for a gas scintillation detector, there is adjoined to a region of high secondary electron amplification, an elongate region in which the amplification factor for secondary electrons is approximately 1. The first region serves for the production of a relatively large electron current and the second, elongate, region for the production of a strong photon signal while maintaining the photon current.

Abstract translation: 用于在样品室中扫描高压的电子显微镜的检测器具有用于加速从接收在样品保持器上的样品发出的电子的第一电极，并且至少一个第二电极，其端部朝向样品架保持器的一端较小 距离样品保持器的距离小于第一电极，并且处于第一电极的电位和光束引导管的电位之间的电位。 二次电子级联的体积由第二电极增加。 在气体闪烁检测器的替代实施例中，邻接于二次电子放大的区域，其中二次电子的放大因子约为1的细长区域。第一区域用于产生相对较大的电子电流 和第二个细长的区域，用于生产强光子信号，同时保持光子电流。

公开(公告)号：US06590210B1

公开(公告)日：2003-07-08

申请号：US09623824

申请日：2000-09-08

Applicant: Erik Essers

Inventor： Erik Essers

IPC: H01J3728

CPC classification number: H01J37/28 ,  H01J37/244 ,  H01J2237/2608

Abstract: With a scanning electron microscope having an electron gun and a specimen chamber between which one or more pressure stage apertures are arranged, through whose orifices a primary electron beam can be deflected to a specimen in the specimen chamber, where the lowest pressure stage aperture (18) nearest the specimen, through which the primary electron beam strikes the specimen, is set up to shield an elevated pressure in the specimen chamber with respect to the remaining microscope column of the scanning electron microscope and to allow secondary electrons emanating from the specimen to pass through their orifice to reach at least one detector, the detector is a high-sensitivity detector (74) biased at a positive potential with respect to the specimen. At least one electrode (44, 55) which is at a positive potential with respect to the pressure stage aperture (18) and is adapted to deflect the secondary electrons from the specimen to the detector (74) may be arranged above the bottom pressure stage aperture (18). As an alternative, the scanning electron microscope is equipped for detection of secondary electrons through the orifice of at least one pressure stage aperture which is constructed in layers of at least two conductive layers which are electrically insulated from one another and can be biased with potentials.

Abstract translation: 使用具有电子枪和样品室的扫描电子显微镜，其间布置有一个或多个压力级孔，通过其孔可以将一次电子束偏转到样品室中的样品，其中最低压级孔（18 ），其中初级电子束撞击样本最近的样本被设置为相对于扫描电子显微镜的剩余显微镜柱屏蔽样品室中的升高的压力，并允许从样品发出的二次电子通过 通过其孔口到达至少一个检测器，检测器是相对于样品偏置为正电位的高灵敏度检测器（74）。 至少一个相对于压力平台孔（18）处于正电位并且将二次电子从试样偏转到检测器（74）的电极（44,55）可以布置在底压级 孔（18）。 作为替代，扫描电子显微镜被配备用于通过至少一个压力级孔的孔口检测二次电子，其被构造成彼此电绝缘并且可以被电位偏置的至少两个导电层的层。

公开(公告)号：US20090039257A1

公开(公告)日：2009-02-12

申请号：US11659145

申请日：2005-07-28

Applicant: Erik Essers ,  Gerd Benner ,  Volker Drexel

Inventor： Erik Essers ,  Gerd Benner ,  Volker Drexel

IPC: G21K7/00

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/2449

Abstract: An electron beam device has an electron gun for generating an electron beam, an objective lens for focusing the electron beam on an object and at least one detector for detecting electrons emitted by the object or electrons backscattered by the object. Detection of electrons emitted by or backscattered by an object may be simplified and improved using quadrupole devices and certain configurations of these devices provided in the electron beam device.

Abstract translation: 电子束装置具有用于产生电子束的电子枪，用于将电子束聚焦在物体上的物镜和用于检测被物体背面散射的物体或电子发射的电子的至少一个检测器。 可以使用四极装置和设置在电子束装置中的这些装置的某些配置来简化和改进由物体发射或反向散射的电子的检测。

公开(公告)号：US20050173644A1

公开(公告)日：2005-08-11

申请号：US10500951

申请日：2001-06-29

Applicant: Peter Gnauck ,  Volker Drexel ,  Erik Essers

Inventor： Peter Gnauck ,  Volker Drexel ,  Erik Essers

IPC: H01J37/18 ,  H01J37/244 ,  H01J37/28 ,  G01J1/00

CPC classification number: H01J37/244

Abstract: A detector for scanning electron microscopes, which can be used under different pressure conditions in the specimen chamber of the electron microscope, designed for the detection of both electrons and light. For this purpose, the detector has a photodetector and a scintillator of a material transmissive for visible light connected before the photodetector. The scintillator can be provided with a coating transparent to visible light. By the application of different potentials, the detector is suitable for the detection of electrons in high vacuum and for the detection of light with high pressures in the specimen chamber.

Abstract translation: 用于扫描电子显微镜的检测器，其可以在电子显微镜的样品室中在不同压力条件下使用，被设计用于检测电子和光。 为此目的，检测器具有光电检测器和用于在光电检测器之前连接的可见光透射的材料的闪烁体。 闪烁体可以具有对可见光透明的涂层。 通过应用不同的电位，检测器适用于检测高真空中的电子和检测样品室中高压的光。

公开(公告)号：US20050006582A1

公开(公告)日：2005-01-13

申请号：US10825240

申请日：2004-04-16

Applicant: Michael Steigerwald ,  Erik Essers

Inventor： Michael Steigerwald ,  Erik Essers

IPC: G01Q30/02 ,  H01J37/05 ,  H01J37/12 ,  H01J37/153 ,  H01J37/28 ,  G01N23/00

CPC classification number: H01J37/28 ,  H01J37/05 ,  H01J37/12 ,  H01J37/153

Abstract: An electron microscopy system and an electron microscopy method for detection of time dependencies of secondary electrons generated by primary electrons is provided, in which the primary electron pulses are directed onto a sample surface and electrons emanating from the sample surface are detected, time resolved. To this end the system comprises in particular a cavity resonator. A cavity resonator can also be used to reduce aberrations of focusing lenses.