公开(公告)号：US20080070338A1

公开(公告)日：2008-03-20

申请号：US11939589

申请日：2007-11-14

申请人： Anis Zribi ,  Glenn Claydon ,  Christopher Kapusta ,  Laura Meyer ,  Ertugal Berkcan ,  Wei-Cheng Tian

发明人： Anis Zribi ,  Glenn Claydon ,  Christopher Kapusta ,  Laura Meyer ,  Ertugal Berkcan ,  Wei-Cheng Tian

IPC分类号： H01L21/02

CPC分类号： G01R33/0283 ,  G01R15/148 ,  G01R33/0286

摘要： A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component having a capacitive magneto-MEMS component, a compensator and an output component for sensing magnetic fields and for providing, in response thereto, an indication of the current present in a respective conductor to be measured. In one embodiment, first and second mechanical sense components are electrically conductive and operate to sense a change in a capacitance between the mechanical sense components in response to a mechanical indicator from a magnetic-to-mechanical converter.

摘要翻译： 基于微机电系统（MEMS）的电流和磁场传感器包括具有电容式磁MEMS组件的基于MEMS的磁场感测部件，补偿器和用于感测磁场的输出部件，并且响应于此而提供 当前存在于待测量的导体中的指示。 在一个实施例中，第一和第二机械感测部件是导电的并且用于响应于来自磁 - 机械转换器的机械指示器感测机械感测部件之间的电容的变化。

公开(公告)号：US20070040547A1

公开(公告)日：2007-02-22

申请号：US11506988

申请日：2006-08-18

申请人： Ertugrul Berkcan ,  Christopher Kapusta ,  Glenn Claydon ,  Anis Zribi ,  Laura Meyer ,  Wei-Cheng Tian

发明人： Ertugrul Berkcan ,  Christopher Kapusta ,  Glenn Claydon ,  Anis Zribi ,  Laura Meyer ,  Wei-Cheng Tian

IPC分类号： G01R1/20

CPC分类号： G01R33/0283 ,  G01R15/148 ,  G01R33/0286

摘要： A micro-electromechanical system (MEMS) current sensor is described as including a first conductor, a magnetic field shaping component for shaping a magnetic field produced by a current in the first conductor, and a MEMS-based magnetic field sensing component including a magneto-MEMS component for sensing the shaped magnetic field and, in response thereto, providing an indication of the current in the first conductor. A method for sensing a current using MEMS is also described as including shaping a magnetic field produced with a current in a first conductor, sensing the shaped magnetic field with a MEMS-based magnetic field sensing component having a magneto-MEMS component magnetic field sensing circuit, and providing an indication of the current in the first conductor.

摘要翻译： 微机电系统（MEMS）电流传感器被描述为包括第一导体，用于使由第一导体中的电流产生的磁场成形的磁场成形部件，以及包括磁 - 用于感测成形磁场的MEMS组件，并且响应于此，提供第一导体中的电流的指示。 还描述了一种用于感测使用MEMS的电流的方法，包括使用在第一导体中的电流产生的磁场成形，用具有磁MEMS组件磁场感测电路的基于MEMS的磁场感测组件感测成形的磁场 并且提供第一导体中的电流的指示。

公开(公告)号：US20050270014A1

公开(公告)日：2005-12-08

申请号：US11129682

申请日：2005-05-13

申请人： Anis Zribi ,  Glenn Claydon ,  Christopher Kapusta ,  Laura Meyer ,  Ertugrul Berkcan ,  Wei-Cheng Tian

发明人： Anis Zribi ,  Glenn Claydon ,  Christopher Kapusta ,  Laura Meyer ,  Ertugrul Berkcan ,  Wei-Cheng Tian

IPC分类号： G01R15/20 ,  G01R33/028 ,  G01R33/02

CPC分类号： G01R33/0283 ,  G01R15/148 ,  G01R33/0286

摘要： A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component having a capacitive magneto-MEMS component, a compensator and an output component for sensing magnetic fields and for providing, in response thereto, an indication of the current present in a respective conductor to be measured. In one embodiment, first and second mechanical sense components are electrically conductive and operate to sense a change in a capacitance between the mechanical sense components in response to a mechanical indicator from a magnetic-to-mechanical converter.

摘要翻译： 基于微机电系统（MEMS）的电流和磁场传感器包括具有电容式磁MEMS组件的基于MEMS的磁场感测部件，补偿器和用于感测磁场的输出部件，并且响应于此而提供 当前存在于待测量的导体中的指示。 在一个实施例中，第一和第二机械感测部件是导电的并且用于响应于来自磁 - 机械转换器的机械指示器感测机械感测部件之间的电容的变化。

公开(公告)号：US20050270013A1

公开(公告)日：2005-12-08

申请号：US10863442

申请日：2004-06-07

申请人： Ertugrul Berkcan ,  Christopher Kapusta ,  Glenn Claydon ,  Anis Zribi ,  Laura Meyer ,  Wei-Cheng Tian

发明人： Ertugrul Berkcan ,  Christopher Kapusta ,  Glenn Claydon ,  Anis Zribi ,  Laura Meyer ,  Wei-Cheng Tian

IPC分类号： G01R15/20 ,  G01R33/028 ,  G01R33/02

CPC分类号： G01R33/0283 ,  G01R15/148 ,  G01R33/0286

摘要： A micro-electromechanical system (MEMS) current sensor is described as including a first conductor, a magnetic field shaping component for shaping a magnetic field produced by a current in the first conductor, and a MEMS-based magnetic field sensing component including a magneto-MEMS component for sensing the shaped magnetic field and, in response thereto, providing an indication of the current in the first conductor. A method for sensing a current using MEMS is also described as including shaping a magnetic field produced with a current in a first conductor, sensing the shaped magnetic field with a MEMS-based magnetic field sensing component having a magneto-MEMS component magnetic field sensing circuit, and providing an indication of the current in the first conductor.

摘要翻译： 微机电系统（MEMS）电流传感器被描述为包括第一导体，用于使由第一导体中的电流产生的磁场成形的磁场成形部件，以及包括磁 - 用于感测成形磁场的MEMS组件，并且响应于此，提供第一导体中的电流的指示。 还描述了一种用于感测使用MEMS的电流的方法，包括使用在第一导体中的电流产生的磁场成形，用具有磁MEMS组件磁场感测电路的基于MEMS的磁场感测组件感测成形的磁场 并且提供第一导体中的电流的指示。

公开(公告)号：US20070052410A1

公开(公告)日：2007-03-08

申请号：US11506493

申请日：2006-08-18

申请人： Ertugrul Berkcan ,  Christopher Kapusta ,  Glenn Claydon ,  Anis Zribi ,  Laura Meyer ,  Wei-Cheng Tian

发明人： Ertugrul Berkcan ,  Christopher Kapusta ,  Glenn Claydon ,  Anis Zribi ,  Laura Meyer ,  Wei-Cheng Tian

IPC分类号： G01R1/20

CPC分类号： G01R33/0283 ,  G01R15/148 ,  G01R33/0286

摘要： A micro-electromechanical system (MEMS) current sensor is described as including a first conductor, a magnetic field shaping component for shaping a magnetic field produced by a current in the first conductor, and a MEMS-based magnetic field sensing component including a magneto-MEMS component for sensing the shaped magnetic field and, in response thereto, providing an indication of the current in the first conductor. A method for sensing a current using MEMS is also described as including shaping a magnetic field produced with a current in a first conductor, sensing the shaped magnetic field with a MEMS-based magnetic field sensing component having a magneto-MEMS component magnetic field sensing circuit, and providing an indication of the current in the first conductor.

公开(公告)号：US20060076947A1

公开(公告)日：2006-04-13

申请号：US11289910

申请日：2005-11-30

申请人： Ertugrul Berkcan ,  Shankar Chandrasekaran ,  Christopher Kapusta ,  Laura Meyer ,  Glenn Claydon ,  Debbie Jones ,  Anis Zribi

发明人： Ertugrul Berkcan ,  Shankar Chandrasekaran ,  Christopher Kapusta ,  Laura Meyer ,  Glenn Claydon ,  Debbie Jones ,  Anis Zribi

IPC分类号： G01R1/20

CPC分类号： G01R15/207 ,  G01R15/148 ,  G01R33/0283 ,  G01R33/0286 ,  G01R35/005 ,  Y10T29/49002

摘要： A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component a structural component comprising a silicon substrate and a compliant layer comprising a material selected from the group consisting of silicon dioxide and silicon nitride, a magnetic-to-mechanical converter coupled to the structural component to provide a mechanical indication of the magnetic field, and a strain responsive component coupled to the structural component to sense the mechanical indication and to provide an indication of the current in the current carrying conductor in response thereto.

摘要翻译： 基于微机电系统（MEMS）的电流和磁场传感器包括基于MEMS的磁场感测部件，包括硅衬底的结构部件和包括选自二氧化硅和氮化硅的材料的柔性层， 耦合到所述结构部件以提供所述磁场的机械指示的磁 - 机械转换器，以及耦合到所述结构部件以感测所述机械指示并且提供所述载流导体中的电流的指示的应变响应部件 回应。

公开(公告)号：US20050262943A1

公开(公告)日：2005-12-01

申请号：US10854845

申请日：2004-05-27

申请人： Glenn Claydon ,  Stacey Goodwin ,  Anis Zribi ,  Wei-Cheng Tian ,  Aaron Knobloch ,  Walter Cicha ,  Patrick Malenfant

发明人： Glenn Claydon ,  Stacey Goodwin ,  Anis Zribi ,  Wei-Cheng Tian ,  Aaron Knobloch ,  Walter Cicha ,  Patrick Malenfant

IPC分类号： G01N29/02 ,  G01N29/036 ,  G01N29/04 ,  G01N29/24

CPC分类号： G01N29/036 ,  G01N29/022 ,  G01N29/2418 ,  G01N2291/0215 ,  G01N2291/0255 ,  G01N2291/0256

摘要： According to some embodiments, a Microelectromechanical System (MEMS) sensor includes a sensing material on a spring element. The sensor may also include a detector adapted to determine a resonant frequency associated with the spring element, wherein the resonant frequency changes upon the exposure of the sensing material to an analyte.

摘要翻译： 根据一些实施例，微机电系统（MEMS）传感器包括弹簧元件上的感测材料。 传感器还可以包括适于确定与弹簧元件相关联的谐振频率的检测器，其中当检测材料暴露于分析物时，谐振频率发生变化。

公开(公告)号：US20080204743A1

公开(公告)日：2008-08-28

申请号：US12104471

申请日：2008-04-17

申请人： Sandip Maity ,  Ayan Banerjee ,  Anis Zribi ,  Stacey Kennerly ,  Long Que ,  Glenn Claydon ,  Shankar Chandrasekaran ,  Shivappa Goravar

发明人： Sandip Maity ,  Ayan Banerjee ,  Anis Zribi ,  Stacey Kennerly ,  Long Que ,  Glenn Claydon ,  Shankar Chandrasekaran ,  Shivappa Goravar

IPC分类号： G01J3/44

CPC分类号： G01J3/44 ,  G01J1/44 ,  G01J3/02 ,  G01J3/0229 ,  G01J3/0232 ,  G01J3/0256 ,  G01J3/0264 ,  G01J3/0272 ,  G01J3/0286 ,  G01J3/0297 ,  G01J3/1895 ,  G01J3/4338 ,  G02B26/04 ,  H01L31/107

摘要： A method of Raman detection for a portable, integrated spectrometer instrument includes directing Raman scattered photons by a sample to an avalanche photodiode (APD), the APD configured to generate an output signal responsive to the intensity of the Raman scattered photons incident thereon. The output signal of the APD is amplified and passed through a discriminator so as to reject at least one or more of amplifier noise and dark noise. A number of discrete output pulses within a set operational range of the discriminator is counted so as to determine a number of photons detected by the APD.

公开(公告)号：US07586603B2

公开(公告)日：2009-09-08

申请号：US12104471

申请日：2008-04-17

申请人： Sandip Maity ,  Ayan Banerjee ,  Anis Zribi ,  Stacey Kennerly ,  Long Que ,  Glenn Claydon ,  Shankar Chandrasekaran ,  Shivappa Goravar

发明人： Sandip Maity ,  Ayan Banerjee ,  Anis Zribi ,  Stacey Kennerly ,  Long Que ,  Glenn Claydon ,  Shankar Chandrasekaran ,  Shivappa Goravar

IPC分类号： G01J3/44

CPC分类号： G01J3/44 ,  G01J1/44 ,  G01J3/02 ,  G01J3/0229 ,  G01J3/0232 ,  G01J3/0256 ,  G01J3/0264 ,  G01J3/0272 ,  G01J3/0286 ,  G01J3/0297 ,  G01J3/1895 ,  G01J3/4338 ,  G02B26/04 ,  H01L31/107

摘要： A method of Raman detection for a portable, integrated spectrometer instrument includes directing Raman scattered photons by a sample to an avalanche photodiode (APD), the APD configured to generate an output signal responsive to the intensity of the Raman scattered photons incident thereon. The output signal of the APD is amplified and passed through a discriminator so as to reject at least one or more of amplifier noise and dark noise. A number of discrete output pulses within a set operational range of the discriminator is counted so as to determine a number of photons detected by the APD.

摘要翻译： 用于便携式，集成光谱仪器的拉曼检测方法包括将样品的拉曼散射光子引导到雪崩光电二极管（APD），APD被配置为响应入射在其上的拉曼散射光子的强度产生输出信号。 APD的输出信号被放大并通过鉴频器，以便抑制至少一个或多个放大器噪声和暗噪声。 对鉴别器的设定操作范围内的多个离散输出脉冲进行计数，以便确定APD检测到的光子数量。

公开(公告)号：US20070236697A1

公开(公告)日：2007-10-11

申请号：US11400948

申请日：2006-04-10

申请人： Anis Zribi ,  Stacey Kennerly ,  Glenn Claydon ,  Long Que ,  Ayan Banerjee ,  Shankar Chandrasekaran ,  Shivappa Goravar ,  David Hays

发明人： Anis Zribi ,  Stacey Kennerly ,  Glenn Claydon ,  Long Que ,  Ayan Banerjee ,  Shankar Chandrasekaran ,  Shivappa Goravar ,  David Hays

IPC分类号： G01B9/02 ,  G01J3/45

CPC分类号： G01J3/02 ,  G01J3/0208 ,  G01J3/0256 ,  G01J3/0272 ,  G01J3/0291 ,  G01J3/26 ,  G01J3/44 ,  G01N21/65 ,  G01N21/658 ,  G01N2201/0221

摘要： An integrated spectrometer instrument, including an optical source formed on a chip, the optical source configured to generate an incident optical beam upon a sample to be measured. Collection optics formed on the chip are configured to receive a scattered optical beam from the sample, and filtering optics formed on the chip are configured to remove elastically scattered light from the scattered optical beam at a wavelength corresponding to the optical source. A tunable filter formed on the chip is configured to pass selected wavelengths of the scattered optical beam, and a photo detector device formed on the chip is configured to generate an output signal corresponding to the intensity of photons passed through the tunable filter.

摘要翻译： 一种集成光谱仪器，包括形成在芯片上的光源，所述光源被配置为在待测样品上产生入射光束。 形成在芯片上的采集光学元件被配置为接收来自样品的散射光束，并且形成在芯片上的滤光光学元件被配置为以对应于光源的波长去除来自散射光束的弹性散射光。 形成在芯片上的可调滤波器被配置为通过散射光束的选定波长，并且形成在芯片上的光检测器装置被配置为产生对应于通过可调谐滤波器的光子的强度的输出信号。