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公开(公告)号：US11152189B2
公开(公告)日：2021-10-19
申请号：US16823140
申请日：2020-03-18
申请人： FEI Company
发明人： James Bishop , Daniel Totonjian , Chris Elbadawi , Charlene Lobo , Milos Toth
IPC分类号： H01J37/244 , H01J37/28
摘要： Various methods and systems are provided for imaging a sample under low vacuum with a charged particle beam. A magnetic field is provided in a detection area of the detector. Gas and plasma are provided in the detection area while detecting charged particles emitted from the sample. Sample image is formed based on the detected charged particles.
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2.发明授权公开(公告)号：US12061159B2
公开(公告)日：2024-08-13
申请号：US17728869
申请日：2022-04-25
申请人： FEI COMPANY
IPC分类号： G01N23/22 , G01N23/20 , G01N23/203 , G01N23/2206 , G01N23/2252 , G01N23/2257
CPC分类号： G01N23/2206 , G01N23/203 , G01N23/2252 , G01N23/2257
摘要： Practical implementation of Particle-Induced X-ray Emission (PIXE) on a focused ion beam apparatus or on a dual-beam apparatus comprising both focused-ion beam and scanning microscopy capabilities is described. Accordingly, an analytical method comprises: directing and focusing a beam of ions comprising a mixture of protons and non-hydrogen ions onto a sample, wherein the kinetic energy of ions of the mixture is not greater than 50 kilo-electron-Volts (keV); and detecting and measuring X-rays that are emitted from the sample in response to the impingement of the protons and non-hydrogen ions onto the sample.
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公开(公告)号：US20210296086A1
公开(公告)日：2021-09-23
申请号：US16823140
申请日：2020-03-18
申请人： FEI Company
发明人： James Bishop , Daniel Totonjian , Chris Elbadawi , Charlene Lobo , Milos Toth
IPC分类号： H01J37/244 , H01J37/28
摘要： Various methods and systems are provided for imaging a sample under low vacuum with a charged particle beam. A magnetic field is provided in a detection area of the detector. Gas and plasma are provided in the detection area while detecting charged particles emitted from the sample. Sample image is formed based on the detected charged particles.
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