公开(公告)号：US20160133436A1

公开(公告)日：2016-05-12

申请号：US14939218

申请日：2015-11-12

Applicant: FEI Company

Inventor： Jacob Simon Faber ,  Lubomir Tuma ,  Timothy Burnett ,  Libor Novak

IPC: H01J37/26 ,  G01K11/30

CPC classification number: H01J37/261 ,  G01K11/30 ,  H01J37/20 ,  H01J37/244 ,  H01J2237/2001 ,  H01J2237/2065 ,  H01J2237/28

Abstract: Disclosed is a method of using a charged particle microscope for inspecting a sample mounted on a sample holder. The microscope is equipped with a solid state detector for detecting secondary particles emanating from the sample in response to irradiation of the sample with the primary beam, with the solid state detector in direct optical view of the sample. In some embodiments, the sample is mounted on a heater with a fast thermal response time. The method comprises contactless measurement of the temperature of the sample and/or sample holder using the solid state detector.

Abstract translation: 公开了使用带电粒子显微镜来检查安装在样品架上的样品的方法。 显微镜配备有固态检测器，用于响应于初级束的样品照射而检测从样品发出的二次颗粒，固态检测器以样品的直接光学视图。 在一些实施例中，将样品安装在具有快速热响应时间的加热器上。 该方法包括使用固态检测器对样品和/或样品保持器的温度进行非接触式测量。

公开(公告)号：US10134563B2

公开(公告)日：2018-11-20

申请号：US14939218

申请日：2015-11-12

Applicant: FEI Company

Inventor： Jacob Simon Faber ,  Lubomir Tuma ,  Timothy Burnett ,  Libor Novak

IPC: G01K1/08 ,  H01J37/26 ,  G01K11/30 ,  H01J37/20 ,  H01J37/244

Abstract: Disclosed is a method of using a charged particle microscope for inspecting a sample mounted on a sample holder. The microscope is equipped with a solid state detector for detecting secondary particles emanating from the sample in response to irradiation of the sample with the primary beam, with the solid state detector in direct optical view of the sample. In some embodiments, the sample is mounted on a heater with a fast thermal response time. The method comprises contactless measurement of the temperature of the sample and/or sample holder using the solid state detector.