METHOD OF STABILIZING TEMPERATURE SENSING IN THE PRESENCE OF TEMPERATURE-SENSING COMPONENT TEMPERATURE VARIATION

    公开(公告)号:US20230314238A1

    公开(公告)日:2023-10-05

    申请号:US17707997

    申请日:2022-03-30

    IPC分类号: G01K1/20 G01J5/53 G01K11/30

    CPC分类号: G01K1/20 G01J5/53 G01K11/30

    摘要: A method of stabilizing temperature sensing in presence of temperature-sensing component temperature variation includes steps of: obtaining response value caused by black body at first temperature of a thermal imager core chip; obtaining high-temperature first-order linear function of high-temperature black body response value versus thermal imager core chip temperature; obtaining low-temperature first-order linear function of low-temperature black body response value versus thermal imager core chip temperature; obtaining response value of high-temperature first-order linear function at first temperature, response value of high-temperature first-order linear function at second temperature of the thermal imager core chip, response value of low-temperature first-order linear function at first temperature, response value of low-temperature first-order linear function at second temperature, and response value of black body and substituting the five values into an equation for correcting the response values; and obtaining instant corrected value of the response value of the black body.

    HIGH SPATIAL RESOLUTION NON-CONTACT TEMPERATURE MEASUREMENT
    2.
    发明申请
    HIGH SPATIAL RESOLUTION NON-CONTACT TEMPERATURE MEASUREMENT 有权
    高空间分辨率非接触式温度测量

    公开(公告)号:US20130340127A1

    公开(公告)日:2013-12-19

    申请号:US13920868

    申请日:2013-06-18

    IPC分类号: G01Q60/58

    摘要: Advantageous systems, methods, and computer-readable media for temperature measurement of a sample, using new temperature measurement and mapping techniques, are provided. The technique employs a temperature sensitive electron signal in a scanning electron microscope (SEM) and provides both high spatial resolution and non-contact temperature measurement capabilities no existing technique can adequately combine. This technique thus adds a new capability—temperature measurement and mapping—to the collection of existing SEM capabilities.

    摘要翻译: 提供了使用新的温度测量和映射技术的用于样品温度测量的有利的系统,方法和计算机可读介质。 该技术在扫描电子显微镜(SEM)中采用温度敏感的电子信号,并提供高空间分辨率和非接触式温度测量能力,而现有的技术无法充分结合。 因此,该技术增加了新的能力 - 温度测量和映射,以收集现有的SEM功能。

    In-situ temperature measurement using X-ray diffraction
    5.
    发明授权
    In-situ temperature measurement using X-ray diffraction 失效
    使用X射线衍射的原位温度测量

    公开(公告)号:US5636258A

    公开(公告)日:1997-06-03

    申请号:US554209

    申请日:1995-10-24

    CPC分类号: G01K11/30 G01N23/207

    摘要: A non-contact in-situ temperature measurement apparatus for a single crystal substrate such as a semiconductor wafer using X-ray diffraction. Utilizing the Bragg condition for X-ray diffraction, the lattice constant of the semiconductor substrate can be determined either by measuring the diffraction angle for a monochromatic X-ray (monochromatic approach) or by measuring the wavelength of an X-ray diffracted with a certain scattering angle (polychromatic approach). The lattice constant, as a well-known function of temperature, is finally converted into the temperature of the semiconductor substrate.

    摘要翻译: 一种用于单晶衬底(例如使用X射线衍射的半导体晶片)的非接触式现场温度测量装置。 利用用于X射线衍射的布拉格条件,半导体衬底的晶格常数可以通过测量单色X射线(单色法)的衍射角或通过测量以某种方式衍射的X射线的波长来确定 散射角(多色方法)。 作为公知的温度函数的晶格常数最终转换为半导体衬底的温度。

    Electrode member, electron energy analyzer, photoelectron energy analyzer, and temperature measuring apparatus
    7.
    发明授权
    Electrode member, electron energy analyzer, photoelectron energy analyzer, and temperature measuring apparatus 有权
    电极部件,电子能量分析装置,光电子能量分析装置以及温度测定装置

    公开(公告)号:US08944679B2

    公开(公告)日:2015-02-03

    申请号:US13392569

    申请日:2010-08-18

    CPC分类号: G01N23/227 G01K11/30

    摘要: An electrode member has a plurality of spherical electrode sections wherein the radiuses of the spherical sections are different from each other. The spherical electrode sections are disposed in a state wherein the center points of the respective spheres match each other and the spherical electrode sections are insulated from each other such that voltages can be independently applied thereto. Electron-passing openings for electrons, which move from the center point to the outside of the electrode member, are formed at positions where the spherical electrode sections and a plurality of straight lines radially extending from the center point intersect each other.

    摘要翻译: 电极部件具有多个球形电极部分,其中球形部分的半径彼此不同。 球状电极部分设置在各个球体的中心点彼此匹配的状态,并且球形电极部分彼此绝缘,使得可以独立地施加电压。 在从中心点向径向延伸的球形电极部分和多条直线相交的位置处,形成从电极部件的中心点向外侧移动的电子的电子通过孔。

    High spatial resolution non-contact temperature measurement
    8.
    发明授权
    High spatial resolution non-contact temperature measurement 有权
    高空间分辨率非接触式温度测量

    公开(公告)号:US08809783B2

    公开(公告)日:2014-08-19

    申请号:US13920868

    申请日:2013-06-18

    IPC分类号: G01K9/00 G01K11/30

    摘要: Systems, methods, and computer-readable media for temperature measurement of a sample, using new temperature measurement and mapping techniques, are provided. The technique employs a temperature sensitive electron signal in a scanning electron microscope (SEM) and provides both high spatial resolution and non-contact temperature measurement capabilities. An electron beam of the SEM can be initiated to interact with a sample, and a temperature sensitive signal can be collected from the sample and analyzed.

    摘要翻译: 提供了使用新的温度测量和映射技术的用于样品温度测量的系统,方法和计算机可读介质。 该技术在扫描电子显微镜(SEM)中采用温度敏感的电子信号,并提供高空间分辨率和非接触式温度测量功能。 可以启动SEM的电子束与样品相互作用,并且可以从样品中收集温度敏感信号并进行分析。

    Method for designating a component having a heat insulation layer and for determining its operating time
    9.
    发明授权
    Method for designating a component having a heat insulation layer and for determining its operating time 有权
    用于指定具有绝热层并用于确定其工作时间的部件的方法

    公开(公告)号:US08252601B2

    公开(公告)日:2012-08-28

    申请号:US12197742

    申请日:2008-08-25

    IPC分类号: G01N21/00

    CPC分类号: G01K3/04 G01K11/30

    摘要: A method for designating a component, coated with a heat insulation layer including zirconium dioxide (ZrO2) stabilized with yttrium oxide (Y2O3) [YSZ], and for determining its operating time or operating temperature is provided. The method includes doping the heat insulation layer and marking the doped heat insulation layer, with at least one metal oxide in at least one surface region of the component. The metal oxide is selected such that the doped region of YSZ is visible or can be made optically visible in order to designate the component. The method also includes comparing a slower or faster change in lattice parameters of the doped YSZ region, as compared with undoped YSZ, and determining the operating time of the component under temperature by comparing the lattice parameters with a known calibrating characteristic curve.

    摘要翻译: 提供涂覆有包含用氧化钇(Y 2 O 3)[YSZ]稳定的二氧化锆(ZrO 2)和用于确定其操作时间或操作温度的绝热层的组分的方法。 该方法包括掺杂绝热层并且在该组件的至少一个表面区域中用至少一种金属氧化物标记掺杂的隔热层。 选择金属氧化物使得YSZ的掺杂区域是可见的或可以被制成光学可见的以便表示该组分。 该方法还包括比较与未掺杂YSZ相比掺杂YSZ区域的晶格参数更慢或更快的变化,并且通过将晶格参数与已知校准特性曲线进行比较来确定组件在温度下的操作时间。