-
公开(公告)号：US20170092803A1
公开(公告)日：2017-03-30
申请号：US15290054
申请日：2016-10-11
Applicant: FIRST SOLAR, INC.
Inventor： John Barden , Rick C. Powell
IPC: H01L31/18 , H01L31/046 , C23C16/448 , H01L31/0296
CPC classification number: H01L31/1828 , C23C14/228 , C23C14/24 , C23C14/243 , C23C14/56 , C23C16/448 , H01L21/02557 , H01L21/02562 , H01L31/02963 , H01L31/046 , Y02E10/543 , Y02P70/521
Abstract: An improved feeder system and method for continuous vapor transport deposition that includes at least two vaporizers couple to a common distributor through an improved seal for separately vaporizing and collecting at least any two vaporizable materials for deposition as a material layer on a substrate. Multiple vaporizer provide redundancy and allow for continuous deposition during vaporizer maintenance and repair.
-
公开(公告)号：US10749068B2
公开(公告)日：2020-08-18
申请号：US16185966
申请日：2018-11-09
Applicant: First Solar, Inc.
Inventor： John Barden , Rick C. Powell
IPC: C23C16/00 , H01L31/18 , H01L21/02 , C23C16/448 , C23C14/22 , C23C14/24 , C23C14/56 , H01L31/046 , H01L31/0296
Abstract: An improved feeder system and method for continuous vapor transport deposition that includes at least two vaporizers couple to a common distributor through an improved seal for separately vaporizing and collecting at least any two vaporizable materials for deposition as a material layer on a substrate. Multiple vaporizer provide redundancy and allow for continuous deposition during vaporizer maintenance and repair.
-
公开(公告)号：US09490120B2
公开(公告)日：2016-11-08
申请号：US13671195
申请日：2012-11-07
Applicant: FIRST SOLAR, INC.
Inventor： John Barden , Rick C. Powell
CPC classification number: H01L31/1828 , C23C14/228 , C23C14/24 , C23C14/243 , C23C14/56 , C23C16/448 , H01L21/02557 , H01L21/02562 , H01L31/02963 , H01L31/046 , Y02E10/543 , Y02P70/521
Abstract: An improved feeder system and method for continuous vapor transport deposition that includes at least two vaporizers couple to a common distributor through an improved seal for separately vaporizing and collecting at least any two vaporizable materials for deposition as a material layer on a substrate. Multiple vaporizer provide redundancy and allow for continuous deposition during vaporizer maintenance and repair.
Abstract translation: 一种用于连续蒸气传输沉积的改进的馈送系统和方法，其包括通过改进的密封件耦合到公共分配器的至少两个蒸发器，用于分别蒸发并收集至少任何两种可蒸发材料，以沉积作为基底上的材料层。 多个蒸发器提供冗余并允许蒸发器维护和修理期间的连续沉积。
-
公开(公告)号：US20240247363A1
公开(公告)日：2024-07-25
申请号：US18628285
申请日：2024-04-05
Applicant: First Solar, Inc.
Inventor： Zhigang Ban , John Barden , Jerry Drennan , Litian Liu , Rick Powell , Nirav Vora , Yaojun Xu
IPC: C23C14/24
CPC classification number: C23C14/243
Abstract: Distributor assemblies for vapor transport deposition systems, and methods of conducting vapor transport deposition, are described.
-
公开(公告)号：US20180323332A1
公开(公告)日：2018-11-08
申请号：US16040173
申请日：2018-07-19
Applicant: First Solar, Inc.
Inventor： John Barden , Changming Jin , Feng Liao , Rick C. Powell , Gang Xiong
CPC classification number: H01L31/18 , C23C14/024 , C23C14/0629 , C23C14/228 , C23C14/58 , H01L21/67173 , H01L21/6776 , H01L31/1828 , Y02E10/543 , Y02P70/521
Abstract: A vapor transport deposition system and method that includes a vaporizer and distributor unit and at least one auxiliary process unit for integrating thin-film layer deposition with one or more pre- or post-deposition processes.
-
Patent Agency Ranking
公开(公告)号：US20130203202A1
公开(公告)日：2013-08-08
申请号：US13754535
申请日：2013-01-30
Applicant: FIRST SOLAR, INC.
Inventor： Gang Xiong , John Barden , Feng Liao , Rick C. Powell , Changming Jin
IPC: H01L31/18
CPC classification number: H01L31/18 , C23C14/024 , C23C14/0629 , C23C14/228 , C23C14/58 , H01L21/67173 , H01L21/6776 , H01L31/1828 , Y02E10/543 , Y02P70/521
Abstract: vapor transport deposition system and method that includes a vaporizer and distributor unit and at least one auxiliary process unit for integrating thin-film layer deposition with one or more pre- or post-deposition processes.
Abstract translation: 蒸气输送沉积系统和方法，其包括蒸发器和分配器单元以及用于将薄膜层沉积与一个或多个沉积前或沉积后工艺集成的至少一个辅助处理单元。
-
公开(公告)号：US20210301387A1
公开(公告)日：2021-09-30
申请号：US17267189
申请日：2019-08-09
Applicant: First Solar, Inc.
Inventor： John Barden , Rick Powell , Aaron Roggelin , Nirav Vora
IPC: C23C14/22 , C23C14/26 , C23C14/56 , C23C16/448
Abstract: Distributor assemblies for vapor transport deposition systems, and methods of conducting vapor transport deposition, are described.
-
公开(公告)号：US20190081199A1
公开(公告)日：2019-03-14
申请号：US16185966
申请日：2018-11-09
Applicant: First Solar, Inc.
Inventor： John Barden , Rick C. Powell
IPC: H01L31/18 , C23C14/22 , C23C14/24 , C23C16/448 , H01L21/02 , H01L31/0296 , H01L31/046 , C23C14/56
Abstract: An improved feeder system and method for continuous vapor transport deposition that includes at least two vaporizers couple to a common distributor through an improved seal for separately vaporizing and collecting at least any two vaporizable materials for deposition as a material layer on a substrate. Multiple vaporizer provide redundancy and allow for continuous deposition during vaporizer maintenance and repair.
-
公开(公告)号：US10147838B2
公开(公告)日：2018-12-04
申请号：US15290054
申请日：2016-10-11
Applicant: FIRST SOLAR, INC.
Inventor： John Barden , Rick C. Powell
IPC: C23C16/448 , H01L31/18 , H01L21/02 , C23C14/22 , C23C14/24 , C23C14/56 , H01L31/046 , H01L31/0296
Abstract: An improved feeder system and method for continuous vapor transport deposition that includes at least two vaporizers coupled to a common distributor through an improved seal for separately vaporizing and collecting at least any two vaporizable materials for deposition as a material layer on a substrate. Multiple vaporizers provide redundancy and allow for continuous deposition during vaporizer maintenance and repair.
-
公开(公告)号：US20130130475A1
公开(公告)日：2013-05-23
申请号：US13671195
申请日：2012-11-07
Applicant: First Solar, Inc.
Inventor： John Barden , Rick C. Powell
IPC: H01L21/02 , C23C16/448
CPC classification number: H01L31/1828 , C23C14/228 , C23C14/24 , C23C14/243 , C23C14/56 , C23C16/448 , H01L21/02557 , H01L21/02562 , H01L31/02963 , H01L31/046 , Y02E10/543 , Y02P70/521
Abstract: An improved feeder system and method for continuous vapor transport deposition that includes at least two vaporizers couple to a common distributor through an improved seal for separately vaporizing and collecting at least any two vaporizable materials for deposition as a material layer on a substrate. Multiple vaporizer provide redundancy and allow for continuous deposition during vaporizer maintenance and repair.
Abstract translation: 一种用于连续蒸气传输沉积的改进的馈送系统和方法，其包括通过改进的密封件耦合到公共分配器的至少两个蒸发器，用于分别蒸发并收集至少任何两种可蒸发材料，以沉积作为基底上的材料层。 多个蒸发器提供冗余并允许蒸发器维护和修理期间的连续沉积。
-
-
-
-
-
-
-
-
-
Search Results
19
records
(took 0.015 seconds)
