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    Method of providing desirable wetting and release characterstics between a mold and a polymerizable composition
    1.
    发明申请
    Method of providing desirable wetting and release characterstics between a mold and a polymerizable composition 有权
    在模具和可聚合组合物之间提供所需的润湿和释放特性的方法

    公开(公告)号：US20060175736A1

    公开(公告)日：2006-08-10

    申请号：US11244428

    申请日：2005-10-05

    申请人： Frank Xu ,  Pankaj Lad ,  Ian McMackin ,  Van Truskett ,  Edward Fletcher

    发明人： Frank Xu ,  Pankaj Lad ,  Ian McMackin ,  Van Truskett ,  Edward Fletcher

    IPC分类号： B28B7/36

    CPC分类号： G03F7/0002 ,  B41C1/10 ,  B41M7/0072 ,  B41M7/0081 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  Y10S977/887

    摘要： The present invention provides a method that features improved wetting characteristics while allowing preferential adhesion and release characteristics with respect to a substrate and a mold having imprinting material disposed therebetween. The method includes coating a surface of the mold with a volume of surfactant containing solution. The surfactant in the solution includes a hydrophobic component consisting essentially of a plurality of fluorine-containing molecules. The distribution of the plurality of the fluorine atoms in the fluorine-containing molecules, as well as the fluorine-containing molecules throughout the volume provides a desired contact angle with respect to a polymerizable composition disposed on the substrate. The contact angle is in a range of 50° or less.

    摘要翻译： 本发明提供了一种具有改进的润湿特性的方法，同时允许相对于基材和在其之间设置有压印材料的模具的优先粘合和释放特性。 该方法包括用一定体积的含表面活性剂的溶液涂覆模具的表面。 溶液中的表面活性剂包括基本上由多个含氟分子组成的疏水组分。 含氟分子中的多个氟原子的分布以及整个体积中的含氟分子相对于设置在基材上的可聚合组合物提供期望的接触角。 接触角在50°以下的范围内。

    System for controlling a volume of material on a mold
    8.
    发明申请
    System for controlling a volume of material on a mold 有权
    用于控制模具上的材料体积的系统

    公开(公告)号：US20060121141A1

    公开(公告)日：2006-06-08

    申请号：US11101139

    申请日：2005-04-07

    申请人： Steven Shackleton ,  Ian McMackin ,  Pankaj Lad ,  Van Truskett

    发明人： Steven Shackleton ,  Ian McMackin ,  Pankaj Lad ,  Van Truskett

    IPC分类号： B29C35/08

    CPC分类号： G03F7/0002 ,  B82Y10/00 ,  B82Y40/00 ,  Y10S977/887

    摘要： A system for controlling a volume of liquid on a mold that features a body defining a volume with an aperture formed into the body and positioned proximate to the mold. A pump system is in fluid communication with the body, and the aperture and the pump system are established to create a stream of fluid moving between the mold and the volume. In this manner a quantity of fluid is removed while retained upon the mold is a desired portion of the fluid to undertake imprint lithographic processes.

    摘要翻译： 一种用于控制模具上的液体体积的系统，其特征在于，具有限定体积的主体，所述体积具有形成在所述主体中并且定位成靠近所述模具的孔。 泵系统与主体流体连通，并且孔和泵系统被建立以产生在模具和体积之间移动的流体流。 以这种方式，除去一定量的流体，同时保留在模具上是流体的期望部分以进行压印光刻工艺。