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公开(公告)号:US20020094677A1
公开(公告)日:2002-07-18
申请号:US10044979
申请日:2002-01-15
发明人: Akira Furuya , Chikashi Anayama , Katsumi Sugiura , Kensei Nakao , Taro Hasegawa
IPC分类号: H01L021/44
CPC分类号: B82Y20/00 , H01L21/02395 , H01L21/0243 , H01L21/02433 , H01L21/02461 , H01L21/02463 , H01L21/02505 , H01L21/02546 , H01L21/02576 , H01L21/0262 , H01S5/2201 , H01S5/2238 , H01S5/305 , H01S5/3054 , H01S5/34326 , H01S5/3436 , H01S2301/173 , H01S2304/04
摘要: In the S3-type semiconductor laser, when an angle of a first growth profile line to the first principal plane, the first growth profile line connecting respective lower side lines of an upper inclined plane and a lower inclined plane of the first layer of the first conduction type cladding layer is null1, an angle of a second growth profile line to the first principal plane, the second growth profile line connecting respective lower side lines of an upper inclined plane and a lower inclined plane of the second layer of the first conduction type cladding layer is null2, an angle of a third growth profile line to the first principal plane, the third growth profile line connecting respective lower side lines of an upper inclined plane and a lower inclined plane of the third layer of the first conduction type cladding layer is null3, and an angle of a fourth growth profile line to the first principal plane, the fourth growth profile line connecting respective lower side lines of an upper inclined plane and a lower inclined plane of the fourth layer of the first conduction type cladding layer is null4, relationships null1 null3, null3