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公开(公告)号:US20160315084A1
公开(公告)日:2016-10-27
申请号:US14691960
申请日:2015-04-21
Applicant: GLOBALFOUNDRIES INC.
Inventor: Xusheng WU , HongLiang SHEN , Changyong XIAO , Jianhua YIN , Jie CHEN , Jin Ping LIU , Hong YU , Zhenyu HU , Lan YANG , Wanxun HE
IPC: H01L27/092 , H01L29/10 , H01L21/8238
CPC classification number: H01L27/0924 , H01L21/823807 , H01L21/823821 , H01L21/82385 , H01L29/1033
Abstract: There is set forth herein in one embodiment a semiconductor structure having a first region and a second region. The first region can include fins of a first fin height and the second region can include fins of a second fin height.
Abstract translation: 这里在一个实施例中阐述了具有第一区域和第二区域的半导体结构。 第一区域可以包括第一翅片高度的翅片,并且第二区域可以包括具有第二翅片高度的翅片。
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公开(公告)号:US20180158821A1
公开(公告)日:2018-06-07
申请号:US15370555
申请日:2016-12-06
Applicant: GLOBALFOUNDRIES INC.
Inventor: Changyong XIAO , Xusheng WU , Min-hwa CHI , Jie CHEN
IPC: H01L27/092 , H01L21/8238
CPC classification number: H01L27/092 , H01L21/823842 , H01L21/82385 , H01L29/4966 , H01L29/517 , H01L29/66545
Abstract: The present disclosure relates to semiconductor structures and, more particularly, to gate structures with low resistance and methods of manufacture. The structure includes: an nFET device formed in a first cavity having a first volume which is filled with conductive material; and a pFET device forming in a second cavity having a second volume greater than the first volume. The second volume being filled with the conductive material.
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