摘要:
An attenuating phase metrology cell on a reticle comprising an attenuating feature and a binary feature. The metrology cell is used to determine amount of focal shift associated with the attenuating phase-shifting material. A dimension of an image of the attenuating feature is measured at a number of focal distances from the reticle. Thereafter a first relationship between the measurements of the attenuating feature and the focal distance is determined. A dimension of an aerial image of the binary feature is also measured at a number of focal distances from the reticle. The relationship between the measurements of the binary feature and focal distance is determined. An amount of focal shift is then determined based upon the first and second relationships. The attenuating metrology pattern can thus be included on an attenuating phase-shifting reticle, such that the focal shift of the attenuating phase-shifting reticle can be determined.
摘要:
A method and apparatus for fabricating a mask for use in patterning a radiation sensitive layer in a lithographic printer. An embedded phase shifting layer is disposed over a substantially transparent base layer such that attenuated regions of the mask are phase shifted approximately 160 to 200 degrees relative to open features in the mask. In accordance with the present invention, radiation transmission is reduced through the open feature regions of the mask. In one embodiment, a thin radiation transmission reducing layer is deposited over the open feature regions of the mask. In another embodiment, the open feature regions of the mask are roughened to reduce radiation transmission. In yet another embodiment, ion implantation is performed in the open feature regions of the mask to reduce transmission. With the reduced transmission of radiation through the open feature regions of the present mask, high resolution lithography employing short wavelength radiation is realized.
摘要:
A metrology pattern on a reticle comprising a phase-shifted feature and an additional phase-shifted feature and/or non phase-shifted feature is disclosed. The metrology pattern can be used to determine the target thickness for achieving 180.degree. phase difference, i.e., zero phase error on a phase-shifted reticle. A test reticle having several such metrology patterns, with several different phase-shifter thickness differences is used to produce a CD versus defocus data for each of the phase-shifter thickness differences by performing an exposure matrix or series of aerial images. The data can be used to determine a target thickness for zero phase error. The data can also be used to determine a correlation between focal shift, phase error, and shifter thickness. The metrology pattern can be placed on reticles used for the fabrication of semiconductor devices, for example, so that an exposure matrix can be performed, to determine any focal shift, which can then be related to phase error.
摘要:
Disclosed is a multi-gear torquer with end covers on both sides of the casing. An input shaft and an output shaft are respectively arranged at the center of the two end covers. A sun gear is fixed on the input shaft and moves along a planet gear engaged in the transmission mechanism. The planet gear meshes with a gear ring and moves around the sun gear, then the planet gear drives the turntable centrally fixed with the output shaft connected to the load end. The multi-gear torquer disclosed herein has the following advantages: large output torque and high mechanical efficiency, and it can be used as power transmission equipment for a car or a train and used as other mechanical transmission equipment.
摘要:
A motor with a variable-speed torque converter is disclosed. A rotor of the motor has a common permanent magnet structure. Permanent magnets are disposed on the rotor. The variable-speed torque converter includes a wheel disc, a wheel ring, a roller, a transmission gear II, a transmission gear III, a round wheel, an annular gear, a driving gear, turning discs, a transmission shaft, and an output shaft. The driving gear fixedly connected to the transmission shaft of the motor drives the transmission gear. The transmission gear is in contact with the annular gear. The transmission gear rotates around the driving gear to drive the wheel disc to rotate together. The wheel disc is fixedly connected to the output shaft to drive a driving wheel to rotate. Therefore, a working capability of the motor is enhanced. The converter can be applied to an electromotor, a generator, or any other power device.
摘要:
A system and method for automated determination of position and movement of a contact lens with respect to a subject wearer's eye based upon a complimentary pair of images, acquired in rapid succession, in which one image of the pair is acquired using light that allows viewing of the pupil and/or limbus through the lens and the other image is acquired using light that is absorbed by the lens to generate an opaque image with a defined edge relative to the surrounding sclera. The images of the pair are acquired in close enough temporal proximity to ensure that eye movement in the interval therebetween is insignificant and both images are in the same approximate reference frame. Thus, the location of the pupil and limbus in one image can be accurately compared with the location of the contact lens edge in the other image.
摘要:
An exemplary technique is provided for communication in a personal area network. The technique includes transmitting, to a personal area network coordinator, joint information of a sensor device indicated by reserved bits and includes a type, a channel access rate, and a latest node buffer occupation rate of the sensor device; receiving, from the personal area network coordinator, information regarding adjusted active duration and duty cycle of the communication of the sensor device; and performing further communication based upon the adjusted active duration and duty cycle. Also, the technique includes receiving, from a sensor device, joint information indicated by reserved bits and includes a type, a channel access rate, and a latest node buffer occupation rate of the sensor device; adjusting an active duration and a duty cycle of the communication of the sensor device; and transmitting information regarding the adjusted active duration and duty cycle to the sensor device.
摘要:
A system and method for generating golden template images in a vision system to inspect an acquired runtime image of an object with a multi-layer printed pattern is provided. The system and method performs a registration process on runtime images using registration models each trained on respective canonical layer mask images, and outputting poses. Based upon the poses, warped layer masks are generated. Combination masks are computed based upon differing combinations of the warped layer masks. Intensity values for pixels of the foreground regions for the combination masks are estimated. The estimated intensity values are then blended associated with the combination masks to generate a golden template image. This golden template image can be used to compare with a runtime image. An exemplary application of this system and method is in print inspection on flat and non-flat surfaces.
摘要:
The present invention provides a method for channel estimation used in a receiver of a multi-carrier communication system, including: receiving a multi-carrier symbols from a transmitter of the multi-carrier communication system; and obtaining channel information of sub-carriers carrying data of the multi-carrier symbols, using selectively time direction interpolation and frequency direction interpolation for channel information of a plurality of scatter pilots of the multi-carrier symbols.
摘要:
In one aspect of the present invention, a battery charging system has a first rectifier adapted for converting an AC voltage at an input thereof to a first DC voltage at an output thereof; a power factor correction (PFC) circuit coupled to the first rectifier, for correcting the power factor of the battery charging system and outputting a second DC voltage; a first power converter coupled to the PFC circuit, for converting the second DC voltage to a third DC voltage; a second power converter coupled to the first power converter, for converting the third DC voltage to a fourth DC voltage to be delivered to a battery; and a first controller adapted for sensing the fourth DC voltage at the output of the second power converter for regulating the second power converter to maintain the fourth DC voltage at a predetermined value.