Method and apparatus for precision determination of phase-shift in a
phase-shifted reticle
    1.
    发明授权
    Method and apparatus for precision determination of phase-shift in a phase-shifted reticle 失效
    用于精确确定相移掩模版中相移的方法和装置

    公开(公告)号:US5789118A

    公开(公告)日:1998-08-04

    申请号:US764667

    申请日:1996-12-11

    摘要: An attenuating phase metrology cell on a reticle comprising an attenuating feature and a binary feature. The metrology cell is used to determine amount of focal shift associated with the attenuating phase-shifting material. A dimension of an image of the attenuating feature is measured at a number of focal distances from the reticle. Thereafter a first relationship between the measurements of the attenuating feature and the focal distance is determined. A dimension of an aerial image of the binary feature is also measured at a number of focal distances from the reticle. The relationship between the measurements of the binary feature and focal distance is determined. An amount of focal shift is then determined based upon the first and second relationships. The attenuating metrology pattern can thus be included on an attenuating phase-shifting reticle, such that the focal shift of the attenuating phase-shifting reticle can be determined.

    摘要翻译: 包括衰减特征和二进制特征的掩模版上的衰减相位测量单元。 测量单元用于确定与衰减相移材料相关的焦点位移量。 衰减特征的图像的尺寸在距离掩模版的多个焦距处被测量。 此后确定衰减特征的测量与焦距之间的第一关系。 在距掩模版的多个焦距处也测量二进制特征的空间图像的尺寸。 确定二进制特征和焦距的测量之间的关系。 然后基于第一和第二关系确定焦点偏移量。 因此衰减计量模式可以被包括在衰减的相移掩模版上,使得可以确定衰减相移掩模版的焦点偏移。

    Embedded phase shifting mask with improved relative attenuated film
transmission
    2.
    发明授权
    Embedded phase shifting mask with improved relative attenuated film transmission 失效
    嵌入式相移掩模,具有改进的相对衰减薄膜传输

    公开(公告)号:US5618643A

    公开(公告)日:1997-04-08

    申请号:US573526

    申请日:1995-12-15

    申请人: Giang T. Dao Gang Liu

    发明人: Giang T. Dao Gang Liu

    IPC分类号: G03F1/32 G03F9/00

    CPC分类号: G03F1/32

    摘要: A method and apparatus for fabricating a mask for use in patterning a radiation sensitive layer in a lithographic printer. An embedded phase shifting layer is disposed over a substantially transparent base layer such that attenuated regions of the mask are phase shifted approximately 160 to 200 degrees relative to open features in the mask. In accordance with the present invention, radiation transmission is reduced through the open feature regions of the mask. In one embodiment, a thin radiation transmission reducing layer is deposited over the open feature regions of the mask. In another embodiment, the open feature regions of the mask are roughened to reduce radiation transmission. In yet another embodiment, ion implantation is performed in the open feature regions of the mask to reduce transmission. With the reduced transmission of radiation through the open feature regions of the present mask, high resolution lithography employing short wavelength radiation is realized.

    摘要翻译: 一种用于制造用于图案化平版印刷机中的辐射敏感层的掩模的方法和装置。 嵌入式相移层设置在基本上透明的基底层上,使得掩模的衰减区域相对于掩模中的开放特征相移大约160至200度。 根据本发明,辐射透射通过掩模的开放特征区域减小。 在一个实施例中,薄的辐射透射降低层沉积在掩模的开放特征区域上。 在另一个实施例中,掩模的开放特征区域被粗糙化以减少辐射透射。 在另一个实施例中,在掩模的开放特征区域中执行离子注入以减少透射。 随着辐射通过本掩模的开放特征区域的减小的透射,实现了采用短波长辐射的高分辨率光刻。

    Method and apparatus for precision determination of phase-shift in a
phase-shifted reticle
    3.
    发明授权
    Method and apparatus for precision determination of phase-shift in a phase-shifted reticle 失效
    用于精确确定相移掩模版中相移的方法和装置

    公开(公告)号:US5700602A

    公开(公告)日:1997-12-23

    申请号:US538354

    申请日:1995-10-30

    摘要: A metrology pattern on a reticle comprising a phase-shifted feature and an additional phase-shifted feature and/or non phase-shifted feature is disclosed. The metrology pattern can be used to determine the target thickness for achieving 180.degree. phase difference, i.e., zero phase error on a phase-shifted reticle. A test reticle having several such metrology patterns, with several different phase-shifter thickness differences is used to produce a CD versus defocus data for each of the phase-shifter thickness differences by performing an exposure matrix or series of aerial images. The data can be used to determine a target thickness for zero phase error. The data can also be used to determine a correlation between focal shift, phase error, and shifter thickness. The metrology pattern can be placed on reticles used for the fabrication of semiconductor devices, for example, so that an exposure matrix can be performed, to determine any focal shift, which can then be related to phase error.

    摘要翻译: 公开了包括相移特征和附加相移特征和/或非相移特征的掩模版上的度量图案。 可以使用计量模式来确定实现180°相位差的目标厚度,即在相移掩模版上的零相位误差。 具有几种这样的测量图案的测试掩模版具有几种不同的移相器厚度差异,用于通过执行曝光矩阵或一系列的空间图像来产生每个移相器厚度差的CD对散焦数据。 该数据可用于确定零相位误差的目标厚度。 该数据还可用于确定焦点偏移,相位误差和移位器厚度之间的相关性。 例如,可以将计量图案放置在用于制造半导体器件的掩模版上,使得可以执行曝光矩阵,以确定任何可能与相位误差相关的焦点偏移。

    Multi-gear torquer
    4.
    发明授权

    公开(公告)号:US10914361B2

    公开(公告)日:2021-02-09

    申请号:US16201979

    申请日:2018-11-27

    申请人: Gang Liu

    发明人: Gang Liu

    摘要: Disclosed is a multi-gear torquer with end covers on both sides of the casing. An input shaft and an output shaft are respectively arranged at the center of the two end covers. A sun gear is fixed on the input shaft and moves along a planet gear engaged in the transmission mechanism. The planet gear meshes with a gear ring and moves around the sun gear, then the planet gear drives the turntable centrally fixed with the output shaft connected to the load end. The multi-gear torquer disclosed herein has the following advantages: large output torque and high mechanical efficiency, and it can be used as power transmission equipment for a car or a train and used as other mechanical transmission equipment.

    Motor
    5.
    发明授权
    Motor 审中-公开

    公开(公告)号:US10670143B2

    公开(公告)日:2020-06-02

    申请号:US15939342

    申请日:2018-03-29

    申请人: Gang Liu

    发明人: Gang Liu

    摘要: A motor with a variable-speed torque converter is disclosed. A rotor of the motor has a common permanent magnet structure. Permanent magnets are disposed on the rotor. The variable-speed torque converter includes a wheel disc, a wheel ring, a roller, a transmission gear II, a transmission gear III, a round wheel, an annular gear, a driving gear, turning discs, a transmission shaft, and an output shaft. The driving gear fixedly connected to the transmission shaft of the motor drives the transmission gear. The transmission gear is in contact with the annular gear. The transmission gear rotates around the driving gear to drive the wheel disc to rotate together. The wheel disc is fixedly connected to the output shaft to drive a driving wheel to rotate. Therefore, a working capability of the motor is enhanced. The converter can be applied to an electromotor, a generator, or any other power device.

    System and method for automatically tracking a contact lens in a wearer's eye

    公开(公告)号:US09883797B1

    公开(公告)日:2018-02-06

    申请号:US14277139

    申请日:2014-05-14

    摘要: A system and method for automated determination of position and movement of a contact lens with respect to a subject wearer's eye based upon a complimentary pair of images, acquired in rapid succession, in which one image of the pair is acquired using light that allows viewing of the pupil and/or limbus through the lens and the other image is acquired using light that is absorbed by the lens to generate an opaque image with a defined edge relative to the surrounding sclera. The images of the pair are acquired in close enough temporal proximity to ensure that eye movement in the interval therebetween is insignificant and both images are in the same approximate reference frame. Thus, the location of the pupil and limbus in one image can be accurately compared with the location of the contact lens edge in the other image.

    Methods and apparatuses for communication in a personal area network
    7.
    发明授权
    Methods and apparatuses for communication in a personal area network 有权
    用于个人区域网络通信的方法和装置

    公开(公告)号:US09301248B2

    公开(公告)日:2016-03-29

    申请号:US13996059

    申请日:2010-12-20

    摘要: An exemplary technique is provided for communication in a personal area network. The technique includes transmitting, to a personal area network coordinator, joint information of a sensor device indicated by reserved bits and includes a type, a channel access rate, and a latest node buffer occupation rate of the sensor device; receiving, from the personal area network coordinator, information regarding adjusted active duration and duty cycle of the communication of the sensor device; and performing further communication based upon the adjusted active duration and duty cycle. Also, the technique includes receiving, from a sensor device, joint information indicated by reserved bits and includes a type, a channel access rate, and a latest node buffer occupation rate of the sensor device; adjusting an active duration and a duty cycle of the communication of the sensor device; and transmitting information regarding the adjusted active duration and duty cycle to the sensor device.

    摘要翻译: 提供了一种用于个人区域网络中的通信的示例性技术。 该技术包括向个人区域网络协调器发送由保留位指示的传感器设备的联合信息,并且包括传感器设备的类型,信道访问速率和最新节点缓冲器占用率; 从个人区域网络协调器接收关于传感器设备的通信的调整的有效持续时间和占空比的信息; 并且基于调整的有效持续时间和占空比执行进一步的通信。 此外,该技术包括从传感器设备接收由保留位指示的联合信息,并且包括传感器设备的类型,信道访问速率和最新节点缓冲器占用率; 调整传感器装置的通信的有效持续时间和占空比; 以及将关于经调节的有效持续时间和占空比的信息发送到传感器装置。

    System and method for producing synthetic golden template image for vision system inspection of multi-layer patterns
    8.
    发明授权
    System and method for producing synthetic golden template image for vision system inspection of multi-layer patterns 有权
    用于生成合成金色模板图像的系统和方法,用于多层图案的视觉系统检查

    公开(公告)号:US08971663B2

    公开(公告)日:2015-03-03

    申请号:US13625021

    申请日:2012-09-24

    摘要: A system and method for generating golden template images in a vision system to inspect an acquired runtime image of an object with a multi-layer printed pattern is provided. The system and method performs a registration process on runtime images using registration models each trained on respective canonical layer mask images, and outputting poses. Based upon the poses, warped layer masks are generated. Combination masks are computed based upon differing combinations of the warped layer masks. Intensity values for pixels of the foreground regions for the combination masks are estimated. The estimated intensity values are then blended associated with the combination masks to generate a golden template image. This golden template image can be used to compare with a runtime image. An exemplary application of this system and method is in print inspection on flat and non-flat surfaces.

    摘要翻译: 提供了一种用于在视觉系统中生成金色模板图像以用多层印刷图案检查对象的获取的运行时图像的系统和方法。 该系统和方法使用每个训练在各个规范层掩模图像上的注册模型并输出姿势来对运行时图像执行注册过程。 基于姿态,产生翘曲层掩模。 基于翘曲层掩模的不同组合来计算组合掩模。 估计用于组合掩码的前景区域的像素的强度值。 然后将估计的强度值与组合掩模相关联以生成金色模板图像。 此黄金模板图像可用于与运行时映像进行比较。 该系统和方法的示例性应用是在平坦和非平坦表面上进行打印检查。

    Method and apparatus for channel estimation
    9.
    发明授权
    Method and apparatus for channel estimation 有权
    用于信道估计的方法和装置

    公开(公告)号:US08934330B2

    公开(公告)日:2015-01-13

    申请号:US13519577

    申请日:2009-12-29

    申请人: Ben Niu Gang Liu Li Zou

    发明人: Ben Niu Gang Liu Li Zou

    IPC分类号: H04J11/00 H04L25/02 H04L27/26

    摘要: The present invention provides a method for channel estimation used in a receiver of a multi-carrier communication system, including: receiving a multi-carrier symbols from a transmitter of the multi-carrier communication system; and obtaining channel information of sub-carriers carrying data of the multi-carrier symbols, using selectively time direction interpolation and frequency direction interpolation for channel information of a plurality of scatter pilots of the multi-carrier symbols.

    摘要翻译: 本发明提供一种用于多载波通信系统的接收机中的信道估计方法,包括:从多载波通信系统的发射机接收多载波符号; 以及使用多载波符号的多个散射导频的信道信息选择性地进行时间内插和频率方向插值来获得承载多载波符号数据的子载波的信道信息。

    Battery charging system
    10.
    发明授权
    Battery charging system 有权
    电池充电系统

    公开(公告)号:US08817507B2

    公开(公告)日:2014-08-26

    申请号:US13269715

    申请日:2011-10-10

    申请人: Gang Liu Jin-Fa Zhang

    发明人: Gang Liu Jin-Fa Zhang

    CPC分类号: H02M7/219 H02J7/022

    摘要: In one aspect of the present invention, a battery charging system has a first rectifier adapted for converting an AC voltage at an input thereof to a first DC voltage at an output thereof; a power factor correction (PFC) circuit coupled to the first rectifier, for correcting the power factor of the battery charging system and outputting a second DC voltage; a first power converter coupled to the PFC circuit, for converting the second DC voltage to a third DC voltage; a second power converter coupled to the first power converter, for converting the third DC voltage to a fourth DC voltage to be delivered to a battery; and a first controller adapted for sensing the fourth DC voltage at the output of the second power converter for regulating the second power converter to maintain the fourth DC voltage at a predetermined value.

    摘要翻译: 在本发明的一个方面,电池充电系统具有第一整流器,其适于将其输入处的交流电压转换成其输出处的第一直流电压; 耦合到第一整流器的功率因数校正(PFC)电路,用于校正电池充电系统的功率因数并输出第二DC电压; 耦合到所述PFC电路的第一功率转换器,用于将所述第二DC电压转换为第三DC电压; 耦合到所述第一功率转换器的第二功率转换器,用于将所述第三直流电压转换为要传送到电池的第四直流电压; 以及第一控制器,适于感测在第二功率转换器的输出处的第四直流电压,用于调节第二功率转换器以将第四直流电压保持在预定值。