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    Heating system for high throughput sputtering
    2.
    发明授权
    Heating system for high throughput sputtering 失效
    用于高通量溅射的加热系统

    公开(公告)号：US5972184A

    公开(公告)日：1999-10-26

    申请号：US45975

    申请日：1993-04-09

    申请人： Dennis R. Hollars ,  Delbert F. Waltrip ,  Robert B. Zubeck ,  Josef Bonigut ,  Robert M. Smith ,  Gary L. Payne

    发明人： Dennis R. Hollars ,  Delbert F. Waltrip ,  Robert B. Zubeck ,  Josef Bonigut ,  Robert M. Smith ,  Gary L. Payne

    IPC分类号： C23C14/02 ,  C23C14/34 ,  C23C14/35 ,  C23C14/50 ,  C23C14/54 ,  C23C14/56 ,  G05B19/05 ,  G05B19/418 ,  G11B5/85 ,  G11B5/851 ,  H01L21/00 ,  H01L21/677

    CPC分类号： H01L21/6776 ,  C23C14/02 ,  C23C14/028 ,  C23C14/34 ,  C23C14/35 ,  C23C14/352 ,  C23C14/50 ,  C23C14/54 ,  C23C14/541 ,  C23C14/568 ,  G05B19/052 ,  G05B19/4189 ,  G11B5/851 ,  H01J37/32733 ,  H01J37/3405 ,  H01L21/6715 ,  H01L21/67173 ,  H01L21/67207 ,  H01L21/67213 ,  H01L21/67236 ,  H01L21/67253 ,  H01L21/67259 ,  H01L21/67276 ,  H01L21/67712 ,  H01L21/67721 ,  G05B2219/31225 ,  G05B2219/31237 ,  G05B2219/32413 ,  G05B2219/34029 ,  G05B2219/34279 ,  G05B2219/34287 ,  G05B2219/34304 ,  G05B2219/50363 ,  Y02P90/18 ,  Y02P90/28

    摘要： A high throughput sputtering apparatus which provides a single or multi-layer coating to the surface of a plurality of substrates. The apparatus comprises a plurality of buffer and sputtering chambers which include an input end and an output end. The substrates are transported through the chambers at varying rates of speed such that the rate of speed of a pallet from the input end to the output end is a constant for each of the pallets. The high throughput sputtering apparatus also includes a transport system which transports the substrates through the sputtering chambers at variable velocities, a high capacity vacuum pump system which evacuates the ambient pressure within the sputtering chambers to a vacuum level within a pressure range sufficient to enable sputtering operation, a substrate heating system which heats the substrates to a temperature conducive to sputtering the coatings thereon and provides a substantially uniform temperature profile over the surface of the substrates; and an electronic control system which provides control signals to and for receiving feedback input from other components of the apparatus. The electronic control system is programmable to control the sputtering chambers, the transport system, the vacuum pump system, and the substrate heating system. The substrate heating system efficiently maintains a desired substrate temperature by minimizing radiative heat losses as the substrates proceed through the sputtering apparatus. The high throughput sputtering apparatus provides substrates to be sputtered in a rapid and uniform heating process to optimize film integrity during the sputtering steps, provides successive layers of thin films on the substrates, and removes the sputtered substrates without contaminating the environment.

    摘要翻译： 一种高通量溅射装置，其向多个基板的表面提供单层或多层涂层。 该装置包括多个缓冲和溅射室，其包括输入端和输出端。 基板以不同的速度传送通过室，使得托盘从输入端到输出端的速度速率对于每个托盘是恒定的。 高通量溅射装置还包括以可变速度输送基板通过溅射室的输送系统，将真空室内的环境压力排出到足以实现溅射操作的压力范围内的真空度的高容量真空泵系统 衬底加热系统，其将衬底加热到​​有利于溅射其上的涂层的温度，并在衬底的表面上提供基本均匀的温度分布; 以及电子控制系统，其向控制信号提供控制信号并从该设备的其他部件接收反馈输入。 电子控制系统可编程控制溅射室，输送系统，真空泵系统和基板加热系统。 当衬底通过溅射装置进行时，衬底加热系统通过最小化辐射热损失来有效地保持期望的衬底温度。 高通量溅射装置提供在快速且均匀的加热过程中溅射的基板，以在溅射步骤期间优化膜的完整性，在基板上提供连续的薄膜层，并且在不污染环境的情况下去除溅射的基板。

    Device for injecting chemicals into the soil
    5.
    发明授权
    Device for injecting chemicals into the soil 失效
    将化学物质注入土壤的装置

    公开(公告)号：US5558471A

    公开(公告)日：1996-09-24

    申请号：US409344

    申请日：1995-03-23

    申请人： Gary L. Payne

    发明人： Gary L. Payne

    IPC分类号： A01B49/06 ,  A01C23/02 ,  A01M17/00 ,  A01C13/00

    CPC分类号： A01C23/025 ,  A01B49/06 ,  A01M17/002

    摘要： This invention is a device for injecting chemicals into the soil, comprising two embodiments. In both embodiments a disc cuts the soil, making way for a brace with a knife that cuts away the soil further. A nozzle connected to a tube, which draws chemical from a reservoir, sprays the chemical directly into the soil. A belt, which encircles two drums, keeps the vegetation on the soil. In one embodiment the discs are on the drums. In the second embodiment the disc is separate from the drums.

    摘要翻译： 本发明是一种用于将化学物质注入土壤的装置，包括两个实施方案。 在两个实施例中，圆盘切割土壤，使用具有切割土壤的刀具来支撑支架。 连接到管的喷嘴，其从储存器吸取化学品，将化学品直接喷入土壤中。 围绕两个鼓的皮带将植被保留在土壤上。 在一个实施例中，盘在鼓上。 在第二实施例中，盘与鼓分开。

    Adjustable lighting fixture
    6.
    发明授权
    Adjustable lighting fixture 失效
    可调节照明灯具

    公开(公告)号：US4727460A

    公开(公告)日：1988-02-23

    申请号：US862845

    申请日：1986-05-13

    申请人： Gary L. Payne

    发明人： Gary L. Payne

    IPC分类号： F21V19/00 ,  F21V21/14 ,  F21V21/28 ,  F21V21/30 ,  F21V21/34 ,  F21V21/26

    CPC分类号： F21V21/30 ,  F21V19/007 ,  F21V21/14 ,  F21V21/28 ,  F21V21/34

    摘要： An adjustable fixture for holding a lamp of the type having a generally annular rim, such as a sealed-beam lamp, includes a lampholder having front and rear generally parallel, spaced generally U-shaped members. The lampholder includes a base section adapted to engage the lamp proximate the rim and a pair of generally straight sections. Spring clips are preferably positioned on the straight sections of at least one of the U-shaped members for biasing the lamp toward the base sections of the U-shaped member. An elongated bridging member extends between the straight sections of the U-shaped members for interconnecting the straight sections. At least one end of the bridging member having a generally flat surface. A support arm member having a surface adapted for engagement with the generally flat surface of the bridging member is removably secured to the bridging arm member. The support arm member is also adapted to be secured to a fixed structure utilizing a fixture mount. Preferably, lamp retaining pins extend inwardly from the base section of the rear U-shaped member. The base section of the front U-shaped member is preferably split to permit the front U-shaped member to be spread for lamp installation.

    摘要翻译： 用于保持具有大致环形边缘的类型的灯（例如密封光束灯）的可调节固定器包括具有前后大致平行且间隔开的大致U形构件的灯座。 灯座包括适于接合靠近边缘的灯的基座部分和一对大致直的部分。 弹簧夹优选地定位在至少一个U形构件的直线部分上，用于将灯朝向U形构件的基部。 细长的桥接构件在U形构件的直的部分之间延伸，用于互连直的部分。 桥接构件的至少一端具有大致平坦的表面。 具有适于与桥接构件的大致平坦表面接合的表面的支撑臂构件可移除地固定到桥接臂构件。 支撑臂构件还适于利用夹具安装件固定到固定结构。 优选地，灯保持销从后U形构件的基部向内延伸。 前U形构件的基部优选地被分开以允许前U形构件扩展用于灯安装。