公开(公告)号：US20090255447A1

公开(公告)日：2009-10-15

申请号：US12421798

申请日：2009-04-10

申请人： Gerhard Schubert ,  Christian Jackel ,  Ulf-Carsten Kirschstein ,  Michael Boehm ,  Rene Bauer ,  Gerd Harnisch ,  Thomas Peschel ,  Stefan Risse ,  Christoph Schenk

发明人： Gerhard Schubert ,  Christian Jackel ,  Ulf-Carsten Kirschstein ,  Michael Boehm ,  Rene Bauer ,  Gerd Harnisch ,  Thomas Peschel ,  Stefan Risse ,  Christoph Schenk

IPC分类号： A47B37/00

CPC分类号： G03F7/70716 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/70816 ,  G03F7/70991 ,  H01J37/20 ,  H01J37/3174 ,  H01J2237/182 ,  H01J2237/2005 ,  H01J2237/20221 ,  H01L21/68

摘要： The invention is directed to a table for vacuum application which is guided by means of aerostatic bearing elements, having a fixedly mounted supporting structure and a tabletop which is displaceable in x-direction and y-direction with respect to the fixedly mounted supporting structure by means of slides. The slides are provided with the aerostatic bearing elements for guiding, these aerostatic bearing elements being connected to feed lines for supplying the gas required for the operation of the gas bearings and suction lines for removing this gas. The suction lines comprise at least one variable-length line arrangement having a first pipe member and a second pipe member which penetrate one inside the other without contacting, at least one sealing gap being provided between the pipe members.

摘要翻译： 本发明涉及一种用于真空应用的工作台，其通过空气静力轴承元件引导，具有固定安装的支撑结构和台面，其可相对于固定安装的支撑结构在x方向和y方向上移位 的幻灯片。 滑块设置有用于引导的空气静力轴承元件，这些空气静力轴承元件连接到用于供应用于运行气体轴承所需的气体的进给管线和用于去除该气体的吸入管线。 抽吸管线包括至少一个可变长度的管线装置，其具有第一管道构件和第二管道构件，该管道构件和第二管道构件穿过另一个内部而不接触，至少一个密封间隙设置在管道构件之间。

公开(公告)号：US20100122603A1

公开(公告)日：2010-05-20

申请号：US12618839

申请日：2009-11-16

申请人： Gerhard Schubert ,  Christian Jackel ,  Ulf-Carsten Kirschstein ,  Michael Boehm ,  René Bauer ,  Gerd Harnisch ,  Thomas Peschel ,  Stefan Risse ,  Christoph Schenk

发明人： Gerhard Schubert ,  Christian Jackel ,  Ulf-Carsten Kirschstein ,  Michael Boehm ,  René Bauer ,  Gerd Harnisch ,  Thomas Peschel ,  Stefan Risse ,  Christoph Schenk

IPC分类号： G05G11/00

CPC分类号： H01L21/682 ,  G03F7/70716 ,  Y10T74/20348

摘要： A table system for vacuum application has a base plate and a moving table guided by aerostatic bearing units. The bearing units (10) are connected to supply lines and suction lines for supplying and extracting the gas required for the operation of the bearing units and are provided in each instance with a sealing system having at least one stage and comprising suction channel and sealing gap for sealing relative to the vacuum. The table system is characterized in that the aerostatic bearing units (10) are constructed at least partially as swivel joints, and a push rod (4) which is actuated by a drive (5) for guiding the moving table laterally is connected to the rotating part (21) of each swivel joint, and in that the push rods (4) are hollow and constitute a component part of the suction lines for extracting the operating gas.

摘要翻译： 用于真空应用的台式系统具有由空气静力轴承单元引导的基板和移动台。 轴承单元（10）连接到用于供应和提取用于轴承单元的操作所需的气体的供应管线和抽吸管线，并且每个具有至少一个级的密封系统，并且包括吸入通道和密封间隙 用于相对于真空的密封。 台面系统的特征在于，空气静力轴承单元（10）至少部分地构造为旋转接头，并且由用于将移动台横向引导的驱动器（5）致动的推杆（4）连接到旋转 每个旋转接头的部分（21），并且推杆（4）是中空的，并且构成用于抽出操作气体的抽吸管线的组成部分。

公开(公告)号：US08267582B2

公开(公告)日：2012-09-18

申请号：US12421798

申请日：2009-04-10

申请人： Gerhard Schubert ,  Christian Jackel ,  Ulf-Carsten Kirschstein ,  Michael Boehm ,  René Bauer ,  Gerd Harnisch ,  Thomas Peschel ,  Stefan Risse ,  Christoph Schenk

发明人： Gerhard Schubert ,  Christian Jackel ,  Ulf-Carsten Kirschstein ,  Michael Boehm ,  René Bauer ,  Gerd Harnisch ,  Thomas Peschel ,  Stefan Risse ,  Christoph Schenk

IPC分类号： F16C32/06

CPC分类号： G03F7/70716 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/70816 ,  G03F7/70991 ,  H01J37/20 ,  H01J37/3174 ,  H01J2237/182 ,  H01J2237/2005 ,  H01J2237/20221 ,  H01L21/68

摘要： A table for vacuum application which is guided by aerostatic bearing elements, having a fixedly mounted supporting structure and a tabletop which is displaceable in x-direction and y-direction with respect to the fixedly mounted supporting structure by means of slides. The slides are provided with the aerostatic bearing elements for guiding, these aerostatic bearing elements being connected to feed lines for supplying the gas required for the operation of the gas bearings and suction lines for removing this gas. The suction lines comprise at least one variable-length line arrangement having a first pipe member and a second pipe member which penetrate one inside the other without contacting, at least one sealing gap being provided between the pipe members.

摘要翻译： 用于由空气静力轴承元件引导的真空应用的桌子，具有固定安装的支撑结构和桌面，其可以通过滑块相对于固定安装的支撑结构在x方向和y方向上移位。 滑块设置有用于引导的空气静力轴承元件，这些空气静力轴承元件连接到用于供应用于运行气体轴承所需的气体的供给管线和用于去除该气体的吸入管线。 抽吸管线包括至少一个可变长度的管线装置，其具有第一管道构件和第二管道构件，该管道构件和第二管道构件穿过另一个内部而不接触，至少一个密封间隙设置在管道构件之间。

公开(公告)号：US08496221B2

公开(公告)日：2013-07-30

申请号：US12618839

申请日：2009-11-16

申请人： Gerhard Schubert ,  Christian Jackel ,  Ulf-Carsten Kirschstein ,  Michael Boehm ,  René Bauer ,  Gerd Harnisch ,  Thomas Peschel ,  Stefan Risse ,  Christoph Schenk

发明人： Gerhard Schubert ,  Christian Jackel ,  Ulf-Carsten Kirschstein ,  Michael Boehm ,  René Bauer ,  Gerd Harnisch ,  Thomas Peschel ,  Stefan Risse ,  Christoph Schenk

IPC分类号： F16C32/06

CPC分类号： H01L21/682 ,  G03F7/70716 ,  Y10T74/20348

摘要： A table system for vacuum application has a base plate and a moving table guided by aerostatic bearing units. The bearing units (10) are connected to supply lines and suction lines for supplying and extracting the gas required for the operation of the bearing units and are provided in each instance with a sealing system having at least one stage and comprising suction channel and sealing gap for sealing relative to the vacuum. The table system is characterized in that the aerostatic bearing units (10) are constructed at least partially as swivel joints, and a push rod (4) which is actuated by a drive (5) for guiding the moving table laterally is connected to the rotating part (21) of each swivel joint, and in that the push rods (4) are hollow and constitute a component part of the suction lines for extracting the operating gas.

摘要翻译： 用于真空应用的台式系统具有由空气静力轴承单元引导的基板和移动台。 轴承单元（10）连接到用于供应和提取用于轴承单元的操作所需的气体的供应管线和抽吸管线，并且每个具有至少一个级的密封系统，并且包括吸入通道和密封间隙 用于相对于真空的密封。 台面系统的特征在于，空气静力轴承单元（10）至少部分地构造为旋转接头，并且由用于将移动台横向引导的驱动器（5）致动的推杆（4）连接到旋转 每个旋转接头的部分（21），并且推杆（4）是中空的，并且构成用于抽出操作气体的抽吸管线的组成部分。

公开(公告)号：US20100061667A1

公开(公告)日：2010-03-11

申请号：US12553340

申请日：2009-09-03

申请人： Gerhard Schubert ,  Christian Jackel ,  Ulf-Carsten Kirschstein ,  Michael Boehm ,  René Bauer ,  Gerd Harnisch ,  Thomas Peschel ,  Stefan Risse ,  Christoph Schenk

发明人： Gerhard Schubert ,  Christian Jackel ,  Ulf-Carsten Kirschstein ,  Michael Boehm ,  René Bauer ,  Gerd Harnisch ,  Thomas Peschel ,  Stefan Risse ,  Christoph Schenk

IPC分类号： F16C17/00

CPC分类号： F16C29/007 ,  F16C32/0404 ,  F16C32/0603 ,  F16C32/0666 ,  F16C32/0674 ,  F16C39/00

摘要： A proposed aerostatic bearing arrangement for moving a device on a base structure, particularly in a vacuum environment, has at least one aerostatic bearing element comprising a bearing body having a load-carrying zone and a suction area. An electrostatic preloading unit having at least one electrode is associated with the at least one aerostatic bearing element, and a voltage can be applied to the electrode in such a way that a force component is generated in direction of the surface normal of the bearing body of the aerostatic bearing element.

摘要翻译： 一种用于将设备移动到基座结构上，特别是在真空环境中的所提出的空气静力轴承装置具有至少一个空气静力轴承元件，其包括具有负载区域和吸入区域的轴承体。 具有至少一个电极的静电预加载单元与至少一个空气静力轴承元件相关联，并且可以以这样的方式施加电压，使得在轴承体的表面法线方向上产生力分量 空气静力轴承元件。

公开(公告)号：US08529130B2

公开(公告)日：2013-09-10

申请号：US12553340

申请日：2009-09-03

申请人： Gerhard Schubert ,  Christian Jackel ,  Ulf-Carsten Kirschstein ,  Michael Boehm ,  René Bauer ,  Gerd Harnisch ,  Thomas Peschel ,  Stefan Risse ,  Christoph Schenk

发明人： Gerhard Schubert ,  Christian Jackel ,  Ulf-Carsten Kirschstein ,  Michael Boehm ,  René Bauer ,  Gerd Harnisch ,  Thomas Peschel ,  Stefan Risse ,  Christoph Schenk

IPC分类号： F16C17/00 ,  F16C32/06

CPC分类号： F16C29/007 ,  F16C32/0404 ,  F16C32/0603 ,  F16C32/0666 ,  F16C32/0674 ,  F16C39/00

摘要： A proposed aerostatic bearing arrangement for moving a device on a base structure, particularly in a vacuum environment, has at least one aerostatic bearing element comprising a bearing body having a load-carrying zone and a suction area. An electrostatic preloading unit having at least one electrode is associated with the at least one aerostatic bearing element, and a voltage can be applied to the electrode in such a way that a force component is generated in direction of the surface normal of the bearing body of the aerostatic bearing element.

摘要翻译： 一种用于将设备移动到基座结构上，特别是在真空环境中的所提出的空气静力轴承装置具有至少一个空气静力轴承元件，其包括具有负载区域和吸入区域的轴承体。 具有至少一个电极的静电预加载单元与至少一个空气静力轴承元件相关联，并且可以以这样的方式施加电压，使得在轴承体的表面法线方向上产生力分量 空气静力轴承元件。