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    Aerostatically guided table system for vacuum application
    4.
    发明授权
    Aerostatically guided table system for vacuum application 有权
    气动导向台系统用于真空应用

    公开(公告)号：US08496221B2

    公开(公告)日：2013-07-30

    申请号：US12618839

    申请日：2009-11-16

    申请人： Gerhard Schubert ,  Christian Jackel ,  Ulf-Carsten Kirschstein ,  Michael Boehm ,  René Bauer ,  Gerd Harnisch ,  Thomas Peschel ,  Stefan Risse ,  Christoph Schenk

    发明人： Gerhard Schubert ,  Christian Jackel ,  Ulf-Carsten Kirschstein ,  Michael Boehm ,  René Bauer ,  Gerd Harnisch ,  Thomas Peschel ,  Stefan Risse ,  Christoph Schenk

    IPC分类号： F16C32/06

    CPC分类号： H01L21/682 ,  G03F7/70716 ,  Y10T74/20348

    摘要： A table system for vacuum application has a base plate and a moving table guided by aerostatic bearing units. The bearing units (10) are connected to supply lines and suction lines for supplying and extracting the gas required for the operation of the bearing units and are provided in each instance with a sealing system having at least one stage and comprising suction channel and sealing gap for sealing relative to the vacuum. The table system is characterized in that the aerostatic bearing units (10) are constructed at least partially as swivel joints, and a push rod (4) which is actuated by a drive (5) for guiding the moving table laterally is connected to the rotating part (21) of each swivel joint, and in that the push rods (4) are hollow and constitute a component part of the suction lines for extracting the operating gas.

    摘要翻译： 用于真空应用的台式系统具有由空气静力轴承单元引导的基板和移动台。 轴承单元（10）连接到用于供应和提取用于轴承单元的操作所需的气体的供应管线和抽吸管线，并且每个具有至少一个级的密封系统，并且包括吸入通道和密封间隙 用于相对于真空的密封。 台面系统的特征在于，空气静力轴承单元（10）至少部分地构造为旋转接头，并且由用于将移动台横向引导的驱动器（5）致动的推杆（4）连接到旋转 每个旋转接头的部分（21），并且推杆（4）是中空的，并且构成用于抽出操作气体的抽吸管线的组成部分。

    Aerostatically Guided Table System for Vacuum Application
    5.
    发明申请
    Aerostatically Guided Table System for Vacuum Application 有权
    用于真空应用的气动引导台系统

    公开(公告)号：US20100122603A1

    公开(公告)日：2010-05-20

    申请号：US12618839

    申请日：2009-11-16

    申请人： Gerhard Schubert ,  Christian Jackel ,  Ulf-Carsten Kirschstein ,  Michael Boehm ,  René Bauer ,  Gerd Harnisch ,  Thomas Peschel ,  Stefan Risse ,  Christoph Schenk

    发明人： Gerhard Schubert ,  Christian Jackel ,  Ulf-Carsten Kirschstein ,  Michael Boehm ,  René Bauer ,  Gerd Harnisch ,  Thomas Peschel ,  Stefan Risse ,  Christoph Schenk

    IPC分类号： G05G11/00

    CPC分类号： H01L21/682 ,  G03F7/70716 ,  Y10T74/20348

    摘要： A table system for vacuum application has a base plate and a moving table guided by aerostatic bearing units. The bearing units (10) are connected to supply lines and suction lines for supplying and extracting the gas required for the operation of the bearing units and are provided in each instance with a sealing system having at least one stage and comprising suction channel and sealing gap for sealing relative to the vacuum. The table system is characterized in that the aerostatic bearing units (10) are constructed at least partially as swivel joints, and a push rod (4) which is actuated by a drive (5) for guiding the moving table laterally is connected to the rotating part (21) of each swivel joint, and in that the push rods (4) are hollow and constitute a component part of the suction lines for extracting the operating gas.

    摘要翻译： 用于真空应用的台式系统具有由空气静力轴承单元引导的基板和移动台。 轴承单元（10）连接到用于供应和提取用于轴承单元的操作所需的气体的供应管线和抽吸管线，并且每个具有至少一个级的密封系统，并且包括吸入通道和密封间隙 用于相对于真空的密封。 台面系统的特征在于，空气静力轴承单元（10）至少部分地构造为旋转接头，并且由用于将移动台横向引导的驱动器（5）致动的推杆（4）连接到旋转 每个旋转接头的部分（21），并且推杆（4）是中空的，并且构成用于抽出操作气体的抽吸管线的组成部分。

    Electrostatic deflection system for corpuscular radiation
    7.
    发明授权
    Electrostatic deflection system for corpuscular radiation 失效
    静电偏转系统用于红外辐射

    公开(公告)号：US07491946B2

    公开(公告)日：2009-02-17

    申请号：US11346666

    申请日：2006-02-03

    申请人： Stefan Risse ,  Thomas Peschel ,  Christoph Damm ,  Andreas Gebhardt ,  Mathias Rohde ,  Christoph Schenk ,  Thomas Elster ,  Hans-Joachim Doering ,  Gerhard Schubert

    发明人： Stefan Risse ,  Thomas Peschel ,  Christoph Damm ,  Andreas Gebhardt ,  Mathias Rohde ,  Christoph Schenk ,  Thomas Elster ,  Hans-Joachim Doering ,  Gerhard Schubert

    IPC分类号： H01J37/147

    CPC分类号： G21K1/087

    摘要： The invention is directed to electrostatic deflection systems for corpuscular beams which can be used particularly in microstructured and nanostructured applications in lithography installations or measuring equipment. According to the proposed object of the invention, the individual electrodes of a deflection system of this kind should permanently have and retain a very exact axially symmetric arrangement relative to one another. In the electrostatic deflection system according to the invention, rod-shaped electrodes are held in an axially symmetric arrangement in an inwardly hollow carrier through which a corpuscular beam can be directed. The carrier is formed of at least two, and at most four, carrier members which are connected to one another.

    摘要翻译： 本发明涉及用于微粒束的静电偏转系统，其可以特别用于光刻设备或测量设备中的微结构和纳米结构应用中。 根据本发明的提出的目的，这种偏转系统的各个电极应该永久地保持和保持相对于彼此的精确的轴向对称布置。 在根据本发明的静电偏转系统中，棒状电极被保持在向内空心载体中的轴向对称布置，通过该载体可以引导红细胞束。 载体由彼此连接的至少两个，最多四个载体构件形成。

    System for receiving and retaining a substrate
    9.
    发明授权
    System for receiving and retaining a substrate 失效
    用于接收和保持基板的系统

    公开(公告)号：US06480369B1

    公开(公告)日：2002-11-12

    申请号：US09600478

    申请日：2000-10-04

    申请人： Ulf-Carsten Kirschstein ,  Stefan Risse ,  Christoph Damm ,  Thomas Peschel

    发明人： Ulf-Carsten Kirschstein ,  Stefan Risse ,  Christoph Damm ,  Thomas Peschel

    IPC分类号： H02N1300

    CPC分类号： G03F7/70691 ,  H01L21/6833

    摘要： The invention refers to a receiving and supporting system for a substrate (17) in an exposure system, which is provided with a handling system for the supply of the substrate (17), with an electrostatic chuck arrangement (1) moveable in X, Y coordinates, for the support of the substrate (17) during the exposure, and with an exposure optic, from which a right angled particle radiation, in Z-direction is directed toward the substrate surface. In regard to the respective supporting system, at least a second electrostatic chuck arrangement (6) is provided, which—similar to the first chuck arrangement (1), for the support of the substrate (17) during the exposure, provides a bearing surface for the substrate, whereby the bearing surface of this second chuck arrangement (6) is positioned movable in Z coordinate. In regard to their supporting force, both chuck arrangements (1, 6) are arranged in such a manner, that the substrate (17) is securely positioned when being supported either on the first chuck arrangement (1) or when being supported exclusively on the second chuck arrangement (6).

    摘要翻译： 本发明涉及一种用于曝光系统中的基板（17）的接收和支撑系统，其具有用于供应基板（17）的处理系统，其中静电卡盘装置（1）可在X，Y 坐标，用于在曝光期间对基板（17）的支撑，以及曝光光学元件，Z方向上的直角粒子辐射从该曝光光学元件朝向基板表面。关于相应的支撑系统，至少 提供第二静电卡盘装置（6），其类似于第一卡盘装置（1），用于在曝光期间支撑基板（17），为基板提供支承表面，从而使该基板 第二卡盘装置（6）定位在Z坐标中可移动。 关于它们的支撑力，两个卡盘装置（1,6）以这样的方式布置，使得当被支撑在第一卡盘装置（1）上时或当被支撑在第一卡盘装置 第二卡盘装置（6）。

    Method for producing an optical assembly having at least two optical functional surfaces, an optical device and unit for carrying out the method
    10.
    发明授权
    Method for producing an optical assembly having at least two optical functional surfaces, an optical device and unit for carrying out the method 有权
    用于制造具有至少两个光学功能表面的光学组件的方法，用于执行该方法的光学装置和单元

    公开(公告)号：US09296161B2

    公开(公告)日：2016-03-29

    申请号：US13496089

    申请日：2010-09-13

    申请人： Sebastian Scheiding ,  Stefan Risse ,  Andreas Gebhardt ,  Christoph Damm ,  Thomas Peschel ,  Ralf Steinkopf

    发明人： Sebastian Scheiding ,  Stefan Risse ,  Andreas Gebhardt ,  Christoph Damm ,  Thomas Peschel ,  Ralf Steinkopf

    IPC分类号： B23B5/00 ,  B29D11/00 ,  G02B7/182 ,  B23B5/40 ,  G02B17/06

    CPC分类号： B29D11/00596 ,  G02B7/182 ,  G02B17/0626 ,  Y10T82/10

    摘要： The invention relates to a method for producing an optical assembly, comprising at least two optical functional surfaces arranged in a fixed positional relationship to one another on a common supporting structure, wherein by means of a processing machine, in various process steps, at least two optical functional surfaces and at least one reference structure having a defined and measurable relative position to the optical functional surfaces are produced. The supporting structure remains rigidly connected to the processing machine until said process steps have been completed, and wherein the optical functional surfaces are then measured relative to the at least one reference structure, and any deviation from a target shape and target position is determined, after which said process steps are repeated at least once with modified actuation of the processing machine. The invention further relates to an optical device comprising an optical assembly produced in this way and to a unit for carrying out such a method.

    摘要翻译： 本发明涉及一种用于制造光学组件的方法，所述方法包括至少两个在共同的支撑结构上以彼此固定的位置关系布置的光学功能表面，其中通过加工机器，在各种工艺步骤中，至少两个 产生光学功能表面和至少一个具有与光学功能表面的限定且可测量的相对位置的参考结构。 支撑结构保持刚性地连接到加工机器，直到所述工艺步骤已经完成，并且其中然后相对于至少一个参考结构测量光学功能表面，并且在目标形状和目标位置之间的任何偏差在 其中所述处理步骤通过处理机的修改的致动重复至少一次。 本发明还涉及一种光学装置，其包括以这种方式制造的光学组件和用于执行这种方法的单元。