摘要:
A proposed aerostatic bearing arrangement for moving a device on a base structure, particularly in a vacuum environment, has at least one aerostatic bearing element comprising a bearing body having a load-carrying zone and a suction area. An electrostatic preloading unit having at least one electrode is associated with the at least one aerostatic bearing element, and a voltage can be applied to the electrode in such a way that a force component is generated in direction of the surface normal of the bearing body of the aerostatic bearing element.
摘要:
In an electrostatic-suspension, force-rebalance type inertial instrument in which the suspension plates of the electrostatic bearing are further used in a capacitive bridge to provide inertial data read-out, improved means for decoupling the forcerebalance signal component and the inertial data signal component in the read-out signal.
摘要:
By employing a combination of magnetic forces and those from electrostatic fields, a new stabilizer is able, unlike those employing dynamic effects, to function at any speed with no need for sensors or dynamically generated electrical currents. Embodiments are provided that stabilize the radial, axial and tilt instability. In addition to its use for stabilization, the radial stabilizer described herein also functions as an eccentricity detector.
摘要:
Electrostatic stabilizers are provided for passive bearing systems composed of annular magnets having a net positive stiffness against radial displacements and that have a negative stiffness for vertical displacements, resulting in a vertical instability. Further embodiments are shown of a radial electrostatic stabilizer geometry (using circuitry similar to that employed in the vertical stabilizer). This version is suitable for stabilizing radial (lateral) displacements of a rotor that is levitated by annular permanent magnets that are stable against vertical displacements but are unstable against radial displacements.
摘要:
Electrostatic stabilizers are provided for passive bearing systems composed of annular magnets having a net positive stiffness against radial displacements and that have a negative stiffness for vertical displacements, resulting in a vertical instability. Further embodiments are shown of a radial electrostatic stabilizer geometry (using circuitry similar to that employed in the vertical stabilizer). This version is suitable for stabilizing radial (lateral) displacements of a rotor that is levitated by annular permanent magnets that are stable against vertical displacements but are unstable against radial displacements.
摘要:
A radial turbomolecular pump comprising an electrostatically levitated rotor with a high compression ratio and pump speed at a chip-scale level. The levitated rotor can be sandwiched between a stator plate and a driver and multiple concentric rings of microblades can be fabricated on the rotor plate and the stator plate. The center portions of the driver and the base plate include concentric ring electrodes for rotor levitation by electrostatic forces. The space between two concentric rings of microblades forms a groove that is wide enough to receive the microblades from the opposing disk. The stator disk can be fixed and the rotor disk spins such that the rotor microblades move tangentially relative to the stator microblades. The microblades can be tilted at an angle from the tangent, facilitating momentum transfer to gas molecules in the radial direction.