公开(公告)号：US10050408B2

公开(公告)日：2018-08-14

申请号：US15379192

申请日：2016-12-14

申请人： Gigaphoton Inc.

发明人： Akiyoshi Suzuki ,  Osamu Wakabayashi ,  Masaki Arakawa ,  Koji Ashikawa ,  Yasuhiro Kamba

IPC分类号： H01S3/23 ,  H01S3/081 ,  H01S3/00 ,  G02B27/12 ,  G02B27/10 ,  H01L21/67 ,  H01L21/02 ,  H01L27/12 ,  B23K26/00

摘要： A laser system may include a plurality of laser apparatuses, a beam delivery device configured to bundle pulse laser beams emitted from respective laser apparatuses of the plurality of laser apparatuses to emit a bundled laser beam, and a controller configured to control operated laser apparatuses of the plurality of laser apparatuses such that, at a change in a number representing how many laser apparatuses are operated, a beam parameter of the bundled laser beam emitted from the beam delivery device approaches a beam parameter of the bundled laser beam emitted before the change.

公开(公告)号：US10074958B2

公开(公告)日：2018-09-11

申请号：US15353235

申请日：2016-11-16

申请人： Gigaphoton Inc.

发明人： Osamu Wakabayashi ,  Masaki Arakawa ,  Kouji Kakizaki

IPC分类号： G02B27/10 ,  H01S3/13 ,  G01J1/42 ,  H01S3/00 ,  H01S3/139 ,  H01S3/23 ,  H01S3/225

CPC分类号： H01S3/1305 ,  G01J1/4257 ,  G01J2001/4261 ,  H01S3/0014 ,  H01S3/005 ,  H01S3/0071 ,  H01S3/1394 ,  H01S3/225 ,  H01S3/2383

摘要： The laser system may include a plurality of laser apparatuses, a beam delivery device configured to bundle pulse laser beams emitted from respective laser apparatuses of the plurality of laser apparatuses to emit a bundled pulse laser beam, and a beam parameter measuring device provided in an optical path of the bundled pulse laser beam to measure a beam parameter of each one of the pulse laser beams and a beam parameter of the bundled pulse laser beam.

公开(公告)号：US11217962B2

公开(公告)日：2022-01-04

申请号：US16707880

申请日：2019-12-09

申请人： Gigaphoton Inc.

发明人： Masaki Arakawa ,  Osamu Wakabayashi

IPC分类号： H01S3/23 ,  G02B27/09 ,  H01S3/00 ,  H01S3/038 ,  H01S3/08 ,  H01S3/225 ,  G02B5/00 ,  H01S3/083

摘要： A laser system includes: A. a solid-state laser apparatus configured to output a pulse laser beam having light intensity distribution in a Gaussian shape that is rotationally symmetric about an optical path axis; B. an amplifier including a pair of discharge electrodes and configured to amplify the pulse laser beam in a discharge space between the pair of discharge electrodes; and C. a conversion optical system configured to convert the light intensity distribution of the pulse laser beam output from the amplifier into a top hat shape in each of a discharge direction of the pair of discharge electrodes and a direction orthogonal to the discharge direction.

公开(公告)号：US09966721B2

公开(公告)日：2018-05-08

申请号：US15350284

申请日：2016-11-14

申请人： Gigaphoton Inc.

发明人： Kouji Kakizaki ,  Masaki Arakawa ,  Kouji Ashikawa ,  Yasuhiro Kamba ,  Akiyoshi Suzuki ,  Osamu Wakabayashi

IPC分类号： H01S3/10 ,  H01S3/00 ,  H01S3/105 ,  H01S3/23 ,  H01S3/081 ,  H01S3/225 ,  H01S3/13 ,  G02B27/12 ,  G02B27/09

CPC分类号： H01S3/005 ,  G02B27/0955 ,  G02B27/123 ,  H01S3/0071 ,  H01S3/081 ,  H01S3/105 ,  H01S3/1305 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2253 ,  H01S3/2255 ,  H01S3/2256 ,  H01S3/2366

摘要： The laser system may include first and second laser apparatuses and a beam delivery device. The first laser apparatus may be provided so as to emit a first laser beam to the beam delivery device in a first direction. The second laser apparatus may be provided so as to emit a second laser beam to the beam delivery device in a direction substantially parallel to the first direction. The beam delivery device may be configured to bundle the first and second laser beams and to emit the first and second laser beams from the beam delivery device to a beam delivery direction different from the first direction.