Multilayered substrate obtained via wafer bonding for power applications
    1.
    发明申请
    Multilayered substrate obtained via wafer bonding for power applications 审中-公开
    通过晶片接合获得的多层基板用于电力应用

    公开(公告)号:US20060284167A1

    公开(公告)日:2006-12-21

    申请号:US11326439

    申请日:2006-01-06

    IPC分类号: H01L29/08 H01L35/24 H01L51/00

    CPC分类号: H01L21/2007

    摘要: A multi-layer semiconductor device utilizes the good thermal and electrical properties of a polycrystalline substrate with the electrical properties of single crystal film transferred via wafer bonding. The device structure includes a polycrystalline, e.g., silicon carbide substrate, which was polished. A planarization layer of silicon is formed on the surface, followed by chemical mechanical polishing. The substrate is then bonded to either a bulk silicon wafer or a silicon-on-insulator (SOI) wafer. The silicon (SOI) wafer is thinned to the desired thickness.

    摘要翻译: 多层半导体器件利用具有通过晶片接合转移的单晶膜的电性能的多晶衬底的良好的热和电特性。 器件结构包括被抛光的多晶,例如碳化硅衬底。 在表面上形成硅的平坦化层,然后进行化学机械抛光。 然后将衬底接合到体硅晶片或绝缘体上硅(SOI)晶片上。 将硅(SOI)晶片减薄至所需的厚度。

    Novel thinning process for 3 - dimensional integration via wafer bonding
    2.
    发明申请
    Novel thinning process for 3 - dimensional integration via wafer bonding 有权
    通过晶片接合进行三维集成的新型稀化工艺

    公开(公告)号:US20060286767A1

    公开(公告)日:2006-12-21

    申请号:US11154641

    申请日:2005-06-17

    IPC分类号: H01L21/30

    摘要: First and second semiconductor wafers are bonded together, with at least one of the wafers having a first layer of silicon, an intermediate oxide layer and a second layer of silicon. The first silicon layer is initially mechanically reduced by around 80% to 90% of its thickness. The remaining silicon layer is further reduced by a plasma etch which may leave an uneven thickness. With appropriate masking the uneven thickness is made even by a second plasma etch. Remaining silicon is removed by a dry etch with XeF2 or BrF3 to expose the intermediate oxide layer. Prior to bonding the semiconductor wafers may be provided with various semiconductor devices to which electrical connections are made through conducting vias formed through the exposed intermediate oxide layer.

    摘要翻译: 第一和第二半导体晶片被结合在一起,其中至少一个晶片具有第一层硅,中间氧化物层和第二硅层。 第一硅层最初机械地还原其厚度的大约80%至90%。 剩余的硅层通过等离子体蚀刻进一步减小,其可能留下不均匀的厚度。 通过适当的掩蔽,即使通过第二等离子体蚀刻也可以形成不均匀的厚度。 通过用XeF 2或BrF 3 3的干蚀刻除去剩余的硅,以暴露中间氧化物层。 在接合之前,半导体晶片可以设置有各种半导体器件,通过通过暴露的中间氧化物层形成的通孔来形成电连接。

    Novel method for integrating silicon CMOS and AlGaN/GaN wideband amplifiers on engineered substrates
    3.
    发明申请
    Novel method for integrating silicon CMOS and AlGaN/GaN wideband amplifiers on engineered substrates 有权
    在工程衬底上集成硅CMOS和AlGaN / GaN宽带放大器的新方法

    公开(公告)号:US20060284247A1

    公开(公告)日:2006-12-21

    申请号:US11326443

    申请日:2006-01-06

    IPC分类号: H01L29/76 H01L23/62

    摘要: High-speed silicon CMOS circuits and high-power AlGaN/GaN amplifiers are integrated on the same wafer. A thin layer of high resistivity silicon is bonded on a substrate. Following the bonding, an AlGaN/GaN structure is grown over the bonded silicon layer. A silicon nitride or a silicon oxide layer is then deposited over the AlGaN/GaN structure. Following this, a thin layer of silicon is bonded to the silicon nitride/silicon oxide layer. An area for the fabrication of AlGaN/GaN devices is defined, and the silicon is etched away from those areas. Following this, CMOS devices are fabricated on the silicon layer and AlGaN/GaN devices fabricated on the AlGaN/GaN surface.

    摘要翻译: 高速硅CMOS电路和大功率AlGaN / GaN放大器集成在同一晶圆上。 一层薄层的高电阻率硅结合在基片上。 在接合之后,在结合的硅层上生长AlGaN / GaN结构。 然后在AlGaN / GaN结构上沉积氮化硅或氧化硅层。 之后,将一薄层硅结合到氮化硅/氧化硅层上。 定义了用于制造AlGaN / GaN器件的区域,并且从这些区域蚀刻硅。 之后,在硅层和在AlGaN / GaN表面上制造的AlGaN / GaN器件上制造CMOS器件。

    Pivoting Lock for Double Lever Cam Lock Fitting

    公开(公告)号:US20220356973A1

    公开(公告)日:2022-11-10

    申请号:US17872836

    申请日:2022-07-25

    IPC分类号: F16L37/18 F16L37/20

    摘要: Method and apparatus for an improved camlock fitting having outer/inner cam lever which are restrained against unintended opening or rotation by a pivoting locking member which is pivotally mounted onto an axle disposed in a corresponding hole on the cam levers so that the pivoting locking member can be easily pivoted in the vertical plane relative to the cam arms. Each of the outer and inner arms has a pivoting locking member mounted on its underside in a protective housing. The camlock fitting may also have an air vent. Together this provides a safety lock assembly for the cam lock fitting so that when the cam lock fitting is pressurized unbeknownst to the operator and the operator attempts to open the cam lock fitting, the safety lock assembly will prevent operation or complete separation of the male and the female portions of the fitting to prevent inadvertent pressurized discharge of hazardous materials.

    Rotating female portion and ergonomic safety lock for cam lock fitting

    公开(公告)号:US11131413B2

    公开(公告)日:2021-09-28

    申请号:US16570756

    申请日:2019-09-13

    摘要: A method and apparatus for an improved rotatable safety cam lock fitting having ergonomically designed double cam levers having outer and inner portions so that when the outer cam levers are opened and the inner cam lever remain closed, the male and female portions of the cam lock fitting only slightly separate from each other allowing the operator to quickly reclose the cam lock fitting if the operator observes that the cam lock fitting still contains pressurized material. This is accomplished by providing a larger cam lobe on the outer cam lever and a smaller cam lobe on the inner cam lever so that when the smaller cam lobe is in a closed position and protrudes into a peripheral groove on the male portion the male and female ends have a small space therein between. Various configurations of the cam portions relative to each other are provided. Various lever locking assemblies may be used to prevent the cam levers from being inadvertently opened.

    Rotating Female Portion and Ergonomic Safety Lock for Cam Lock Fitting

    公开(公告)号:US20210018129A1

    公开(公告)日:2021-01-21

    申请号:US16570756

    申请日:2019-09-13

    IPC分类号: F16L37/18 F16L37/20

    摘要: A method and apparatus for an improved rotatable safety cam lock fitting having ergonomically designed double cam levers having outer and inner portions so that when the outer cam levers are opened and the inner cam lever remain closed, the male and female portions of the cam lock fitting only slightly separate from each other allowing the operator to quickly reclose the cam lock fitting if the operator observes that the cam lock fitting still contains pressurized material. This is accomplished by providing a larger cam lobe on the outer cam lever and a smaller cam lobe on the inner cam lever so that when the smaller cam lobe is in a closed position and protrudes into a peripheral groove on the male portion the male and female ends have a small space therein between. Various configurations of the cam portions relative to each other are provided. Various lever locking assemblies may be used to prevent the cam levers from being inadvertently opened.

    Double cam levers and safety lock for cam lock fitting

    公开(公告)号:US10473248B2

    公开(公告)日:2019-11-12

    申请号:US16284571

    申请日:2019-02-25

    IPC分类号: F16L37/18

    摘要: A method and apparatus for an improved safety cam lock fitting having double cam levers having outer and inner portions so that when the outer cam levers are opened and the inner cam lever remain closed, the male and female portions of the cam lock fitting only slightly separate from each other allowing the operator to quickly reclose the cam lock fitting if the operator observes that the cam lock fitting still contains pressurized material. This is accomplished by providing a larger cam lobe on the outer cam lever and a smaller cam lobe on the inner cam lever so that when the smaller cam lobe is in a closed position and protrudes into a peripheral groove on the male portion the male and female ends have a small space therein between. Various lever locking assemblies may be used to prevent the cam levers from being inadvertently opened.

    Rotating Female Portion and Safety Lock for Cam Lock Fitting

    公开(公告)号:US20190338876A1

    公开(公告)日:2019-11-07

    申请号:US16517379

    申请日:2019-07-19

    申请人: Jeffrey Hartman

    发明人: Jeffrey Hartman

    IPC分类号: F16L37/18

    摘要: A cam lock fitting having a rotating female portion which may include a safety lock which prevents separation of the male and the female portions of the fitting to prevent inadvertent pressurized discharges. Rotation of the female portion is accomplished by placing a connecting collar on the rear of the female end portion so that the female portion rotates about the connecting collar. The safety lock mechanism operates by placing opposing notches in the end of the male portion so that when the cam levers are opened the male and female portions of the cam lock fitting initially only slightly separate allowing the operator to quickly reclose the cam lock fitting if it contains pressurized material. The rotating female portion easily aligns the cam lobes of the cam lever with the notches on the male coupling so that the male and female portions can be separated.

    Double Cam Levers and Safety Lock for Cam Lock Fitting

    公开(公告)号:US20190234548A1

    公开(公告)日:2019-08-01

    申请号:US16383582

    申请日:2019-04-13

    IPC分类号: F16L37/18 F16L37/20

    摘要: A method and apparatus for an improved safety cam lock fitting having side by side double cam levers having outer and inner portions so that when the outer cam levers are opened and the inner cam lever remain closed, the male and female portions of the cam lock fitting only slightly separate from each other allowing the operator to quickly reclose the cam lock fitting if the operator observes that the cam lock fitting still contains pressurized material. This is accomplished by providing a larger cam lobe on the outer cam lever and a smaller cam lobe on the inner cam lever so that when the smaller cam lobe is in a closed position and protrudes into a peripheral groove on the male portion the male and female ends have a small space therein between. A lever latching mechanism may be used to prevent the cam levers from being inadvertently opened.

    Double cam levers and safety lock for cam lock fitting

    公开(公告)号:US09695968B1

    公开(公告)日:2017-07-04

    申请号:US15336197

    申请日:2016-10-27

    IPC分类号: F16L37/18 F16L37/20

    摘要: An apparatus for an improved cam lock fitting having cooperating double cam levers having outer and inner portions so that when the outer cam levers are opened and the inner cam lever remain closed, the male and female portions of the cam lock fitting only slightly separate from each other allowing the operator to quickly reclose the cam lock fitting if the operator observes that the cam lock fitting still contains pressurized material. This is accomplished by providing a larger cam lobe on the outer cam lever and a smaller cam lobe on a fork shaped inner cam lever so that when the smaller cam lobe is in a closed position and protrudes into a peripheral groove on the male portion the male and female ends have a small space thereinbetween.