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    CVD reactor with gas flow virtual walls
    1.
    发明授权
    CVD reactor with gas flow virtual walls 有权
    具有气流虚拟壁的CVD反应器

    公开(公告)号：US09212422B2

    公开(公告)日：2015-12-15

    申请号：US13222840

    申请日：2011-08-31

    申请人： Gregg Higashi ,  Alexander Lerner ,  Khurshed Sorabji ,  Lori D. Washington

    发明人： Gregg Higashi ,  Alexander Lerner ,  Khurshed Sorabji ,  Lori D. Washington

    IPC分类号： C23C16/455

    CPC分类号： C23C16/45565 ,  C23C16/45519

    摘要： A chemical vapor deposition reactor has one or more deposition zones bounded by gas flow virtual walls, within a housing having closed walls. Each deposition zone supports chemical vapor deposition onto a substrate. Virtual walls formed of gas flows laterally surround the deposition zone, including a first gas flow of reactant gas from within the deposition zone and a second gas flow of non-reactant gas from a region laterally external to the deposition zone. The first and second gas flows are mutually pressure balanced to form the virtual walls. The virtual walls are formed by merging of gas flows at the boundary of each deposition zone. The housing has an exhaust valve to prevent pressure differences or pressure build up that would destabilize the virtual walls. Cross-contamination is reduced, between the deposition zones and the closed walls of the housing or an interior region of the housing outside the gas flow virtual walls.

    摘要翻译： 化学气相沉积反应器具有由气流虚拟壁限定的一个或多个沉积区，在具有封闭壁的壳体内。 每个沉积区支持化学气相沉积到基底上。 由气体流形成的虚拟壁横向包围沉积区，包括来自沉积区内的反应气体的第一气流和非反应气体从沉积区的横向外侧的区域的第二气流。 第一和第二气体流量相互压力平衡以形成虚拟壁。 虚拟壁通过在每个沉积区的边界处合并气流而形成。 壳体具有排气阀，以防止压力差或压力增加，这将破坏虚拟墙体的稳定性。 在沉积区域和壳体的封闭壁之间或在气流虚拟壁外部的壳体的内部区域之间的交叉污染减少。

    CVD REACTOR WITH GAS FLOW VIRTUAL WALLS
    2.
    发明申请
    CVD REACTOR WITH GAS FLOW VIRTUAL WALLS 有权
    气体反应器与气体虚拟壁挂

    公开(公告)号：US20130052346A1

    公开(公告)日：2013-02-28

    申请号：US13222840

    申请日：2011-08-31

    申请人： Gregg Higashi ,  Alexander Lerner ,  Khurshed Sorabji ,  Lori D. Washington

    发明人： Gregg Higashi ,  Alexander Lerner ,  Khurshed Sorabji ,  Lori D. Washington

    IPC分类号： C23C16/455

    CPC分类号： C23C16/45565 ,  C23C16/45519

    摘要： A chemical vapor deposition reactor has one or more deposition zones bounded by gas flow virtual walls, within a housing having closed walls. Each deposition zone supports chemical vapor deposition onto a substrate. Virtual walls formed of gas flows laterally surround the deposition zone, including a first gas flow of reactant gas from within the deposition zone and a second gas flow of non-reactant gas from a region laterally external to the deposition zone. The first and second gas flows are mutually pressure balanced to form the virtual walls. The virtual walls are formed by merging of gas flows at the boundary of each deposition zone. The housing has an exhaust valve to prevent pressure differences or pressure build up that would destabilize the virtual walls. Cross-contamination is reduced, between the deposition zones and the closed walls of the housing or an interior region of the housing outside the gas flow virtual walls.

    摘要翻译： 化学气相沉积反应器具有由气流虚拟壁限定的一个或多个沉积区，在具有封闭壁的壳体内。 每个沉积区支持化学气相沉积到基底上。 由气体流形成的虚拟壁横向包围沉积区，包括来自沉积区内的反应气体的第一气流和非反应气体从沉积区的横向外侧的区域的第二气流。 第一和第二气体流量相互压力平衡以形成虚拟壁。 虚拟壁通过在每个沉积区的边界处合并气流而形成。 壳体具有排气阀，以防止压力差或压力增加，这将破坏虚拟墙体的稳定性。 在沉积区域和壳体的封闭壁之间或在气流虚拟壁外部的壳体的内部区域之间的交叉污染减少。

    Rapid thermal processing lamphead with improved cooling
    4.
    发明授权
    Rapid thermal processing lamphead with improved cooling 有权
    快速热处理灯头具有改进的冷却

    公开(公告)号：US08294068B2

    公开(公告)日：2012-10-23

    申请号：US12207711

    申请日：2008-09-10

    申请人： Joseph M. Ranish ,  Khurshed Sorabji ,  Kedarnath Sangam ,  Alexander Lerner

    发明人： Joseph M. Ranish ,  Khurshed Sorabji ,  Kedarnath Sangam ,  Alexander Lerner

    IPC分类号： A21B1/22 ,  F26B19/00

    CPC分类号： F27B17/0025 ,  F27D5/0037 ,  F27D21/0014 ,  H01L21/67109 ,  H01L21/67115

    摘要： Embodiments of a lamphead and apparatus utilizing same are provided herein. In some embodiments, a lamphead for use in thermal processing may include a monolithic member having a plurality of coolant passages and a plurality of lamp passages and reflector cavities, wherein each lamp passage is configured to accommodate a lamp and each reflector cavity is shaped to act as a reflector or to receive a replaceable reflector for the lamp, and wherein the plurality of coolant passages are disposed proximate to the plurality of lamp passages; and at least one heat transfer member extending from the monolithic member into each coolant passage. In some embodiments, the lamphead may be disposed in an apparatus comprising a process chamber having a substrate support, wherein the lamphead is positioned to provide energy to the substrate support.

    摘要翻译： 本发明提供了一种灯头及其使用装置的实施例。 在一些实施例中，用于热处理的灯头可以包括具有多个冷却剂通道和多个灯通道和反射器腔的整体构件，其中每个灯通道被配置成容纳灯，并且每个反射器空腔成形为能够起作用 作为反射器或接收用于灯的可更换反射器，并且其中所述多个冷却剂通道设置成靠近所述多个灯通道; 以及至少一个传热构件，其从所述整体构件延伸到每个冷却剂通道中。 在一些实施例中，灯头可以设置在包括具有基板支撑件的处理室的设备中，其中灯头被定位成向基板支撑件提供能量。

    Synchronous interface to asynchronous processes
    8.
    发明授权
    Synchronous interface to asynchronous processes 有权
    异步进程的同步接口

    公开(公告)号：US08260849B2

    公开(公告)日：2012-09-04

    申请号：US12777164

    申请日：2010-05-10

    申请人： Taras Shkvarchuk ,  Alexander Lerner ,  Thomas Nabiel Boulos

    发明人： Taras Shkvarchuk ,  Alexander Lerner ,  Thomas Nabiel Boulos

    IPC分类号： G06F15/16

    CPC分类号： H04L63/20 ,  H04L12/5601 ,  H04L63/10 ,  H04L67/02 ,  H04L67/28 ,  H04L67/2823 ,  H04L67/42 ,  H04L2012/5619 ,  H04L2012/5629

    摘要： Methods and apparatus, including computer program products, implementing and using techniques for selectively accessing one or more web services from a client machine, the one or more web services and the client machine being accessible over a network. A request for information is received from a client machine with a conversion engine. The request is received over a synchronous interface. The request is processed in the conversion engine. The processed request is transmitted over an asynchronous interface from the conversion engine to at least one web service. Methods and apparatus, including computer program products, for converting a web service description language file for a synchronous web service into a web service description language file for an asynchronous client machine are also described.

    摘要翻译： 包括计算机程序产品，用于从客户机选择性地访问一个或多个web服务的实现和使用技术的方法和装置，所述一个或多个web服务和所述客户端机器可通过网络访问。 从具有转换引擎的客户机接收到信息请求。 通过同步接口接收请求。 请求在转换引擎中处理。 经处理的请求通过异步接口从转换引擎传输到至少一个Web服务。 还描述了用于将用于同步web服务的web服务描述语言文件转换成用于异步客户机的web服务描述语言文件的方法和装置，包括计算机程序产品。

    METHOD, SYSTEM, AND COMPUTER PROGRAM PRODUCT FOR FACILITATING COMMUNICATION IN AN INTEROPERABILITY NETWORK
    9.
    发明申请
    METHOD, SYSTEM, AND COMPUTER PROGRAM PRODUCT FOR FACILITATING COMMUNICATION IN AN INTEROPERABILITY NETWORK 有权
    在互通网络中促进通信的方法，系统和计算机程序产品

    公开(公告)号：US20100281515A1

    公开(公告)日：2010-11-04

    申请号：US12775394

    申请日：2010-05-06

    申请人： Alexander Lerner ,  Michael K. Dewey

    发明人： Alexander Lerner ,  Michael K. Dewey

    IPC分类号： G06F21/00

    CPC分类号： H04L63/20 ,  G06F9/546 ,  G06F21/6236 ,  H04L63/102 ,  H04L67/327

    摘要： Methods and apparatus are described for facilitating communication among a plurality of entities via an interoperability network. Each entity has policy data corresponding thereto governing interaction with the entity via the interoperability network. A message is transmitted from a first one of the entities to a second one of the entities. The first entity has first policy data corresponding thereto and the second entity has second policy data corresponding thereto. The transmitted message was handled in the network according to combined policy data representing a combination of the first and second policy data.

    摘要翻译： 描述了用于促进通过互操作性网络在多个实体之间进行通信的方法和装置。 每个实体具有与其对应的策略数据，以管理通过互操作性网络与实体的交互。 消息从第一个实体发送到第二个实体。 第一实体具有与之对应的第一策略数据，第二实体具有对应于其的第二策略数据。 根据表示第一和第二策略数据的组合的组合策略数据，在网络中处理所发送的消息。