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公开(公告)号：US08703568B2
公开(公告)日：2014-04-22
申请号：US13359125
申请日：2012-01-26
IPC分类号： H01L21/336
CPC分类号： H01L29/66659 , H01L21/26506 , H01L21/26586 , H01L21/823807 , H01L21/823814 , H01L21/823878 , H01L21/823892 , H01L29/1045 , H01L29/105 , H01L29/1083 , H01L29/36 , H01L29/78612 , H01L29/78654
摘要： The present invention is a method for forming super steep doping profiles in MOS transistor structures. The method comprises forming a carbon containing layer (110) beneath the gate dielectric (50) and source and drain regions (80) of a MOS transistor. The carbon containing layer (110) will prevent the diffusion of dopants into the region (40) directly beneath the gate dielectric layer (50).
摘要翻译： 本发明是一种用于在MOS晶体管结构中形成超陡掺杂分布的方法。 该方法包括在栅极电介质（50）下面形成含碳层（110），并在MOS晶体管的源极和漏极区域（80）形成。 含碳层（110）将防止掺杂剂扩散到栅极电介质层（50）正下方的区域（40）中。
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2.发明授权公开(公告)号：US08247300B2
公开(公告)日：2012-08-21
申请号：US12627794
申请日：2009-11-30
申请人： Jeffrey A. Babcock , Angelo Pinto , Manfred Schiekofer , Scott G. Balster , Gregory E. Howard , Alfred Hausler
发明人： Jeffrey A. Babcock , Angelo Pinto , Manfred Schiekofer , Scott G. Balster , Gregory E. Howard , Alfred Hausler
IPC分类号： H01L21/8222
CPC分类号： H01L29/66265 , H01L21/82285 , H01L29/66242 , H01L29/7317 , H01L29/7378
摘要： An integrated circuit and method of fabricating the integrated circuit is disclosed. The integrated circuit includes vertical bipolar transistors (30, 50, 60), each having a buried collector region (26′). A carbon-bearing diffusion barrier (28c) is disposed over the buried collector region (26′), to inhibit the diffusion of dopant from the buried collector region (26′) into the overlying epitaxial layer (28). The diffusion barrier (28c) may be formed by incorporating a carbon source into the epitaxial formation of the overlying layer (28), or by ion implantation. In the case of ion implantation of carbon or SiGeC, masks (52, 62) may be used to define the locations of the buried collector regions (26′) that are to receive the carbon; for example, portions underlying eventual collector contacts (33, 44c) may be masked from the carbon implant so that dopant from the buried collector region (26′) can diffuse upward to meet the contact (33). MOS transistors (70, 80) including the diffusion barrier (28) are also disclosed.
摘要翻译： 公开了一种集成电路及其制造方法。 集成电路包括垂直双极晶体管（30,50,60），每个具有一个埋设集电极区域（26'）。 含碳扩散阻挡层（28c）设置在掩埋集电极区域（26'）之上，以阻止掺杂剂从掩埋的集电极区域（26'）扩散到上覆的外延层（28）中。 扩散阻挡层（28c）可以通过将碳源引入上覆层（28）的外延层中，或通过离子注入形成。 在碳或SiGeC的离子注入的情况下，可以使用掩模（52,62）来限定待接收碳的掩埋收集器区域（26'）的位置; 例如，最终的集电极触点（33,44c）下面的部分可以从碳注入掩模，使得来自掩埋的集电极区域（26'）的掺杂剂可向上扩散以满足触点（33）。 还公开了包括扩散阻挡层（28）的MOS晶体管（70,80）。
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3.发明授权On chip heating for electrical trimming of polysilicon and polysilicon-silicon-germanium resistors and electrically programmable fuses for integrated circuits 有权片上加热用于多晶硅和多晶硅 - 锗 - 锗电阻器的电气修整和用于集成电路的电可编程保险丝公开(公告)号：US07422972B2
公开(公告)日：2008-09-09
申请号：US11182981
申请日：2005-07-15
IPC分类号： H01L21/44
CPC分类号： H01L21/76886 , H01L21/76888 , H01L23/345 , H01L23/5256 , H01L28/20 , H01L2924/0002 , H01L2924/00
摘要： An integrated circuit programmable structure (60) is formed for use a trim resistor and/or a programmable fuse. The programmable structure comprises placing heating elements (70) in close proximity to the programmable structure (60) to heat the programmable structure (60) during programming.
摘要翻译： 形成用于使用微调电阻器和/或可编程保险丝的集成电路可编程结构（60）。 可编程结构包括将加热元件（70）放置在可编程结构（60）附近以在编程期间加热可编程结构（60）。
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公开(公告)号：US07064399B2
公开(公告)日：2006-06-20
申请号：US09948856
申请日：2001-09-07
IPC分类号： H01L31/119
CPC分类号： H01L29/66659 , H01L21/26506 , H01L21/26586 , H01L21/823807 , H01L21/823814 , H01L21/823878 , H01L21/823892 , H01L29/1045 , H01L29/105 , H01L29/1083 , H01L29/36 , H01L29/78612 , H01L29/78654
摘要： The present invention is a method for forming super steep doping profiles in MOS transistor structures. The method comprises forming a carbon containing layer (110) beneath the gate dielectric (50) and source and drain regions (80) of a MOS transistor. The carbon containing layer (110) will prevent the diffusion of dopants into the region (40) directly beneath the gate dielectric layer (50).
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公开(公告)号：US06894366B2
公开(公告)日：2005-05-17
申请号：US09967187
申请日：2001-09-28
IPC分类号： H01L21/331 , H01L29/08 , H01L29/32 , H01L29/732 , H01L27/082 , H01L27/102 , H01L29/70 , H01L31/11
CPC分类号： H01L29/7322 , H01L29/0821 , H01L29/32
摘要： An improved BJT is described that maximizes both Bvceo and Ft/Fmax for optimum performance. Scattering centers are introduced in the collector region (80) of the BJT to improve Bvceo. The inclusion of the scattering centers allows the width of the collector region WCD (90) to be reduced leading to an improvement in Ft/Fmax.
摘要翻译： 描述了改进的BJT，使Bvceo和Ft / Fmax最大化以获得最佳性能。 散射中心引入BJT的收集器区域（80），以改善Bvceo。 包含散射中心允许减小集电极区域W（90）的宽度，从而改善Ft / Fmax。
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6.发明授权Integrated process for high voltage and high performance silicon-on-insulator bipolar devices 有权用于高电压和高性能绝缘体上的双极器件的集成工艺公开(公告)号：US06838348B2
公开(公告)日：2005-01-04
申请号：US10844144
申请日：2004-05-12
IPC分类号： H01L21/331 , H01L21/84 , H01L27/082 , H01L27/12 , H01L29/06 , H01L29/08 , H01L29/73
CPC分类号： H01L29/66265 , H01L21/84 , H01L27/0826 , H01L27/1203 , H01L29/0692 , H01L29/0821 , H01L29/7317
摘要： High-voltage bipolar transistors (30, 60) in silicon-on-insulator (SOI) integrated circuits are disclosed. In one disclosed embodiment, an collector region (28) is formed in epitaxial silicon (24, 25) disposed over a buried insulator layer (22). A base region (32) and emitter (36) are disposed over the collector region (28). Buried collector region (31) are disposed in the epitaxial silicon (24) away from the base region (32). The transistor may be arranged in a rectangular fashion, as conventional, or alternatively by forming an annular buried collector region (31). According to another disclosed embodiment, a high voltage transistor (60) includes a central isolation structure (62), so that the base region (65) and emitter region (66) are ring-shaped to provide improved performance. A process for fabricating the high voltage transistor (30, 60) simultaneously with a high performance transistor (40) is also disclosed.
摘要翻译： 公开了绝缘体上硅（SOI）集成电路中的高电压双极晶体管（30,60）。 在一个公开的实施例中，集电极区域（28）形成在设置在掩埋绝缘体层（22）上的外延硅（24,25）中。 基极区域（32）和发射极（36）设置在集电极区域（28）的上方。 掩埋集电极区域（31）设置在远离基极区域（32）的外延硅（24）中。 晶体管可以以常规方式布置成矩形方式，或者通过形成环形埋层集电极区域（31）来布置。 根据另一公开的实施例，高压晶体管（60）包括中心隔离结构（62），使得基极区域（65）和发射极区域（66）是环形的，以提供改进的性能。 还公开了与高性能晶体管（40）同时制造高压晶体管（30,60）的工艺。
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公开(公告)号：US08129246B2
公开(公告)日：2012-03-06
申请号：US13006224
申请日：2011-01-13
IPC分类号： H01L21/336
CPC分类号： H01L29/66659 , H01L21/26506 , H01L21/26586 , H01L21/823807 , H01L21/823814 , H01L21/823878 , H01L21/823892 , H01L29/1045 , H01L29/105 , H01L29/1083 , H01L29/36 , H01L29/78612 , H01L29/78654
摘要： The present invention is a method for forming super steep doping profiles in MOS transistor structures. The method comprises forming a carbon containing layer (110) beneath the gate dielectric (50) and source and drain regions (80) of a MOS transistor. The carbon containing layer (110) will prevent the diffusion of dopants into the region (40) directly beneath the gate dielectric layer (50).
摘要翻译： 本发明是一种用于在MOS晶体管结构中形成超陡掺杂分布的方法。 该方法包括在栅极电介质（50）下面形成含碳层（110），并在MOS晶体管的源极和漏极区域（80）形成。 含碳层（110）将防止掺杂剂扩散到栅极电介质层（50）正下方的区域（40）中。
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公开(公告)号：US07655523B2
公开(公告)日：2010-02-02
申请号：US11928652
申请日：2007-10-30
IPC分类号： H01L21/336
CPC分类号： H01L29/66659 , H01L21/26506 , H01L21/26586 , H01L21/823807 , H01L21/823814 , H01L21/823878 , H01L21/823892 , H01L29/1045 , H01L29/105 , H01L29/1083 , H01L29/36 , H01L29/78612 , H01L29/78654
摘要： The present invention is a method for forming super steep doping profiles in MOS transistor structures. The method comprises forming a carbon containing layer (110) beneath the gate dielectric (50) and source and drain regions (80) of a MOS transistor. The carbon containing layer (110) will prevent the diffusion of dopants into the region (40) directly beneath the gate dielectric layer (50).
摘要翻译： 本发明是一种用于在MOS晶体管结构中形成超陡掺杂分布的方法。 该方法包括在栅极电介质（50）下面形成含碳层（110），并在MOS晶体管的源极和漏极区域（80）形成。 含碳层（110）将防止掺杂剂扩散到栅极电介质层（50）正下方的区域（40）中。
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公开(公告)号：US20090130805A1
公开(公告)日：2009-05-21
申请号：US12356371
申请日：2009-01-20
IPC分类号： H01L21/336 , H01L21/265
CPC分类号： H01L29/66659 , H01L21/26506 , H01L21/26586 , H01L21/823807 , H01L21/823814 , H01L21/823878 , H01L21/823892 , H01L29/1045 , H01L29/105 , H01L29/1083 , H01L29/36 , H01L29/78612 , H01L29/78654
摘要： The present invention is a method for forming super steep doping profiles in MOS transistor structures. The method comprises forming a carbon containing layer (110) beneath the gate dielectric (50) and source and drain regions (80) of a MOS transistor. The carbon containing layer (110) will prevent the diffusion of dopants into the region (40) directly beneath the gate dielectric layer (50).
摘要翻译： 本发明是一种用于在MOS晶体管结构中形成超陡掺杂分布的方法。 该方法包括在栅极电介质（50）下面形成含碳层（110），并在MOS晶体管的源极和漏极区域（80）形成。 含碳层（110）将防止掺杂剂扩散到栅极电介质层（50）正下方的区域（40）中。
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公开(公告)号：US07501324B2
公开(公告)日：2009-03-10
申请号：US11380602
申请日：2006-04-27
IPC分类号： H01L21/336
CPC分类号： H01L29/66659 , H01L21/26506 , H01L21/26586 , H01L21/823807 , H01L21/823814 , H01L21/823878 , H01L21/823892 , H01L29/1045 , H01L29/105 , H01L29/1083 , H01L29/36 , H01L29/78612 , H01L29/78654
摘要： The present invention is a method for forming super steep doping profiles in MOS transistor structures. The method comprises forming a carbon containing layer (110) beneath the gate dielectric (50) and source and drain regions (80) of a MOS transistor. The carbon containing layer (110) will prevent the diffusion of dopants into the region (40) directly beneath the gate dielectric layer (50).
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