OPTICAL DEVICE FOR MICROSCOPIC OBSERVATION
    1.
    发明申请

    公开(公告)号:US20180307030A1

    公开(公告)日:2018-10-25

    申请号:US16025288

    申请日:2018-07-02

    Abstract: An optical device for microscopic observation 4 comprises: a cold stop 13 having openings 13d, 13e corresponding to a low-magnification microscope optical system 5 and being a stop member arranged in a vacuum vessel 12 to let the light from the sample S pass to the camera 3; a warm stop 10 having an opening 14 corresponding to a high-magnification microscope optical system 5 and being a stop member arranged outside the vacuum vessel 12 to let the light from the sample S pass toward the cold stop 13; and a support member 11 supporting the warm stop 10 so that the warm stop can be inserted to or removed from on the optical axis of the light from the sample S, wherein the warm stop 10 has a reflective surface 15 on the camera 3 side and wherein the opening 14 is smaller than the openings 13d, 13e.

    SOLID IMMERSION LENS HOLDER AND IMAGE ACQUISITION DEVICE

    公开(公告)号:US20170285296A1

    公开(公告)日:2017-10-05

    申请号:US15507252

    申请日:2015-09-24

    Abstract: A solid immersion lens holder includes a first member having a first opening disposing a spherical face portion therein so that a part of the spherical face portion protrudes toward an objective lens side and a second member having a second opening disposing a contact portion therein so that a contact face protrudes toward a side opposite to the objective lens side. The first member includes three plate members disposed on the objective lens side with respect to the first opening. Each of the three plate members is provided with a protrusion portion capable of contacting the spherical face portion.

    SEMICONDUCTOR FAILURE ANALYSIS DEVICE

    公开(公告)号:US20250093279A1

    公开(公告)日:2025-03-20

    申请号:US18937872

    申请日:2024-11-05

    Abstract: The semiconductor failure analysis device 1 includes: a tester 2 configured to apply a stimulation signal to a semiconductor device 100; a light source 3 configured to generate irradiation light L1 with which the semiconductor device 100 is irradiated; a solid immersion lens 4 disposed on an optical path of the irradiation light L1; a light detection unit 5 configured to receive reflected light L2 and to output a detection signal according to the reflected light L2; an optical system 6 disposed between the light source 3 and the solid immersion lens 4 to emit the irradiation light L1 to the semiconductor device 100 via the solid immersion lens 4 and disposed between the solid immersion lens 4 and the light detection unit 5 to emit the reflected light L2 received via the solid immersion lens 4 to the light detection unit 5; and a computer 7 configured to obtain information on a failure portion of the semiconductor device 100 using the detection signal. The light source 3 emits the irradiation light L1 having a center wavelength of 880 nm or more and 980 nm or less. The solid immersion lens 4 is formed of GaAs.

    OPTICAL DEVICE FOR MICROSCOPIC OBSERVATION
    6.
    发明申请
    OPTICAL DEVICE FOR MICROSCOPIC OBSERVATION 审中-公开
    用于微观观察的光学装置

    公开(公告)号:US20160313547A1

    公开(公告)日:2016-10-27

    申请号:US15198634

    申请日:2016-06-30

    Abstract: An optical device for microscopic observation 4 comprises: a cold stop 13 having openings 13d, 13e corresponding to a low-magnification microscope optical system 5 and being a stop member arranged in a vacuum vessel 12 to let the light from the sample S pass to the camera 3; a warm stop 10 having an opening 14 corresponding to a high-magnification microscope optical system 5 and being a stop member arranged outside the vacuum vessel 12 to let the light from the sample S pass toward the cold stop 13; and a support member 11 supporting the warm stop 10 so that the warm stop can be inserted to or removed from on the optical axis of the light from the sample S, wherein the warm stop 10 has a reflective surface 15 on the camera 3 side and wherein the opening 14 is smaller than the openings 13d, 13e.

    Abstract translation: 用于显微镜观察的光学装置4包括:具有对应于低倍率显微镜光学系统5的开口13d,13e的冷止端13,并且是设置在真空容器12中以使来自样品S的光通过到 相机3; 具有对应于高倍率显微镜光学系统5的开口14的热止动件10,并且是设置在真空容器12外部以使来自样品S的光通向冷止器13的止动构件; 以及支撑暖挡件10的支撑构件11,使得暖挡件可以插入到来自样品S的光的光轴上或从其上移除,其中暖挡件10在相机3侧具有反射表面15, 其中开口14小于开口13d,13e。

    SEMICONDUCTOR FAILURE ANALYSIS DEVICE

    公开(公告)号:US20230087835A1

    公开(公告)日:2023-03-23

    申请号:US17795570

    申请日:2020-11-24

    Abstract: The semiconductor failure analysis device includes: a light source configured to generate irradiation light with which the semiconductor device is irradiated; a solid immersion lens disposed on an optical path of the irradiation light; a light detection unit configured to receive reflected light and to output a detection signal according to the reflected light; an optical system 6 disposed between the light source and the solid immersion lens to emit the irradiation light to the semiconductor device via the solid immersion lens and disposed between the solid immersion lens and the light detection unit to emit the reflected light received via the solid immersion lens to the light detection unit. The light source emits the irradiation light having a center wavelength of 880 nm or more and 980 nm or less. The solid immersion lens is formed of GaAs.

    OPTICAL UNIT AND FILM THICKNESS MEASUREMENT DEVICE

    公开(公告)号:US20220333913A1

    公开(公告)日:2022-10-20

    申请号:US17634298

    申请日:2020-08-31

    Abstract: An optical unit includes an input portion configured to have measurement light having a wavelength extending from an ultraviolet region to a visible region input thereto, an optical system configured to condense the measurement light in a state where a chromatic aberration is caused to occur, and an opening portion configured not to image light having a wavelength in the visible region and to image light having a wavelength in the ultraviolet region of the measurement light having a chromatic aberration having occurred therein.

    SOLID IMMERSION LENS UNIT AND SEMICONDUCTOR INSPECTION DEVICE

    公开(公告)号:US20220326501A1

    公开(公告)日:2022-10-13

    申请号:US17634036

    申请日:2020-07-16

    Abstract: A solid immersion lens unit includes a solid immersion lens and a holder for swingably holding the solid immersion lens. The solid immersion lens includes a first lens portion formed of a first material, and a second lens portion formed of a second material having a refractive index smaller than a refractive index of the first material and coupled to the first lens portion. The first lens portion includes a contact surface for contacting with an observation object and a convex first spherical surface. The second lens portion includes a concave second spherical surface facing the first spherical surface and a convex third spherical surface to be disposed to face an objective lens. The holder has a contact portion configured to be contactable with the third spherical surface.

    METHOD FOR OBSERVING STEM CELLS, METHOD FOR REMOVAL OF CELL REGION IN STATE TENDING TOWARD DIFFERENTIATION, AND DEVICE FOR OBSERVING STEM CELLS
    10.
    发明申请
    METHOD FOR OBSERVING STEM CELLS, METHOD FOR REMOVAL OF CELL REGION IN STATE TENDING TOWARD DIFFERENTIATION, AND DEVICE FOR OBSERVING STEM CELLS 有权
    用于观察干细胞的方法,用于移除状态趋势分化中的细胞区域的方法,以及用于观察干细胞的装置

    公开(公告)号:US20150323454A1

    公开(公告)日:2015-11-12

    申请号:US14806999

    申请日:2015-07-23

    Abstract: A method for observing stem cells by an observation device 1 comprises, placing stem cells C in a petri dish 11, mounting the petri dish 11 on a waveguide 21 via water 13, emitting illumination light L1 into the waveguide 21 and emitting the illumination light L1 to the stem cells C in the petri dish 11 via the water 13, and detecting scattered light L2, the scattered light L2 being the illumination light L1 emitted to the stem cells C that is scattered by the stem cells C and has passed through the waveguide 21. Then, in the light image detected by means of the scattered light L2, a region that is markedly darker than other regions is identified as being in the state tending toward differentiation.

    Abstract translation: 通过观察装置1观察干细胞的方法包括:将干细胞C放置在培养皿11中,通过水13将培养皿11安装在波导21上,将照明光L1发射到波导21中并发射照明光L1 通过水13向陪替氏培养皿11中的干细胞C,并且检测散射光L2,散射光L2是发射到干细胞C的干细胞C的照射光L1,其被干细胞C散射并已经通过波导 然后,在通过散射光L2检测到的光图像中,比其他区域明显更暗的区域被识别为处于朝向微分的状态。

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