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公开(公告)号：US11921277B2
公开(公告)日：2024-03-05
申请号：US16772983
申请日：2018-11-06
发明人： Satoshi Takimoto
CPC分类号： G02B21/367 , G02B21/10 , G02B21/24 , H04N23/55
摘要： An image acquisition device includes: a stage on which a sample is placed; a drive unit; a first irradiation optical system; a second irradiation optical system; a beam splitter; a pupil dividing element; a first imaging lens; a first imaging element; an analysis unit; a control unit; a second imaging lens; and a second imaging element, a first irradiation light irradiation range captured by the first irradiation optical system includes a second imaging region captured by the second imaging element, the second imaging region is located behind a first imaging region in a scanning direction, and the control unit controls a focus position of an objective lens based on focus information before capturing the second imaging region by the second imaging element.
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公开(公告)号：US11988497B2
公开(公告)日：2024-05-21
申请号：US17634298
申请日：2020-08-31
发明人： Ikuo Arata , Satoshi Takimoto , Kenichi Ohtsuka
CPC分类号： G01B11/0625 , G01B5/06 , G01B11/02 , G01B11/06 , G02B17/0816 , G02B17/0868
摘要： An optical unit includes an input portion configured to have measurement light having a wavelength extending from an ultraviolet region to a visible region input thereto, an optical system configured to condense the measurement light in a state where a chromatic aberration is caused to occur, and an opening portion configured not to image light having a wavelength in the visible region and to image light having a wavelength in the ultraviolet region of the measurement light having a chromatic aberration having occurred therein.
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