公开(公告)号：US11624902B2

公开(公告)日：2023-04-11

申请号：US16765529

申请日：2018-11-09

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Yumi Kuramoto ,  Katsumi Shibayama ,  Takashi Kasahara ,  Masaki Hirose ,  Toshimitsu Kawai ,  Hiroki Oyama

IPC: G02B26/00 ,  G01N21/45 ,  G01N21/95 ,  H01L27/144 ,  H01L31/0203 ,  H01L31/0216

Abstract: A wafer includes a substrate layer, a first mirror layer having a plurality of two-dimensionally arranged first mirror portions, and a second mirror layer having a plurality of two-dimensionally arranged second mirror portions. In the wafer, a gap is formed between the first mirror portion and the second mirror portion so as to form a plurality of Fabry-Perot interference filter portions. A wafer inspection method according to an embodiment includes a step of performing faulty/non-faulty determination of each of the plurality of Fabry-Perot interference filter portions, and a step of applying ink to at least part of a portion overlapping the gap when viewed in a facing direction on the second mirror layer of the Fabry-Perot interference filter portion determined as faulty.

公开(公告)号：US11555741B2

公开(公告)日：2023-01-17

申请号：US17398261

申请日：2021-08-10

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masaki Hirose ,  Katsumi Shibayama ,  Takashi Kasahara ,  Toshimitsu Kawai ,  Takehiko Yashiro ,  Mitsushi Mineno ,  Shigeru Suzuki

IPC: G01J3/26 ,  G02B26/00 ,  G02B5/28 ,  G01J5/04 ,  G01J5/02 ,  G01J3/02 ,  G01J5/10 ,  G01J5/06 ,  G01J5/0802 ,  G02B7/00

Abstract: A light detection device includes a Fabry-Perot interference filter, a light detector, a spacer that has a placement surface on which a portion outside a light transmission region in a bottom surface of the interference filter is placed, and an adhesive member that adheres the interference filter and the spacer to each other. Elastic modulus of the adhesive member is smaller than elastic modulus of the spacer. At least a part of a lateral surface of the interference filter is located on the placement surface such that a part of the placement surface of the spacer is disposed outside the lateral surface. The adhesive member is disposed in a corner portion formed by the lateral surface of the interference filter and the part of the placement surface of the spacer and contacts each of the lateral surface and the part of the placement surface.

公开(公告)号：US11422059B2

公开(公告)日：2022-08-23

申请号：US16765626

申请日：2018-11-09

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Takashi Kasahara ,  Katsumi Shibayama ,  Masaki Hirose ,  Toshimitsu Kawai ,  Hiroki Oyama ,  Yumi Kuramoto

IPC: G01M11/02 ,  G01M11/00 ,  G02B26/00

Abstract: An optical inspection device includes: a wafer support unit configured to support a wafer in which a plurality of Fabry-Perot interference filter portions are formed, each of the plurality of filter portions in which a distance between the first mirror portion and the second mirror portion facing each other varies by an electrostatic force, the wafer support unit configured to support the wafer such that a direction in which the first mirror portion and the second mirror portion face each other follows along a reference line; a light emission unit configured to emit light to be incident on each of the plurality of filter portions along the reference line; and a light detection unit configured to detect light transmitted through each of the plurality of filter portions along the reference line. The wafer support unit has a light passage region that allows light to pass along the reference line.

公开(公告)号：US11054560B2

公开(公告)日：2021-07-06

申请号：US15633863

申请日：2017-06-27

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Toshimitsu Kawai ,  Katsumi Shibayama ,  Takashi Kasahara ,  Masaki Hirose ,  Hiroki Oyama ,  Yumi Teramachi

IPC: G02B5/28 ,  G02B26/00 ,  G01J5/08 ,  G01J5/06 ,  G01J1/04 ,  G01J5/02 ,  G01J5/04

Abstract: A Fabry-Perot interference filter includes: a substrate having a first surface and a second surface facing each other; a first layer structure disposed on the first surface; and a second layer structure disposed on the second surface, wherein the first layer structure is provided with a first mirror portion and a second mirror portion facing each other with an air gap therebetween, and a distance between the first mirror portion and the second mirror portion is varied, and the second layer structure is formed with a separation region separating at least a part of the second layer structure into one side and another side in a direction along the second surface.

公开(公告)号：US11041755B2

公开(公告)日：2021-06-22

申请号：US16303688

申请日：2017-05-26

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Takashi Kasahara ,  Katsumi Shibayama ,  Masaki Hirose ,  Toshimitsu Kawai ,  Hiroki Oyama ,  Yumi Kuramoto

IPC: G01J3/26 ,  B23K26/53 ,  B23K26/08 ,  G02B5/28 ,  G02B26/00

Abstract: A method of manufacturing a Fabry-Perot interference filter includes a forming step of forming a first mirror layer having a plurality of first mirror portions, a sacrificial layer having a plurality of portions expected to be removed, and a second mirror layer having a plurality of second mirror portions on a first main surface of a wafer which includes parts corresponding to a plurality of two-dimensionally arranged substrates and is expected to be cut into the plurality of substrates along each of a plurality of lines; a removing step of simultaneously removing the plurality of two-dimensionally arranged portions expected to be removed from the sacrificial layer through etching after the Ruining step; and a cutting step of cutting the wafer into the plurality of substrates along each of the plurality of lines after the removing step.

公开(公告)号：US10900834B2

公开(公告)日：2021-01-26

申请号：US16303209

申请日：2017-05-01

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Takashi Kasahara ,  Katsumi Shibayama ,  Masaki Hirose ,  Toshimitsu Kawai ,  Hiroki Oyama ,  Yumi Kuramoto

IPC: G01J3/26 ,  B23K26/53 ,  B23K26/00 ,  B23K26/064 ,  B81B3/00 ,  B81C1/00 ,  G01J3/02 ,  G02B5/28 ,  G02B26/00 ,  B23K26/06 ,  B23K103/00 ,  B23K101/40

Abstract: The Fabry-Perot interference filter includes: a substrate having a first surface, a first laminate having a first mirror portion disposed on the first surface, a second laminate having a second mirror portion facing the first mirror portion with an air gap interposed therebetween, and an intermediate layer defining the air gap between the first and second laminate. The substrate has an outer edge portion positioned outside an outer edge of the intermediate layer when viewed from a direction perpendicular to the first surface. The second laminate further includes a covering portion covering the intermediate layer and a peripheral edge portion positioned on the first surface in the outer edge portion. The second mirror portion, the covering portion, and the peripheral edge portion are integrally formed so as to be continuous with each other. The peripheral edge portion is thinned along an outer edge of the outer edge portion.

公开(公告)号：USD839117S1

公开(公告)日：2019-01-29

申请号：US35504120

申请日：2017-06-06

Applicant: HAMAMATSU PHOTONICS K.K.

Designer： Masaki Hirose ,  Katsumi Shibayama ,  Takashi Kasahara ,  Toshimitsu Kawai ,  Hiroki Oyama ,  Yumi Teramachi ,  Takafumi Yokino ,  Katsuhiko Kato

公开(公告)号：US10185140B2

公开(公告)日：2019-01-22

申请号：US14901732

申请日：2014-06-24

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Katsumi Shibayama ,  Takashi Kasahara ,  Masaki Hirose ,  Toshimitsu Kawai

IPC: G01J3/26 ,  G02B26/00

Abstract: A Fabry-Perot interference filter 10A includes a first mirror 31; a second mirror 41 being opposite to the first mirror 31 with a gap S therebetween; a first electrode 17 formed in the first mirror 31 to surround a light transmission region 11; a second electrode 18 formed in the first mirror 31 to include the light transmission region 11; and a third electrode 19 formed in the second mirror 41 to be opposite to the first electrode 17 and the second electrode 18 and connected to the same potential as the second electrode 18. The second electrode 18 is positioned at the side of the third electrode 19 or the opposite side thereof with respect to the first electrode 17 in an opposite direction D where the first mirror 31 and the second mirror 41 are opposite each other.

公开(公告)号：USD829582S1

公开(公告)日：2018-10-02

申请号：US35503193

申请日：2016-12-13

Applicant: HAMAMATSU PHOTONICS K.K.

Designer： Masaki Hirose ,  Katsumi Shibayama ,  Takashi Kasahara ,  Toshimitsu Kawai ,  Hiroki Oyama ,  Yumi Teramachi ,  Takafumi Yokino ,  Katsuhiko Kato

公开(公告)号：US09863883B2

公开(公告)日：2018-01-09

申请号：US14420502

申请日：2013-08-09

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Katsumi Shibayama ,  Masashi Ito ,  Takafumi Yokino ,  Masaki Hirose ,  Anna Yoshida ,  Kazuto Ofuji ,  Yoshihiro Maruyama ,  Takashi Kasahara ,  Toshimitsu Kawai ,  Toru Hirohata ,  Hiroki Kamei ,  Hiroki Oyama

IPC: G01N21/65 ,  G01N21/03 ,  B82Y40/00

CPC classification number: G01N21/658 ,  B82Y40/00 ,  G01N21/03 ,  G01N2201/068

Abstract: A SERS element comprises a substrate having a front face; a fine structure part formed on the front face and having a plurality of pillars; and a conductor layer formed on the fine structure part and constituting an optical function part for generating surface-enhanced Raman scattering. The conductor layer has a base part formed along the front face and a plurality of protrusions protruding from the base part at respective positions corresponding to the pillars. The base part is formed with a plurality of grooves surrounding the respective pillars when seen in the projecting direction of the pillars, while an end part of the protrusion is located within the groove corresponding thereto.