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公开(公告)号：US11796391B2
公开(公告)日：2023-10-24
申请号：US17634280
申请日：2020-10-06
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi Kasahara , Katsumi Shibayama , Kei Tabata , Masaki Hirose , Hiroki Oyama , Yumi Kuramoto
CPC classification number: G01J3/26 , G01J3/0297 , G01J3/45 , G02B5/281 , G02B26/001
Abstract: A light detection device includes: a first support part disposed on a mounting surface of the wiring board; a Fabry-Perot interference filter disposed in a first support region of the first support part; and a temperature detector, wherein the temperature detector is disposed on the mounting surface such that at least a part of the temperature detector overlaps a part of the Fabry-Perot interference filter when seen in a first direction perpendicular to the mounting surface and such that at least a part of the temperature detector overlaps a part of the first support part when seen in a second direction in which the first support part and the light detector are aligned with each other, and wherein a first distance between the temperature detector and the first support part in the second direction is smaller than a first width of the first support region in the second direction.
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公开(公告)号：US11294170B2
公开(公告)日：2022-04-05
申请号：US16765577
申请日：2018-11-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Masaki Hirose , Katsumi Shibayama , Takashi Kasahara , Toshimitsu Kawai , Hiroki Oyama , Yumi Kuramoto
IPC: H01L27/144 , H01L31/0203 , H01L31/0216 , H01L31/18 , G02B27/00 , B08B5/02 , B08B13/00 , G02B5/28
Abstract: A method for removing a foreign substance according to an embodiment includes: a step of preparing a Fabry-Perot interference filter in which a gap is formed between a portion of a first laminate at least including a first mirror portion and a portion of a second laminate at least including a second mirror portion facing each other so that a distance between the first mirror portion and the second mirror portion facing each other varies by an electrostatic force; a step of detecting a foreign substance adhering to a surface of the second laminate; and a step of blowing air in which an airflow peak position is adjusted on the basis of a position of the detected foreign substance onto the surface of the second laminate and thereby removing the foreign substance from the surface of the second laminate.
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3.发明授权公开(公告)号：US11156500B2
公开(公告)日：2021-10-26
申请号：US16609270
申请日：2018-04-24
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi Kasahara , Katsumi Shibayama , Masaki Hirose , Toshimitsu Kawai , Hiroki Oyama , Yumi Kuramoto
Abstract: Provided is a non-transitory computer-readable recording medium recording an optical measurement control program in a light detection device, the program causing a computer to execute a process of measuring light to be measured by acquiring an electric signal output from the light detector, the optical measurement control program causing the computer to function as: a voltage control unit controlling the potential difference generated between the pair of mirrors to gradually increase until the potential difference reaches a set potential difference corresponding to a wavelength of the light to be measured before the acquisition of the electric signal is started; and a signal acquisition unit acquiring the electric signal in a state where the voltage control unit allows the set potential difference to be generated between the pair of mirrors.
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公开(公告)号：US11624902B2
公开(公告)日：2023-04-11
申请号：US16765529
申请日：2018-11-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Yumi Kuramoto , Katsumi Shibayama , Takashi Kasahara , Masaki Hirose , Toshimitsu Kawai , Hiroki Oyama
IPC: G02B26/00 , G01N21/45 , G01N21/95 , H01L27/144 , H01L31/0203 , H01L31/0216
Abstract: A wafer includes a substrate layer, a first mirror layer having a plurality of two-dimensionally arranged first mirror portions, and a second mirror layer having a plurality of two-dimensionally arranged second mirror portions. In the wafer, a gap is formed between the first mirror portion and the second mirror portion so as to form a plurality of Fabry-Perot interference filter portions. A wafer inspection method according to an embodiment includes a step of performing faulty/non-faulty determination of each of the plurality of Fabry-Perot interference filter portions, and a step of applying ink to at least part of a portion overlapping the gap when viewed in a facing direction on the second mirror layer of the Fabry-Perot interference filter portion determined as faulty.
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公开(公告)号：US11422059B2
公开(公告)日：2022-08-23
申请号：US16765626
申请日：2018-11-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi Kasahara , Katsumi Shibayama , Masaki Hirose , Toshimitsu Kawai , Hiroki Oyama , Yumi Kuramoto
Abstract: An optical inspection device includes: a wafer support unit configured to support a wafer in which a plurality of Fabry-Perot interference filter portions are formed, each of the plurality of filter portions in which a distance between the first mirror portion and the second mirror portion facing each other varies by an electrostatic force, the wafer support unit configured to support the wafer such that a direction in which the first mirror portion and the second mirror portion face each other follows along a reference line; a light emission unit configured to emit light to be incident on each of the plurality of filter portions along the reference line; and a light detection unit configured to detect light transmitted through each of the plurality of filter portions along the reference line. The wafer support unit has a light passage region that allows light to pass along the reference line.
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Patent Agency Ranking
公开(公告)号：US11041755B2
公开(公告)日：2021-06-22
申请号：US16303688
申请日：2017-05-26
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi Kasahara , Katsumi Shibayama , Masaki Hirose , Toshimitsu Kawai , Hiroki Oyama , Yumi Kuramoto
Abstract: A method of manufacturing a Fabry-Perot interference filter includes a forming step of forming a first mirror layer having a plurality of first mirror portions, a sacrificial layer having a plurality of portions expected to be removed, and a second mirror layer having a plurality of second mirror portions on a first main surface of a wafer which includes parts corresponding to a plurality of two-dimensionally arranged substrates and is expected to be cut into the plurality of substrates along each of a plurality of lines; a removing step of simultaneously removing the plurality of two-dimensionally arranged portions expected to be removed from the sacrificial layer through etching after the Ruining step; and a cutting step of cutting the wafer into the plurality of substrates along each of the plurality of lines after the removing step.
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公开(公告)号：US10900834B2
公开(公告)日：2021-01-26
申请号：US16303209
申请日：2017-05-01
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi Kasahara , Katsumi Shibayama , Masaki Hirose , Toshimitsu Kawai , Hiroki Oyama , Yumi Kuramoto
IPC: G01J3/26 , B23K26/53 , B23K26/00 , B23K26/064 , B81B3/00 , B81C1/00 , G01J3/02 , G02B5/28 , G02B26/00 , B23K26/06 , B23K103/00 , B23K101/40
Abstract: The Fabry-Perot interference filter includes: a substrate having a first surface, a first laminate having a first mirror portion disposed on the first surface, a second laminate having a second mirror portion facing the first mirror portion with an air gap interposed therebetween, and an intermediate layer defining the air gap between the first and second laminate. The substrate has an outer edge portion positioned outside an outer edge of the intermediate layer when viewed from a direction perpendicular to the first surface. The second laminate further includes a covering portion covering the intermediate layer and a peripheral edge portion positioned on the first surface in the outer edge portion. The second mirror portion, the covering portion, and the peripheral edge portion are integrally formed so as to be continuous with each other. The peripheral edge portion is thinned along an outer edge of the outer edge portion.
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公开(公告)号：US20250052612A1
公开(公告)日：2025-02-13
申请号：US18931815
申请日：2024-10-30
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi Kasahara , Katsumi Shibayama , Kei Tabata , Masaki Hirose , Hiroki Oyama , Yumi Kuramoto
Abstract: A light detection device of the present invention includes: a wiring board; a first support part disposed on a mounting surface of the wiring board; a Fabry-Perot interference filter having a first mirror part and a second mirror part between which a distance is variable and having an outer edge portion disposed in a first support region of the first support part; a light detector disposed on the mounting surface to face the first mirror part and the second mirror part on one side of the first support part; and a temperature detector disposed on the mounting surface, wherein the temperature detector is disposed on the mounting surface such that at least a part of the temperature detector overlaps a part of the Fabry-Perot interference filter when seen in a first direction perpendicular to the mounting surface and such that at least a part of the temperature detector overlaps a part of the first support part when seen in a second direction in which the first support part and the light detector are aligned with each other, and wherein a first distance between the temperature detector and the first support part in the second direction is smaller than a first width of the first support region in the second direction.
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公开(公告)号：US12169143B2
公开(公告)日：2024-12-17
申请号：US18223209
申请日：2023-07-18
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi Kasahara , Katsumi Shibayama , Kei Tabata , Masaki Hirose , Hiroki Oyama , Yumi Kuramoto
Abstract: A light detection device of the present invention includes: a wiring board; a first support part disposed on a mounting surface of the wiring board; a Fabry-Perot interference filter having a first mirror part and a second mirror part between which a distance is variable and having an outer edge portion disposed in a first support region of the first support part; a light detector disposed on the mounting surface to face the first mirror part and the second mirror part on one side of the first support part; and a temperature detector disposed on the mounting surface, wherein the temperature detector is disposed on the mounting surface such that at least a part of the temperature detector overlaps a part of the Fabry-Perot interference filter when seen in a first direction perpendicular to the mounting surface and such that at least a part of the temperature detector overlaps a part of the first support part when seen in a second direction in which the first support part and the light detector are aligned with each other, and wherein a first distance between the temperature detector and the first support part in the second direction is smaller than a first width of the first support region in the second direction.
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公开(公告)号：US11609420B2
公开(公告)日：2023-03-21
申请号：US17861721
申请日：2022-07-11
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Toshimitsu Kawai , Katsumi Shibayama , Takashi Kasahara , Masaki Hirose , Hiroki Oyama , Yumi Kuramoto
IPC: G02B26/00
Abstract: A wafer includes a substrate layer, a first mirror layer having a plurality of two-dimensionally arranged first mirror portions, and a second mirror layer having a plurality of two-dimensionally arranged second mirror portions. A plurality of Fabry-Perot interference filter portions are formed in an effective area, in each of the plurality of Fabry-Perot interference filter portions a gap is formed between the first mirror portion and the second mirror portion. A plurality of dummy filter portions are formed in a dummy area disposed along an outer edge of the substrate layer and surrounding the effective area, in each of the plurality of dummy filter portions an intermediate layer is provided between the first mirror portion and the second mirror portion. At least the second mirror portion is surrounded by the first groove in each of the plurality of Fabry-Perot interference filter portions and the plurality of dummy filter portions.
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