公开(公告)号：US5107511A

公开(公告)日：1992-04-21

申请号：US381723

申请日：1989-08-25

申请人： Hajime Nakatani ,  Yoshibumi Minowa ,  Hiromi Kaneko ,  Hitoshi Wakata ,  Kenyu Haruta ,  Haruhiko Nagai ,  Kenichi Yasuda ,  Hiroyuki Mukumoto

发明人： Hajime Nakatani ,  Yoshibumi Minowa ,  Hiromi Kaneko ,  Hitoshi Wakata ,  Kenyu Haruta ,  Haruhiko Nagai ,  Kenichi Yasuda ,  Hiroyuki Mukumoto

IPC分类号： H01S3/137 ,  H01S3/225

CPC分类号： H01S3/137 ,  H01S3/225

摘要： A method and apparatus for stabilizing the wavelength in a laser. The apparatus includes a first and second etalon for fine and rough tuning, respectively, of a laser oscillator. The output power and wavelength of the laser beam, for example, can be used to adjust these etalons to provide a constant output power and to counteract the change in etalon characteristics due to heat.

公开(公告)号：US4914662A

公开(公告)日：1990-04-03

申请号：US248900

申请日：1988-09-26

申请人： Hajime Nakatani ,  Yoshibumi Minowa ,  Hitoshi Wakata ,  Haruhiko Nagai ,  Kenyu Haruta

发明人： Hajime Nakatani ,  Yoshibumi Minowa ,  Hitoshi Wakata ,  Haruhiko Nagai ,  Kenyu Haruta

IPC分类号： H01S3/131

CPC分类号： H01S3/131

摘要： A laser wavelength is stabilized by deriving a portion of laser beam emitted from a wavelength variable laser oscillator, spectroscopically processing the laser beam portion by means of a wavelength monitor mechanism, measuring a spatial intensity distribution of the spectroscopically processed beam portion, spectroscopically processing light having a specific wavelength and measuring a spatial intensity distribution thereof, analyzing the measured spatial intensity distribution of the spectroscopically processed beam portion on the basis of the measured spatial intensity distribution of the spectroscopically processed light having the specific wavelength, and controlling wavelength of the laser oscillator according to a result of the analysis.

摘要翻译： 通过导出从波长可变激光振荡器发射的激光束的一部分来稳定激光波长，通过波长监测机构对激光束部分进行光谱处理，测量光谱处理的光束部分的空间强度分布，光谱处理具有 特定波长并测量其空间强度分布，基于所测量的具有特定波长的光谱处理光的空间强度分布，并根据测量的激光振荡器的波长控制光谱处理光束部分的测量空间强度分布， 分析结果。

公开(公告)号：US4686682A

公开(公告)日：1987-08-11

申请号：US782568

申请日：1985-10-01

申请人： Kenyu Haruta ,  Hitoshi Wakata ,  Yukio Sato ,  Haruhiko Nagai ,  Hajime Nakatani ,  Hideki Kita

发明人： Kenyu Haruta ,  Hitoshi Wakata ,  Yukio Sato ,  Haruhiko Nagai ,  Hajime Nakatani ,  Hideki Kita

IPC分类号： H01S3/036 ,  H01S3/038 ,  H01S3/041 ,  H01S3/0971 ,  H01S3/225 ,  H01S3/097

CPC分类号： H01S3/036 ,  H01S3/0385 ,  H01S3/041 ,  H01S3/0971 ,  H01S3/0384 ,  H01S3/225

摘要： A discharge excitation type short pulse laser device which is constructed with first and second main electrodes disposed in confrontation with the direction of the laser beam axis as their longitudinal direction, an auxiliary electrode provided on the rear surface part of the second main electrode and opposed to the second main electrode through the dielectric member, a pulse circuit for applying a pulse voltage across the first and second main electrodes, and a circuit for applying a voltage across the auxiliary electrode and the second main electrode, the circuit forming a part of the pulse circuit, or being independent of the pulse circuit, wherein the second main electrode is made of an electrically conductive material having a plurality of apertures therein, the second main electrode and the dielectric member are disposed in tight adhesion each other, and the second main electrode is thinly formed to enable creeping discharge to be produced on the surface of the dielectric member, thereby distributing electrons to be the seed for the main discharge to be generated across the main electrode.

摘要翻译： 一种放电激励型短脉冲激光器件，其由与激光束轴线的方向对置设置的第一和第二主电极作为其纵向方向构成，辅助电极设置在第二主电极的后表面部分上并与 通过电介质构件的第二主电极，用于在第一和第二主电极上施加脉冲电压的脉冲电路，以及用于在辅助电极和第二主电极之间施加电压的电路，形成脉冲的一部分的电路 电路或独立于脉冲电路，其中第二主电极由其中具有多个孔的导电材料制成，第二主电极和电介质构件彼此紧密地配置，第二主电极 被薄形成以能够在电介质构件的表面上产生爬电放电， 从而将电子分配成跨越主电极而产生的用于主放电的种子。

公开(公告)号：US4977563A

公开(公告)日：1990-12-11

申请号：US362409

申请日：1989-05-23

申请人： Hajime Nakatani ,  Yoshibumi Minowa ,  Hitoshi Wakata

发明人： Hajime Nakatani ,  Yoshibumi Minowa ,  Hitoshi Wakata

IPC分类号： H01S3/106 ,  H01S3/137 ,  H01S3/225

CPC分类号： H01S3/137 ,  H01S3/1062 ,  H01S3/225

摘要： A laser apparatus comprising a Fabry-Perot etalon for selecting a laser oscillation wavelength and a wavelength monitor means for monitoring a laser beam taken out from a laser oscillator whose wavelength is variable, whereby the pressure at the gap in the Fabry-Perot etalon is adjusted on the basis of a signal output from the wavelength monitor means. In order to adjust the pressure at the gap the Fabry-Perot etalon is hermetically sealed in a vessel containing a gas and the gas pressure is controlled on the basis of the output signal.

摘要翻译： PCT No.PCT / JP88 / 00970 Sec。 371日期1989年5月23日 102（e）日期1989年5月23日PCT提交1988年9月22日PCT公布。 出版物WO89 / 03132 日期：1989年4月6日。一种激光装置，包括用于选择激光振荡波长的法布里 - 珀罗标准具和用于监测从波长可变的激光振荡器取出的激光束的波长监视装置， 基于来自波长监视器装置的信号输出来调节法布里 - 珀罗标准具。 为了调节间隙处的压力，法布里 - 珀罗标准具密封在含有气体的容器中，并且基于输出信号控制气体压力。

公开(公告)号：US5187716A

公开(公告)日：1993-02-16

申请号：US725098

申请日：1991-07-03

申请人： Kenyu Haruta ,  Haruhiko Nagai ,  Hajime Nakatani ,  Yoshihiko Yamamoto ,  Taketoshi Takemura ,  Takashi Eura ,  Shungo Tsuboi ,  Yoshifumi Matsushita ,  Tadao Minagawa

发明人： Kenyu Haruta ,  Haruhiko Nagai ,  Hajime Nakatani ,  Yoshihiko Yamamoto ,  Taketoshi Takemura ,  Takashi Eura ,  Shungo Tsuboi ,  Yoshifumi Matsushita ,  Tadao Minagawa

IPC分类号： H01S3/038 ,  H01S3/0971 ,  H01S3/225

CPC分类号： H01S3/225 ,  H01S3/0388 ,  H01S3/0971

摘要： At least the opposing surface portions of the main electrodes of an excimer laser device are covered with materials which are resistive to chemical etching than nickel. The etching resistive material may be a platinum based alloy containing rhodium, ruthenium, iridium, or osmium; a nickel based alloy containing gold, platinum, rhodium, ruthenium, iridium, or osmium; or rhodium, ruthenium, iridium, or osmium. Thus, an excimer laser device is realized by which the lives of the electrodes and the laser gas are prolonged.

公开(公告)号：US4947398A

公开(公告)日：1990-08-07

申请号：US372834

申请日：1989-06-29

申请人： Kenichi Yasuda ,  Hitoshi Wakata ,  Hajime Nakatani

发明人： Kenichi Yasuda ,  Hitoshi Wakata ,  Hajime Nakatani

IPC分类号： H01S3/136 ,  H01S3/137 ,  H01S3/225

CPC分类号： H01S3/136 ,  H01S3/137 ,  H01S3/225

摘要： Methods of controlling the wavelength and output power of a laser device with two intracavity etalons are disclosed, together with a wavelength monitor capable of detecting sidebands. A method is characterized by the usage of hot/cold parameter K which takes two values 0 and 1 indicating the cold and hot state of the device, respectively. The parameter K, which is reset to 0 at the start, is set to 1 when the laser beam is stabilized; it is reset to 0, whenever the lasing pause exceeds a predetermined time length. Preparatory starting steps are performed or omitted at the start, depending on the value of K. Another method is characterized by the adjustment of the intracavity etalons during the lasing pauses, in accordance with exponential functions with thermal time constants. The sideband detecting wavelength monitor comprises a single etalon whose free spectal region FSRm is selected with respect to that, FSR.sub.2, of the fine tuning intracavity etalon in such a manner that the interference fringes of the sidebands formed by the monitor etalon are distinct from each other and from those of the central wavelength .lambda..sub.0. Namely, when i is the integer which is associated with a sideband wavelength .lambda..sub.S via the equation: .lambda..sub.S =.lambda..sub.0 +i.times.FSR.sub.2, the free spectral regions FSR.sub.2 and FSRm are selected in such a manner that the apparent wavelength differences: R=i.multidot.FSR.sub.2 +j.multidot.FSRm between the central wavelength .lambda..sub.0 and the sideband wavelengths .lambda..sub.S, wherein j is an integer which minimizes the value of R for each i, are different from zero and from each other.

摘要翻译： 公开了具有两个腔内标准具的激光装置的波长和输出功率的控制方法，以及能够检测边带的波长监视器。 一种方法的特征在于使用热/冷参数K，其分别表示设备的冷热状态的两个值0和1。 当激光束稳定时，启动时复位为0的参数K被设置为1; 每当激光暂停超过预定时间长度时，它将重置为0。 准备启动步骤在开始时执行或省略，取决于K的值。另一种方法的特征在于根据具有热时间常数的指数函数在激光暂停期间调节腔内标准具。 该边带检测波长监视器包括单个标准具，其相对于微调腔内标准具的FSR2选择其自由光谱区域FSRm，使得由监视器标准具形成的边带的干涉条纹彼此不同 以及中心波长λ0的那些。即，当i是通过以下等式与边带波长λS相关联的整数时：λS =λ0 + ixFSR2，在这样的一个中选择自由光谱区域FSR2和FSRm 在中心波长λ0与边带波长λS之间的表观波长差：R = ixFSR2 + jxFSRm，其中j是使每个i的R值最小的整数不同于零和彼此。

公开(公告)号：US5243614A

公开(公告)日：1993-09-07

申请号：US795793

申请日：1991-11-21

申请人： Hitoshi Wakata ,  Atsushi Sugitatsu ,  Hajime Nakatani ,  Yasushi Minamitani

发明人： Hitoshi Wakata ,  Atsushi Sugitatsu ,  Hajime Nakatani ,  Yasushi Minamitani

IPC分类号： G01J1/44 ,  G01J3/26 ,  H01S3/137 ,  H01S3/225

CPC分类号： G01J3/02 ,  G01J3/0237 ,  G01J3/26 ,  H01S3/137 ,  G01J2001/4493 ,  G01J2003/265 ,  H01S3/225

摘要： A wavelength monitor/stabilizer for narrowly controlling the bandwidth of laser; the monitor/stabilizer uses parameters Q, F or G derived by measuring diameters of interference fringes given by the beam of the wavelength-controlled narrow bandwidth laser e.g. excimer laser and those given by the reference light e.g. of a mercury lamp. The controlling is made by controlling the parameter to be in a predetermined range. An image sensing unit for detecting the interference fringes are splitted into plural image sensors with adjustable distance for enabling more rapid measurement by skipping the in-between part.

摘要翻译： 用于狭窄控制激光带宽的波长监视器/稳定器; 监视器/稳定器使用通过测量由波长控制的窄带宽激光束的波束给出的干涉条纹的直径导出的参数Q，F或G，例如 准分子激光和由参考光给出的那些。 的水银灯。 通过将参数控制在预定范围内来进行控制。 用于检测干涉条纹的图像感测单元被分割成具有可调节距离的多个图像传感器，以通过跳过中间部分来实现更快速的测量。

公开(公告)号：US20080213140A1

公开(公告)日：2008-09-04

申请号：US12100435

申请日：2008-04-10

申请人： Youichiro Tabata ,  Hajime Nakatani ,  Masaki Kuzumoto

发明人： Youichiro Tabata ,  Hajime Nakatani ,  Masaki Kuzumoto

IPC分类号： B01J19/12

CPC分类号： C01B13/11 ,  C01B2201/60 ,  C01B2201/66

摘要： An ozone generator for generating ozone by applying a specified process to oxygen by discharge includes a first raw material gas supply unit for supplying the oxygen as a first raw material gas, and a second raw material gas supply unit for supplying an oxide compound gas as a second raw material gas, in which, by excited light, excited and generated by a discharge in the oxygen and the oxide compound gas, the oxide compound gas is dissociated, or the oxide compound gas is excited accelerating dissociation of the oxygen, and ozone is generated. In this way, ozone generation efficiency is raised.

摘要翻译： 一种用于通过排出对氧气进行特定工艺来产生臭氧的臭氧发生器包括：第一原料气体供应单元，用于供应作为第一原料气体的氧;以及第二原料气体供应单元，用于将氧化物化合物气体作为 第二原料气体，其中通过激发光激发并通过在氧气和氧化物化合物气体中的放电产生氧化物化合物气体，氧化物化合物气体被分解，或氧化物化合物气体被激发以促进氧的解离，臭氧是 生成。 这样就可以提高臭氧发生效率。

公开(公告)号：US20080206115A1

公开(公告)日：2008-08-28

申请号：US12100444

申请日：2008-04-10

申请人： Youichiro Tabata ,  Hajime Nakatani ,  Masaki Kuzumoto

发明人： Youichiro Tabata ,  Hajime Nakatani ,  Masaki Kuzumoto

IPC分类号： B01J19/08

CPC分类号： C01B13/11 ,  C01B2201/60 ,  C01B2201/66

摘要： An ozone generator for generating ozone by applying a specified process to oxygen by discharge includes a first raw material gas supply unit for supplying the oxygen as a first raw material gas, and a second raw material gas supply unit for supplying an oxide compound gas as a second raw material gas, in which, by excited light, excited and generated by a discharge in the oxygen and the oxide compound gas, the oxide compound gas is dissociated, or the oxide compound gas is excited accelerating dissociation of the oxygen, and ozone is generated. In this way, ozone generation efficiency is raised.

公开(公告)号：US07198765B2

公开(公告)日：2007-04-03

申请号：US10394048

申请日：2003-03-24

申请人： Youichiro Tabata ,  Akaru Usui ,  Yujiro Okihara ,  Tetsuya Saitsu ,  Norimitsu Esaki ,  Hajime Nakatani

发明人： Youichiro Tabata ,  Akaru Usui ,  Yujiro Okihara ,  Tetsuya Saitsu ,  Norimitsu Esaki ,  Hajime Nakatani

IPC分类号： B01J19/08

CPC分类号： C01B13/11 ,  C01B2201/12 ,  C01B2201/22 ,  C01B2201/70

摘要： An ozone generator in which a discharge region may be enlarged without damaging ozone generating performance. In the ozonizer, an alternating current is applied between a first electrode and a second electrode, and a discharge is produced in a gap into which oxygen is injected. In the first electrode, an ozone gas passage for retrieving ozone gas generated in the discharge region is located between an electrode surface facing the discharge region and a side. The ozone gas passages are dispersed in the first electrode. The ozone gas passages collect ozone generated at discharge region locations inside the first electrode.

摘要翻译： 一种臭氧发生器，其中放电区域可以扩大而不损害臭氧产生性能。 在臭氧发生器中，在第一电极和第二电极之间施加交流电，并且在注入氧气的间隙中产生放电。 在第一电极中，用于回收在放电区域中产生的臭氧气体的臭氧气体通道位于面向放电区域的电极表面与侧面之间。 臭氧气体通道分散在第一电极中。 臭氧气体通道收集在第一电极内部的放电区域处产生的臭氧。