公开(公告)号：US5456995A

公开(公告)日：1995-10-10

申请号：US224561

申请日：1994-04-07

申请人： Haruyoshi Ozaki ,  Fumio Oi ,  Yasunori Uetani ,  Makoto Hanabata ,  Takeshi Hioki

发明人： Haruyoshi Ozaki ,  Fumio Oi ,  Yasunori Uetani ,  Makoto Hanabata ,  Takeshi Hioki

IPC分类号： G03F7/022 ,  G03F7/023

CPC分类号： G03F7/0236 ,  G03F7/0226

摘要： A positive resist composition which comprises, in admixture, a photosensitive 1,2-quinone diazide compound, an alkali-soluble resin to bind ingredients and polyphenol compound to control a dissolution rate in a developer represented by the formula: ##STR1## wherein R is C.sub.1-18 or hydrogen, the composition is sensitive to radiation and has good balance of sensitivity, resolving power and heat resistance.

摘要翻译： 一种正性抗蚀剂组合物，其包含光敏1,2-醌二叠氮化合物，碱溶性树脂以结合成分和多酚化合物以控制由下式表示的显影剂中的溶解速率：位置对辐射敏感， 具有良好的灵敏度平衡，分辨能力和耐热性。

公开(公告)号：US5456996A

公开(公告)日：1995-10-10

申请号：US224563

申请日：1994-04-07

申请人： Haruyoshi Ozaki ,  Fumio Oi ,  Yasunori Uetani ,  Makoto Hanabata ,  Takeshi Hioki

发明人： Haruyoshi Ozaki ,  Fumio Oi ,  Yasunori Uetani ,  Makoto Hanabata ,  Takeshi Hioki

IPC分类号： G03F7/022 ,  G03F7/023

CPC分类号： G03F7/0236 ,  G03F7/0226

摘要： A positive resist composition which comprises, in admixture, a photosensitive 1,2-quinone diazide compound, an alkali-soluble resin to bind ingredients and polyphenol compound to control a dissolution rate in a developer having a molecular weight of not more than 550 and represented by the general formula: ##STR1## wherein a, b, c, d, e, and f are the same or different and a number of 0-3, provided that d+f is not less than 1, and provided that if b, d and f are 1, then at least one of a, c, and e is not 0; R.sub.1, R.sub.2 and R.sub.3 are the same or different and a C.sub.1 -C.sub.18 alkyl group, a C.sub.1 -C.sub.18 alkoxy group, a carboxyl group or a halogen atom; R.sub.4 is a hydrogen atom, a C.sub.1 -C.sub.18 alkyl group or aryl group, wherein an amount of said 1,2-quinone diazide compound is from 5 to 100% by weight and an amount of said polyphenol compound is from 4 to 40% by weight based on the total weight of said alkali-soluble resin, wherein the resist composition is sensitive to radiation and has good balance of sensitivity, resolving power and heat resistance.

摘要翻译： 一种正性抗蚀剂组合物，其包含光敏1,2-醌二叠氮化合物，碱溶性树脂以结合成分和多酚化合物以控制分子量不大于550的显影剂中的溶解速率，并表示为 其通式如下：其中a，b，c，d，e和f相同或不同，数为0-3，条件是d + f不小于1，条件是如果b ，d和f为1，则a，c和e中的至少一个不为0; R1，R2和R3相同或不同，C1-C18烷基，C1-C18烷氧基，羧基或卤原子; R4是氢原子，C1-C18烷基或芳基，其中所述1,2-醌二叠氮化合物的量为5〜100重量％，所述多酚化合物的量为4〜40体积％ 基于所述碱溶性树脂的总重量，其中抗蚀剂组合物对辐射敏感，并且具有良好的灵敏度平衡，分辨能力和耐热性。

公开(公告)号：US5861229A

公开(公告)日：1999-01-19

申请号：US948466

申请日：1992-09-22

申请人： Haruyoshi Osaki ,  Fumio Oi ,  Yasunori Uetani ,  Makoto Hanabata ,  Takeshi Hioki

发明人： Haruyoshi Osaki ,  Fumio Oi ,  Yasunori Uetani ,  Makoto Hanabata ,  Takeshi Hioki

IPC分类号： G03F7/022 ,  G03F7/023

CPC分类号： G03F7/0226 ,  G03F7/0236

摘要： A positive resist composition which comprises a 1,2-quinone diazide compound and an alkali-soluble resin containing a polyphenol compound (I) of the general formula:X--.alpha.--H (I)wherein x is a group of the formula: ##STR1## and .alpha. is a divalent group which comprises a repeating unit of the formula: ##STR2## in which n is a number of not less than 1; a, b, c, d, e and f are the same or different and a number of 0-3, provided that d+f is not less than 1; R.sub.1, R.sub.2 and R.sub.3 are the same or different and a C.sub.1 -C.sub.18 alkyl group, a C.sub.1 -C.sub.18 alkoxy group, a carboxyl group or a halogen atom; R.sub.4 is a hydrogen atom, a C.sub.1 -C.sub.18 alkyl group or an aryl group, which resist composition is sensitive to radiation and has good balance of sensitivity, resolving power and heat resistance.

摘要翻译： 一种正性抗蚀剂组合物，其包含1,2-醌二叠氮化合物和含有下列通式的多酚化合物（I）的碱溶性树脂：X-α-H（I），其中x是下式的基团： 并且α是包含下式的重复单元的二价基团：其中n是不小于1的数目：或 a，b，c，d，e和f相同或不同，数目为0-3，条件是d + f不小于1; R1，R2和R3相同或不同，C1-C18烷基，C1-C18烷氧基，羧基或卤原子; R4是氢原子，C1-C18烷基或芳基，其抗蚀剂组成对辐射敏感，并具有良好的灵敏度，分辨能力和耐热性的平衡。

公开(公告)号：US5290656A

公开(公告)日：1994-03-01

申请号：US5429

申请日：1993-01-19

申请人： Yasunori Uetani ,  Makoto Hanabata ,  Hirotoshi Nakanishi ,  Koji Kuwana ,  Yukio Hanamoto ,  Fumio Oi ,  Jun Tomioka

发明人： Yasunori Uetani ,  Makoto Hanabata ,  Hirotoshi Nakanishi ,  Koji Kuwana ,  Yukio Hanamoto ,  Fumio Oi ,  Jun Tomioka

IPC分类号： G03F7/022 ,  G03C1/52 ,  C07C309/76

CPC分类号： G03F7/022

摘要： A quinone diazide sulfonic acid ester of a phenol compound of the general formula (I): ##STR1## wherein Y.sub.1, Y.sub.2, Y.sub.3 and Y.sub.4 are the same or different and each a hydrogen atom, an alkyl group, a halogen atom or a hydroxyl group, provided that at least one of Y.sub.1, Y.sub.2, Y.sub.3 and Y.sub.4 is a hydroxyl group; Z.sub.1, Z.sub.2, Z.sub.3, Z.sub.4, Z.sub.5 and Z.sub.6 are the same or different and each a hydrogen atom, an alkyl, an aryl group, a halogen atom or a hydroxyl group, provided that at least one of Z.sub.1, Z.sub.2, Z.sub.3, Z.sub.4, Z.sub.5 and Z.sub.6 is a hydroxyl group; X is ##STR2## in which R.sub.1 and R.sub.2 are the same or different and each a hydrogen atom, an alkyl group, an alkenyl group, a cyclo-alkyl group, an alkoxy group or an aryl group, provided that when at least one of R.sub.1 and R.sub.2 is a hydrogen atom, an alkyl or aryl group is present at the ortho position to a hydroxyl group which is present at the ortho position to X provides a positive resist composition which has a high .gamma.-value.

摘要翻译： 通式（I）的酚化合物的醌二叠氮磺酸酯：其中Y 1，Y 2，Y 3和Y 4相同或不同，各自为氢原子，烷基，卤素原子 或羟基，条件是Y 1，Y 2，Y 3和Y 4中的至少一个为羟基; Z 1，Z 2，Z 3，Z 4，Z 5和Z 6相同或不同，各自为氢原子，烷基，芳基，卤素原子或羟基，条件是Z1，Z2，Z3，Z4中的至少一个 Z5和Z6是羟基; X为，其中R 1和R 2相同或不同，并且各自为氢原子，烷基，烯基，环烷基，烷氧基或芳基，条件是当至少一个 R1和R2是氢原子，烷基或芳基存在于与X的邻位存在的羟基的邻位，提供具有高γ值的正性抗蚀剂组合物。

公开(公告)号：US5124228A

公开(公告)日：1992-06-23

申请号：US381298

申请日：1989-07-18

申请人： Yasunori Uetani ,  Makoto Hanabata ,  Hirotoshi Nakanishi ,  Koji Kuwana ,  Fumio Oi

发明人： Yasunori Uetani ,  Makoto Hanabata ,  Hirotoshi Nakanishi ,  Koji Kuwana ,  Fumio Oi

IPC分类号： G03F7/022

CPC分类号： G03F7/0226

摘要： A quinone diazide sulfonic acid ester of a phenol compound of the general formula (I) or (II): ##STR1## wherein a, c and d are the same or different and a number of 0 to 3, provided that when a is 0 or 3, b is a number of 0 to 3 or when a is 1 or 2, b is 0, 1 or 2, and a+b and c+d are not less than 2; R and R' are the same or different and an alkyl group or an aryl group provides a positive resist composition having a high .gamma.-value.

公开(公告)号：US4812551A

公开(公告)日：1989-03-14

申请号：US118041

申请日：1987-11-09

申请人： Fumio Oi ,  Haruyoshi Osaki ,  Akihiro Furuta ,  Yukikazu Uemura ,  Takao Ninomiya ,  Yasunori Uetani ,  Makoto Hanabata

发明人： Fumio Oi ,  Haruyoshi Osaki ,  Akihiro Furuta ,  Yukikazu Uemura ,  Takao Ninomiya ,  Yasunori Uetani ,  Makoto Hanabata

IPC分类号： G03C1/72 ,  C08G8/00 ,  C08G8/08 ,  G03F7/023 ,  C08G8/04

CPC分类号： C08G8/00 ,  C08G8/08 ,  G03F7/0236

摘要： A novolak resin for a positive photoresist is provided herein, which resin is produced by the addition condensation reaction of a phenol with formaldehyde. This novolak resin has improved heat resistant and sensitivity properties and the thickness retention of the novolak resins are very high. The novolak resins are characterized in that the area ratio of the gel permeation chromatographic pattern (GPC) as measured by the use of a UV(254 nm) detector, is as follows: a range wherein the molecular weight, calculated as polystyrene, is from 150 to less than 500, not including a phenol and the unreacted monomer, is from 8 to 35%, hereinafter referred to as an A region, the range wherein the molecular weight calculated as polystyrene is from 500 to less than 5000 is from 0 to 30%, hereinafter referred to as a B region, and the range wherein the molecular weight calculated as polystyrene exceeds 5000 is from 35 to 92%, hereinafter referred to as the C region, and wherein the ratio of the B region to the A region is 2.50 or less.

摘要翻译： 本文提供了一种用于正性光致抗蚀剂的酚醛清漆树脂，该树脂通过苯酚与甲醛的加成缩合反应制备。 该酚醛清漆树脂具有改善的耐热性和灵敏度性能，并且酚醛清漆树脂的厚度保持率非常高。 酚醛清漆树脂的特征在于通过使用UV（254nm）检测器测量的凝胶渗透色谱图（GPC）的面积比如下：其中以聚苯乙烯计算的分子量来自 150〜小于500，不包括苯酚和未反应单体，为8〜35％，以下称为A区，其中以聚苯乙烯计算的分子量为500〜5000以下的范围为0〜 30％，以下称为B区，其中以聚苯乙烯计算的分子量超过5000的范围为35〜92％，以下称为C区，其中B区与A区的比例 是2.50以下。

公开(公告)号：US5378586A

公开(公告)日：1995-01-03

申请号：US152891

申请日：1993-11-16

申请人： Yasunori Uetani ,  Makoto Hanabata ,  Hirotoshi Nakanishi ,  Koji Kuwana ,  Fumio Oi

发明人： Yasunori Uetani ,  Makoto Hanabata ,  Hirotoshi Nakanishi ,  Koji Kuwana ,  Fumio Oi

IPC分类号： G03F7/022 ,  H01L21/027 ,  G03F7/023 ,  G03F7/30

CPC分类号： G03F7/0226

摘要： A positive resist composition which comprises in admixture an alkali-soluble resin and, as a sensitizer, first and second quinone diazide sulfonic acid esters of a phenol compound, wherein(a) the first ester is a quinone diazide sulfonic acid diester of a phenol compound having not less than three hydroxyl groups which exhibits a pattern area that is not less than 40% of all pattern areas corresponding to the sensitizer in a high pressure liquid chromatography (HPLC) pattern measured with a primary detector using UV light having a wavelength of 254 nm, and(b) the second ester is a quinone diazide sulfonic acid ester that is a complete ester of a phenol compound having not less than two hydroxyl groups which exhibits a pattern area corresponding to not less than 5% and is less than 60% of all pattern areas corresponding to the sensitizer in the HPLC pattern.

摘要翻译： 一种正性抗蚀剂组合物，其包含碱溶性树脂和作为敏化剂的酚化合物的第一和第二醌二叠氮磺酸酯，其中（a）第一酯是苯酚化合物的醌二叠氮磺酸二酯 在使用波长为254的紫外光的主要检测器测量的高压液相色谱（HPLC）图案中，具有不小于3个羟基的图案面积不小于对应于敏化剂的所有图案区域的40％ nm，和（b）第二酯是醌二叠氮基磺酸酯，其是具有不少于2个羟基的酚化合物的完全酯，其显示对应于不小于5％且小于60％的图案面积， 在HPLC图案中对应于敏化剂的所有图案区域。

公开(公告)号：US5059507A

公开(公告)日：1991-10-22

申请号：US364123

申请日：1989-06-12

申请人： Yasunori Uetani ,  Makoto Hanabata ,  Hirotoshi Nakanishi ,  Koji Kuwana ,  Yukio Hanamoto ,  Fumio Oi

发明人： Yasunori Uetani ,  Makoto Hanabata ,  Hirotoshi Nakanishi ,  Koji Kuwana ,  Yukio Hanamoto ,  Fumio Oi

IPC分类号： G03F7/022 ,  H01L21/027

CPC分类号： G03F7/022

摘要： A quinone diazide sulfonic acid ester of a phenol compound of the general formula (I): ##STR1## wherein Y.sub.1 and Y.sub.2 are each a hydrogen atom, an alkyl group or a hydroxyl group, provided that at least one of Y.sub.1 and Y.sub.2 is a hydroxyl group; Z.sub.1, Z.sub.2, Z.sub.3, Z.sub.4, Z.sub.5, Z.sub.6 and Z.sub.7 are the same or different and each a hydrogen atom, a hydroxyl group, an alkyl group, a cycloalkyl group, an aryl group or halogen atom, provided that at least two of Z.sub.1, Z.sub.2, Z.sub.3, Z.sub.4, Z.sub.5, Z.sub.6 and Z.sub.7 are hydroxyl groups; R.sub.1, R.sub.2 and R.sub.3 are the same or different and each a hydrogen atom, an alkyl group, an alkenyl group, a cycloalkyl group or an aryl group provides a positive resist composition having a high .gamma.-value.

公开(公告)号：US4863829A

公开(公告)日：1989-09-05

申请号：US175658

申请日：1988-03-29

申请人： Akihiro Furuta ,  Makoto Hanabata ,  Seimei Yasui ,  Osamu Hiroaki ,  Naoyoshi Jinno

发明人： Akihiro Furuta ,  Makoto Hanabata ,  Seimei Yasui ,  Osamu Hiroaki ,  Naoyoshi Jinno

IPC分类号： G03F7/023

CPC分类号： G03F7/0236

摘要： A positive type photoresist composition comprising a novolak resin and O-quinone diazide compound, the novolak resin being one which is obtained by the addition condensation reaction of a phenol and formaldehyde which is performed in one stage by using as a catalyst an organic acid salt of a divalent metal which is more electropositive than hydrogen, or in two stages by using an acid catalyst in the subsequent stage, the phenol being at least one compound represented by the formula ##STR1## wherein R is hydrogen or an alkyl group of carbon number 1 to 4, the compound being such that the average carbon number in the substituent per one phenol nucelus is 0.5 to 1.5 and the ones with the substituent at the ortho- or para-position with respect to the hydroxyl group account for less than 50 mol %, is disclosed. The positive type photoresist composition of the invention has an improved resolving power, i.e., .gamma.-value.

摘要翻译： 一种正型光致抗蚀剂组合物，其包含酚醛清漆树脂和O-醌二叠氮化合物，所述酚醛清漆树脂是通过苯酚和甲醛的加成缩合反应得到的酚醛清漆树脂，其通过使用作为催化剂在一个阶段中进行的一个阶段中进行的有机酸盐 二价金属，其比氢更正电，或者在后续阶段通过使用酸催化剂分两个阶段，所述酚是至少一种由下式表示的化合物：其中R是氢或碳数为1的烷基 至4，该化合物使得每一个酚醛树脂的取代基中的平均碳数为0.5至1.5，相对于羟基在邻位或对位取代基的平均碳数小于50mol％ ，被披露。 本发明的正型光致抗蚀剂组合物具有改进的分辨能力，即γ值。

公开(公告)号：US4414365A

公开(公告)日：1983-11-08

申请号：US356241

申请日：1982-03-08

申请人： Hiroaki Sugimoto ,  Makoto Hanabata

发明人： Hiroaki Sugimoto ,  Makoto Hanabata

IPC分类号： C08G63/60 ,  C08L67/00

CPC分类号： C08G63/605 ,  C08L67/00

摘要： A process for producing an aromatic polyester composition, which is characterized in that in producing an aromatic polyester represented by the general formula A, ##STR1## (wherein X is an alkylene group having 1 to 4 carbon atoms, --O--, --SO.sub.2 --, --S--, or --CO--; m and n are each 0 or 1; the ratio of d to e is in the range of from 1:1 to 10:1; the ratio of e to f is in the range of from 9:10 to 10:9; and the substituents attached to the benzene ring are in para or meta position to one another), the polymerization is carried out by the method of bulk polymerization, using substantially no solvent, and in the presence of at least one polymer selected from the group consisting of polyalkylene terephthalates, polyphenylene sulfides, aromatic polysulfones, and aromatic polyesters represented by the general formula B, ##STR2## wherein (p+q) is in the range of from 10 to 100 and p/(p+q).gtoreq.0.8.

摘要翻译： 一种芳族聚酯组合物的制备方法，其特征在于在制备由通式A表示的芳族聚酯，其中X为具有1至4个碳原子的亚烷基，-O-，-SO 2 - ， - S-或-CO-; m和n各自为0或1; d与e的比例在1：1至10：1的范围内; e与f的比例在 为9:10至10:9;并且与苯环相连的取代基彼此处于对位或间位），聚合通过本体聚合法，基本上不使用溶剂进行，并且在存在下 的至少一种选自聚对苯二甲酸亚烷基酯，聚苯硫醚，芳族聚砜和由通式B表示的芳族聚酯的聚合物，其中（p + q）在10至100的范围内，和 p /（p + q）> / = 0.8。