Rotary gyroscope
    1.
    发明授权
    Rotary gyroscope 有权
    旋转陀螺仪

    公开(公告)号:US07043987B2

    公开(公告)日:2006-05-16

    申请号:US10793331

    申请日:2004-03-05

    IPC分类号: G01P9/04

    CPC分类号: G01C19/5642 G01C19/02

    摘要: A rotary gyroscope includes a base plate, an intermediate structure, including a driven element floating over the base plate and supported by a driving supporter radially extending therefrom, the driven element performing an oscillating motion with respect to a first axis, which is normal to a center plane thereof, a driving electrode driving the driven element, and a sensing element disposed in the driven element and connected to the driven element by a sensing connector to oscillate together with the driven element and concurrently to perform a sensing motion with respect to a third axis, which is normal to the first axis and any second axis, which is parallel to a center plane, due to a Coriolis force when an angular velocity is inputted from the second axis, and a cover covering the intermediate structure and having a sensing electrode to detect the sensing motion of the sensing element.

    摘要翻译: 旋转陀螺仪包括基板,中间结构,其包括浮动在基板上并被由其径向延伸的驱动支撑件支撑的从动元件,所述从动元件相对于第一轴执行振荡运动,该第一轴垂直于 驱动驱动元件的驱动电极,以及设置在从动元件中并通过感测连接器与被驱动元件连接的传感元件,与驱动元件一起摆动,并且同时执行相对于第三驱动元件的感测运动 轴,其平行于中心平面垂直于第一轴线和任何第二轴线,由于当从第二轴线输入角速度时的科里奥利力,以及覆盖中间结构并具有感测电极的盖子 以检测感测元件的感测运动。

    Micro electro mechanical system device
    2.
    发明授权
    Micro electro mechanical system device 失效
    微机电系统装置

    公开(公告)号:US07750767B2

    公开(公告)日:2010-07-06

    申请号:US11711057

    申请日:2007-02-27

    IPC分类号: H01H51/22

    摘要: A micro electro mechanical system (MEMS) device is provided. The MEMS device includes: a stage which operates in a vibration mode; an axle which supports the stage and allows rotation of the stage; and a capacitive sensor which detects rotation of the stage. The capacitive sensor includes: a sensing arm which extends from the stage; driving combs which extend from the sensing arm and rotated together with the stage; fixed combs which are fixedly supported for engagement with the driving combs, the fixed combs including surfaces overlapping opposite surfaces of the driving combs in accordance with the rotation of the driving combs; and a capacitance sensing portion which detects a capacitance change of the driving combs and the fixed combs. Therefore, the MEMS device performs precise scanning by structurally preventing deformation of the stage having a light reflecting surface.

    摘要翻译: 提供了微机电系统(MEMS)装置。 MEMS器件包括:以振动模式操作的级; 支撑舞台并允许舞台旋转的轴; 以及检测台的旋转的电容式传感器。 该电容传感器包括:从该台延伸的感测臂; 驱动梳子,其从感测臂延伸并与舞台一起旋转; 固定梳子,其被固定地支撑以与驱动梳状物接合,固定梳根据驱动梳的旋转包括与驱动梳的相对表面重叠的表面; 以及电容感测部,其检测驱动梳和固定梳的电容变化。 因此,MEMS器件通过结构防止具有光反射表面的台的变形来执行精确的扫描。

    Micro electro mechanical system device
    3.
    发明申请
    Micro electro mechanical system device 失效
    微机电系统装置

    公开(公告)号:US20080007376A1

    公开(公告)日:2008-01-10

    申请号:US11711057

    申请日:2007-02-27

    IPC分类号: H01F7/08 G01R27/26

    摘要: A micro electro mechanical system (MEMS) device is provided. The MEMS device includes: a stage which operates in a vibration mode; an axle which supports the stage and allows rotation of the stage; and a capacitive sensor which detects rotation of the stage. The capacitive sensor includes: a sensing arm which extends from the stage; driving combs which extend from the sensing arm and rotated together with the stage; fixed combs which are fixedly supported for engagement with the driving combs, the fixed combs including surfaces overlapping opposite surfaces of the driving combs in accordance with the rotation of the driving combs; and a capacitance sensing portion which detects a capacitance change of the driving combs and the fixed combs. Therefore, the MEMS device performs precise scanning by structurally preventing deformation of the stage having a light reflecting surface.

    摘要翻译: 提供了微机电系统(MEMS)装置。 MEMS器件包括:以振动模式操作的级; 支撑舞台并允许舞台旋转的轴; 以及检测台的旋转的电容式传感器。 该电容传感器包括:从该台延伸的感测臂; 驱动梳子,其从感测臂延伸并与舞台一起旋转; 固定梳子,其被固定地支撑以与驱动梳状物接合,固定梳根据驱动梳的旋转包括与驱动梳的相对表面重叠的表面; 以及电容感测部,其检测驱动梳和固定梳的电容变化。 因此,MEMS器件通过结构防止具有光反射表面的台的变形来执行精确的扫描。

    Image fusing apparatus using carbon nano-tube heater
    4.
    发明授权
    Image fusing apparatus using carbon nano-tube heater 有权
    图像融合装置采用碳纳米管加热器

    公开(公告)号:US08995894B2

    公开(公告)日:2015-03-31

    申请号:US13599165

    申请日:2012-08-30

    IPC分类号: G03G15/20

    摘要: An image fusing apparatus includes a heating belt including a resistance heating layer, an insulating layer formed on an inner surface of the resistance heating layer, and a release layer formed on an outer surface of the resistance heating layer; a heating supporting roller disposed (positioned) inside the heating belt and rotating with the heating belt; a pressing roller disposed (positioned) parallel to the heating supporting roller and in contact with the outer surface of the heating belt to form a nip; and an electricity supplying member to supply electricity to the resistance heating layer of the heating belt. A thickness of paper non-contact areas of opposite side end portions of the resistance heating layer of the heating belt is the same as or thicker than the thickness of a paper contact area of a middle portion of the resistance heating layer thereof.

    摘要翻译: 图像定影装置包括加热带,其包括电阻加热层,形成在电阻加热层的内表面上的绝缘层和形成在电阻加热层的外表面上的剥离层; 在加热带内设置(定位)并与加热带一起旋转的加热支撑辊; 设置(定位)平行于加热支撑辊并与加热带的外表面接触以形成辊隙的加压辊; 以及向加热带的电阻加热层供电的供电部件。 加热带的电阻加热层的相对侧端部的纸张非接触区域的厚度与其电阻加热层的中间部分的纸张接触面积的厚度相同或更厚。

    MEMS device and fabrication method of the same
    5.
    发明授权
    MEMS device and fabrication method of the same 有权
    MEMS器件及其制造方法相同

    公开(公告)号:US07800280B2

    公开(公告)日:2010-09-21

    申请号:US11873008

    申请日:2007-10-16

    IPC分类号: H02N1/00

    摘要: A microelectromechanical systems (MEMS) device includes a frame, an actuator formed on the same layer as the frame and connected to the frame to be capable of performing a relative motion with respect to the frame, and at least one stopper restricting a displacement of the actuator in a direction along the height of the actuator. The MEMS device is fabricated by bonding a second substrate to a first substrate, forming the frame and the actuator by partially removing the first substrate, and forming the at least one stopper by partially removing the second substrate.

    摘要翻译: 微机电系统(MEMS)装置包括框架,致动器,其形成在与框架相同的层上并连接到框架以能够相对于框架执行相对运动;以及至少一个限制器 致动器沿着致动器高度的方向。 MEMS器件通过将第二衬底接合到第一衬底,通过部分去除第一衬底而形成框架和致动器,并且通过部分去除第二衬底来形成至少一个止动器来制造。

    RF MEMS switch having asymmetrical spring rigidity
    6.
    发明授权
    RF MEMS switch having asymmetrical spring rigidity 失效
    RF MEMS开关具有不对称的弹簧刚度

    公开(公告)号:US07420444B2

    公开(公告)日:2008-09-02

    申请号:US11385700

    申请日:2006-03-22

    IPC分类号: H01P1/10

    摘要: An RF MEMS switch having asymmetrical spring rigidity. The RF MEMS switch has supporting members spaced apart in a certain interval on a substrate, a membrane being a motion member suspended by plural spring members extended on both sides of the membrane, and a bottom electrode being a contact surface on an upper surface of the substrate facing a bottom surface of the membrane, wherein the plural spring members placed on opposite sides of the membrane have asymmetrical rigidity, and a portion of the membrane on a side of stronger spring rigidity is first separated from the contact surface when the RF MEMS switch is turned off. The present invention has an advantage of easy separation of the switch from the contact surface, when the switch is turned off, due to the different rigidity of the springs located on the sides of the membrane.

    摘要翻译: 具有不对称弹簧刚度的RF MEMS开关。 RF MEMS开关具有在基板上以一定间隔隔开的支撑构件,膜是由在膜的两侧延伸的多个弹簧构件悬挂的运动构件,底电极是位于膜的上表面上的接触表面 衬底面向膜的底表面,其中放置在膜的相对侧上的多个弹簧构件具有不对称的刚性,并且当RF MEMS开关在膜的另一侧具有更强的弹簧刚度的一部分首先与接触表面分离 已关闭 本发明的优点在于,当开关断开时,由于位于膜侧面的弹簧的刚度不同,开关与接触表面容易分离。

    MEMS DEVICE AND FABRICATION METHOD OF THE SAME
    7.
    发明申请
    MEMS DEVICE AND FABRICATION METHOD OF THE SAME 有权
    MEMS器件及其制造方法

    公开(公告)号:US20080179988A1

    公开(公告)日:2008-07-31

    申请号:US11873008

    申请日:2007-10-16

    IPC分类号: H02N1/00 H01L21/00

    摘要: A microelectromechanical systems (MEMS) device includes a frame, an actuator formed on the same layer as the frame and connected to the frame to be capable of performing a relative motion with respect to the frame, and at least one stopper restricting a displacement of the actuator in a direction along the height of the actuator. The MEMS device is fabricated by bonding a second substrate to a first substrate, forming the frame and the actuator by partially removing the first substrate, and forming the at least one stopper by partially removing the second substrate.

    摘要翻译: 微机电系统(MEMS)装置包括框架,致动器,其形成在与框架相同的层上并连接到框架以能够相对于框架执行相对运动;以及至少一个限制器 致动器沿着致动器高度的方向。 MEMS器件通过将第二衬底接合到第一衬底,通过部分去除第一衬底而形成框架和致动器,并且通过部分去除第二衬底来形成至少一个止动器来制造。

    Vertical comb actuator radio frequency micro-electro-mechanical system switch
    8.
    发明申请
    Vertical comb actuator radio frequency micro-electro-mechanical system switch 有权
    立式梳子执行器射频微机电系统开关

    公开(公告)号:US20070024390A1

    公开(公告)日:2007-02-01

    申请号:US11417242

    申请日:2006-05-04

    IPC分类号: H01P1/10

    CPC分类号: H01H59/0009

    摘要: A vertical comb actuator radio frequency (RF) micro-electro-mechanical system (MEMS) switch. The RF MEMS switch includes a substrate; first and second signal lines spaced at a predetermined interval from each other and deposited on an upper surface of the substrate; an actuator positioned over the first and second signal lines when viewed from the upper surface of the substrate and spaced at a predetermined interval from the first and second signal lines; and a fixing portion positioned over the actuator when viewed from the upper surface of the substrate, wherein the fixing portion permits the actuator to come in contact with the first and second signal lines when a predetermined driving voltage is applied. Thus, it is possible to prevent the actuator from sticking to the substrate. In addition, the RF MEMS switch can be operated with a low voltage and insertion loss and power loss can be reduced.

    摘要翻译: 立式梳子致动器射频(RF)微机电系统(MEMS)开关。 RF MEMS开关包括基板; 第一和第二信号线以预定间隔彼此间隔开并沉积在基板的上表面上; 当从所述基板的上表面观察并且以与所述第一信号线和所述第二信号线预定的间隔隔开时,所述致动器位于所述第一和第二信号线上方; 以及当从基板的上表面观察时定位在致动器上方的固定部分,其中当施加预定的驱动电压时,固定部分允许致动器与第一和第二信号线接触。 因此,可以防止致动器粘附到基板。 此外,RF MEMS开关可以在低电压和插入损耗下工作,并且可以降低功率损耗。

    MEMS switch and manufacturing method thereof
    9.
    发明申请
    MEMS switch and manufacturing method thereof 有权
    MEMS开关及其制造方法

    公开(公告)号:US20070018760A1

    公开(公告)日:2007-01-25

    申请号:US11429364

    申请日:2006-05-08

    IPC分类号: H01H51/22

    CPC分类号: H01H59/0009 H01H2059/0054

    摘要: A MEMS switch including a substrate at least one fixed electrode formed on top of the substrate and at least one restoring electrode formed on top of the substrate and formed at a lateral surface of the fixed electrode. At least one signal line is formed on top of the substrate and has a switching contact part. A movable electrode is distantly connected from the top of the substrate at a predetermined space via an elastic connector on the substrate and at least one contact member formed on a bottom surface of the movable electrode or on a bottom surface of the elastic connector for attachment to or detachment from the switching contact part. At least one pivot boss is formed on either the bottom surface of the movable electrode or on the top of the substrate.

    摘要翻译: 一种MEMS开关,其包括形成在所述基板的顶部上的至少一个固定电极的基板和形成在所述基板的顶部上并形成在所述固定电极的侧表面上的至少一个恢复电极。 至少一个信号线形成在基板的顶部上并且具有开关接触部分。 可移动电极通过基板上的弹性连接器在预定空间处从基板的顶部远离连接,以及形成在可动电极的底表面上或弹性连接器的底表面上的至少一个接触件,用于附接到 或从开关接触部分拆卸。 至少一个枢转凸起形成在可动电极的底表面上或衬底的顶部上。

    MEMS device and fabrication method of the same
    10.
    发明授权
    MEMS device and fabrication method of the same 有权
    MEMS器件及其制造方法相同

    公开(公告)号:US07977207B2

    公开(公告)日:2011-07-12

    申请号:US12856308

    申请日:2010-08-13

    IPC分类号: H02N1/00

    摘要: A microelectromechanical systems (MEMS) device includes a frame, an actuator formed on the same layer as the frame and connected to the frame to be capable of performing a relative motion with respect to the frame, and at least one stopper restricting a displacement of the actuator in a direction along the height of the actuator. The MEMS device is fabricated by bonding a second substrate to a first substrate, forming the frame and the actuator by partially removing the first substrate, and forming the at least one stopper by partially removing the second substrate.

    摘要翻译: 微机电系统(MEMS)装置包括框架,致动器,其形成在与框架相同的层上并连接到框架以能够相对于框架执行相对运动;以及至少一个限制器 致动器沿着致动器高度的方向。 MEMS器件通过将第二衬底接合到第一衬底,通过部分去除第一衬底而形成框架和致动器,并且通过部分去除第二衬底来形成至少一个止动器来制造。