公开(公告)号：US06614005B1

公开(公告)日：2003-09-02

申请号：US09979646

申请日：2001-12-13

申请人： Heinrich Walk ,  Roland Mader ,  Werner Blersch ,  Markus Hauf

发明人： Heinrich Walk ,  Roland Mader ,  Werner Blersch ,  Markus Hauf

IPC分类号： F27B514

CPC分类号： H01L21/2686 ,  H01L21/67115 ,  H05B3/0047

摘要： The aim of the invention is to provide an economical and homogenous thermal treatment for substrate. To this end, the inventive device and method for thermally treating substrates, especially semiconductor wafers, comprise at least one heating device for heating at least one substrate by electromagnetic radiation. Said heating device comprises at least two arc lamps, the radiation characteristics for each arc lamp being controlled individually, and the electromagnetic radiation of the arc lamps contributing essentially to the power density of the electromagnetic radiation of the heating device.

摘要翻译： 本发明的目的是为基材提供经济和均匀的热处理。 为此，用于热处理基板，特别是半导体晶片的本发明的装置和方法包括用于通过电磁辐射加热至少一个基板的至少一个加热装置。 所述加热装置包括至少两个弧光灯，每个弧光灯的辐射特性被单独控制，并且电弧灯的电磁辐射基本上有助于加热装置的电磁辐射的功率密度。

公开(公告)号：US06316747B1

公开(公告)日：2001-11-13

申请号：US09623841

申请日：2000-10-06

申请人： Werner Blersch ,  Heinrich Walk

发明人： Werner Blersch ,  Heinrich Walk

IPC分类号： F27B514

CPC分类号： H01L21/67115

摘要： An apparatus for the thermal treatment of substrates is provided. The apparatus includes a reaction chamber, at least one elongated heat source, and at least one reflection wall that is disposed adjacent to the heat source and serves to reflect at least a portion of the radiation given off thereby. The reflection wall has at least one rib, and the heat source is disposed at an oblique angle to the longitudinal direction of the rib.

摘要翻译： 提供了一种用于基板的热处理的装置。 该设备包括反应室，至少一个细长的热源，以及至少一个反射壁，该反射壁邻近热源设置并用于反射由此释放的辐射的至少一部分。 反射壁具有至少一个肋，并且热源设置成与肋的纵向方向成倾斜的角度。

公开(公告)号：US5965047A

公开(公告)日：1999-10-12

申请号：US960150

申请日：1997-10-24

申请人： Werner Blersch ,  Peter Gruenwald ,  Michael Maurer ,  Helmut Merkle ,  Thomas Theiler ,  Heinrich Walk

发明人： Werner Blersch ,  Peter Gruenwald ,  Michael Maurer ,  Helmut Merkle ,  Thomas Theiler ,  Heinrich Walk

IPC分类号： H01L21/26 ,  H01L21/00 ,  C23C16/00

CPC分类号： H01L21/67115

摘要： A rapid thermal processing (RTP) chamber, wherein one wall of the chamber supporting a substrate rotates with respect to the rest of the chamber so that the substrate being treated in the RTP chamber is relatively rotated with respect to the lamps heating the substrate.

摘要翻译： 快速热处理（RTP）室，其中支撑衬底的室的一个壁相对于室的其余部分旋转，使得在RTP室中被处理的衬底相对于加热衬底的灯相对旋转。

公开(公告)号：US06191392B1

公开(公告)日：2001-02-20

申请号：US09208955

申请日：1998-12-08

申请人： Markus Hauf ,  Thomas Knarr ,  Heinrich Walk ,  Horst Balthasar ,  Uwe Müller

发明人： Markus Hauf ,  Thomas Knarr ,  Heinrich Walk ,  Horst Balthasar ,  Uwe Müller

IPC分类号： A21B100

CPC分类号： G01J5/0003

摘要： A method is provide for measuring electromagnetic radiation radiated from a surface of an object that is irradiated by electromagnetic radiation given off by at least one radiation source. The radiation given off by the radiation source is determined by at least one first detector, and the radiation given off by the irradiated object is determined by at least one second detector that measures the radiation. The radiation from the at least one radiation source is actively modulated with at least one characteristic parameter. The radiation determined by the second detector is corrected with the radiation determined by the first detector to compensate for the radiation of the radiation source reflected from the object.

摘要翻译： 提供一种测量从被至少一个辐射源发出的电磁辐射照射的物体表面辐射的电磁辐射的方法。 由辐射源发出的辐射由至少一个第一检测器确定，由照射物体放出的辐射由至少一个测量辐射的第二检测器确定。 来自至少一个辐射源的辐射被至少一个特征参数主动调制。 用由第一检测器确定的辐射来校正由第二检测器确定的辐射，以补偿从物体反射的辐射源的辐射。

公开(公告)号：US06369363B2

公开(公告)日：2002-04-09

申请号：US09789942

申请日：2001-02-16

申请人： Markus Hauf ,  Thomas Knarr ,  Heinrich Walk ,  Horst Balthasar ,  Uwe Müller

发明人： Markus Hauf ,  Thomas Knarr ,  Heinrich Walk ,  Horst Balthasar ,  Uwe Müller

IPC分类号： F27D1100

CPC分类号： G01J5/0003

摘要： A method is provide for measuring electromagnetic radiation radiated from a surface of an object that is irradiated by electromagnetic radiation given off by at least one radiation source. The radiation given off by the radiation source is determined by at least one first detector, and the radiation given off by the irradiated object is determined by at least one second detector that measures the radiation. The radiation from the at least one radiation source is actively modulated with at least one characteristic pyrometer. The radiation determined by the second detector is corrected with the radiation determined by the first detector to compensate for the radiation of the radiation source reflected from the object.

摘要翻译： 提供一种测量从被至少一个辐射源发出的电磁辐射照射的物体表面辐射的电磁辐射的方法。 由辐射源发出的辐射由至少一个第一检测器确定，由照射物体放出的辐射由至少一个测量辐射的第二检测器确定。 来自至少一个辐射源的辐射用至少一个特征性高温计主动调制。 用由第一检测器确定的辐射来校正由第二检测器确定的辐射，以补偿从物体反射的辐射源的辐射。

公开(公告)号：US5359693A

公开(公告)日：1994-10-25

申请号：US913093

申请日：1992-07-14

申请人： Zsolt Nenyei ,  Thomas Knarr ,  Heinrich Walk

发明人： Zsolt Nenyei ,  Thomas Knarr ,  Heinrich Walk

IPC分类号： B01J19/12 ,  G05D23/19 ,  H01L21/268 ,  H01L21/324 ,  H01L21/00

CPC分类号： H01L21/2686 ,  B01J19/122 ,  G05D23/1904 ,  H01L21/324

摘要： A low defect rate is provided in rapid thermal processing of delicate components with reduction of defects caused by inhomogeneities of temperature during a rapid thermal processing. In a suitable system a defect-guarded RTP method is carried out in such a manner that the density of the heating energy is adjusted in consecutive intervals of time, which may be as short as desired, to such automatically controlled limiting values or to such fixed values that in the reaction chamber the difference between the primary and secondary energy densities is almost continuously held at the minimum which is achievable throughout the thermal processing whereas the ramps have predetermined slopes.

摘要翻译： 在快速热处理过程中，由于温度不均匀引起的缺陷减少，精密部件的快速热处理提供了低缺陷率。 在合适的系统中，以这样一种方式进行缺陷保护的RTP方法，即将加热能量的密度在所需的连续时间间隔内调节，其可以根据需要尽可能短地限制到这种自动控制的限制值或固定 在反应室中，初级和次级能量密度之间的差异几乎连续地保持在整个热处理中可实现的最小值，而斜坡具有预定的斜率。

公开(公告)号：US07614925B2

公开(公告)日：2009-11-10

申请号：US11511317

申请日：2006-08-29

申请人： Friedrich Boebel ,  Klaus Kraft ,  Heinrich Walk

发明人： Friedrich Boebel ,  Klaus Kraft ,  Heinrich Walk

IPC分类号： B60L11/00 ,  B63H21/17 ,  B63H1/14 ,  B63H5/20 ,  B63H5/125 ,  B63H20/08

CPC分类号： B63H20/007 ,  B60L11/1805 ,  B60L11/1877 ,  B60L2200/32 ,  B63H20/32 ,  B63H20/36 ,  B63H21/17 ,  Y02T10/7005 ,  Y02T10/705

摘要： A transportable outboard drive for a boat has a head, a pylon, a shaft connecting the head and the pylon, an electric motor and a cable running inside the shaft. The shaft has at least two shaft sections and wherein the head, shaft and pylon can be arranged in a working configuration or in a transport configuration. In the working configuration, the head, the shaft and the pylon are rigidly connected to each other. In the working configuration and the transport configuration, the cable and shaft are differently positioned with respect to each other, whereas, in its transport configuration, the shaft sections are separated from each other.

摘要翻译： 船的可运输舷外驱动器具有头部，塔架，连接头部和塔架的轴，电动机和在轴内部延伸的电缆。 轴具有至少两个轴部分，并且其中头部，轴和塔架可以布置成工作构型或运输构型。 在工作结构中，头部，轴和托架彼此刚性连接。 在工作结构和输送结构中，电缆和轴相对于彼此不同地定位，而在其输送构造中，轴部彼此分离。

公开(公告)号：US07853337B2

公开(公告)日：2010-12-14

申请号：US11582138

申请日：2006-10-17

申请人： Gottfried Keller ,  Andreas W{hacek over (o)}rz ,  Heinrich Walk

发明人： Gottfried Keller ,  Andreas W{hacek over (o)}rz ,  Heinrich Walk

IPC分类号： G05B11/01 ,  G08C19/04 ,  G08C19/00 ,  H02N2/00

CPC分类号： B28B17/0081 ,  B28B1/0873 ,  B28B3/022

摘要： A device is provided for monitoring and controlling a machine having at least two sensors for recording measurement variables, particularly motion variables, and with an electronic control loop for evaluating the recorded measurement variables and correspondingly controlling machine components of which the measurement variables can be influenced.

摘要翻译： 提供了一种用于监测和控制具有至少两个用于记录测量变量，特别是运动变量的传感器的机器的机器，以及用于评估记录的测量变量的电子控制回路以及相应地控制可以影响测量变量的机器部件。

公开(公告)号：US20070088523A1

公开(公告)日：2007-04-19

申请号：US11582138

申请日：2006-10-17

申请人： Gottfried Keller ,  Andreas Worz ,  Heinrich Walk

发明人： Gottfried Keller ,  Andreas Worz ,  Heinrich Walk

IPC分类号： G01D1/00

CPC分类号： B28B17/0081 ,  B28B1/0873 ,  B28B3/022

摘要： A device is provided for monitoring and controlling a machine having at least two sensors for recording measurement variables, particularly motion variables, and with an electronic control loop for evaluating the recorded measurement variables and correspondingly controlling machine components by means of which the measurement variables can be influenced.

摘要翻译： 提供了一种用于监测和控制具有至少两个用于记录测量变量，特别是运动变量的传感器的机器的机器，以及用于评估所记录的测量变量的电子控制回路，并且相应地控制机器部件，通过该机器部件，测量变量可以 影响

公开(公告)号：US20070046131A1

公开(公告)日：2007-03-01

申请号：US11511316

申请日：2006-08-29

申请人： Friedrich Boebel ,  Klaus Kraft ,  Heinrich Walk

发明人： Friedrich Boebel ,  Klaus Kraft ,  Heinrich Walk

IPC分类号： B63H21/17 ,  H02K21/12 ,  H02K19/00

CPC分类号： B63H20/007 ,  B63H20/00 ,  B63H23/24 ,  B63H2005/1258 ,  H02K7/14 ,  H02K29/03

摘要： A boat drive has a permanent magnet-excited, electronically commutated synchronous motor with a stator and a rotor. The number of poles of the stator and the number of poles of the rotor are different. The magnetic field created between the poles of the stator and the poles of the rotor is an essentially radial field with respect to the shaft of the rotor. The poles of the rotor have a greater distance from the shaft of said rotor than the poles of the stator.

摘要翻译： 船用驱动器具有带定子和转子的永磁励磁电子换向同步电动机。 定子的极数和转子的极数不同。 在定子的极和转子的极之间产生的磁场是相对于转子的轴的基本上径向的场。 转子的极与转子的轴的距离比定子的极有更大的距离。