Etched-facet semiconductor optical component with integrated end-coupled waveguide and methods of fabrication and use thereof
    2.
    发明授权
    Etched-facet semiconductor optical component with integrated end-coupled waveguide and methods of fabrication and use thereof 有权
    具有集成端耦合波导的蚀刻面半导体光学部件及其制造和使用方法

    公开(公告)号:US07599585B2

    公开(公告)日:2009-10-06

    申请号:US11765134

    申请日:2007-06-19

    IPC分类号: G02B6/00 G02B6/12 G02B6/13

    摘要: An optical apparatus comprises: a semiconductor substrate; a semiconductor optical device integrally formed on the substrate and having a device end face; and a low-index planar optical waveguide integrally formed on the semiconductor substrate at the device end face. The waveguide is end-coupled at its proximal end to the optical device through the device end face and is arranged so as to comprise a waveguide mode converter. The waveguide is arranged at its distal end to transmit or receive an optical signal through its distal end to or from another low-index optical waveguide end-coupled with the integrally-formed waveguide and assembled with the integrally-formed waveguide, optical device, or substrate. The optical apparatus can further comprise a discrete low-index optical waveguide assembled with the integrally-formed waveguide, optical device, or substrate so as to be end-coupled with the integrally-formed waveguide at its distal end.

    摘要翻译: 光学装置包括:半导体衬底; 整体地形成在所述基板上并具有器件端面的半导体光学器件; 以及在器件端面上一体地形成在半导体衬底上的低折射率平面光波导。 波导在其近端处通过器件端面端接到光学器件,并且被布置成包括波导模式转换器。 波导布置在其远端处,以将光信号通过其远端传输或接收到与整体形成的波导端连接的另一个低折射率光波导,或者与一体形成的波导,光学器件或 基质。 光学装置还可以包括与整体形成的波导,光学器件或衬底组装的离散低折射率光波导,以便在其远端处与整体形成的波导端部耦合。

    Etched-facet semiconductor optical component with integrated end-coupled waveguide and methods of fabrication and use thereof
    3.
    发明授权
    Etched-facet semiconductor optical component with integrated end-coupled waveguide and methods of fabrication and use thereof 有权
    具有集成端耦合波导的蚀刻面半导体光学部件及其制造和使用方法

    公开(公告)号:US07233713B2

    公开(公告)日:2007-06-19

    申请号:US11328406

    申请日:2006-01-09

    IPC分类号: G02B6/00 G02B6/12 G02B6/13

    摘要: An optical apparatus comprises a semiconductor optical device waveguide formed on a semiconductor substrate, and an integrated end-coupled waveguide formed on the semiconductor substrate. The integrated waveguide may comprise materials differing from those of the device waveguide and the substrate. Spatially selective material processing may be employed for first forming the optical device waveguide on the substrate, and for subsequently depositing and forming the integrated end-coupled waveguide on the substrate. Spatially selective material processing enables accurate spatial mode matching and transverse alignment of the waveguides, and multiple device waveguides and corresponding integrated end-coupled waveguides may be fabricated concurrently on a common substrate on a wafer scale. The integrated end-coupled waveguide may be adapted for fulfilling one or more functions, and the device waveguide and/or integrated waveguide and/or spatially selective material processing steps may be adapted in a variety of ways for achieving the needed/desired degree of end-coupling.

    摘要翻译: 光学装置包括形成在半导体衬底上的半导体光学器件波导和形成在半导体衬底上的集成端耦合波导。 集成波导可以包括与器件波导和衬底不同的材料。 可以采用空间选择性材料处理来首先在衬底上形成光学器件波导,并且用于随后在衬底上沉积和形成集成的端部耦合波导。 空间选择性材料处理可实现波导的精确的空间模式匹配和横向对准,并且多个器件波导和相应的集成端耦合波导可以在晶片规模上的公共衬底上同时制造。 集成端耦合波导可以适于实现一个或多个功能,并且器件波导和/或集成波导和/或空间选择性材料处理步骤可以以各种方式进行调整,以实现所需/期望的结束度 -耦合。

    Etched-facet semiconductor optical component with integrated end-coupled waveguide and methods of fabrication and use thereof
    4.
    发明授权
    Etched-facet semiconductor optical component with integrated end-coupled waveguide and methods of fabrication and use thereof 有权
    具有集成端耦合波导的蚀刻面半导体光学部件及其制造和使用方法

    公开(公告)号:US06985646B2

    公开(公告)日:2006-01-10

    申请号:US10759858

    申请日:2004-01-16

    IPC分类号: G02B6/00 G02B6/12 G02B6/13

    摘要: An optical apparatus comprises a semiconductor optical device waveguide formed on a semiconductor substrate, and an integrated end-coupled waveguide formed on the semiconductor substrate. The integrated waveguide may comprise materials differing from those of the device waveguide and the substrate. Spatially selective material processing may be employed for first forming the optical device waveguide on the substrate, and for subsequently depositing and forming the integrated end-coupled waveguide on the substrate. Spatially selective material processing enables accurate spatial mode matching and transverse alignment of the waveguides, and multiple device waveguides and corresponding integrated end-coupled waveguides may be fabricated concurrently on a common substrate on a wafer scale. The integrated end-coupled waveguide may be adapted for fulfilling one or more functions, and the device waveguide and/or integrated waveguide and/or spatially selective material processing steps may be adapted in a variety of ways for achieving the needed/desired degree of end-coupling.

    摘要翻译: 光学装置包括形成在半导体衬底上的半导体光学器件波导和形成在半导体衬底上的集成端耦合波导。 集成波导可以包括与器件波导和衬底不同的材料。 可以采用空间选择性材料处理来首先在衬底上形成光学器件波导,并且用于随后在衬底上沉积和形成集成的端部耦合波导。 空间选择性材料处理可实现波导的精确的空间模式匹配和横向对准,并且多个器件波导和相应的集成端耦合波导可以在晶片规模上的公共衬底上同时制造。 集成端耦合波导可以适于实现一个或多个功能,并且器件波导和/或集成波导和/或空间选择性材料处理步骤可以以各种方式进行调整,以实现所需/期望的结束度 -耦合。

    Reflector for a double-pass photodetector
    6.
    发明授权
    Reflector for a double-pass photodetector 失效
    双通道光电探测器的反射器

    公开(公告)号:US07492024B2

    公开(公告)日:2009-02-17

    申请号:US11456294

    申请日:2006-07-10

    IPC分类号: H01L33/00

    摘要: An apparatus comprises: a substrate; a photodetector formed on an area of a surface of the substrate; an electrical contact formed on a portion of the photodetector; and a reflector formed over a portion of the photodetector distinct from the portion of the photodetector having the electrical contact formed thereon. The substrate, the photodetector, and the reflector are arranged so that an optical signal to be detected is incident on the photodetector from within the substrate, and at least a portion of the optical signal incident on the photodetector and transmitted thereby on a first pass is reflected by the reflector to propagate through the photodetector for a second pass.

    摘要翻译: 一种装置包括:基板; 形成在所述基板的表面的区域上的光电检测器; 形成在所述光电检测器的一部分上的电接触; 以及形成在光电检测器的不同于其上形成有电接触的光电检测器的部分的反射器上的反射器。 衬底,光电检测器和反射器被布置成使得待检测的光信号从衬底内入射到光电检测器上,并且入射到光电检测器上的光信号的至少一部分在第一次通过时被传输, 由反射器反射,以通过光电检测器传播第二次通过。

    Optical component for free-space optical propagation between waveguides
    10.
    发明授权
    Optical component for free-space optical propagation between waveguides 失效
    用于波导之间的自由空间光学传播的光学部件

    公开(公告)号:US07366379B2

    公开(公告)日:2008-04-29

    申请号:US11564144

    申请日:2006-11-28

    IPC分类号: G02B6/26

    摘要: An optical component may comprise a horizontal member with two side walls and a substantially transparent end wall protruding from the horizontal member. The end wall, side walls and horizontal member may partially enclose an interior volume, and optical functionality is imparted in any suitable manner on at least a portion of the end wall. An optical assembly may comprise such an optical component mounted on a waveguide substrate along with a planar waveguide and a second waveguide, which are end-coupled by either reflection from the optical component end wall or transmission through the optical component end wall. An end portion of a planar waveguide may be received within the interior volume of the mounted component. Proper positioning of the optical component relative to the waveguides may be facilitated by alignment surfaces and/or alignment marks on the component and/or waveguide substrate.

    摘要翻译: 光学部件可以包括具有两个侧壁的水平部件和从水平部件突出的基本上透明的端壁。 端壁,侧壁和水平构件可以部分地包围内部体积,并且光学功能性以任何合适的方式施加在端壁的至少一部分上。 光学组件可以包括安装在波导衬底上的平面波导和第二波导的这种光学部件,其通过来自光学部件端壁的反射或通过光学部件端壁的透射件端接耦合。 平面波导的端部可以被容纳在安装部件的内部空间内。 光学部件相对于波导的适当定位可以通过部件和/或波导基板上的对准表面和/或对准标记来促进。