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1.发明授权公开(公告)号：US07589455B2
公开(公告)日：2009-09-15
申请号：US11942364
申请日：2007-11-19
申请人： Hideo Adachi , Katsuhiro Wakabayashi , Kazuya Matsumoto , Ryo Ota , Masaaki Amikura , Hiroshi Ito , Mamoru Hasegawa
发明人： Hideo Adachi , Katsuhiro Wakabayashi , Kazuya Matsumoto , Ryo Ota , Masaaki Amikura , Hiroshi Ito , Mamoru Hasegawa
IPC分类号： H01L41/09
CPC分类号： A61B8/12 , A61B8/445 , A61B8/4483 , A61B2562/028 , B06B1/0292
摘要： A capacitive micromachined ultrasonic transducer (cMUT) is constituted by a plurality of transducer elements comprising plural transducer cells that are mutually connected in parallel and comprises: a silicon substrate; a bottom electrode placed on the top surface of the silicon substrate; an upper electrode placed opposite to the bottom electrode and apart therefrom by a prescribed air or vacuum; a membrane for supporting the bottom electrode; and a membrane supporting part for supporting the membrane, wherein the cMUT comprises a third electrode which has an electrical continuity to the bottom electrode and which corresponds to either one of the transducer cells of a prescribed number of the transducer subelement or of the transducer elements, and a fourth electrode which is a ground electrode electrically connected to the bottom electrode.
摘要翻译： 电容微加工超声换能器（cMUT）由多个换能器元件构成，多个换能器元件包括并联的多个换能器单元，包括：硅基底; 放置在硅衬底的顶表面上的底电极; 上电极通过规定的空气或真空与底电极相对设置并与其分离; 用于支撑底部电极的膜; 以及用于支撑所述膜的膜支撑部分，其中所述cMUT包括与所述底部电极具有电连续性并且对应于规定数量的所述换能器子元件或所述换能器元件中的任一个换能器单元的第三电极， 以及第四电极，其是与所述底部电极电连接的接地电极。
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2.发明申请CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND PRODUCTION METHOD OF SAME 有权电容式MICROMACHINED超声波传感器及其生产方法公开(公告)号：US20080067895A1
公开(公告)日：2008-03-20
申请号：US11942364
申请日：2007-11-19
申请人： Hideo Adachi , Katsuhiro Wakabayashi , Kazuya Matsumoto , Ryo Ota , Masaaki Amikura , Hiroshi Ito , Mamoru Hasegawa
发明人： Hideo Adachi , Katsuhiro Wakabayashi , Kazuya Matsumoto , Ryo Ota , Masaaki Amikura , Hiroshi Ito , Mamoru Hasegawa
IPC分类号： H01L41/00
CPC分类号： A61B8/12 , A61B8/445 , A61B8/4483 , A61B2562/028 , B06B1/0292
摘要： A capacitive micromachined ultrasonic transducer (cMUT) is constituted by a plurality of transducer elements comprising plural transducer cells that are mutually connected in parallel and comprises: a silicon substrate; a bottom electrode placed on the top surface of the silicon substrate; an upper electrode placed opposite to the bottom electrode and apart therefrom by a prescribed air or vacuum; a membrane for supporting the bottom electrode; and a membrane supporting part for supporting the membrane, wherein the cMUT comprises a third electrode which has an electrical continuity to the bottom electrode and which corresponds to either one of the transducer cells of a prescribed number of the transducer subelement or of the transducer elements, and a fourth electrode which is a ground electrode electrically connected to the bottom electrode.
摘要翻译： 电容微加工超声波换能器（cMUT）由多个换能器元件构成，多个换能器元件包括并联的多个换能器单元，包括：硅基底; 放置在硅衬底的顶表面上的底电极; 上电极通过规定的空气或真空与底电极相对设置并与其分离; 用于支撑底部电极的膜; 以及用于支撑所述膜的膜支撑部分，其中所述cMUT包括与所述底部电极具有电连续性并且对应于规定数量的所述换能器子元件或所述换能器元件中的任一个换能器单元的第三电极， 以及第四电极，其是与所述底部电极电连接的接地电极。
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3.发明授权Capacitive micromachined ultrasonic transducer (cMUT) device and method of controlling the same 有权电容式微加工超声波换能器（cMUT）装置及其控制方法公开(公告)号：US08345512B2
公开(公告)日：2013-01-01
申请号：US12062240
申请日：2008-04-03
申请人： Hideo Adachi , Katsuhiro Wakabayashi , Kosei Tamiya , Masaaki Amikura , Kazuya Matsumoto , Ryo Ohta , Mamoru Hasegawa , Hiroshi Ito
发明人： Hideo Adachi , Katsuhiro Wakabayashi , Kosei Tamiya , Masaaki Amikura , Kazuya Matsumoto , Ryo Ohta , Mamoru Hasegawa , Hiroshi Ito
CPC分类号： A61B8/00 , A61B8/12 , B06B1/0207 , B06B1/0292 , B06B2201/51 , G01N29/2406
摘要： A capacitive micromachined ultrasonic transducer (cMUT) device, comprising: a cMUT formed on a semiconductor substrate; a DC high-voltage generation unit that is provided on the semiconductor substrate and that is for generating a DC high-voltage signal to be superposed on a driving signal for the cMUT; a driving signal generation unit that is provided on the semiconductor substrate and that is for generating the driving signal; and a superposition unit that is provided on the semiconductor substrate and that is for branching the DC high-voltage signal output from the DC high-voltage generation unit and for superposing one of the branched DC high-voltage signals on the other of the branched DC high-voltage signals via the driving signal generation unit.
摘要翻译： 一种电容微加工超声波换能器（cMUT）装置，包括：形成在半导体衬底上的cMUT; DC高电压产生单元，设置在半导体基板上，用于产生叠加在cMUT的驱动信号上的DC高电压信号; 驱动信号生成单元，其设置在所述半导体基板上，用于产生所述驱动信号; 以及叠加单元，其设置在所述半导体基板上，并且用于分支从所述直流高压发生单元输出的所述直流高电压信号，并且用于将所述分支直流高电压信号中的一个叠加在所述分支DC 通过驱动信号发生单元的高电压信号。
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4.发明申请Ultrasonic transducer, method for manufacturing ultrasonic transducer, and ultrasonic endoscope 有权超声波换能器，超声波换能器制造方法及超声波内窥镜公开(公告)号：US20080200811A1
公开(公告)日：2008-08-21
申请号：US11977191
申请日：2007-10-24
CPC分类号： A61B8/4488 , A61B8/12 , A61B8/445 , A61B8/4483 , A61B2562/028 , B06B1/0292
摘要： An ultrasonic transducer according to the invention includes a flexible sheet, a rigid body portion including a lower electrode made of at least a thin-film conductive material on a surface of the flexible sheet, a dividing portion which divides the rigid body portion into segments, and a plurality of transducer elements including the divided rigid body portion, has at least one transducer cell composed of one of the segments, an insulating partition portion bonded to the segment, an air gap portion surrounded by the partition portion, an upper electrode opposed to the lower electrode extending to the partition portion to sandwich the air gap portion therebetween, and an upper insulating layer formed on the upper electrode, and includes an upper protection film which continuously covers a surface portion of the transducer elements and the dividing portion.
摘要翻译： 根据本发明的超声波换能器包括柔性片，刚性体部分，其包括在柔性片的表面上由至少薄膜导电材料制成的下电极，将刚体部分分割成段的分割部分， 并且包括分割刚体部的多个换能器元件具有至少一个由一个片段组成的换能器单元，与该片段接合的绝缘隔板部分，被该分隔部包围的气隙部分， 所述下电极延伸到所述分隔部分以夹住所述气隙部分，以及形成在所述上电极上的上绝缘层，并且包括连续覆盖所述换能器元件的表面部分和所述分割部分的上保护膜。
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5.发明申请Ultrasonic transducer, ultrasonic probe, and ultrasonic diagnostic apparatus 审中-公开超声波换能器，超声波探头和超声波诊断仪公开(公告)号：US20080089180A1
公开(公告)日：2008-04-17
申请号：US11973945
申请日：2007-10-11
CPC分类号： B06B1/0292 , A61B8/12 , A61B8/445 , A61B8/4461 , A61B8/4488
摘要： An ultrasonic transducer of a capacitance type includes a pair of electrodes disposed to be opposed to each other and a vibration film including one of the pair of electrodes. The ultrasonic transducer includes n (n is a natural number equal to or larger than 1) air gap layers interposed between the pair of electrodes and m (m is a natural number equal to or larger than 1) insulating layers interposed between the pair of electrodes. In the ultrasonic transducer, a following Formula (1) is satisfied: d1≦{Σdn+Σ(tm/Km)}/3 (1) where, dn indicates a thickness of an nth air gap layer, d1 indicates a thickness of an air gap layer for allowing the vibration film to vibrate, tm indicates a thickness of an mth insulating layer, and Km indicates a dielectric constant of the mth insulating layer.
摘要翻译： 电容式的超声波换能器包括彼此相对设置的一对电极和包括一对电极之一的振动膜。 超声波换能器包括介于一对电极之间的n（n为1以上的自然数）气隙层，m（m为1以上的自然数）绝缘层插入在该一对电极之间 。 在超声波换能器中，满足以下公式（1）：<？in-line-formula description =“In-line Formulas”end =“lead”？> d <1 <= {SigmaD < ＆lt;＆lt;＆lt;＆lt;＆lt; n＆gt; +＆Sigma;＆Sigma;＆Sigma; m＆CenterDot;（3） “end =”tail“？>其中，d
表示第n个气隙层的厚度，d <1>表示用于允许振动的气隙层的厚度 薄膜振动，t m表示第m绝缘层的厚度，K m表示第m绝缘层的介电常数。 -
6.发明授权Ultrasonic transducer, ultrasonic transducer fabrication method, and ultrasonic endoscope 有权超声波换能器，超声波换能器制造方法和超声波内窥镜公开(公告)号：US07952256B2
公开(公告)日：2011-05-31
申请号：US11870786
申请日：2007-10-11
IPC分类号： H01L41/08
CPC分类号： A61B8/4488 , A61B8/12 , A61B8/445 , B06B1/0292 , Y10T29/42 , Y10T29/49005 , Y10T29/49155
摘要： An ultrasonic transducer according to the present invention includes: two or more ultrasonic transducer cells, each of which has a lower electrode, a first insulating layer placed on the lower electrode, a cavity placed on the first insulating layer, a second insulating layer placed on the cavity, and an upper electrode placed above the second insulating layer; channels which communicate the cavities with each other; the second insulating layer placed on the channels; holes formed in the second insulating layer placed on the channels; and sealing portions which seal the holes, where that part of the sealing portions which enters the channels is the same in cross-sectional shape as the holes.
摘要翻译： 根据本发明的超声波换能器包括：两个或更多个超声波换能器单元，每个超声换能器单元具有下电极，设置在下电极上的第一绝缘层，放置在第一绝缘层上的空腔，放置在第二绝缘层上的第二绝缘层 所述空腔和位于所述第二绝缘层上方的上电极; 将空腔相互通信的通道; 第二绝缘层放置在通道上; 形成在通道上的第二绝缘层中的孔; 以及密封孔的密封部分，其中进入通道的密封部分的那部分与孔的横截面形状相同。
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7.发明授权Ultrasonic transducer, method for manufacturing ultrasonic transducer, and ultrasonic endoscope 有权超声波换能器，超声波换能器制造方法及超声波内窥镜公开(公告)号：US08740800B2
公开(公告)日：2014-06-03
申请号：US11977191
申请日：2007-10-24
IPC分类号： A61B8/14
CPC分类号： A61B8/4488 , A61B8/12 , A61B8/445 , A61B8/4483 , A61B2562/028 , B06B1/0292
摘要： An ultrasonic transducer according to the invention includes a flexible sheet, a rigid body portion including a lower electrode made of at least a thin-film conductive material on a surface of the flexible sheet, a dividing portion which divides the rigid body portion into segments, and a plurality of transducer elements including the divided rigid body portion, has at least one transducer cell composed of one of the segments, an insulating partition portion bonded to the segment, an air gap portion surrounded by the partition portion, an upper electrode opposed to the lower electrode extending to the partition portion to sandwich the air gap portion therebetween, and an upper insulating layer formed on the upper electrode, and includes an upper protection film which continuously covers a surface portion of the transducer elements and the dividing portion.
摘要翻译： 根据本发明的超声波换能器包括柔性片，刚性体部分，其包括在柔性片的表面上由至少薄膜导电材料制成的下电极，将刚体部分分割成段的分割部分， 并且包括分割刚体部的多个换能器元件具有至少一个由一个片段组成的换能器单元，与该片段接合的绝缘隔板部分，被该分隔部包围的气隙部分， 所述下电极延伸到所述分隔部分以夹住所述气隙部分，以及形成在所述上电极上的上绝缘层，并且包括连续覆盖所述换能器元件的表面部分和所述分割部分的上保护膜。
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8.发明授权Ultrasonic transducer, method of manufacturing ultrasonic transducer, ultrasonic diagnostic apparatus, and ultrasonic microscope 有权超声波换能器，超声波换能器的制造方法，超声波诊断装置和超声波显微镜公开(公告)号：US08047995B2
公开(公告)日：2011-11-01
申请号：US12197706
申请日：2008-08-25
申请人： Katsuhiro Wakabayashi , Hideo Adachi , Mamoru Hasegawa , Kazuya Matsumoto , Kazuhisa Karaki , Yoshitaka Kamiya
发明人： Katsuhiro Wakabayashi , Hideo Adachi , Mamoru Hasegawa , Kazuya Matsumoto , Kazuhisa Karaki , Yoshitaka Kamiya
IPC分类号： A61B8/00
CPC分类号： B06B1/0292 , A61B8/483 , H04R19/01 , Y10T29/42
摘要： A ultrasonic transducer of the invention comprises: a transducer cell including a first electrode and a second electrode disposed separated from the first electrode by an air gap portion; and an electret for applying a potential difference between the first electrode and the second electrode. The electret is disposed in a region where at least a part thereof does not overlap with the transducer cell when viewed from a transmitting direction of ultrasonic waves.
摘要翻译： 本发明的超声换能器包括：换能器单元，包括第一电极和通过气隙部分与第一电极隔开的第二电极; 以及用于在第一电极和第二电极之间施加电位差的驻极体。 当从超声波的发送方向观察时，驻极体设置在至少一部分与换能器单元不重叠的区域。
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公开(公告)号：US08026651B2
公开(公告)日：2011-09-27
申请号：US12424118
申请日：2009-04-15
申请人： Katsuhiro Wakabayashi , Hideo Adachi , Kazuya Matsumoto , Mamoru Hasegawa , Kazuhisa Karaki , Yoshitaka Kamiya
发明人： Katsuhiro Wakabayashi , Hideo Adachi , Kazuya Matsumoto , Mamoru Hasegawa , Kazuhisa Karaki , Yoshitaka Kamiya
CPC分类号： B06B1/0292
摘要： An ultrasound transducer includes a substrate, an ultrasound transducer cell placed on one surface of the substrate and having a lower electrode, a first gap portion placed on the lower electrode and an upper electrode placed on the first gap portion, a first conductive layer placed on the other surface of the substrate and electrically connected to one of the lower electrode and the upper electrode, an electret film placed on the first conductive layer, an insulating layer placed on the electret film, and a second conductive layer placed on the insulating layer and electrically connected to the one of the lower electrode and the upper electrode not electrically connected to the first conductive layer.
摘要翻译： 超声波换能器包括基板，放置在基板的一个表面上的超声换能器单元，具有下电极，放置在下电极上的第一间隙部分和放置在第一间隙部分上的上电极，第一导电层置于 基板的另一个表面，并且电连接到下电极和上电极中的一个，驻留在第一导电层上的驻极体膜，设置在驻极体膜上的绝缘层和放置在绝缘层上的第二导电层， 电连接到未电连接到第一导电层的下电极和上电极之一。
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公开(公告)号：US08381387B2
公开(公告)日：2013-02-26
申请号：US12914651
申请日：2010-10-28
CPC分类号： A61B8/4488 , A61B8/12 , A61B8/445 , B06B1/0292 , Y10T29/42 , Y10T29/49005 , Y10T29/49155
摘要： An ultrasonic transducer fabrication method including: depositing a conductive material on an insulating layer, partially etching the conductive material to form lower electrodes; depositing an insulating material to cover the lower electrodes to form a first insulating layer and depositing a sacrificial material thereon, performing etching, to create cavities and a channel-shaped sacrificial layer to communicate the cavities; depositing an insulating material on the first insulating layer to form a second insulating layer; partially etching the second insulating layer to form holes; etching and removing the sacrificial layer through the holes to form the cavities and channels; depositing a conductive material on the second insulating layer to plug the holes and form a conductive film; partially etching the conductive film to form upper electrodes and sealing portions which plug the holes; and forming a protective film on the second insulating layer to cover the upper electrodes and the sealing portions.
摘要翻译： 一种超声换能器制造方法，包括：在绝缘层上沉积导电材料，部分地蚀刻导电材料以形成下电极; 沉积绝缘材料以覆盖下电极以形成第一绝缘层并在其上沉积牺牲材料，执行蚀刻以产生空腔和沟槽状牺牲层以连通空腔; 在所述第一绝缘层上沉积绝缘材料以形成第二绝缘层; 部分蚀刻第二绝缘层以形成孔; 通过孔蚀刻和去除牺牲层以形成空腔和通道; 在第二绝缘层上沉积导电材料以堵塞孔并形成导电膜; 部分地蚀刻导电膜以形成上电极和堵塞孔的密封部分; 以及在所述第二绝缘层上形成保护膜以覆盖所述上电极和所述密封部。
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