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    Capacitive micromachined ultrasonic transducer and production method of same
    2.
    发明授权
    Capacitive micromachined ultrasonic transducer and production method of same 有权
    电容式微加工超声波换能器及其制作方法

    公开(公告)号：US07589455B2

    公开(公告)日：2009-09-15

    申请号：US11942364

    申请日：2007-11-19

    申请人： Hideo Adachi ,  Katsuhiro Wakabayashi ,  Kazuya Matsumoto ,  Ryo Ota ,  Masaaki Amikura ,  Hiroshi Ito ,  Mamoru Hasegawa

    发明人： Hideo Adachi ,  Katsuhiro Wakabayashi ,  Kazuya Matsumoto ,  Ryo Ota ,  Masaaki Amikura ,  Hiroshi Ito ,  Mamoru Hasegawa

    IPC分类号： H01L41/09

    CPC分类号： A61B8/12 ,  A61B8/445 ,  A61B8/4483 ,  A61B2562/028 ,  B06B1/0292

    摘要： A capacitive micromachined ultrasonic transducer (cMUT) is constituted by a plurality of transducer elements comprising plural transducer cells that are mutually connected in parallel and comprises: a silicon substrate; a bottom electrode placed on the top surface of the silicon substrate; an upper electrode placed opposite to the bottom electrode and apart therefrom by a prescribed air or vacuum; a membrane for supporting the bottom electrode; and a membrane supporting part for supporting the membrane, wherein the cMUT comprises a third electrode which has an electrical continuity to the bottom electrode and which corresponds to either one of the transducer cells of a prescribed number of the transducer subelement or of the transducer elements, and a fourth electrode which is a ground electrode electrically connected to the bottom electrode.

    摘要翻译： 电容微加工超声换能器（cMUT）由多个换能器元件构成，多个换能器元件包括并联的多个换能器单元，包括：硅基底; 放置在硅衬底的顶表面上的底电极; 上电极通过规定的空气或真空与底电极相对设置并与其分离; 用于支撑底部电极的膜; 以及用于支撑所述膜的膜支撑部分，其中所述cMUT包括与所述底部电极具有电连续性并且对应于规定数量的所述换能器子元件或所述换能器元件中的任一个换能器单元的第三电极， 以及第四电极，其是与所述底部电极电连接的接地电极。

    CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND PRODUCTION METHOD OF SAME
    3.
    发明申请
    CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND PRODUCTION METHOD OF SAME 有权
    电容式MICROMACHINED超声波传感器及其生产方法

    公开(公告)号：US20080067895A1

    公开(公告)日：2008-03-20

    申请号：US11942364

    申请日：2007-11-19

    申请人： Hideo Adachi ,  Katsuhiro Wakabayashi ,  Kazuya Matsumoto ,  Ryo Ota ,  Masaaki Amikura ,  Hiroshi Ito ,  Mamoru Hasegawa

    发明人： Hideo Adachi ,  Katsuhiro Wakabayashi ,  Kazuya Matsumoto ,  Ryo Ota ,  Masaaki Amikura ,  Hiroshi Ito ,  Mamoru Hasegawa

    IPC分类号： H01L41/00

    CPC分类号： A61B8/12 ,  A61B8/445 ,  A61B8/4483 ,  A61B2562/028 ,  B06B1/0292

    摘要： A capacitive micromachined ultrasonic transducer (cMUT) is constituted by a plurality of transducer elements comprising plural transducer cells that are mutually connected in parallel and comprises: a silicon substrate; a bottom electrode placed on the top surface of the silicon substrate; an upper electrode placed opposite to the bottom electrode and apart therefrom by a prescribed air or vacuum; a membrane for supporting the bottom electrode; and a membrane supporting part for supporting the membrane, wherein the cMUT comprises a third electrode which has an electrical continuity to the bottom electrode and which corresponds to either one of the transducer cells of a prescribed number of the transducer subelement or of the transducer elements, and a fourth electrode which is a ground electrode electrically connected to the bottom electrode.

    摘要翻译： 电容微加工超声波换能器（cMUT）由多个换能器元件构成，多个换能器元件包括并联的多个换能器单元，包括：硅基底; 放置在硅衬底的顶表面上的底电极; 上电极通过规定的空气或真空与底电极相对设置并与其分离; 用于支撑底部电极的膜; 以及用于支撑所述膜的膜支撑部分，其中所述cMUT包括与所述底部电极具有电连续性并且对应于规定数量的所述换能器子元件或所述换能器元件中的任一个换能器单元的第三电极， 以及第四电极，其是与所述底部电极电连接的接地电极。

    Ultrasonic transducer, method for manufacturing ultrasonic transducer, and ultrasonic endoscope
    4.
    发明申请
    Ultrasonic transducer, method for manufacturing ultrasonic transducer, and ultrasonic endoscope 有权
    超声波换能器，超声波换能器制造方法及超声波内窥镜

    公开(公告)号：US20080200811A1

    公开(公告)日：2008-08-21

    申请号：US11977191

    申请日：2007-10-24

    申请人： Katsuhiro Wakabayashi ,  Hideo Adachi ,  Mamoru Hasegawa ,  Kazuya Matsumoto ,  Ryo Ohta

    发明人： Katsuhiro Wakabayashi ,  Hideo Adachi ,  Mamoru Hasegawa ,  Kazuya Matsumoto ,  Ryo Ohta

    IPC分类号： A61B8/00 ,  G01N29/00 ,  A61B1/00

    CPC分类号： A61B8/4488 ,  A61B8/12 ,  A61B8/445 ,  A61B8/4483 ,  A61B2562/028 ,  B06B1/0292

    摘要： An ultrasonic transducer according to the invention includes a flexible sheet, a rigid body portion including a lower electrode made of at least a thin-film conductive material on a surface of the flexible sheet, a dividing portion which divides the rigid body portion into segments, and a plurality of transducer elements including the divided rigid body portion, has at least one transducer cell composed of one of the segments, an insulating partition portion bonded to the segment, an air gap portion surrounded by the partition portion, an upper electrode opposed to the lower electrode extending to the partition portion to sandwich the air gap portion therebetween, and an upper insulating layer formed on the upper electrode, and includes an upper protection film which continuously covers a surface portion of the transducer elements and the dividing portion.

    摘要翻译： 根据本发明的超声波换能器包括柔性片，刚性体部分，其包括在柔性片的表面上由至少薄膜导电材料制成的下电极，将刚体部分分割成段的分割部分， 并且包括分割刚体部的多个换能器元件具有至少一个由一个片段组成的换能器单元，与该片段接合的绝缘隔板部分，被该分隔部包围的气隙部分， 所述下电极延伸到所述分隔部分以夹住所述气隙部分，以及形成在所述上电极上的上绝缘层，并且包括连续覆盖所述换能器元件的表面部分和所述分割部分的上保护膜。

    Ultrasonic transducer, ultrasonic probe, and ultrasonic diagnostic apparatus
    5.
    发明申请
    Ultrasonic transducer, ultrasonic probe, and ultrasonic diagnostic apparatus 审中-公开
    超声波换能器，超声波探头和超声波诊断仪

    公开(公告)号：US20080089180A1

    公开(公告)日：2008-04-17

    申请号：US11973945

    申请日：2007-10-11

    申请人： Kazuya Matsumoto ,  Mamoru Hasegawa ,  Ryo Ohta ,  Hideo Adachi ,  Katsuhiro Wakabayashi

    发明人： Kazuya Matsumoto ,  Mamoru Hasegawa ,  Ryo Ohta ,  Hideo Adachi ,  Katsuhiro Wakabayashi

    IPC分类号： H04R19/00 ,  G01H11/06 ,  H02N1/00 ,  H02N1/08

    CPC分类号： B06B1/0292 ,  A61B8/12 ,  A61B8/445 ,  A61B8/4461 ,  A61B8/4488

    摘要： An ultrasonic transducer of a capacitance type includes a pair of electrodes disposed to be opposed to each other and a vibration film including one of the pair of electrodes. The ultrasonic transducer includes n (n is a natural number equal to or larger than 1) air gap layers interposed between the pair of electrodes and m (m is a natural number equal to or larger than 1) insulating layers interposed between the pair of electrodes. In the ultrasonic transducer, a following Formula (1) is satisfied: d1≦{Σdn+Σ(tm/Km)}/3   (1) where, dn indicates a thickness of an nth air gap layer, d1 indicates a thickness of an air gap layer for allowing the vibration film to vibrate, tm indicates a thickness of an mth insulating layer, and Km indicates a dielectric constant of the mth insulating layer.

    摘要翻译： 电容式的超声波换能器包括彼此相对设置的一对电极和包括一对电极之一的振动膜。 超声波换能器包括介于一对电极之间的n（n为1以上的自然数）气隙层，m（m为1以上的自然数）绝缘层插入在该一对电极之间 。 在超声波换能器中，满足以下公式（1）：<？in-line-formula description =“In-line Formulas”end =“lead”？> d <1 <= {SigmaD < ＆lt;＆lt;＆lt;＆lt;＆lt; n＆gt; +＆Sigma;＆Sigma;＆Sigma; m＆CenterDot;（3） “end =”tail“？>其中，d 表示第n个气隙层的厚度，d <1>表示用于允许振动的气隙层的厚度 薄膜振动，t m表示第m绝缘层的厚度，K m表示第m绝缘层的介电常数。

    Ultrasonic transducer, method for manufacturing ultrasonic transducer, and ultrasonic endoscope
    6.
    发明授权
    Ultrasonic transducer, method for manufacturing ultrasonic transducer, and ultrasonic endoscope 有权
    超声波换能器，超声波换能器制造方法及超声波内窥镜

    公开(公告)号：US08740800B2

    公开(公告)日：2014-06-03

    申请号：US11977191

    申请日：2007-10-24

    申请人： Katsuhiro Wakabayashi ,  Hideo Adachi ,  Mamoru Hasegawa ,  Kazuya Matsumoto ,  Ryo Ohta

    发明人： Katsuhiro Wakabayashi ,  Hideo Adachi ,  Mamoru Hasegawa ,  Kazuya Matsumoto ,  Ryo Ohta

    IPC分类号： A61B8/14

    CPC分类号： A61B8/4488 ,  A61B8/12 ,  A61B8/445 ,  A61B8/4483 ,  A61B2562/028 ,  B06B1/0292

    摘要： An ultrasonic transducer according to the invention includes a flexible sheet, a rigid body portion including a lower electrode made of at least a thin-film conductive material on a surface of the flexible sheet, a dividing portion which divides the rigid body portion into segments, and a plurality of transducer elements including the divided rigid body portion, has at least one transducer cell composed of one of the segments, an insulating partition portion bonded to the segment, an air gap portion surrounded by the partition portion, an upper electrode opposed to the lower electrode extending to the partition portion to sandwich the air gap portion therebetween, and an upper insulating layer formed on the upper electrode, and includes an upper protection film which continuously covers a surface portion of the transducer elements and the dividing portion.

    摘要翻译： 根据本发明的超声波换能器包括柔性片，刚性体部分，其包括在柔性片的表面上由至少薄膜导电材料制成的下电极，将刚体部分分割成段的分割部分， 并且包括分割刚体部的多个换能器元件具有至少一个由一个片段组成的换能器单元，与该片段接合的绝缘隔板部分，被该分隔部包围的气隙部分， 所述下电极延伸到所述分隔部分以夹住所述气隙部分，以及形成在所述上电极上的上绝缘层，并且包括连续覆盖所述换能器元件的表面部分和所述分割部分的上保护膜。

    Ultrasonic transducer, ultrasonic transducer fabrication method, and ultrasonic endoscope
    7.
    发明授权
    Ultrasonic transducer, ultrasonic transducer fabrication method, and ultrasonic endoscope 有权
    超声波换能器，超声波换能器制造方法和超声波内窥镜

    公开(公告)号：US07952256B2

    公开(公告)日：2011-05-31

    申请号：US11870786

    申请日：2007-10-11

    申请人： Kazuya Matsumoto ,  Ryo Ohta ,  Mamoru Hasegawa ,  Hideo Adachi ,  Katsuhiro Wakabayashi

    发明人： Kazuya Matsumoto ,  Ryo Ohta ,  Mamoru Hasegawa ,  Hideo Adachi ,  Katsuhiro Wakabayashi

    IPC分类号： H01L41/08

    CPC分类号： A61B8/4488 ,  A61B8/12 ,  A61B8/445 ,  B06B1/0292 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49155

    摘要： An ultrasonic transducer according to the present invention includes: two or more ultrasonic transducer cells, each of which has a lower electrode, a first insulating layer placed on the lower electrode, a cavity placed on the first insulating layer, a second insulating layer placed on the cavity, and an upper electrode placed above the second insulating layer; channels which communicate the cavities with each other; the second insulating layer placed on the channels; holes formed in the second insulating layer placed on the channels; and sealing portions which seal the holes, where that part of the sealing portions which enters the channels is the same in cross-sectional shape as the holes.

    摘要翻译： 根据本发明的超声波换能器包括：两个或更多个超声波换能器单元，每个超声换能器单元具有下电极，设置在下电极上的第一绝缘层，放置在第一绝缘层上的空腔，放置在第二绝缘层上的第二绝缘层 所述空腔和位于所述第二绝缘层上方的上电极; 将空腔相互通信的通道; 第二绝缘层放置在通道上; 形成在通道上的第二绝缘层中的孔; 以及密封孔的密封部分，其中进入通道的密封部分的那部分与孔的横截面形状相同。

    Method of fabricating an ultrasonic transducer
    8.
    发明授权
    Method of fabricating an ultrasonic transducer 有权
    制造超声波换能器的方法

    公开(公告)号：US08381387B2

    公开(公告)日：2013-02-26

    申请号：US12914651

    申请日：2010-10-28

    申请人： Kazuya Matsumoto ,  Ryo Ohta ,  Mamoru Hasegawa ,  Hideo Adachi ,  Katsuhiro Wakabayashi

    发明人： Kazuya Matsumoto ,  Ryo Ohta ,  Mamoru Hasegawa ,  Hideo Adachi ,  Katsuhiro Wakabayashi

    IPC分类号： H04R31/00 ,  H04R17/00 ,  H01L41/22

    CPC分类号： A61B8/4488 ,  A61B8/12 ,  A61B8/445 ,  B06B1/0292 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49155

    摘要： An ultrasonic transducer fabrication method including: depositing a conductive material on an insulating layer, partially etching the conductive material to form lower electrodes; depositing an insulating material to cover the lower electrodes to form a first insulating layer and depositing a sacrificial material thereon, performing etching, to create cavities and a channel-shaped sacrificial layer to communicate the cavities; depositing an insulating material on the first insulating layer to form a second insulating layer; partially etching the second insulating layer to form holes; etching and removing the sacrificial layer through the holes to form the cavities and channels; depositing a conductive material on the second insulating layer to plug the holes and form a conductive film; partially etching the conductive film to form upper electrodes and sealing portions which plug the holes; and forming a protective film on the second insulating layer to cover the upper electrodes and the sealing portions.

    摘要翻译： 一种超声换能器制造方法，包括：在绝缘层上沉积导电材料，部分地蚀刻导电材料以形成下电极; 沉积绝缘材料以覆盖下电极以形成第一绝缘层并在其上沉积牺牲材料，执行蚀刻以产生空腔和沟槽状牺牲层以连通空腔; 在所述第一绝缘层上沉积绝缘材料以形成第二绝缘层; 部分蚀刻第二绝缘层以形成孔; 通过孔蚀刻和去除牺牲层以形成空腔和通道; 在第二绝缘层上沉积导电材料以堵塞孔并形成导电膜; 部分地蚀刻导电膜以形成上电极和堵塞孔的密封部分; 以及在所述第二绝缘层上形成保护膜以覆盖所述上电极和所述密封部。