Optical system for oblique incidence interferometer and apparatus using the same
    1.
    发明授权
    Optical system for oblique incidence interferometer and apparatus using the same 失效
    用于斜入射干涉仪的光学系统及其使用方法

    公开(公告)号:US06643026B2

    公开(公告)日:2003-11-04

    申请号:US09779634

    申请日:2001-02-09

    IPC分类号: G01B902

    CPC分类号: G01B9/02022 G01B2290/70

    摘要: In an optical system for an oblique incidence interferometer, first and second prisms are used for luminous flux dividing and for luminous flux combining, respectively. Reference light and measurement light are separated from each other at a surface where collimated coherent light enters or exits from the first prism, whereas the reference light and measurement light are combined together at a surface where the measurement light enters or exits from the second prism.

    摘要翻译: 在用于倾斜入射干涉仪的光学系统中,第一和第二棱镜分别用于光通量分配和光通量组合。 参考光和测量光在准直相干光从第一棱镜进入或离开的表面彼此分离,而参考光和测量光在测量光进入或离开第二棱镜的表面处组合在一起。

    Optical system for oblique incidence interferometer and apparatus using the same
    2.
    发明授权
    Optical system for oblique incidence interferometer and apparatus using the same 失效
    用于斜入射干涉仪的光学系统及其使用方法

    公开(公告)号:US06570661B2

    公开(公告)日:2003-05-27

    申请号:US09737753

    申请日:2000-12-18

    IPC分类号: G01B902

    摘要: In an interferometer optical system comprising a reference standard having an entrance surface on which a luminous flux from a light source is incident and a reference plane on which the luminous flux entering from the entrance surface is obliquely incident, an angle within the range of 10° to 30° is formed between the entrance surface and reference plane of the reference standard.

    摘要翻译: 在包括参考标准的干涉仪光学系统中,入射表面上来自光源的光束入射,入射表面入射的光束倾斜入射的基准面,在10°的范围内的角度 在参考标准的入射面和参考平面之间形成30°。

    ROTATION DRIVE DEVICE
    3.
    发明申请
    ROTATION DRIVE DEVICE 有权
    旋转驱动装置

    公开(公告)号:US20120285168A1

    公开(公告)日:2012-11-15

    申请号:US13555077

    申请日:2012-07-20

    申请人: Fumio Watanabe

    发明人: Fumio Watanabe

    IPC分类号: F03G3/00

    CPC分类号: F03G3/00

    摘要: In a rotation drive device (10), each of rotating units (20) has a swing arm (23) which is supported so as to be swingable around a swing center axis (23A) provided in a support table (22), a weight (24) is provided at a position at which a length of an arm from the swing center axis (23A) of the swing arm (23) is longer, and a connection point in a fluid cylinder (25) side is provided at a position at which the length of the arm from the swing center axis (23A) is shorter.

    摘要翻译: 在旋转驱动装置(10)中,每个旋转单元(20)具有摆动臂(23),所述摆动臂(23)被支撑成围绕设置在支撑台(22)中的摆动中心轴线(23A)摆动, (24)设置在从摆臂(23)的摆动中心轴(23A)的臂的长度较长的位置,并且在液压缸(25)侧的连接点设置在位置 其中臂从摆动中心轴线(23A)的长度较短。

    Quadrupole mass spectrometer and vacuum device using the same
    4.
    发明授权
    Quadrupole mass spectrometer and vacuum device using the same 失效
    四极杆质谱仪和使用相同的真空装置

    公开(公告)号:US07332714B2

    公开(公告)日:2008-02-19

    申请号:US11375063

    申请日:2006-03-15

    IPC分类号: H01J49/42 H01J49/28

    摘要: In a quadrupole mass spectrometer which measures partial pressure strength according to a gas type in a vacuum system from ion current intensity, a quadrupole mass spectrometer with a total pressure measurement electrode has a total pressure measurement electrode for examining an ion density disposed in a demarcation space which is comprised of a grid electrode and an ion focusing electrode. And, a vacuum system is provided with only the quadrupole mass spectrometer which measures partial pressure strength according to a gas type in the vacuum system from an ion current intensity and does not have an ionization vacuum gauge other than the quadrupole mass spectrometer.

    摘要翻译: 在根据离子电流强度根据真空系统中的气体类型测量分压强度的四极杆质谱仪中,具有总压力测量电极的四极质谱仪具有用于检查设置在分界空间中的离子密度的总压力测量电极 其由栅电极和离子聚焦电极组成。 并且,仅具有四极质谱仪的真空系统,其根据离子电流强度根据真空系统中的气体类型测量分压强度,并且除四极质谱仪之外不具有电离真空计。

    Material for vacuum device, vacuum device, vacuum apparatus, manufacturing method of material for vacuum device, processing method of vacuum device, and processing method of vacuum apparatus
    5.
    发明授权
    Material for vacuum device, vacuum device, vacuum apparatus, manufacturing method of material for vacuum device, processing method of vacuum device, and processing method of vacuum apparatus 有权
    真空装置的材料,真空装置,真空装置,真空装置的材料的制造方法,真空装置的加工方法以及真空装置的加工方法

    公开(公告)号:US07297419B2

    公开(公告)日:2007-11-20

    申请号:US10862358

    申请日:2004-06-08

    申请人: Fumio Watanabe

    发明人: Fumio Watanabe

    IPC分类号: D02G3/00

    摘要: The present invention relates to a manufacturing method of a material for vacuum device used in a vacuum apparatus that generates ultra-high vacuum and performs processing. Its constitution has the steps of: reducing pressure around the alloy of Cu and a doping element; increasing the temperature of the alloy to outgas hydrogen from the alloy, and gathering the doping element near the surface of the alloy and precipitating the doping element; and exposing the alloy to single oxygen, single nitrogen, mixed gas of oxygen and nitrogen, ozone (O3), oxygen content compound, nitrogen content compound or oxygen-nitrogen content compound, or a combination of them, or a plasma thereof while the temperature of the alloy is maintained at a range of room temperature or higher and the temperature of the alloy increased for outgassing hydrogen or lower, whereby it is reacted with the precipitated doping element so that one of an oxide film, a nitride film and an oxide-nitride film of the doping element is formed on a surface layer of the alloy.

    摘要翻译: 本发明涉及一种用于真空装置的真空装置的制造方法,该真空装置产生超高真空并进行处理。 其结构具有以下步骤:减少Cu和掺杂元素周围的合金压力; 提高合金的温度以从合金中排出氢气,并将掺杂元素聚集在合金表面附近并沉淀掺杂元素; 并将合金暴露于单氧,单氮,氧和氮的混合气体,臭氧(O 3 3 N),氧含量化合物,氮含量化合物或氧 - 氮含量化合物或它们的组合 或其等离子体,同时合金的温度保持在室温以上的范围内,并且合金的温度升高以使除气氢或更低,由此其与沉淀的掺杂元素反应,使得氧化物膜 在合金的表面层上形成掺杂元素的氮化物膜和氧化物氮化物膜。

    Semiconductor device and fabrication method introducing horizontal side-steps into vertical steps
    6.
    发明授权
    Semiconductor device and fabrication method introducing horizontal side-steps into vertical steps 有权
    半导体器件和制造方法将水平侧向引入垂直步骤

    公开(公告)号:US06373134B1

    公开(公告)日:2002-04-16

    申请号:US09514030

    申请日:2000-02-25

    申请人: Fumio Watanabe

    发明人: Fumio Watanabe

    IPC分类号: H01L2348

    摘要: A semiconductor device has an interconnection pattern that crosses a vertical step. The part of the vertical step crossed by the interconnection pattern includes a horizontal side-step. The horizontal side-step increases the total length of the crossing, thereby reducing the risk of electrical discontinuity at the crossing, without increasing the width of the interconnection pattern itself.

    摘要翻译: 半导体器件具有穿过垂直台阶的互连图案。 通过互连图案交叉的垂直步骤的部分包括水平侧边。 水平侧边增加了交叉点的总长度,从而降低了交叉口处电气不连续的风险,而不增加互连图案本身的宽度。

    Fluid cylinder assembly
    7.
    发明授权
    Fluid cylinder assembly 有权
    流体缸组件

    公开(公告)号:US06216581B1

    公开(公告)日:2001-04-17

    申请号:US09375365

    申请日:1999-08-17

    IPC分类号: F15B1526

    CPC分类号: G01L5/0076 F15B15/1433

    摘要: A fluid cylinder assembly of the kind provided with a cylinder tube in which a piston coupled by a piston rod operates. The cylinder tube has one end connected with a rod cover. The piston rod passes through an aperture in the rod cover and projects outwardly. The rod cover is associated with means for mounting the fluid cylinder assembly on a frame and a load transducer which converts a change in load axially acting thereon to a change in voltage or current and develops an electric signal. The movement of a lead wire extending outwardly of the load transducer is precluded, and the results of measurement are obtained with a high degree of accuracy.

    摘要翻译: 一种具有气缸套的液压缸组件,其中由活塞杆联接的活塞运行。 气缸筒的一端与杆盖连接。 活塞杆通过杆盖中的孔并向外突出。 杆盖与用于将液压缸组件安装在框架上的装置和负载传感器相结合,负载传感器将轴向作用在其上的负载变化转换为电压或电流的变化并产生电信号。 排除了从负载传感器向外延伸的引线的移动,并且以高精度获得测量结果。

    Infrared zoom lens system
    8.
    发明授权
    Infrared zoom lens system 失效
    红外变焦镜头系统

    公开(公告)号:US06091551A

    公开(公告)日:2000-07-18

    申请号:US013600

    申请日:1998-01-26

    申请人: Fumio Watanabe

    发明人: Fumio Watanabe

    CPC分类号: G02B15/173 G02B13/14

    摘要: An infrared zoom lens comprises, in order from the subject end to the image end, a positive power first lens group having lens elements less than three, a negative power second lens group having lens elements less than three, a third lens group having a single meniscus lens element with a concave subject side surface, a fourth lens group having a single convex lens element, and a positive power fifth lens group having at least four lens elements which include a convex meniscus lens with a concave image side surface facing directly to an image plane, the second and third lens groups being axially movable in predetermined relation relative to each other and relative to the first, fourth and fifth lens groups which are stationary to vary the zoom ratio of the infrared zoom lens and form a sharp image on the image plane, and satisfies the following conditions:______________________________________ 1.00 f2/ft 0.35

    摘要翻译: 红外变焦透镜从主体到图像端依次包括具有小于3的透镜元件的正电源第一透镜组,具有小于三个透镜元件的负电力第二透镜组,具有单个透镜元件的第三透镜组 具有凹入的对象侧面的弯月透镜元件,具有单个凸透镜元件的第四透镜组,以及具有至少四个透镜元件的正功率第五透镜组,所述透镜元件包括凸形弯月形透镜,凹面像侧面直接面向 图像平面,第二和第三透镜组可相对于彼此以预定关系轴向移动,并且相对于静止的第一,第四和第五透镜组可以改变红外变焦透镜的变焦比并在其上形成清晰图像 图像平面,满足以下条件: - 1.00 f2 / ft - 0.35

    Cooling and dust collecting apparatus for machine tool
    9.
    发明授权
    Cooling and dust collecting apparatus for machine tool 失效
    机床冷却集尘装置

    公开(公告)号:US5487629A

    公开(公告)日:1996-01-30

    申请号:US321856

    申请日:1994-10-14

    申请人: Fumio Watanabe

    发明人: Fumio Watanabe

    IPC分类号: B23Q11/00 B23Q11/10 B23C9/00

    摘要: A cutting and dust collecting housing which encloses a cutter main shaft and a cutter forms a closed space where cutting, cooling and chip collecting are performed. The pressurized cold air introduced into the housing, partly is blown from first cold air outlet holes to make an air curtain around the cutter, and partly is blown from second cold air outlet holes to cool the cutter and at the same time to strip cutting chips off the cutter. The cutting chips are floated in the housing and then discharged therefrom by a vacuum type cutting chip sucking device.

    摘要翻译: 封闭切割器主轴和切割器的切割和集尘壳体形成切割,冷却和芯片收集的封闭空间。 引入壳体的加压冷空气部分地从第一冷气出口孔吹出,以在切割器周围形成空气幕,并且部分地从第二冷气出口孔吹出以冷却切割器,同时剥离切屑 切断刀。 切割芯片浮在壳体中,然后通过真空型切屑吸引装置排出。

    Keyboard switch assembly
    10.
    发明授权
    Keyboard switch assembly 失效
    键盘开关总成

    公开(公告)号:US5387261A

    公开(公告)日:1995-02-07

    申请号:US131201

    申请日:1993-10-01

    CPC分类号: B41J5/12 H01H3/122

    摘要: A semilunar recess affixed to a key cap of a keyboard switch is snapped over a swing rod, rotatably affixed to a key seat, during assembly of the keyboard switch. The swing rod is supported by the key seat in a position permitting the semilunar recess to snap onto it. This arrangement permits single-step assembly of keys to a keyboard.

    摘要翻译: 在键盘开关的组装期间,固定到键盘开关的键帽的半月凹槽被卡在摆动杆上,可旋转地固定到键座上。 摇杆由钥匙座支撑在允许半月凹槽卡扣的位置上。 这种布置允许键到键盘的单步组装。