公开(公告)号：US07279067B2

公开(公告)日：2007-10-09

申请号：US10503940

申请日：2003-02-17

申请人： Tetsuo Yoshida ,  Yoshiaki Sasaki ,  Hiroaki Saeki ,  Yasushi Taniyama ,  Hiroshi Takizawa

发明人： Tetsuo Yoshida ,  Yoshiaki Sasaki ,  Hiroaki Saeki ,  Yasushi Taniyama ,  Hiroshi Takizawa

IPC分类号： C23F1/00 ,  H01L21/306 ,  C23C16/00 ,  B65G49/07

CPC分类号： H01L21/67017 ,  H01L21/67772 ,  Y10S414/135 ,  Y10S414/137

摘要： In a port structure 16A in a semiconductor processing system 2, a door 20A is disposed in a port 12A defined by upright wall 52 and 54. A table 48 opposed to the port is disposed outside the system. Defined on the table is a mount region 76 for mounting an open type cassette 18A for a process subject substrate W. A hood 50 is disposed rotatable relative to the table. The hood defines in its closed position a closed space surrounding the mount region and port, the space having a size to receive the cassette. First ventholes 58 are formed in the upright walls and/or the door so as to introduce gas from within the system into the closed space in the hood. Second ventholes 72 are formed in the table so as to discharge the gas can be discharged out of the closed space.

摘要翻译： 在半导体处理系统2中的端口结构16A中，门20A设置在由直立壁52和54限定的端口12A中。 与该端口相对的一个表48设置在系统外部。 在桌子上定义的是安装区域76，用于安装用于处理对象衬底W的打开型盒18A。罩50可相对于桌子旋转设置。 罩在其关闭位置限定围绕安装区域和端口的封闭空间，该空间具有用于容纳盒的尺寸。 第一通气孔58形成在直立壁和/或门中，以将来自系统内的气体引入罩内的封闭空间。 第二通气孔72形成在工作台中，以便排出气体可以排出封闭空间。

公开(公告)号：US06984097B1

公开(公告)日：2006-01-10

申请号：US10019227

申请日：2000-06-28

申请人： Hiroaki Saeki ,  Yoshiaki Sasaki ,  Keiichi Matsushima ,  Yasushi Taniyama ,  Shuuji Hagiwara

发明人： Hiroaki Saeki ,  Yoshiaki Sasaki ,  Keiichi Matsushima ,  Yasushi Taniyama ,  Shuuji Hagiwara

IPC分类号： B65G49/07

CPC分类号： H01L21/50 ,  H01L21/67772 ,  H01L21/67775

摘要： An attaching and removing unit of a lid for a wafer carrier according to the invention includes: a lid holding plate that can move forward and backward relatively to a lid for a wafer carrier provided with a lock unit having a keyhole exposed outside, on a side of the keyhole; a driver for causing the lid holding plate to move forward and backward; and a key element protruding from the lid holding plate on a side of the lid in a pivotable manner, the key element disposed opposite the keyhole in a direction of the forward and backward movement. The lock unit is adapted to be locked and unlocked by the key element pivoting in the keyhole. In a locked state, the key element can be inserted into and released from the keyhole, and in an unlocked state, the key element is engaged with and can not be released from the keyhole, while the lid holding plate holds the lid. The lid holding plate is provided with a lid-detecting unit for detecting whether the lid holding plate is holding the lid or not.

摘要翻译： 根据本发明的用于晶片载体的盖的安装和拆卸单元包括：盖保持板，其能相对于晶片载体的盖子前后移动，所述盖板设置有具有在外侧露出的锁孔的锁定单元， 的钥孔; 用于使盖保持板前后移动的驱动器; 以及从所述盖保持板在所述盖的侧面以可转动的方式突出的键元件，所述键元件在所述向前和向后移动的方向上与所述键孔相对设置。 锁定单元适于通过在键孔中枢转的键元件来锁定和解锁。 在锁定状态下，键元件可以插入钥匙孔中并从钥匙孔释放，并且在解锁状态下，当盖子保持板握住盖子时，钥匙元件与钥匙孔接合并且不能从钥匙孔释放。 盖保持板设置有用于检测盖保持板是否保持盖的盖检测单元。

公开(公告)号：US20050103270A1

公开(公告)日：2005-05-19

申请号：US10503940

申请日：2003-02-17

申请人： Tetsuo Yoshida ,  Yoshiaki Sasaki ,  Hiroaki Saeki ,  Yasushi Taniyama ,  Hiroshi Takizawa

发明人： Tetsuo Yoshida ,  Yoshiaki Sasaki ,  Hiroaki Saeki ,  Yasushi Taniyama ,  Hiroshi Takizawa

IPC分类号： B65G49/00 ,  H01L21/00 ,  H01L21/677 ,  C23C16/00

CPC分类号： H01L21/67017 ,  H01L21/67772 ,  Y10S414/135 ,  Y10S414/137

摘要： In a port structure 16A in a semiconductor processing system 2, a door 20A is disposed in a port 12A defined by upright wall 52 and 54. A table 48 opposed to the port is disposed outside the system. Defined on the table is a mount region 76 for mounting an open type cassette 18A for a process subject substrate W. A hood 50 is disposed rotatable relative to the table. The hood defines in its closed position a closed space surrounding the mount region and port, the space having a size to receive the cassette. First ventholes 58 are formed in the upright walls and/or the door so as to introduce gas from within the system into the closed space in the hood. Second ventholes 72 are formed in the table so as to discharge the gas can be discharged out of the closed space.

摘要翻译： 在半导体处理系统2中的端口结构16A中，门20A设置在由直立壁52和54限定的端口12A中。 与该端口相对的一个表48设置在系统外部。 在桌子上定义的是安装区域76，用于安装用于处理对象衬底W的打开型盒18A。罩50可相对于桌子旋转设置。 罩在其关闭位置限定围绕安装区域和端口的封闭空间，该空间具有用于容纳盒的尺寸。 第一通气孔58形成在直立壁和/或门中，以将来自系统内的气体引入罩内的封闭空间。 第二通气孔72形成在工作台中，以便排出气体可以排出封闭空间。

公开(公告)号：US06676356B2

公开(公告)日：2004-01-13

申请号：US09950640

申请日：2001-09-13

申请人： Hiroaki Saeki ,  Yoshiaki Sasaki ,  Yasushi Taniyama

发明人： Hiroaki Saeki ,  Yoshiaki Sasaki ,  Yasushi Taniyama

IPC分类号： H01J502

CPC分类号： H01L21/67775

摘要： A table for a transfer container is provided with an opening portion formed therein. A clamp is swingably supported on the lower side of the table. The clamp has a second engaging portion hook to project upward from the table through the opening portion, and to engage with the first engaging portion of the transfer container. A first actuator is disposed to apply a swing-driving force to the clamp. The first actuator has a reciprocation rod pivotally connected to the clamp, and is swingably supported on the lower side of the table.

摘要翻译： 用于转移容器的工作台设置有形成在其中的开口部分。 夹具可摆动地支撑在桌子的下侧。 夹具具有第二接合部分钩，以从桌子向上突出穿过开口部分，并与转移容器的第一接合部分接合。 第一致动器设置成向夹具施加摆动驱动力。 第一致动器具有枢转地连接到夹具的往复杆，并且可摆动地支撑在工作台的下侧。

公开(公告)号：US06540869B2

公开(公告)日：2003-04-01

申请号：US09870495

申请日：2001-06-01

申请人： Hiroaki Saeki ,  Yasushi Taniyama

发明人： Hiroaki Saeki ,  Yasushi Taniyama

IPC分类号： C23F100

CPC分类号： H01L21/67161 ,  H01L21/67196 ,  H01L21/67775 ,  Y10S414/139 ,  Y10T29/41

摘要： A semiconductor processing system comprises a first vacuum processing unit and a second vacuum processing unit connected thereto. The first and second vacuum processing units respectively comprise I/O transfer chambers. Casings of the transfer chambers are connected to each other, and a common transfer robot is arranged in the casings. The transfer robot is moved along horizontal guide rails and formed by connecting rails of the transfer chambers. A rail adjusting mechanism is provided to obtain linearity of the horizontal rails.

摘要翻译： 半导体处理系统包括与其连接的第一真空处理单元和第二真空处理单元。 第一和第二真空处理单元分别包括I / O传送室。 传送室的壳体彼此连接，并且在壳体中布置有共同的传送机器人。 传送机器人沿着水平导轨移动并通过连接传送室的轨道形成。 提供轨道调整机构以获得水平轨道的线性。

公开(公告)号：US07393172B1

公开(公告)日：2008-07-01

申请号：US10048012

申请日：2000-07-26

申请人： Hiroaki Saeki ,  Masaki Narushima ,  Tetsu Osawa ,  Yasushi Taniyama ,  Shuuji Hagiwara

发明人： Hiroaki Saeki ,  Masaki Narushima ,  Tetsu Osawa ,  Yasushi Taniyama ,  Shuuji Hagiwara

IPC分类号： H01L21/677

CPC分类号： H01L21/68707 ,  H01L21/67766 ,  Y10S414/137

摘要： In a wafer transfer system wherein a wafer transfer robot linearly reciprocates by a linear motor, dust is prevented from adhering to a wafer.A fixed base 9, on which the secondary side 11 of a linear motor M for linearly reciprocating a wafer transfer robot R is mounted, is mounted on the system body 1 of a wafer transfer system A in lateral directions and in vertical directions, so that dust dropping in accordance with the flow of clean air K from a clean air supply system 4 is directly sucked into an exhaust fan 5, which is provided on the bottom portion 1c of the system body 1, to be exhausted without being deposited on the top face of the fixed base 9 and the secondary side 11.

摘要翻译： 在其中晶片传送机器人通过线性电动机线性往复运动的晶片传送系统中，防止灰尘附着在晶片上。 在晶片传送系统A的系统主体1上沿横向和垂直方向安装固定基座9，其上安装有晶片传送机器人R用于线性往复运动的线性电动机M的次级侧11，使得 根据来自清洁空气供给系统4的清洁空气K的流动的粉尘直接吸入设置在系统主体1的底部1c上的排气扇5，而不会沉积在排气扇5上 固定底座9和次侧11的顶面。

公开(公告)号：US20120034051A1

公开(公告)日：2012-02-09

申请号：US13204865

申请日：2011-08-08

申请人： Fuminori ASA ,  Yasushi Taniyama

发明人： Fuminori ASA ,  Yasushi Taniyama

IPC分类号： H01L21/67

CPC分类号： H01L21/67772

摘要： A load port including a frame having an opening, a vessel receiving table that receives the wafer vessel, a door removably attached to the opening, a door opening and closing mechanism that opens and closes the door, and a closing mechanism that exerts force on the door when the door opening and closing mechanism closes the door.

摘要翻译： 包括具有开口的框架的装载端口，容纳晶片容器的容器接收台，可拆卸地附接到开口的门，用于打开和关闭门的门打开和关闭机构，以及关闭机构， 当门打开和关闭机构关闭门时门。

公开(公告)号：US08540473B2

公开(公告)日：2013-09-24

申请号：US13204865

申请日：2011-08-08

申请人： Fuminori Asa ,  Yasushi Taniyama

发明人： Fuminori Asa ,  Yasushi Taniyama

IPC分类号： B65B21/02

CPC分类号： H01L21/67772

摘要： A load port including a frame having an opening, a vessel receiving table that receives the wafer vessel, a door removably attached to the opening, a door opening and closing mechanism that opens and closes the door, and a closing mechanism that exerts force on the door when the door opening and closing mechanism closes the door.

摘要翻译： 包括具有开口的框架的装载端口，容纳晶片容器的容器接收台，可拆卸地附接到开口的门，用于打开和关闭门的门打开和关闭机构，以及关闭机构， 当门打开和关闭机构关闭门时门。

公开(公告)号：US20080152465A1

公开(公告)日：2008-06-26

申请号：US12003332

申请日：2007-12-21

申请人： Sachio Tachibana ,  Yasushi Taniyama

发明人： Sachio Tachibana ,  Yasushi Taniyama

IPC分类号： B65H1/00

CPC分类号： B65H5/04 ,  B25J9/1045 ,  B25J9/1065 ,  B65H2301/3115 ,  B65H2403/531 ,  H01L21/67742 ,  H01L21/67766 ,  Y10T74/20305 ,  Y10T74/20323 ,  Y10T74/20329

摘要： In a first linkage, base ends of a pair of first links which have the same length with each other are pivotably coupled to a fixed table through a pair of first coupling shafts, and tip ends of the first links are pivotably coupled to a pair of first intermediate shafts which are fixed to a first intermediate table. In a second linkage, base ends of a pair of second links which have the same length with the first links are pivotably coupled to the first intermediate shafts, and tip ends of the second links are pivotably coupled to a first installation table of the object through a pair of second coupling shafts. A first driving unit is operable to apply torque to one of the first coupling shafts to rotate one of the first links. A first transmission unit is provided in the first intermediate table and operable to transmit the torque from the one of the first links to one of the second links. The transmission unit includes a pair of pulleys pivotably supported by the first intermediate shafts and fixed to the one of the first links and the one of the second links; and an upper belt and lower belt are partially wound around the pulleys in opposite directions with each other and fixed to the pulleys so as to transmit the torque. One of the pulleys is divided into an upper part fixed with the upper belt and a lower part fixed with the lower belt in an axial direction of the first intermediate shafts.

摘要翻译： 在第一连杆中，具有相同长度的一对第一连杆的基端通过一对第一连接轴可枢转地联接到固定台上，第一连杆的尖端可枢转地连接到一对 固定在第一中间台上的第一中间轴。 在第二连杆中，与第一连杆具有相同长度的一对第二连杆的基端可枢转地联接到第一中间轴，并且第二连杆的末端可枢转地联接到物体的第一安装台，通过 一对第二联轴器。 第一驱动单元可操作以向第一联接轴之一施加扭矩以旋转第一连杆中的一个。 第一传输单元设置在第一中间表中，并且可操作以将扭矩从第一链接中的一个传递到第二链接中的一个。 传动单元包括一对滑轮，其由第一中间轴可枢转地支撑并固定到第一连杆中的一个和第二连杆中的一个; 并且上皮带和下皮带彼此相反地部分地卷绕在皮带轮上并固定到皮带轮上以传递扭矩。 其中一个滑轮被分成固定在上部皮带上的上部和沿着第一中间轴的轴向与下部皮带固定的下部。

公开(公告)号：US07987742B2

公开(公告)日：2011-08-02

申请号：US12003332

申请日：2007-12-21

申请人： Sachio Tachibana ,  Yasushi Taniyama

发明人： Sachio Tachibana ,  Yasushi Taniyama

IPC分类号： B25J17/00 ,  B25J18/00

CPC分类号： B65H5/04 ,  B25J9/1045 ,  B25J9/1065 ,  B65H2301/3115 ,  B65H2403/531 ,  H01L21/67742 ,  H01L21/67766 ,  Y10T74/20305 ,  Y10T74/20323 ,  Y10T74/20329

摘要： A transportation apparatus operable to linearly transport an object includes a first transmission unit provided in a first intermediate table and which is operable to transmit torque from one of a pair of first links to one of a pair of second links. The transmission unit includes a pair of pulleys supported by a pair of first intermediate shafts and fixed to the one of the first links and the one of the second links; and an upper belt and lower belt are partially wound around the pulley in opposite directions with each other and fixed to the pulleys so as to transmit the torque. One of the pulley is divided into an upper part fixed with the upper belt and a lower fixed with the lower belt in an axial direction of the first intermediate shafts.

摘要翻译： 可操作用于线性运送物体的运输设备包括设置在第一中间台中的第一传动单元，其可操作以将扭矩从一对第一连杆中的一个传递到一对第二连杆中的一个。 传动单元包括由一对第一中间轴支撑并固定到第一连杆中的一个和第二连杆中的一个的一对皮带轮; 并且上皮带和下皮带彼此相反地部分地缠绕在皮带轮上并固定到滑轮上以传递扭矩。 滑轮中的一个被分为固定有上带的上部和沿着第一中间轴的轴向的下带固定的下部皮带。