公开(公告)号：US06676356B2

公开(公告)日：2004-01-13

申请号：US09950640

申请日：2001-09-13

申请人： Hiroaki Saeki ,  Yoshiaki Sasaki ,  Yasushi Taniyama

发明人： Hiroaki Saeki ,  Yoshiaki Sasaki ,  Yasushi Taniyama

IPC分类号： H01J502

CPC分类号： H01L21/67775

摘要： A table for a transfer container is provided with an opening portion formed therein. A clamp is swingably supported on the lower side of the table. The clamp has a second engaging portion hook to project upward from the table through the opening portion, and to engage with the first engaging portion of the transfer container. A first actuator is disposed to apply a swing-driving force to the clamp. The first actuator has a reciprocation rod pivotally connected to the clamp, and is swingably supported on the lower side of the table.

摘要翻译： 用于转移容器的工作台设置有形成在其中的开口部分。 夹具可摆动地支撑在桌子的下侧。 夹具具有第二接合部分钩，以从桌子向上突出穿过开口部分，并与转移容器的第一接合部分接合。 第一致动器设置成向夹具施加摆动驱动力。 第一致动器具有枢转地连接到夹具的往复杆，并且可摆动地支撑在工作台的下侧。

公开(公告)号：US06984097B1

公开(公告)日：2006-01-10

申请号：US10019227

申请日：2000-06-28

申请人： Hiroaki Saeki ,  Yoshiaki Sasaki ,  Keiichi Matsushima ,  Yasushi Taniyama ,  Shuuji Hagiwara

发明人： Hiroaki Saeki ,  Yoshiaki Sasaki ,  Keiichi Matsushima ,  Yasushi Taniyama ,  Shuuji Hagiwara

IPC分类号： B65G49/07

CPC分类号： H01L21/50 ,  H01L21/67772 ,  H01L21/67775

摘要： An attaching and removing unit of a lid for a wafer carrier according to the invention includes: a lid holding plate that can move forward and backward relatively to a lid for a wafer carrier provided with a lock unit having a keyhole exposed outside, on a side of the keyhole; a driver for causing the lid holding plate to move forward and backward; and a key element protruding from the lid holding plate on a side of the lid in a pivotable manner, the key element disposed opposite the keyhole in a direction of the forward and backward movement. The lock unit is adapted to be locked and unlocked by the key element pivoting in the keyhole. In a locked state, the key element can be inserted into and released from the keyhole, and in an unlocked state, the key element is engaged with and can not be released from the keyhole, while the lid holding plate holds the lid. The lid holding plate is provided with a lid-detecting unit for detecting whether the lid holding plate is holding the lid or not.

摘要翻译： 根据本发明的用于晶片载体的盖的安装和拆卸单元包括：盖保持板，其能相对于晶片载体的盖子前后移动，所述盖板设置有具有在外侧露出的锁孔的锁定单元， 的钥孔; 用于使盖保持板前后移动的驱动器; 以及从所述盖保持板在所述盖的侧面以可转动的方式突出的键元件，所述键元件在所述向前和向后移动的方向上与所述键孔相对设置。 锁定单元适于通过在键孔中枢转的键元件来锁定和解锁。 在锁定状态下，键元件可以插入钥匙孔中并从钥匙孔释放，并且在解锁状态下，当盖子保持板握住盖子时，钥匙元件与钥匙孔接合并且不能从钥匙孔释放。 盖保持板设置有用于检测盖保持板是否保持盖的盖检测单元。

公开(公告)号：US20050103270A1

公开(公告)日：2005-05-19

申请号：US10503940

申请日：2003-02-17

申请人： Tetsuo Yoshida ,  Yoshiaki Sasaki ,  Hiroaki Saeki ,  Yasushi Taniyama ,  Hiroshi Takizawa

发明人： Tetsuo Yoshida ,  Yoshiaki Sasaki ,  Hiroaki Saeki ,  Yasushi Taniyama ,  Hiroshi Takizawa

IPC分类号： B65G49/00 ,  H01L21/00 ,  H01L21/677 ,  C23C16/00

CPC分类号： H01L21/67017 ,  H01L21/67772 ,  Y10S414/135 ,  Y10S414/137

摘要： In a port structure 16A in a semiconductor processing system 2, a door 20A is disposed in a port 12A defined by upright wall 52 and 54. A table 48 opposed to the port is disposed outside the system. Defined on the table is a mount region 76 for mounting an open type cassette 18A for a process subject substrate W. A hood 50 is disposed rotatable relative to the table. The hood defines in its closed position a closed space surrounding the mount region and port, the space having a size to receive the cassette. First ventholes 58 are formed in the upright walls and/or the door so as to introduce gas from within the system into the closed space in the hood. Second ventholes 72 are formed in the table so as to discharge the gas can be discharged out of the closed space.

摘要翻译： 在半导体处理系统2中的端口结构16A中，门20A设置在由直立壁52和54限定的端口12A中。 与该端口相对的一个表48设置在系统外部。 在桌子上定义的是安装区域76，用于安装用于处理对象衬底W的打开型盒18A。罩50可相对于桌子旋转设置。 罩在其关闭位置限定围绕安装区域和端口的封闭空间，该空间具有用于容纳盒的尺寸。 第一通气孔58形成在直立壁和/或门中，以将来自系统内的气体引入罩内的封闭空间。 第二通气孔72形成在工作台中，以便排出气体可以排出封闭空间。

公开(公告)号：US07279067B2

公开(公告)日：2007-10-09

申请号：US10503940

申请日：2003-02-17

申请人： Tetsuo Yoshida ,  Yoshiaki Sasaki ,  Hiroaki Saeki ,  Yasushi Taniyama ,  Hiroshi Takizawa

发明人： Tetsuo Yoshida ,  Yoshiaki Sasaki ,  Hiroaki Saeki ,  Yasushi Taniyama ,  Hiroshi Takizawa

IPC分类号： C23F1/00 ,  H01L21/306 ,  C23C16/00 ,  B65G49/07

CPC分类号： H01L21/67017 ,  H01L21/67772 ,  Y10S414/135 ,  Y10S414/137

摘要： In a port structure 16A in a semiconductor processing system 2, a door 20A is disposed in a port 12A defined by upright wall 52 and 54. A table 48 opposed to the port is disposed outside the system. Defined on the table is a mount region 76 for mounting an open type cassette 18A for a process subject substrate W. A hood 50 is disposed rotatable relative to the table. The hood defines in its closed position a closed space surrounding the mount region and port, the space having a size to receive the cassette. First ventholes 58 are formed in the upright walls and/or the door so as to introduce gas from within the system into the closed space in the hood. Second ventholes 72 are formed in the table so as to discharge the gas can be discharged out of the closed space.

摘要翻译： 在半导体处理系统2中的端口结构16A中，门20A设置在由直立壁52和54限定的端口12A中。 与该端口相对的一个表48设置在系统外部。 在桌子上定义的是安装区域76，用于安装用于处理对象衬底W的打开型盒18A。罩50可相对于桌子旋转设置。 罩在其关闭位置限定围绕安装区域和端口的封闭空间，该空间具有用于容纳盒的尺寸。 第一通气孔58形成在直立壁和/或门中，以将来自系统内的气体引入罩内的封闭空间。 第二通气孔72形成在工作台中，以便排出气体可以排出封闭空间。

公开(公告)号：US06540869B2

公开(公告)日：2003-04-01

申请号：US09870495

申请日：2001-06-01

申请人： Hiroaki Saeki ,  Yasushi Taniyama

发明人： Hiroaki Saeki ,  Yasushi Taniyama

IPC分类号： C23F100

CPC分类号： H01L21/67161 ,  H01L21/67196 ,  H01L21/67775 ,  Y10S414/139 ,  Y10T29/41

摘要： A semiconductor processing system comprises a first vacuum processing unit and a second vacuum processing unit connected thereto. The first and second vacuum processing units respectively comprise I/O transfer chambers. Casings of the transfer chambers are connected to each other, and a common transfer robot is arranged in the casings. The transfer robot is moved along horizontal guide rails and formed by connecting rails of the transfer chambers. A rail adjusting mechanism is provided to obtain linearity of the horizontal rails.

摘要翻译： 半导体处理系统包括与其连接的第一真空处理单元和第二真空处理单元。 第一和第二真空处理单元分别包括I / O传送室。 传送室的壳体彼此连接，并且在壳体中布置有共同的传送机器人。 传送机器人沿着水平导轨移动并通过连接传送室的轨道形成。 提供轨道调整机构以获得水平轨道的线性。

公开(公告)号：US07393172B1

公开(公告)日：2008-07-01

申请号：US10048012

申请日：2000-07-26

申请人： Hiroaki Saeki ,  Masaki Narushima ,  Tetsu Osawa ,  Yasushi Taniyama ,  Shuuji Hagiwara

发明人： Hiroaki Saeki ,  Masaki Narushima ,  Tetsu Osawa ,  Yasushi Taniyama ,  Shuuji Hagiwara

IPC分类号： H01L21/677

CPC分类号： H01L21/68707 ,  H01L21/67766 ,  Y10S414/137

摘要： In a wafer transfer system wherein a wafer transfer robot linearly reciprocates by a linear motor, dust is prevented from adhering to a wafer.A fixed base 9, on which the secondary side 11 of a linear motor M for linearly reciprocating a wafer transfer robot R is mounted, is mounted on the system body 1 of a wafer transfer system A in lateral directions and in vertical directions, so that dust dropping in accordance with the flow of clean air K from a clean air supply system 4 is directly sucked into an exhaust fan 5, which is provided on the bottom portion 1c of the system body 1, to be exhausted without being deposited on the top face of the fixed base 9 and the secondary side 11.

摘要翻译： 在其中晶片传送机器人通过线性电动机线性往复运动的晶片传送系统中，防止灰尘附着在晶片上。 在晶片传送系统A的系统主体1上沿横向和垂直方向安装固定基座9，其上安装有晶片传送机器人R用于线性往复运动的线性电动机M的次级侧11，使得 根据来自清洁空气供给系统4的清洁空气K的流动的粉尘直接吸入设置在系统主体1的底部1c上的排气扇5，而不会沉积在排气扇5上 固定底座9和次侧11的顶面。

公开(公告)号：US08813722B2

公开(公告)日：2014-08-26

申请号：US12852905

申请日：2010-08-09

申请人： William T. Harvey ,  Steven J. Miller ,  Hiroaki Saeki

发明人： William T. Harvey ,  Steven J. Miller ,  Hiroaki Saeki

IPC分类号： F02M61/14

CPC分类号： F02M55/005 ,  F02M69/465 ,  F02M2200/852 ,  F02M2200/853 ,  Y10T29/53

摘要： A fuel injector for an internal combustion engine having an elongated body with a fuel inlet end and a fuel discharge end. The injector body includes an outwardly extending plate attached at a position between its ends and this plate includes at least one radially outwardly extending tab so that the cross-sectional shape of the plate is noncircular. A fuel cup receives the fuel inlet end of the fuel injector and includes a radially inwardly extending ledge at a mid position of the cavity. This ledge includes a through bore complementary in shape to the shape of the plate so that, with the fuel injector and plate aligned at a predetermined angular assembly position, the plate passes through the ledge upon insertion of the fuel injector into the cavity. Thereafter, rotation of the fuel injector and attached plate to a locking position positions the tabs above the ledge thus locking the fuel injector to the fuel cup.

摘要翻译： 一种用于内燃机的燃料喷射器，具有具有燃料入口端和燃料排出端的细长主体。 喷射器主体包括附接在其端部之间的位置处的向外延伸的板，并且该板包括至少一个径向向外延伸的突片，使得板的横截面形状是非圆形的。 燃料杯接收燃料喷射器的燃料入口端，并且在空腔的中间位置包括径向向内延伸的凸缘。 该凸缘包括与板的形状互补的通孔，使得当燃料喷射器和板在预定的角度组装位置对准时，板将燃料喷射器插入空腔中时通过凸缘。 此后，燃料喷射器和附接板旋转到锁定位置将突出部定位在突出部上方，从而将燃料喷射器锁定到燃料杯。

公开(公告)号：US20100244440A1

公开(公告)日：2010-09-30

申请号：US12414795

申请日：2009-03-31

申请人： Harsha Badarinarayan ,  Akira Inoue ,  Takashi Yoshizawa ,  Atsushi Hohkita ,  Hiroaki Saeki ,  Hiroshi Ono ,  Masahiro Soma ,  William Harvey ,  Steve Miller ,  Su-Wei Sung

发明人： Harsha Badarinarayan ,  Akira Inoue ,  Takashi Yoshizawa ,  Atsushi Hohkita ,  Hiroaki Saeki ,  Hiroshi Ono ,  Masahiro Soma ,  William Harvey ,  Steve Miller ,  Su-Wei Sung

IPC分类号： F16L27/04 ,  F16L9/00

CPC分类号： F16L27/047 ,  F02M37/0017 ,  F02M55/005 ,  F02M55/02 ,  F02M55/04 ,  F02M2200/306 ,  F02M2200/8084 ,  F02M2200/9015

摘要： A high pressure fuel pipe construction for an internal combustion engine, such as a direct injection engine. A conduit for the fuel is open at each end and a ball having a throughbore is slidably positioned over one end of the conduit. A reinforcing sleeve is positioned inside the end of the conduit so that the sleeve extends entirely through the ball. The sleeve, ball and the end of the conduit are then brazed together to attach the ball and conduit together. A double chamfer is provided at one end of the ball throughbore to facilitate inspection of the brazing quality. Additionally, a loop is formed in the conduit and a dampener is attached to the loop.

摘要翻译： 用于内燃机的高压燃料管构造，例如直喷式发动机。 用于燃料的导管在每个端部是开放的，并且具有通孔的球可滑动地定位在导管的一端上。 加强套管定位在导管的端部内部，使得套筒完全延伸穿过球。 然后将套筒，球和导管的端部钎焊在一起，将球和导管连接在一起。 在球透孔的一端设有双倒角，以便检查钎焊质量。 另外，在导管中形成环，并且阻尼器附接到环路。

公开(公告)号：US07427860B2

公开(公告)日：2008-09-23

申请号：US11743206

申请日：2007-05-02

申请人： Masashi Saito ,  Youichi Nakano ,  Hayato Sugawara ,  Hiroaki Saeki

发明人： Masashi Saito ,  Youichi Nakano ,  Hayato Sugawara ,  Hiroaki Saeki

IPC分类号： G01B7/30 ,  G01R33/06 ,  H01L43/08

CPC分类号： G01D3/0365 ,  F16H59/70 ,  F16H61/0003 ,  F16H61/32 ,  F16H63/304 ,  F16H2063/005 ,  G01D5/145 ,  G01D11/245 ,  G01D18/00 ,  H02K7/1166 ,  H02K11/21 ,  H02K11/38 ,  Y10T74/19251

摘要： A sensor and a control circuit are provided externally of a gear cover. A shift controller is operated by an electric actuator and a motor driven control module similar thereto. A rotating position detection sensor is thereby provided for a switching device without combination of a circuit and a sensor by oil or metal powder of a gear mechanism portion. The circuit includes a signal processing circuit that approximates an MR element output signal relative to the rotational angle of a body in which a magnet is mounted with a multi-function expressed as a three-dimensional formula.

摘要翻译： 传感器和控制电路设置在齿轮罩的外部。 变速控制器由电致动器和类似于其的电动机驱动控制模块操作。 由此，通过齿轮机构部分的油或金属粉末，不需要电路和传感器的组合来为开关装置提供旋转位置检测传感器。 该电路包括信号处理电路，该信号处理电路相对于以具有表示为三维公式的多重函数安装磁体的主体的旋转角度近似MR元件输出信号。

公开(公告)号：US20060015279A1

公开(公告)日：2006-01-19

申请号：US10534709

申请日：2003-11-13

申请人： Hiroaki Saeki ,  Toshio Kamigaki

发明人： Hiroaki Saeki ,  Toshio Kamigaki

IPC分类号： G01P21/00

CPC分类号： B62D57/032 ,  B25J9/1692 ,  B25J19/021 ,  H01L21/67766 ,  H01L21/681

摘要： A conveying mechanism (22) is disposed in a conveying vessel (10). The conveying mechanism includes: a moving member (38) which can move in a horizontal moving direction; a rotary table (48) attached to the moving member such that the rotary table can turn in a horizontal turning direction and move in the vertical direction; and two arm mechanisms which can bend and stretch in a horizontal operating direction relative to the rotary table. A reference position correcting device for the conveying mechanism includes: a light emitter (66) for emitting a sensing light beam (L); a light detector (68) for receiving the sensing light beam; and correcting means (62). The light emitter and the light detector are fixedly positioned on the conveying vessel. The correcting means corrects reference positions of the rotary table in the moving, vertical, and turning directions, and corrects a reference position of each of the arm mechanisms in the operating direction, based on a detection by the light detector about a light-transmitting state and a light-shielding state of the sensing light beam switched in compliance with the movement and the turn of the rotary table. A light-shielding member is attached on the rotary table, for switching the sensing light beam between the light-transmitting state and the light-shielding state, in compliance with the movement and the turn of the rotary table.

摘要翻译： 输送机构（22）设置在输送容器（10）中。 输送机构包括：能够沿水平移动方向移动的移动部件（38） 旋转台（48），其附接到所述移动构件，使得所述旋转台可以在水平转动方向上转动并沿垂直方向移动; 以及能够相对于旋转台在水平操作方向上弯曲和拉伸的两个臂机构。 用于输送机构的基准位置校正装置包括：用于发射感测光束（L）的光发射器（66）; 用于接收感测光束的光检测器（68）; 和校正装置（62）。 光发射器和光检测器固定地定位在输送容器上。 校正装置基于光检测器关于透光状态的检测，校正旋转台在移动，垂直和转动方向上的参考位置，并且校正每个臂机构在操作方向上的基准位置 并且所述感测光束的光屏蔽状态根据所述旋转台的移动和转动而切换。 遮光构件安装在旋转工作台上，用于根据旋转台的运动和转动将传感光束在透光状态和遮光状态之间切换。