Probe apparatus with optical length-measuring unit and probe testing method
    1.
    发明授权
    Probe apparatus with optical length-measuring unit and probe testing method 失效
    具有光学长度测量单元和探头测试方法的探头设备

    公开(公告)号:US07221177B2

    公开(公告)日:2007-05-22

    申请号:US11184796

    申请日:2005-07-20

    IPC分类号: G01R31/02

    CPC分类号: G01R31/2891 G01R31/2887

    摘要: A probe apparatus with control-position detection means is provided for testing an electrical characteristic of a to-be-tested object formed on a substrate W. The probe apparatus includes a prober chamber, a susceptor provided in the prober chamber for placing thereon a to-be-tested object, and a moving mechanism for moving the susceptor in X-, Y-, Z- and θ-directions. The probe apparatus further includes a probe card having a plurality of probes and opposing the susceptor, and a first optical length-measuring unit. The first length-measuring unit emits light to the surface of the to-be-tested object placed on the susceptor, and detects the Z-directional position of the to-be-tested object based on the light reflected from the object. The probe apparatus can have a second length-measuring unit.

    摘要翻译: 提供了一种具有控制位置检测装置的探针装置,用于测试形成在基片W上的待测物体的电特性。探针装置包括探针室,设置在探针室中的基座, 以及用于在X,Y,Z和θ方向上移动基座的移动机构。 探针装置还包括具有多个探针并与基座对置的探针卡和第一光学长度测量单元。 第一长度测量单元向放置在基座上的被测试物体的表面发光,并且基于从物体反射的光检测被测试对象的Z方向位置。 探针装置可以具有第二长度测量单元。

    Probe mark reading device and probe mark reading method
    2.
    发明申请
    Probe mark reading device and probe mark reading method 有权
    探针标记读取装置和探针标记读取方法

    公开(公告)号:US20060139628A1

    公开(公告)日:2006-06-29

    申请号:US11355928

    申请日:2006-02-17

    IPC分类号: G01N21/88

    摘要: A probe mark reading device for reading probe marks stormed on electrode pads of semi conductor chips contained in a semiconductor wafer (90), comprising a CCD camera (20) for taking an image of the semiconductor wafer (90) and outputting the image as an image signal Si, an optical unit (21) for optically enlarging a location to be photographed by the CCD camera (20), a light source (30) for illuminating the location to be photographed by the CCD camera (20) with a flash of light generated for a short period of time from when a flash signal Sf is provided, an X-Y stage (40) capable of changing a position to be photographed by the CCD camera (20) based on a motor control signal Sm by moving a mounted semiconductor wafer (90) in an X-direction and a Y-direction, and a computer (10) for providing control and saving the images after receiving and trimming the image signal Si. With the above configuration, it is possible to read probe marks in a short time without a user having to expend much time or effort.

    摘要翻译: 一种用于读取在半导体晶片(90)中包含的半导体芯片的电极焊盘上暴露的探针标记的探针标记读取装置,包括用于拍摄半导体晶片(90)的图像的CCD照相机(20),并将该图像输出为 图像信号Si,用于光学地放大由CCD照相机(20)拍摄的位置的光学单元(21),用于照射由CCD照相机(20)拍摄的位置的光源(30),其中闪光 从提供闪光信号Sf的短时间内产生的光,能够通过移动安装的半导体,能够基于电机控制信号Sm改变由CCD照相机(20)拍摄的位置的XY平台(40) 晶片(90)在X方向和Y方向上,以及计算机(10),用于在接收和修整图像信号Si之后提供控制和保存图像。 利用上述配置,可以在短时间内读取探针标记,而无需用户花费大量时间或精力。

    Probe mark reading device and probe mark reading method
    3.
    发明授权
    Probe mark reading device and probe mark reading method 有权
    探针标记读取装置和探针标记读取方法

    公开(公告)号:US07026832B2

    公开(公告)日:2006-04-11

    申请号:US10681271

    申请日:2003-10-09

    IPC分类号: G01R31/02 G06K9/00

    摘要: A probe mark reading device for reading probe marks stormed on electrode pads of semiconductor chips contained in a semiconductor wafer (90), comprising a CCD camera (20) for taking an image of the semiconductor wafer (90) and outputting the image as an image signal Si, an optical unit (21) for optically enlarging a location to be photographed by the CCD camera (20), a light source (30) for illuminating the location to be photographed by the CCD camera (20) with a flash of light generated for a short period of time from when a flash signal Sf is provided, an X-Y stage (40) capable of changing a position to be photographed by the CCD camera (20) based on a motor control signal Sm by moving a mounted semiconductor wafer (90) in an X-direction and a Y-direction, and a computer (10) for providing control and saving the images after receiving and trimming the image signal Si. With the above configuration, it is possible to read probe marks in a short time without a user having to expend much time or effort.

    摘要翻译: 一种用于读取在包含在半导体晶片(90)中的半导体芯片的电极焊盘上暴露的探针标记的探针标记读取装置,包括用于拍摄半导体晶片(90)的图像并将图像作为图像输出的CCD照相机(20) 信号Si,用于光学地放大由CCD照相机(20)拍摄的位置的光学单元(21),用于以CCD闪光灯照亮由CCD照相机(20)拍摄的位置的光源(30) 从提供闪光信号Sf的短时间产生的XY台(40),通过移动安装的半导体晶片,能够基于电机控制信号Sm改变由CCD照相机(20)拍摄的位置的XY台 (90)在X方向和Y方向上,以及计算机(10),用于在接收和修整图像信号Si之后提供控制和保存图像。 利用上述配置,可以在短时间内读取探针标记,而无需用户花费大量时间或精力。

    Probe mark reading device and probe mark reading method
    4.
    发明授权
    Probe mark reading device and probe mark reading method 有权
    探针标记读取装置和探针标记读取方法

    公开(公告)号:US07224175B2

    公开(公告)日:2007-05-29

    申请号:US11355928

    申请日:2006-02-17

    IPC分类号: G01R31/02 G06K9/00

    摘要: A probe mark reading device for reading probe marks stormed on electrode pads of semiconductor chips contained in a semiconductor wafer (90), comprising a CCD camera (20) for taking an image of the semiconductor wafer (90) and outputting the image as an image signal Si, an optical unit (21) for optically enlarging a location to be photographed by the CCD camera (20), a light source (30) for illuminating the location to be photographed by the CCD camera (20) with a flash of light generated for a short period of time from when a flash signal Sf is provided, an X-Y stage (40) capable of changing a position to be photographed by the CCD camera (20) based on a motor control signal Sm by moving a mounted semiconductor wafer (90) in an X-direction and a Y-direction, and a computer (10) for providing control and saving the images after receiving and trimming the image signal Si. With the above configuration, it is possible to read probe marks in a short time without a user having to expend much time or effort.

    摘要翻译: 一种用于读取在包含在半导体晶片(90)中的半导体芯片的电极焊盘上暴露的探针标记的探针标记读取装置,包括用于拍摄半导体晶片(90)的图像并将图像作为图像输出的CCD照相机(20) 信号Si,用于光学地放大由CCD照相机(20)拍摄的位置的光学单元(21),用于利用闪光灯照亮由CCD照相机(20)拍摄的位置的光源(30) 从提供闪光信号Sf的短时间产生的XY台(40),通过移动安装的半导体晶片,能够基于电机控制信号Sm改变由CCD照相机(20)拍摄的位置的XY台 (90)在X方向和Y方向上,以及计算机(10),用于在接收和修整图像信号Si之后提供控制和保存图像。 利用上述配置,可以在短时间内读取探针标记,而无需用户花费大量时间或精力。

    Probe apparatus with optical length-measuring unit and probe testing method
    5.
    发明申请
    Probe apparatus with optical length-measuring unit and probe testing method 失效
    具有光学长度测量单元和探头测试方法的探头设备

    公开(公告)号:US20050253613A1

    公开(公告)日:2005-11-17

    申请号:US11184796

    申请日:2005-07-20

    CPC分类号: G01R31/2891 G01R31/2887

    摘要: A probe apparatus with control-position detection means is provided for testing an electrical characteristic of a to-be-tested object formed on a substrate W. The probe apparatus includes a prober chamber, a susceptor provided in the prober chamber for placing thereon a to-be-tested object, and a moving mechanism for moving the susceptor in X-, Y-, Z- and θ-directions. The probe apparatus further includes a probe card having a plurality of probes and opposing the susceptor, and a first optical length-measuring unit. The first length-measuring unit emits light to the surface of the to-be-tested object placed on the susceptor, and detects the Z-directional position of the to-be-tested object based on the light reflected from the object. The probe apparatus can have a second length-measuring unit.

    摘要翻译: 提供了一种具有控制位置检测装置的探针装置,用于测试形成在基片W上的待测物体的电特性。探针装置包括探针室,设置在探针室中的基座, 以及用于在X,Y,Z和θ方向上移动基座的移动机构。 探针装置还包括具有多个探针并与基座对置的探针卡和第一光学长度测量单元。 第一长度测量单元向放置在基座上的被测试物体的表面发光,并且基于从物体反射的光检测被测试对象的Z方向位置。 探针装置可以具有第二长度测量单元。

    Probing apparatus and positional deviation acquiring method
    6.
    发明授权
    Probing apparatus and positional deviation acquiring method 有权
    探测装置和位置偏差获取方法

    公开(公告)号:US07477064B2

    公开(公告)日:2009-01-13

    申请号:US11386747

    申请日:2006-03-23

    IPC分类号: G01R31/02 G01R31/28

    CPC分类号: G01R31/2891

    摘要: In a prober, a post-contact image representing a region including a pad is acquired by capturing an image of a substrate after a probe has been brought into contact with the pad having an existing probe mark. An image storage unit stores in advance a pre-contact image representing the pad-inclusive region before the probe is brought into contact with the pad. A latest probe mark position acquiring unit acquires a position of a latest probe mark region created by the contact of the probe with the pad from among a plurality of probe mark regions in the post-contact image respectively corresponding to a plurality of probe marks on the pad by comparing the post-contact image with the pre-contact image. A positional deviation acquiring unit finds a deviation in a contact position of the probe with respect to the pad, based on the position of the latest probe mark region.

    摘要翻译: 在探测器中,通过在探针已经与具有现有探针标记的焊盘接触之后通过捕获衬底的图像来获取表示包括衬垫的区域的接触后图像。 图像存储单元在探针与垫接触之前,预先存储表示包含区域的区域的预接触图像。 最新的探针标记位置获取单元从分别对应于多个探针标记的接触后图像中的多个探针标记区域中获取由探针与垫接触而产生的最新探针标记区域的位置, 通过将接触后图像与预接触图像进行比较来实现。 位置偏差获取单元基于最新的探针标记区域的位置来找到探针相对于垫的接触位置的偏差。

    Method and device for light emitting intensity control in a graphic
display device
    7.
    发明授权
    Method and device for light emitting intensity control in a graphic display device 失效
    图形显示装置中发光强度控制的方法和装置

    公开(公告)号:US4639879A

    公开(公告)日:1987-01-27

    申请号:US466503

    申请日:1983-02-15

    申请人: Hiromi Chaya

    发明人: Hiromi Chaya

    摘要: While characters are being displayed on a graphic display device according to commands from a computer, the light emitting intensity of a desired pixel is controlled by outputting only commands related to the light emitting intensity control from said computer. This is done by providing, associated with the graphic display device, for memorizing a group of numerical values corresponding to desired changes of light emitting intensity of a desired pixel belonging to a character or a graphic display displayed on the graphic display device, or by providing for obtaining numerical values corrsponding to the light emitting intensity changes. A device for practicing this method is also disclosed.

    摘要翻译: 当根据来自计算机的命令在图形显示装置上显示字符时,通过仅输出与所述计算机的发光强度控制相关的命令来控制所需像素的发光强度。 这是通过提供与图形显示装置相关联的方式来存储对应于属于图形显示装置上显示的字符或图形显示的所需像素的发光强度的期望变化的一组数值,或者通过提供 以获得响应于发光强度变化的数值。 还公开了一种用于实施该方法的装置。

    Probing apparatus and positional deviation acquiring method

    公开(公告)号:US20060238905A1

    公开(公告)日:2006-10-26

    申请号:US11386747

    申请日:2006-03-23

    IPC分类号: G02B5/08

    CPC分类号: G01R31/2891

    摘要: In a prober, a post-contact image representing a region including a pad is acquired by capturing an image of a substrate after a probe has been brought into contact with the pad having an existing probe mark. An image storage unit stores in advance a pre-contact image representing the pad-inclusive region before the probe is brought into contact with the pad. A latest probe mark position acquiring unit acquires a position of a latest probe mark region created by the contact of the probe with the pad from among a plurality of probe mark regions in the post-contact image respectively corresponding to a plurality of probe marks on the pad by comparing the post-contact image with the pre-contact image. A positional deviation acquiring unit finds a deviation in a contact position of the probe with respect to the pad, based on the position of the latest probe mark region.